CN207458932U - Intelligent power module - Google Patents
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- CN207458932U CN207458932U CN201720948066.2U CN201720948066U CN207458932U CN 207458932 U CN207458932 U CN 207458932U CN 201720948066 U CN201720948066 U CN 201720948066U CN 207458932 U CN207458932 U CN 207458932U
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Abstract
Description
技术领域technical field
本实用新型属于智能功率模块制造技术领域,具体而言,涉及一种智能功率模块。The utility model belongs to the technical field of intelligent power module manufacturing, and in particular relates to an intelligent power module.
背景技术Background technique
智能功率模块,即IPM(Intelligent Power Module),是一种将电力电子技术和集成电路技术结合的功率驱动类产品。智能功率模块把功率开关器件和高压驱动电路集成在一起,并内藏有过电压、过电流和过热等故障检测电路。智能功率模块一方面接收MCU(Microcontroller Unit微控制单元)的控制信号,驱动后续电路工作,另一方面将系统的状态检测信号送回MCU。与传统分立方案相比,智能功率模块以其高集成度、高可靠性等优势赢得越来越大的市场,尤其适合于驱动电机的变频器及各种逆变电源,是变频调速,冶金机械,电力牵引,伺服驱动,变频家电的一种理想电力电子器件。Intelligent Power Module, or IPM (Intelligent Power Module), is a power drive product that combines power electronics technology and integrated circuit technology. The intelligent power module integrates the power switching device and the high-voltage driving circuit, and has built-in fault detection circuits such as overvoltage, overcurrent and overheating. On the one hand, the intelligent power module receives the control signal from the MCU (Microcontroller Unit) to drive the subsequent circuit to work, and on the other hand, it sends the system status detection signal back to the MCU. Compared with traditional discrete solutions, intelligent power modules have won an increasing market due to their advantages of high integration and high reliability. They are especially suitable for inverters and various inverter power supplies for driving motors. An ideal power electronic device for machinery, electric traction, servo drives, and frequency conversion appliances.
智能功率模块一般会工作在恶劣的工况中,如变频空调的室外机,高温高湿的状态下,高温会使智能功率模块内部温度升高,对于现行智能功率模块被密封树脂完全密封的结构,智能功率模块内部非常容易产生热积聚,若将电路基板的下表面外露,密封树脂和电路基板之间的垂直缝隙非常容易使水气进入,另外,边缘垂直的电路基板的设计,电路基板的制作需要开模,提高了成本和制造难度,模具的损耗、长时间使用的偏差等问题导致智能功率模块的生产良率难以提高,智能功率模块的成本居高不下,影响了智能功率模块的普及应用。Smart power modules generally work in harsh working conditions, such as the outdoor unit of an inverter air conditioner. Under high temperature and high humidity, the high temperature will increase the internal temperature of the smart power module. For the current structure of the smart power module that is completely sealed by sealing resin , the interior of the intelligent power module is very easy to generate heat accumulation. If the lower surface of the circuit substrate is exposed, the vertical gap between the sealing resin and the circuit substrate is very easy for water to enter. In addition, the design of the circuit substrate with vertical edges, the circuit substrate Production requires mold opening, which increases the cost and manufacturing difficulty. Problems such as mold loss and long-term use deviation make it difficult to improve the production yield of smart power modules. The cost of smart power modules remains high, which affects the popularization of smart power modules. application.
实用新型内容Utility model content
本实用新型旨在至少解决现有技术中存在的技术问题之一。为此,本实用新型提出一种智能功率模块,所述智能功率模块不易侵入水气。The utility model aims at at least solving one of the technical problems existing in the prior art. For this reason, the utility model proposes an intelligent power module, and the intelligent power module is not easy to invade water vapor.
