CN207779948U - High-precision film resistor hydrogen gas sensor calibration device - Google Patents
High-precision film resistor hydrogen gas sensor calibration device Download PDFInfo
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- CN207779948U CN207779948U CN201820244467.4U CN201820244467U CN207779948U CN 207779948 U CN207779948 U CN 207779948U CN 201820244467 U CN201820244467 U CN 201820244467U CN 207779948 U CN207779948 U CN 207779948U
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Abstract
The utility model discloses a kind of high-precision film resistor hydrogen gas sensor calibration devices, including the gas flow controller for connection of mutually ventilating and constant temperature atmosphere test chamber and the temperature controller for controlling temperature for constant temperature atmosphere test chamber and the resistance instrument for testing output resistance.It can arbitrary adjustment criteria gas concentration value and flow by the utility model, the wide precision of concentration adjustable range is high, the influence of ambient temperature interference and gas flowing to calibration can be greatly reduced when demarcating density of hydrogen calibration curve, so that it is guaranteed that accurately obtaining sensing unit output resistance and density of hydrogen standard value correspondence, it is convenient for every Static State Index of accurate analysed film resistance hydrogen gas sensor；The temperature calibration curve that film resistor hydrogen gas sensor can also be obtained by the utility model, analyzes its temperature characterisitic；Other characteristics such as response time, resolution ratio, the selectivity of film resistor hydrogen gas sensor can also be directed to by the utility model to be detected.
Description
Technical field
The utility model is related to a kind of hydrogen gas sensor calibration devices, more particularly to a kind of is accurate acquisition thin-film electro resistance type
Hydrogen gas sensor hydrogen inductive reactance changing value and standard density of hydrogen value correspondence and the high-precision film resistor hydrogen designed
Gas sensor calibration device.
Background technology
Hydrogen gas sensor type is various, and variety classes sensor characteristics is different, therefore respectively has advantage and disadvantage.It is wherein adjoint partly to lead
Preparation process maturation and aftertreatment technology constantly improve develop rapidly a kind of film resistor hydrogen gas sensor.
The main operational principle of film resistor hydrogen gas sensor is hydrogen adsorption, infiltration when sensor is exposed in hydrogen
The quick material-sensitive layer resistance of hydrogen in sensor can be made to become larger, when sensor is removed from hydrogen, hydrogen can be detached from the quick material of hydrogen, make
The quick resistance of hydrogen reduces and is restored to zero mark resistance.Due to it with micro-volume, range is big, reproducible, back end test equipment
The advantages that ripe with measuring technology, has good future in engineering applications, but it has strong non-linear, temperature sensitivity simultaneously
Etc. characteristics, these characteristics so that the atmosphere sensor Calibration Method in national standard is not applicable, therefore film resistor hydrogen senses
The calibration of device is always a problem.Because sensor Calibration Method be directly related to sensor measurement accuracy and calibration it is accurate
Property, special calibration device is devised for its key property thus, and have studied Calibration Method and greatly improve calibration precision.
The calibration of sensor exactly sets up the relationship between sensor input and output quantity by experiment, while
It can determine that the error relationship under different use conditions obtains its static characteristic.The static characteristic of sensor, specifically mainly
Refer to and depict the calibration curve between sensor input and output quantity by a series of experiments data, can therefrom analyze weight
Want static characteristic index, such as the linearity, lag error, repeatability error and precision, sensitivity.
From the point of view of meterological, measurement error has quite stringent definition, it characterize measured value and actual value it
Between difference, can not generally directly obtain actual measured value, but can add by using standard value appropriate and using statistics
With estimation.Usual method is using the high device of ratio of precision design objective as standard value output device, such as metrological service one
As first select working sensor within the scope of 3~5 value, then select high-purity gas cylinder of configured good concentration in room temperature according to them
It is lower to provide standard density of hydrogen value to tested sensor, sensor is demarcated according to sensor output value.This tradition
Method is only applicable to the sensor of linearity height, fast response time, temperature-insensitive, for film resistor hydrogen gas sensor,
It is primarily present 3 aspect major defects：1) statistical sample quantity is far from enough, and the larger non-linear property of sensor can cause greatly
Calibration error, the calibration precision using the calibration curve of the method acquisition is low, therefore can also be brought to sensor test greatly
Measurement error；2) it is larger that calibration experiment environmental temperature fluctuation is carried out at room temperature, for this kind of temperature of film resistor hydrogen gas sensor
The high sensor of sensibility, measurement error caused by environmental temperature fluctuation is even considerably beyond hydrogen response background values；3) in addition,
In addition to Static State Index, other characteristics such as response time, response speed, gas-selectively, temperature characterisitic of sensor can not also lead to
Calibration experimental provision is crossed to obtain, it is also necessary to which other devices are completed with experiment.Based on the above reason, for film resistor hydrogen
The special high-accuracy calibration device and Calibration Method of Sensor Design have the accurate acquisition of its properties and calibration curve
Significance.