根据本实用新型实施例的智能功率模块,包括:基板,所述基板的侧壁包括上倾斜段和下倾斜段,所述上倾斜段从上到下朝外倾斜,所述下倾斜段从下到上朝外倾斜;绝缘层,所述绝缘层设在所述基板的上表面;布线层,所述布线层设在所述绝缘层上;多个电子元件,多个所述电子元件设在所述布线层上,多个所述电子元件之间或者所述电子元件与所述布线层之间电连接;多个引脚,多个所述引脚设在所述基板的至少一侧边缘处,且所述引脚与所述布线层电连接;密封树脂层,所述密封树脂层包裹在设有所述电子元件的所述基板外部,其中所述基板的下表面露出。The smart power module according to the embodiment of the present invention includes: a base plate, the side wall of the base plate includes an upper inclined section and a lower inclined section, the upper inclined section is inclined outward from top to bottom, and the lower inclined section is Inclined upwards and outwards; an insulating layer, the insulating layer is arranged on the upper surface of the substrate; a wiring layer, the wiring layer is arranged on the insulating layer; a plurality of electronic components, a plurality of electronic elements are arranged on On the wiring layer, a plurality of the electronic components or between the electronic components and the wiring layer are electrically connected; a plurality of pins, and a plurality of the pins are arranged on at least one side edge of the substrate and the pins are electrically connected to the wiring layer; a sealing resin layer, the sealing resin layer wrapping the outside of the substrate provided with the electronic components, wherein the lower surface of the substrate is exposed.
根据本实用新型实施例的智能功率模块,散热性能好,且水气不易通过密封树脂层与基板之间的间隙侵入,智能功率模块的工作更稳定。According to the intelligent power module of the embodiment of the utility model, the heat dissipation performance is good, and water vapor is not easy to intrude through the gap between the sealing resin layer and the substrate, and the operation of the intelligent power module is more stable.
本实用新型的附加方面和优点将在下面的描述中部分给出,部分将从下面的描述中变得明显,或通过本实用新型的实践了解到。Additional aspects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
附图说明Description of drawings
本实用新型的上述和/或附加的方面和优点从结合下面附图对实施例的描述中将变得明显和容易理解,其中:The above and/or additional aspects and advantages of the present utility model will become apparent and easy to understand from the description of the embodiments in conjunction with the following drawings, wherein:
图1是根据本实用新型实施例的智能功率模块的结构示意图;Fig. 1 is a schematic structural diagram of an intelligent power module according to an embodiment of the present invention;
图2是图1中X-X’处的剖视图;Fig. 2 is the sectional view of X-X ' place among Fig. 1;
图3是根据本实用新型实施例的智能功率模块去掉密封树脂层后的俯视图;Fig. 3 is a top view of the smart power module according to the embodiment of the present invention after removing the sealing resin layer;
图4是在基板上设置绝缘层和布线层的工序图;Fig. 4 is a process diagram of arranging an insulating layer and a wiring layer on a substrate;
图5是切割布置有所述布线层的铝板以形成所述基板的工序图;5 is a process diagram of cutting the aluminum plate on which the wiring layer is arranged to form the substrate;
图6是根据本实用新型实施例的智能功率模块的引脚的结构示意图;Fig. 6 is a schematic structural diagram of pins of an intelligent power module according to an embodiment of the present invention;
图7和图8是在布线层上焊接电子元件和引脚的工序图;Figure 7 and Figure 8 are process diagrams of soldering electronic components and pins on the wiring layer;
图9和图10是在多个电子元件之间或者电子元件和布线层之间邦定金属线以形成电连接的工序图;9 and 10 are process diagrams of bonding metal wires between multiple electronic components or between electronic components and wiring layers to form electrical connections;
图11是对带有电子元件和引脚的基板进行注塑的工序图;Fig. 11 is a process diagram of injection molding a substrate with electronic components and pins;
图12是进行引脚切筋成型的工序图;Fig. 12 is the process diagram of carrying out pin cutting and forming;
图13是根据本实用新型实施例的智能功率模块的制造方法的工序流程图。FIG. 13 is a process flow chart of a manufacturing method of an intelligent power module according to an embodiment of the present invention.
附图标记:Reference signs:
智能功率模块10,intelligent power module 10,
引脚11,密封树脂层12,电子元件14,金属线15,基板16,基板的侧壁16A,绝缘层17,布线层18,焊盘18A,载具20,托具21,上模44,下模45,固定装置46,浇口53,排气口54,切刀66,顶针67。Pin 11, sealing resin layer 12, electronic component 14, metal wire 15, substrate 16, side wall 16A of substrate, insulating layer 17, wiring layer 18, pad 18A, carrier 20, holder 21, upper mold 44, Lower mold 45, fixture 46, gate 53, air vent 54, cutter 66, thimble 67.
具体实施方式Detailed ways
下面详细描述本实用新型的实施例,所述实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,仅用于解释本实用新型,而不能理解为对本实用新型的限制。Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present utility model, but should not be construed as limiting the present utility model.
在本实用新型的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本实用新型和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本实用新型的限制。此外,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本实用新型的描述中,除非另有说明,“多个”的含义是两个或两个以上。In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial" The orientation or positional relationship indicated by , "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, rather than indicating or implying the referred device Or elements must have a specific orientation, be constructed and operate in a specific orientation, and thus should not be construed as limiting the invention. In addition, the features defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present utility model, unless otherwise specified, "plurality" means two or more.
在本实用新型的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本实用新型中的具体含义。In the description of the present utility model, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a flexible connection. Detachable connection, or integral connection; it can be mechanical connection or electrical connection; it can be direct connection or indirect connection through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present utility model in specific situations.
下面参考图1-图3描述根据本实用新型实施例的智能功率模块10。The following describes an intelligent power module 10 according to an embodiment of the present invention with reference to FIGS. 1-3 .
如图1-图3所示,根据本实用新型一个实施例的智能功率模块10包括:基板16、绝缘层17、布线层18、多个电子元件14、多个引脚11和密封树脂层12。As shown in Figures 1-3, an intelligent power module 10 according to an embodiment of the present invention includes: a substrate 16, an insulating layer 17, a wiring layer 18, a plurality of electronic components 14, a plurality of pins 11 and a sealing resin layer 12 .
基板16具有上表面、下表面和侧壁,绝缘层17设在基板16的上表面,布线层18 设在绝缘层17上。多个电子元件14设在布线层18上,多个电子元件14之间电连接,或者电子元件14与布线层18之间电连接,多个引脚11设在基板16的至少一侧边缘处,且引脚11与布线层18电连接。密封树脂层12包裹在设有电子元件14的基板16外部,其中基板16的下表面露出以散热。The substrate 16 has an upper surface, a lower surface and side walls, an insulating layer 17 is provided on the upper surface of the substrate 16 , and a wiring layer 18 is provided on the insulating layer 17 . A plurality of electronic components 14 are arranged on the wiring layer 18, electrically connected between the plurality of electronic components 14, or electrically connected between the electronic components 14 and the wiring layer 18, and a plurality of pins 11 are arranged at least one side edge of the substrate 16 , and the pin 11 is electrically connected to the wiring layer 18 . The encapsulating resin layer 12 wraps the substrate 16 on which the electronic components 14 are disposed, wherein the lower surface of the substrate 16 is exposed for heat dissipation.
如图2所示,基板16的侧壁16A包括上倾斜段和下倾斜段,上倾斜段从上到下朝外倾斜,下倾斜段从下到上朝外倾斜,其中“外”指朝远离基板16中心的方向,这样,在对基板16进行注塑时,密封树脂层12包裹基板16的侧壁16A,密封树脂层12与基板16之间的间隙为弯折形,相当于对密封树脂层12与基板16的上表面之间形成密封机构,水气不易侵入。As shown in FIG. 2 , the side wall 16A of the base plate 16 includes an upper inclined section and a lower inclined section, the upper inclined section is inclined outward from top to bottom, and the lower inclined section is inclined outward from bottom to top, wherein "outside" refers to moving away from The direction of the center of the substrate 16, so that when the substrate 16 is injected, the sealing resin layer 12 wraps the side wall 16A of the substrate 16, and the gap between the sealing resin layer 12 and the substrate 16 is bent, which is equivalent to sealing the sealing resin layer. 12 and the upper surface of the substrate 16 form a sealing mechanism, so that water vapor is not easy to intrude.