In conclusion the sensing chip due to film resistor hydrogen gas sensor generally selects palladium-base alloy to do the quick material of hydrogen,
With good invertibity and gas-selectively, but the quick resistance value of hydrogen has strong non-linear relation with extraneous density of hydrogen value,
And the quick resistance value of hydrogen not only also changes with ambient temperature value with density of hydrogen variation, and temperature control is even higher than hydrogen
Sensitivity, therefore the coupled relation of temperature and density of hydrogen must be reduced to improve calibration precision when calibration, hydrogen is calibrated respectively
After gas concentration and temperature are to the response curve of sensor, then hydrogen gas sensor mark can be greatly improved using the method for temperature-compensating
School and measurement accuracy；But traditional calibration device cannot achieve this purpose.
Utility model content
The purpose of this utility model is that solve the above-mentioned problems and provides a kind of high-precision film resistor hydrogen biography
Sensor calibration device.
The utility model is achieved through the following technical solutions above-mentioned purpose：
A kind of high-precision film resistor hydrogen gas sensor calibration device, including the test of gas flow controller, constant temperature atmosphere
Chamber, temperature controller and resistance instrument, the gas flow controller include at least two input ports and a delivery outlet, Mei Gesuo
It states input port and the delivery outlet is separately connected a program-controlled mass flowmenter；The constant temperature atmosphere test chamber include shell and
Temperature sensor, film resistor hydrogen gas sensor, the electric heater being placed in the inner cavity of the shell, the shell, which is equipped with, to be divided
The air inlet not communicated with the inner cavity of the shell and gas outlet；The delivery outlet of the gas flow controller and the constant temperature gas
The air inlet of atmosphere test chamber connects, and the gas outlet of the constant temperature atmosphere test chamber is communicated with air, the letter of the temperature sensor
The power input of number output end and the electric heater respectively with the signal input part and computer heating control of the temperature controller
Output end connects, and the signal output end of the film resistor hydrogen gas sensor is connect with the signal input part of the resistance instrument.
Preferably, the constant temperature atmosphere test chamber further includes chip mounting circuit boards, pinboard, connecting plate, thermal insulation layer
And head cover, the electric heater are electric network, the thermal insulation layer is set on the interior cavity wall of the shell, and the electric network is set to
The outside of the thermal insulation layer, the chip mounting circuit boards are installed on the inner cavity middle position of the shell, the film resistor
Hydrogen gas sensor is installed in the chip mounting circuit boards, and the upper surface of the chip mounting circuit boards is equipped with double socket bottom
Seat or double socket contact pin, the pinboard are installed on the surface of the chip mounting circuit boards, the following table of the pinboard
Face is equipped with the double socket contact pin being electrically connected with the chip mounting circuit boards or double socket pedestal, the temperature sensor
It is installed on the lower surface of pinboard, the head cover is installed on the upper end of the shell and equipped with connection plate interface, the connecting plate
It is embedded in the head cover, top pads and bottom land, the top weldering is respectively equipped at the top and bottom of the connecting plate
Disk is used to be electrically connected with the temperature controller and the resistance instrument, and the bottom land is used for and pair on the pinboard
It arranges socket contact pin or the output signal line of double socket pedestal and the temperature sensor is electrically connected；On the shell into
Gas port is located at the lower section of the chip mounting circuit boards, and the gas outlet on the shell is located at the top of the connecting plate.
Further, multiple vertical support column vias are respectively equipped on the chip mounting circuit boards and the pinboard,
The lower end of multiple vertical support columns is fixed in the intracavity bottom cavity wall of the shell, and the upper end of the support column is worn successively
The support column via in the chip mounting circuit boards and the pinboard is crossed, insulation sleeve is set with outside the support column.