根据本实用新型实施例的智能功率模块10,散热性能好,且水气不易通过密封树脂层12与基板16之间的间隙侵入,智能功率模块10的工作更稳定。According to the smart power module 10 of the embodiment of the present invention, the heat dissipation performance is good, and water vapor is not easy to intrude through the gap between the sealing resin layer 12 and the substrate 16 , and the work of the smart power module 10 is more stable.
下面将参照图1-图3详细描述根据本实用新型实施例的智能功率模块10。The intelligent power module 10 according to the embodiment of the present utility model will be described in detail below with reference to FIGS. 1-3 .
在本实用新型的一个实施例中,基板16可以是由1100等材质的铝构成的矩形板材。在基板16的表面上形成基板16绝缘和布线的方法有两种:一个方法是防蚀处理基板16的至少一个表面;另一个方法是在基板16的至少一个表面上形成绝缘层17后再在其表面形成布线层18。In an embodiment of the present invention, the substrate 16 may be a rectangular plate made of aluminum such as 1100. There are two methods for forming substrate 16 insulation and wiring on the surface of substrate 16: one method is to treat at least one surface of substrate 16 for corrosion protection; the other method is to form insulating layer 17 on at least one surface of substrate 16 and then A wiring layer 18 is formed on its surface.
优选地,如图2所示,基板16的横截面包括两个梯形,上面的梯形的下底与下面的梯形的下底重合,也就是说好,基板16的侧壁16A可以为V形,绝缘层17可以设在上面的梯形的上底,可选地,两个梯形对称,以便于加工。Preferably, as shown in FIG. 2 , the cross-section of the substrate 16 includes two trapezoids, the lower bottom of the upper trapezoid coincides with the lower bottom of the lower trapezoid, that is to say, the side wall 16A of the substrate 16 can be V-shaped, The insulating layer 17 may be provided on the upper bottom of the upper trapezoid. Optionally, the two trapezoids are symmetrical to facilitate processing.
梯形的下底角为α,满足:30°≤α≤45°,基板16的厚度为h,满足:h≤1.5mm,密封树脂层12可以覆盖基板16的侧壁16A,且密封树脂层12与基板16的下表面平齐,这样基板16的下表面外露可以提供良好的散热。The lower base angle of the trapezoid is α, satisfying: 30°≤α≤45°, the thickness of the substrate 16 is h, satisfying: h≤1.5mm, the sealing resin layer 12 can cover the side wall 16A of the substrate 16, and the sealing resin layer 12 It is flush with the lower surface of the substrate 16, so that the exposed lower surface of the substrate 16 can provide good heat dissipation.
基板16为铝板制成,且基板16的上表面和基板16的下表面中的至少一个具有阳极氧化层,以提高基板16的硬度、耐磨性和绝缘耐压,出于节省成本考虑,也可以不具有阳极氧化层;在此值得说明的是,即便基板16的上、下表面具有阳极氧化层时,基板16的侧壁16A也是不具有阳极氧化层的,因为从下述制造方法可以看出,阳极氧化层是在基板16的最初工序完成,基板16的侧壁16A是在基板16的最后工序完成,形成侧壁时,阳极氧化层被切掉了。The substrate 16 is made of aluminum plate, and at least one of the upper surface of the substrate 16 and the lower surface of the substrate 16 has an anodized layer to improve the hardness, wear resistance and insulation withstand voltage of the substrate 16. It may not have an anodized layer; it is worth noting here that even if the upper and lower surfaces of the substrate 16 have an anodized layer, the sidewall 16A of the substrate 16 does not have an anodized layer, because it can be seen from the following manufacturing method It can be seen that the anodized layer is completed in the initial process of the substrate 16, and the sidewall 16A of the substrate 16 is completed in the final process of the substrate 16. When forming the sidewall, the anodized layer is cut off.