The beneficial effects of the utility model are：
The utility model by will be used to control the gas flow controller of density of hydrogen and flow, for providing constant temperature
The resistance of the constant temperature atmosphere test chamber and temperature controller of degree and the output signal for measuring film resistor hydrogen gas sensor
Instrument combines, and is capable of providing arbitrary gas concentration multiple spot standard value, configuration and the control operation of increase and decrease standard density of hydrogen
Simplicity arbitrarily adjustment criteria gas concentration value and flow, the wide precision height of concentration adjustable range can demarcate density of hydrogen calibration curve
When can greatly reduce ambient temperature interference and gas flows influence to calibration, so that it is guaranteed that it is defeated accurately to obtain sensing unit
Go out resistance and density of hydrogen standard value correspondence, consequently facilitating every static state of accurate analysed film resistance hydrogen gas sensor refers to
Mark；By the way that chip mounting circuit boards, pinboard, connecting plate to be combined and be electrically connected, can easily by multiple signals from
It is sent out in constant temperature atmosphere test chamber, increases cavity volume, connection simplicity and cost without using bulky adapter
It is cheap cheap.
The temperature calibration curve that film resistor hydrogen gas sensor can also be obtained by the utility model, analyzes its temperature
Characteristic, in order to which the method for using temperature-compensating from now on realizes high-acruracy survey；It can also be directed to film by the utility model
The response time of resistance hydrogen gas sensor, selectivity, resists other characteristics such as other atmosphere cross jammings to be detected at resolution ratio.
The utility model is also applied for other structures type such as optical fiber atmosphere sensor or other sensitive atmosphere sensings
Such as CO atmosphere sensors etc., nonstandard class atmosphere sensor calibration that these are easily affected by temperature, nonlinear object.
Description of the drawings
Fig. 1 is the structure diagram of high-precision film resistor hydrogen gas sensor calibration device described in the utility model；
Fig. 2 is the constant temperature atmosphere test chamber of high-precision film resistor hydrogen gas sensor calibration device described in the utility model
Section view three-dimensional structure diagram；
Fig. 3 is the stereochemical structure of the connecting plate of high-precision film resistor hydrogen gas sensor calibration device described in the utility model
Figure；
Fig. 4 is the stereochemical structure of the pinboard of high-precision film resistor hydrogen gas sensor calibration device described in the utility model
Figure；
Fig. 5 is the chip mounting circuit boards of high-precision film resistor hydrogen gas sensor calibration device described in the utility model
Three-dimensional structure diagram.
Specific implementation mode
The utility model is described in further detail below in conjunction with the accompanying drawings：
As Figure 1-Figure 5, high-precision film resistor hydrogen gas sensor calibration device described in the utility model includes gas
Flow controller (not showing in Fig. 2-Fig. 5), constant temperature atmosphere test chamber, temperature controller (not showing in Fig. 2-Fig. 5) and resistance instrument (figure
Do not show in 2- Fig. 5), the gas flow controller includes three input ports and a delivery outlet, input port described in two of which
Nitrogen for being passed through hydrogen and for adjusting density of hydrogen, another described input port can be passed through other gases or not have to,
Increase multicomponent calibrating gas and match function, 2 input ports and the delivery outlet for being passed through hydrogen and other gases are separately connected
One program-controlled mass flowmenter, the latter are responsible for total flow control, and the input port for being passed through nitrogen directly connects diluent gas nitrogen not
Connect mass flowmenter；The constant temperature atmosphere test chamber includes shell 9 and 17 (Fig. 2 of temperature sensor for being placed in the inner cavity of shell 9
In do not show), film resistor hydrogen gas sensor 18 (not showing in Fig. 2), electric network 3, chip mounting circuit boards 5, pinboard 4, connection
Plate 13 (not showing in Fig. 2) and thermal insulation layer 2, shell 9 are equipped with the air inlet 10 communicated respectively with the inner cavity of shell 9 and gas outlet 1,
Air inlet 10 is located at the lower section of chip mounting circuit boards 5, and gas outlet 1 is located at the top of the connecting plate；Thermal insulation layer 2 is set to shell
On 9 interior cavity wall, electric network 3 is set to the outside of thermal insulation layer 2, and electric network 3 keeps a fixed gap with chip mounting circuit boards 5,
It is permeated convenient for gas, chip mounting circuit boards 5 are installed on the inner cavity middle position of shell 9, the film resistor hydrogen gas sensor
18 are installed in chip mounting circuit boards 5, the upper surfaces of chip mounting circuit boards 5 be equipped with double socket pedestal 19 (or
Double socket contact pin), pinboard 4 is installed on the surface of chip mounting circuit boards 5, and the lower surface of pinboard 4 is equipped with and chip