电子元件14被固定在布线层18上构成规定的电路。电子元件14采用晶体管或二极管等有源元件、或者电容或电阻等无源元件。另外,也可以通过由铜等制成的散热器将功率元件等发热量大的电子元件14固定在基板16上;面朝上安装的有源元件等通过金属线15与布线层18连接。The electronic component 14 is fixed on the wiring layer 18 to form a predetermined circuit. As the electronic element 14, active elements such as transistors and diodes, or passive elements such as capacitors and resistors are used. In addition, electronic components 14 that generate a large amount of heat such as power components can also be fixed on the substrate 16 through a heat sink made of copper or the like;
布线层18由铜等金属构成,且布线层18与基板16绝缘。另外,在配置导出引脚 11边上形成由布线层18构成的焊盘18A,如图3所示,在基板16的一侧边缘处设置多个对准排列的焊盘18A。The wiring layer 18 is made of metal such as copper, and the wiring layer 18 is insulated from the substrate 16 . In addition, pads 18A composed of wiring layer 18 are formed on the side where lead-out pins 11 are arranged. As shown in FIG.
焊盘18A与布线层18材质和厚度完全一致,一般可以使用1盎司~2盎司的铜箔,另外,布线层18被绝缘层17粘结在基板16的表面上。The material and thickness of the pad 18A is exactly the same as that of the wiring layer 18 . Generally, 1 oz to 2 oz copper foil can be used. In addition, the wiring layer 18 is bonded on the surface of the substrate 16 by the insulating layer 17 .
如图2和图3所示,智能功率模块10还包括:金属线15,多个电子元件14之间可以通过金属线15电连接或者电子元件14与布线层18之间通过金属线15电连接。As shown in FIG. 2 and FIG. 3 , the intelligent power module 10 further includes: a metal wire 15 , and a plurality of electronic components 14 can be electrically connected through the metal wire 15 or between the electronic components 14 and the wiring layer 18 can be electrically connected through the metal wire 15 .
金属线15可以是铝线、金线或铜线,通过邦定使各电子元件14之间、各布线层18之间、电子元件14与布线层18之间建立电连接关系,有时还用于使基板16或引脚11 和布线层18或电子元件14之间建立电连接关系。金属线15的直径为D,满足:15μm ≤D≤400μm。The metal wire 15 can be an aluminum wire, a gold wire or a copper wire, and through bonding, an electrical connection relationship is established between the electronic components 14, between the wiring layers 18, and between the electronic components 14 and the wiring layer 18, and is sometimes used for An electrical connection relationship is established between the substrate 16 or the pin 11 and the wiring layer 18 or the electronic component 14 . The diameter of the metal wire 15 is D, which satisfies: 15 μm≦D≦400 μm.
绝缘层17覆盖基板16至少一个表面形成,绝缘层17可以为环氧树脂等树脂材料内高浓度填充氧化铝等填料制成,以提高热导率。The insulating layer 17 is formed to cover at least one surface of the substrate 16 , and the insulating layer 17 can be made of a resin material such as epoxy resin filled with a filler such as alumina at a high concentration to improve thermal conductivity.
引脚11被固定在设于基板16一个边缘的焊盘18A上,引脚11具有与外部进行输入、输出的作用。在此,设计成多条引脚11和一条贯穿脚处于同一边缘上,引脚11和贯穿脚和焊盘18A,通过焊锡等导电电性粘结剂焊接。The pin 11 is fixed to a pad 18A provided on one edge of the substrate 16, and the pin 11 functions as input and output to the outside. Here, it is designed that a plurality of pins 11 and one through leg are on the same edge, and the pin 11, the through leg and the pad 18A are soldered with a conductive adhesive such as solder.
引脚11还具有如图6所示的结构,引脚11为弯折形。The pin 11 also has a structure as shown in FIG. 6 , and the pin 11 is bent.
引脚11采用铜等金属制成,铜表面通过化学镀和电镀形成一层镍锡合金层,合金层的厚度一般为5μm,镀层可保护铜不被腐蚀氧化,并可提高可焊接性。Pin 11 is made of copper and other metals. The copper surface forms a layer of nickel-tin alloy layer through electroless plating and electroplating. The thickness of the alloy layer is generally 5 μm. The plating layer can protect copper from corrosion and oxidation and improve solderability.