The double socket contact pin 16 (or double socket pedestal) that mounting circuit boards 5 are electrically connected, double socket contact pin 16 are inserted into
In double socket pedestal 19, multiple vertical support column vias 15 are respectively equipped in chip mounting circuit boards 5 and pinboard 4, it is more
The lower end of a vertical support column 11 is fixed in the intracavity bottom cavity wall of shell 9, and the upper end of support column 11 sequentially passes through core
Support column via 15 in piece mounting circuit boards 5 and pinboard 4, support column 11 are set with insulation sleeve 6 outside；Temperature sensor 17 is adopted
With the Pt100 platinum resistance of armouring and it is installed on the lower surface of pinboard 4, prevents hydrogen embrittlement effects temperature measurement accuracy, head cover 7 from installing
In the upper end of shell 9 and equipped with connection plate interface 8, connecting plate 13 is embedded in head cover 7, the top and bottom difference of connecting plate 13
Equipped with top pads 12 and bottom land 14, top pads 12 are electrically connected with the temperature controller and the resistance instrument, bottom
Portion's pad 14 and the output signal line of double socket contact pin 16 and temperature sensor 17 on pinboard 4 are electrically connected；It is described
The delivery outlet of gas flow controller is connect with the air inlet 10 of the constant temperature atmosphere test chamber, the air inlet of constant temperature atmosphere test chamber
10 height of mouth have to be lower than the position of chip mounting circuit boards 5, intracavitary port diameter 3mm, and bore excessive cannot prevent from being passed through gas
Flow too quickly, height is low to be made to be passed through gas slowly and penetrate into 5 or more chip mounting circuit boards, and core is caused when gas being prevented to be passed through
Resistance of sensor fluctuation is excessive in piece mounting circuit boards 5 interferes, gas outlet 1 and the big gas phase of the constant temperature atmosphere test chamber
Logical, the signal output end of temperature sensor 17 and the power input of electric network 3 are defeated with the signal of the temperature controller respectively
Enter end to connect with computer heating control output end, the letter of the signal output end of the film resistor hydrogen gas sensor 18 and the resistance instrument
The connection of number input terminal.
In order to make it easy to understand, being used below to high-precision film resistor hydrogen gas sensor calibration device described in the utility model
Preferred Calibration Method be illustrated, but this method is not unique method, nor the protected object of the utility model.
In conjunction with Fig. 1-Fig. 5, high-precision film resistor hydrogen gas sensor calibration device described in the utility model uses preferred
Calibration Method, including obtain temperature characteristics and obtain hydrogen response characteristic curve, wherein the acquisition temperature characteristics
Method be：The inner cavity of shell 9 is gradually heated to 40 DEG C since room temperature, and temperature point is：Room temperature, 25 DEG C, 30 DEG C, 35 DEG C,
40 DEG C, the high-precision film resistor hydrogen gas sensor calibration device placement more than half an hour, passes through temperature sensing at room temperature
Temperature in the inner cavity of device 17, electric network 3 and temperature controller control shell 9, makes temperature error be less than ± 0.3 DEG C, often
A temperature point is kept for 20-30 minutes, obtains the temperature characteristics of film resistor hydrogen gas sensor 18 and temperature sensor 17；
Obtaining the characteristic method of hydrogen response is：The inner cavity temperature of shell 9 is maintained at certain steady temperature, such as 25 DEG C, constant temperature
After 20-30 minutes, normal concentration hydrogen is passed through by the gas flow controller, film resistor is measured using the resistance instrument
The resistance of hydrogen gas sensor 18 changes, and point three sections of concentration ranges are demarcated respectively, and 40000ppm is risen to from 0ppm when being flushed with hydrogen,
0-2000ppm super low concentration section measuring points are：100,200,300,600,900,1200ppm, 2000ppm-10000ppm low concentrations
It is 5000ppm that section measuring point, which is stepping 2000ppm, 10000ppm-40000ppm high concentration section stepping-in amount, is flushed with hydrogen to 40000ppm
Afterwards, it is stepped down to zero-dose from 40000ppm by same measuring point, when replacing measuring point every time, first uses the new concentration value gas of big flow
Body fills 3-5 minutes, and Rapid replacement falls cavity and tracheae Central Plains beginning concentration hydrogen, then is transferred to low discharge reduction gas flowing and temperature
The influence to calibration is fluctuated, hydrogen response characteristic curve is obtained, with the characteristic of this analysed film resistance hydrogen gas sensor 18, film
The hydrogen nonlinearity of resistance hydrogen gas sensor 18 is strong, high sensitivity when low concentration, when high concentration sensitivity gradually decline, but
Leapfrog test repeatability is good, and sensing unit lag error is small, resolution ratio 100ppm；It may also be aware of by calibration experiment, concentration is low
When film resistor 18 response times of hydrogen gas sensor it is long, response speed with density of hydrogen increase and accelerate.