密封树脂层12可通过传递模方式使用热硬性树脂模制也可使用注入模方式使用热塑性树脂模制。在此,密封树脂层12完全密封基板16具有布线层18的一面上的所有元素,而对于致密性要求高的智能功率模块10,基板16不具有布线层18的一面一般也进行密封处理。The sealing resin layer 12 may be molded using a thermosetting resin by a transfer molding method or may be molded using a thermoplastic resin by an injection molding method. Here, the sealing resin layer 12 completely seals all elements on the side of the substrate 16 with the wiring layer 18 , and for the smart power module 10 requiring high compactness, the side of the substrate 16 without the wiring layer 18 is generally also sealed.
参照图4-图12之后,说明本实用新型实施例的智能功率模块10的制造方法。After referring to FIG. 4-FIG. 12 , the manufacturing method of the smart power module 10 according to the embodiment of the present invention will be described.
本实用新型实施例的智能功率模块10的制造方法包括:The manufacturing method of the intelligent power module 10 according to the embodiment of the utility model includes:
如图4所示,在铝板上设置绝缘层17;As shown in Figure 4, an insulating layer 17 is set on the aluminum plate;
如图4所示,在绝缘层17上形成布线层18;As shown in FIG. 4, a wiring layer 18 is formed on the insulating layer 17;
如图5所示,切割布置有布线层18的铝板以形成基板16;As shown in FIG. 5 , the aluminum plate on which the wiring layer 18 is arranged is cut to form a substrate 16;
如图6所示,制成多个引脚11;As shown in Figure 6, a plurality of pins 11 are made;
如图7和图8所示,在布线层18上装配电子元件14和引脚11;As shown in FIGS. 7 and 8 , assemble electronic components 14 and pins 11 on the wiring layer 18;
如图9和图10所示,在多个电子元件14之间或者电子元件14和布线层18之间邦定金属线15以形成电连接;As shown in FIG. 9 and FIG. 10 , a metal wire 15 is bonded between a plurality of electronic components 14 or between the electronic component 14 and the wiring layer 18 to form an electrical connection;
如图11所示,对带有电子元件14和引脚11的基板16进行注塑,且将基板16的下表面露出;As shown in FIG. 11 , the substrate 16 with the electronic components 14 and the pins 11 is injected, and the lower surface of the substrate 16 is exposed;
测试以完成智能功率模块10的制造。Test to complete the manufacture of the intelligent power module 10 .
可以理解的是,在不违反实际制造逻辑的前提下,上述的步骤顺序可以进行合理的组织与排序。It can be understood that, on the premise of not violating the actual manufacturing logic, the sequence of the above steps can be reasonably organized and sequenced.
下面将参考附图对上述的步骤进行详细解释:The above-mentioned steps will be explained in detail below with reference to the accompanying drawings:
图4示出了在铝板上布置绝缘层17和布线层18的工序,即在大小和结构合适的铝基板16上形成绝缘层17并在绝缘层17表面形成布线层18的工序。4 shows the process of arranging the insulating layer 17 and the wiring layer 18 on the aluminum plate, that is, the process of forming the insulating layer 17 on the aluminum substrate 16 with a suitable size and structure and forming the wiring layer 18 on the surface of the insulating layer 17 .
首先,根据需要的电路布局设计大小合适的基板16,对于一般的智能功率模块10,一般的大小可选取64mm×30mm×1.5mm。Firstly, a substrate 16 with a suitable size is designed according to the required circuit layout. For a general intelligent power module 10, the general size can be selected as 64mm×30mm×1.5mm.
在1m×1m×1.5mm大小或其他大小的铝基板16型材的至少一个表面上形成阳极氧化层,出于成本考虑,也可以省略掉此工序。每个铝板切割成多块基板16,这样可以提高生产效率。An anodic oxidation layer is formed on at least one surface of the profile of the aluminum substrate 16 with a size of 1m×1m×1.5mm or other sizes. For cost considerations, this process can also be omitted. Each aluminum plate is cut into a plurality of substrates 16, which can improve production efficiency.
然后,再在此铝基板16的其中一面设置绝缘层17(该面即为上表面),绝缘层17 的厚度可设置为100μm。Then, an insulating layer 17 is provided on one side of the aluminum substrate 16 (this side is the upper surface), and the thickness of the insulating layer 17 can be set to 100 μm.
另外,在绝缘层17的表面粘贴有作为布线层18的铜箔,如使用2盎司的铜箔,铜箔厚度约为70μm。然后将该工序制造的铜箔进行蚀刻,局部地除去铜箔,形成布线层 18、焊盘18A。必要时,还会在特定位置配置绿油层,起阻焊作用。In addition, a copper foil as the wiring layer 18 is pasted on the surface of the insulating layer 17. For example, a 2-ounce copper foil is used, and the thickness of the copper foil is about 70 μm. The copper foil produced in this step is then etched to partially remove the copper foil to form the wiring layer 18 and the pad 18A. When necessary, a green oil layer will be arranged at a specific position to act as a solder mask.
图5示出了切割布置有布线层18的铝板以形成基板16的工序。FIG. 5 shows a process of cutting the aluminum plate on which the wiring layer 18 is arranged to form the substrate 16 .
步骤切割布置有布线层18的铝板以形成基板16包括:用刀具沿上下方向切割布置有布线层18的铝板,且刀具的切割端面为V形,以使基板16的侧壁16A具有上述结构形式的上倾斜段和下倾斜段,The step of cutting the aluminum plate with the wiring layer 18 to form the substrate 16 includes: cutting the aluminum plate with the wiring layer 18 along the up and down direction with a cutter, and the cutting end surface of the cutter is V-shaped, so that the side wall 16A of the substrate 16 has the above-mentioned structural form upslope and downslope of the
切割的具体方式包括但不限于使用铡刀、滚刀、剪刀等方式,将上述1m×1m×1.5mm 的铝基板16切割成所需的大小,如64mm×30mm×1.5mm,则在切割边缘会自然形成 V型胁逼侧壁16A。The specific cutting method includes but is not limited to using guillotine, hob, scissors, etc. to cut the above-mentioned 1m×1m×1.5mm aluminum substrate 16 into the required size, such as 64mm×30mm×1.5mm, then the cutting edge will be A V-shaped intimidating sidewall 16A is naturally formed.
图6示出了制作引脚11的工序图,该工序可以是制成独立的带镀层的引脚11的工序。FIG. 6 shows a process diagram of manufacturing the pin 11 , which may be a process of manufacturing an independent pin 11 with plating.
每个引脚11都是用铜基材表面镀镍形成;如图6为每个独立引脚11 的示意图,每个独立引脚11被制成长度为25mm,宽度为1.5mm,厚度为0.5mm的长条状。Each pin 11 is formed by nickel plating on the surface of the copper substrate; Figure 6 is a schematic diagram of each independent pin 11, and each independent pin 11 is made into a length of 25 mm, a width of 1.5 mm, and a thickness of 0.5 mm. mm strips.
然后通过化学镀的方法形成镍层:通过镍盐和次亚磷酸钠混合溶液,并添加了适当的络合剂,在已形成特定形状的铜材表面形成镍层,在金属镍具有很强的钝化能力,能迅速生成一层极薄的钝化膜,能抵抗大气、碱和某些酸的腐蚀。镀镍结晶极细小,镍层厚度一般为0.1μm。Then the nickel layer is formed by electroless plating: through the mixed solution of nickel salt and sodium hypophosphite, and adding an appropriate complexing agent, a nickel layer is formed on the surface of the copper material that has formed a specific shape, and the metal nickel has a strong Passivation ability, can quickly form an extremely thin passivation film, which can resist the corrosion of atmosphere, alkali and some acids. The crystals of nickel plating are extremely small, and the thickness of the nickel layer is generally 0.1 μm.