The utility model in order to better understand is below described further the making of the utility model and use：
First, the composing method of constant temperature atmosphere test chamber is：A) by the shell 9 of the constant temperature atmosphere test chamber of included support base
It is horizontal positioned, suitable length is cut out with reference to constant temperature atmosphere test chamber internal diameter and height dimension using the sheathing paper of 2-3mm thickness
Square configuration is curled into cylindrical shape and is put into intracavitary, is close to the inner cavity cavity wall of shell 9, and cannot be overlapped, and forms thermal insulation layer 2；B) it uses
Marker pen stretches into air inlet 10 and gas outlet 1, in the corresponding position marking of thermal insulation layer 2, then by thermal insulation layer 2 output with
Air inlet 10 and the gas outlet matched hole of 1 inner diameter size, as into outlet passageway；C) heating ribbon power uniform winding is being heated
Electric network 3 is formed on net outer wall, and big gap is left at position corresponding with air inlet 10 and gas outlet 1 in order into outlet
Body, one section of 7-10mm length line is fixed and is respectively reserved at both ends after twining, to facilitate on the connection plate interface 8 on connection head cover 7
Cable switching circuit board；D) be placed sequentially in the interior intracavitary of shell 9 after making thermal insulation layer 2 and electric network 3, tapping with into
The position of gas port 10 and gas outlet 1 corresponds to, and the position of air inlet 10 has to be lower than chip mounting circuit boards 5, in this way can be effective
Influence of the airflow fluctuation to chip, can also reduce the calibrated error that different flow difference is brought when eliminating logical deflate；E) by 3 branch
Dagger 11 is rotated on the pedestal of shell 9 in three threaded holes, is fixed on the pedestal of shell 9, and 3 insulation sleeves 6 are put on, support
Column 11 is the threaded cylindrical aluminium rod of metal alloy of upper and lower ends, and insulation sleeve 6 is the bakelite cylindrical prism in the gardens Nei Dai hole；F) it will pass
Film resistor hydrogen gas sensor 18 is inserted in chip mounting circuit boards 5, at most can once install 10 film resistor hydrogen sensings
Chip mounting circuit boards 5 are positioned on insulation sleeve 6 by device 18 after being plugged；G) mounting hole will be corresponded on pinboard 4 pass through stretching
Then support column 11 docks pinboard 4 with the respective socket in chip mounting circuit boards 5, fixed pinboard 4 using screw
On support column 11, respective sensor line on the pinboard 4, Pt100 standard platinum resistances, that is, temperature sensor on inner wall
17 and 3 line of electric network, it is welded in advance at connection plate interface 8 on mounted cable switching circuit board, convenient for by chamber
The data of the acquisition in need of internal institute of portion and measurement are spread out of；F) 1mm thickness polytetrafluoroethylene film or sheathing paper is used to cut out
2mm × 40mm square holes are opened in circular pattern, inside, and outer diameter is identical as the internal diameter of head cover 7, are mounted on the inner wall of head cover 7, for protecting
Temperature is heat-insulated；G) it is to reach better constant temperature effect, thick froth bed can be pasted on the outer wall of shell 9.So far constant temperature atmosphere chamber
It is completed, combination temperature controller, temperature-controlled precision is maintained within ± 0.1 DEG C~± 0.3 DEG C, could meet good calibration
Required precision.
Chip mounting circuit boards 5, pinboard 4, connecting plate 13 are all made of Pcb circuit board makings after 2mm, are connected with each other method
It is as follows：A) tested film resistor hydrogen gas sensor 18 is plugged in chip mounting circuit boards 5, a film resistor hydrogen passes
At least 2 groups of resistance on sensor 18, one group is to survey hydrogen resistance, and another group is temperature detecting resistance, therefore film resistor hydrogen gas sensor
Visible 4 vias on 18, every 2 vias correspond to one group of resistance, upper four cores contact pin are welded at via；In chip mounting circuit boards 5
The via of corresponding film resistor hydrogen gas sensor 18, which is handled affairs, is first welded insert row pedestal, and film resistor hydrogen gas sensor 18 is plugged i.e.
Can, it is not necessarily to bonding wire, reduces sensor cable line volume so that sensor grafting is convenient and can once install more films simultaneously
Resistance hydrogen gas sensor 18 synchronizes calibration, improves calibration efficiency, is convenient at former jointing holes being sensor bonding wire after calibration
Signal is drawn；B) standard Pt100 standard platinum resistances, that is, temperature sensor 17 is welded on to the downside of pinboard 4, for measuring
Temperature value between pinboard 4 and chip mounting circuit boards 5；C) 5 both ends of chip mounting circuit boards are welded with 2 groups of double socket bottoms
Seat 19 corresponds to 2 groups of double socket contact pins 16 being welded on pinboard 4, film resistor hydrogen gas sensor 18 and double socket bottom
19 unicom of seat only need to be by the double socket of chip mounting circuit boards 5 in this way after film resistor hydrogen gas sensor 18 installs
Corresponding double socket contact pin 16 docks on pedestal 19 and pinboard 4, you can believes the output of film resistor hydrogen gas sensor 18
Number lead to pinboard 4；D) connecting plate 13 is embedded at the connection plate interface 8 of head cover 7, and bottom land 14 is used for line pinboard
Double socket contact pin 16 on 4, top pads 12 are used for the temperature controller outside line and high-precision resistance instrument, are connecting
Also need to reserve the interface channel of the interface channel and temperature sensor 17 of electric network 3 on plate 13.Due to being difficult to find tens tunnels on the market
The circuit connector of signal, therefore using the design of this three pieces of circuit boards, can will easily pass multiple signals and be surveyed from constant temperature atmosphere
It is sent out in examination chamber, it is easy and cheap.
Gas flow controller uses three component flow controllers, 3 mass flowmenters to integrate, and passes through computer
CPU is accurately controlled with gas concentration.Wherein, the flowmeter total flow maximum 2000mL of output end, two flowmeters of input terminal are total
Maximum flow 8mL, maximum ratio 1：100, therefore H2、O2Distribution range 0.08mL~8mL.It is required that H2Concentration range 40ppm
When~40000ppm, concentration ratio 1：1000, O2When concentration range 40ppm~20000ppm, concentration ratio 1：500, proportioning is dense
Degree is lower, and total flow needs bigger, and calculation formula is as follows：
Assuming that two kinds of gas distributions, it is assumed that need to configure H2A concentration of x, by N2As diluent gas, H2Flow y and N2Stream
Amount q always meets following formula：
H2Flow：Y=(100x-0.004) × 1.98+0.08 (units：mL)
N2Flow：Z=y/x-y (units：mL)
Total flow：Q is total=y+z (units：mL)
Simpler computational methods assume that total gas flow rate within the scope of equipment index, it is assumed that three kinds of gas mixing ratios, it is false
If total flow is set to 500mL (within the scope of 2000mL), O2With gas concentration 0.5%, then O2Flow is 0.5% × 500=2.50mL,
H2With gas concentration 1%, then H21% × 500=5mL of flow.
The general pure H for using 99.99% or more purity2Or pure N2Distribution is set low when needing reduction total gas flow rate to match again
When concentration, the proportioned low concentration standard hydrogen of metrological service may be used and be used as and match air source.
After computer calculates and automatically controlled flow, it regard the gas for having matched concentration and flow as mark by connecting air flue
Quasi- concentration gases are exported to the air inlet 10 of constant temperature atmosphere test chamber, the gas outlet 1 of constant temperature atmosphere test chamber by hose with it is big
Gas is logical, for intracavity gas to be discharged into air.
The temperature controller and the resistance instrument are then according to prior art choice accuracy matured product as high as possible
Can, it is not specifically described herein.
The above-mentioned content for being related to method is for example, not being the protected object of the utility model.
Above-described embodiment is the preferred embodiment of the utility model, is not the limit to technical solutions of the utility model
System, as long as without the technical solution that creative work can be realized on the basis of the above embodiments, is regarded as falling into
In the rights protection scope of the utility model patent.
Claims (3)
1. a kind of high-precision film resistor hydrogen gas sensor calibration device, it is characterised in that：Including gas flow controller, constant temperature
Atmosphere test chamber, temperature controller and resistance instrument, the gas flow controller include at least two input ports and an output
Mouthful, each input port and the delivery outlet are separately connected a program-controlled mass flowmenter；The constant temperature atmosphere test chamber
Including shell and the temperature sensor, film resistor hydrogen gas sensor, the electric heater that are placed in the inner cavity of the shell, the shell
Body is equipped with the air inlet communicated respectively with the inner cavity of the shell and gas outlet；The delivery outlet of the gas flow controller with
The air inlet of the constant temperature atmosphere test chamber connects, and the gas outlet of the constant temperature atmosphere test chamber is communicated with air, the temperature
The power input of the signal output end of sensor and the electric heater signal input part with the temperature controller respectively
It is connected with computer heating control output end, the signal output end of the film resistor hydrogen gas sensor and the signal of the resistance instrument input
End connection.
2. high-precision film resistor hydrogen gas sensor calibration device according to claim 1, it is characterised in that：The constant temperature
Atmosphere test chamber further includes chip mounting circuit boards, pinboard, connecting plate, thermal insulation layer and head cover, and the electric heater is electric heating
Net, the thermal insulation layer are set on the interior cavity wall of the shell, and the electric network is set to the outside of the thermal insulation layer, the chip
Mounting circuit boards are installed on the inner cavity middle position of the shell, and the film resistor hydrogen gas sensor is installed on the chip peace
On device, circuit board, the upper surface of the chip mounting circuit boards is equipped with double socket pedestal or double socket contact pin, the switching
Plate is installed on the surface of the chip mounting circuit boards, and the lower surface of the pinboard is equipped with and the chip mounting circuit boards
The double socket contact pin or double socket pedestal being electrically connected, the temperature sensor is installed on the lower surface of pinboard, described
Head cover is installed on the upper end of the shell and equipped with connection plate interface, and the connecting plate is embedded in the head cover, the connection
Top pads and bottom land are respectively equipped at the top and bottom of plate, the top pads are used for and the temperature controller and institute
State resistance instrument electric connection, the bottom land be used for on the pinboard double socket contact pin or double socket pedestal with
And the output signal line of the temperature sensor is electrically connected；Air inlet on the shell is located at the chip mounting circuit boards
Lower section, the gas outlet on the shell is located at the top of the connecting plate.
3. high-precision film resistor hydrogen gas sensor calibration device according to claim 2, it is characterised in that：The chip
Multiple vertical support column vias are respectively equipped in mounting circuit boards and the pinboard, the lower end of multiple vertical support columns is solid
Surely it is set in the intracavity bottom cavity wall of the shell, the upper end of the support column sequentially passes through the chip mounting circuit boards and institute
The support column via on pinboard is stated, insulation sleeve is set with outside the support column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820244467.4U CN207779948U (en) | 2018-02-11 | 2018-02-11 | High-precision film resistor hydrogen gas sensor calibration device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820244467.4U CN207779948U (en) | 2018-02-11 | 2018-02-11 | High-precision film resistor hydrogen gas sensor calibration device |
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| Publication Number | Publication Date |
|---|---|
| CN207779948U true CN207779948U (en) | 2018-08-28 |
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| CN201820244467.4U Active CN207779948U (en) | 2018-02-11 | 2018-02-11 | High-precision film resistor hydrogen gas sensor calibration device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108169293A (en) * | 2018-02-11 | 2018-06-15 | 中国工程物理研究院总体工程研究所 | High-precision film resistor hydrogen gas sensor calibration device and Calibration Method |
| CN113034779A (en) * | 2019-12-24 | 2021-06-25 | 深圳怡化电脑股份有限公司 | Quality detection method, device and equipment of thickness sensor and readable medium |
-
2018
- 2018-02-11 CN CN201820244467.4U patent/CN207779948U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108169293A (en) * | 2018-02-11 | 2018-06-15 | 中国工程物理研究院总体工程研究所 | High-precision film resistor hydrogen gas sensor calibration device and Calibration Method |
| CN113034779A (en) * | 2019-12-24 | 2021-06-25 | 深圳怡化电脑股份有限公司 | Quality detection method, device and equipment of thickness sensor and readable medium |
| CN113034779B (en) * | 2019-12-24 | 2023-12-22 | 深圳怡化电脑股份有限公司 | Quality detection method, device and equipment for thickness sensor and readable medium |
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