接着通过酸性硫酸盐工艺,在室温下将已形成形状和镍层的铜材浸在带有正锡离子的镀液中通电,在镍层表面形成镍锡合金层,镍层厚度一般控制在5μm,镍层的形成极大提高了保护性和可焊性。Then, through the acid sulfate process, the copper material with the formed shape and nickel layer is immersed in the plating solution with positive tin ions at room temperature and energized to form a nickel-tin alloy layer on the surface of the nickel layer. The thickness of the nickel layer is generally controlled at 5 μm. , The formation of nickel layer greatly improves the protection and solderability.
最后通过成型压具,将引脚11的其中一头压低一定的高度,譬如1.2mm。Finally, one end of the pin 11 is lowered to a certain height, such as 1.2mm, by a molding press.
到此,引脚11制造完成。So far, pin 11 is manufactured.
图7和图8示出了在布线层18上装配电子元件14和引脚11的工序。7 and 8 show the process of mounting the electronic components 14 and the pins 11 on the wiring layer 18 .
首先,通过锡膏印刷机,使用钢网,对基板16的布线层18的特定位置进行锡膏涂装,钢网可使用0.13mm的厚度。First, a solder paste printing machine is used to coat a specific position of the wiring layer 18 of the substrate 16 with a stencil with a thickness of 0.13 mm.
其次,参照图7和图8,进行电子元件14、引脚11和贯穿脚的安装;安装顺序如下:将基板16放于载具20上,电子元件14可直接放置在布线层18的特定位置;在载具20 上,引脚11可通过如图7的纸面垂直上方往垂直下方的方向放下,使引脚11的一端要安放在焊盘18A上,另一端通过托具21进行固定,载具20和托具21通过合成石等材料制成;放于载具20和托具21上的基板16通过回流焊,锡膏固化,电子元件14、引脚11被固定。Next, referring to FIG. 7 and FIG. 8 , the installation of electronic components 14, pins 11 and through feet is carried out; the installation sequence is as follows: the substrate 16 is placed on the carrier 20, and the electronic components 14 can be directly placed on a specific position of the wiring layer 18 ; On the carrier 20, the pin 11 can be put down in the direction vertically downward through the vertical top of the paper surface as shown in FIG. The carrier 20 and the holder 21 are made of materials such as synthetic stone; the substrate 16 placed on the carrier 20 and the holder 21 is reflowed, the solder paste is cured, and the electronic components 14 and pins 11 are fixed.
图9和图10示出了在多个电子元件14之间或者电子元件14和布线层18之间邦定金属线15以形成电连接的工序。9 and 10 illustrate the process of bonding metal wires 15 between a plurality of electronic components 14 or between electronic components 14 and wiring layers 18 to form electrical connections.
本工序包括清洗基板16并进行邦线连接,使电子元件14和布线层18形成起电连接作用的金属线15的工序。This process includes the process of cleaning the substrate 16 and performing wire bonding, so that the electronic component 14 and the wiring layer 18 form the metal wire 15 for electrical connection.
首先将基板16放入清洗机中进行清洗,将回流焊时残留的松香等助焊剂及冲压时残留的铝线等异物洗净,根据电子元件14在布线层18的排布密度,清洗可通过喷淋或超声或两者结合的形式进行。清洗时,通过机械臂夹持两条或多条引脚11,将基板16置于清洗槽中;First put the substrate 16 into a cleaning machine for cleaning, and clean the residual flux such as rosin during reflow soldering and the foreign matter such as aluminum wire remaining during stamping. According to the arrangement density of the electronic components 14 in the wiring layer 18, cleaning can be done by Spray or ultrasonic or a combination of both. When cleaning, two or more pins 11 are clamped by the mechanical arm, and the substrate 16 is placed in the cleaning tank;
其次,通过在电子元件14和布线层18的特定位置邦定一定直径的金属线15形成电连接,在此,金属线15的粗细应根据邦定点的大小、所需的同流能力、元器件的可加工性等综合考虑,一般地,一般地,单根金属线15的直径不应大于400μm,不应小于 15μm,对于功率器件的连接,可考虑使用多根400μm的铝线并联邦定,对于功能器件的连接,可考虑使用单根38μm的铝线进行邦定。Secondly, an electrical connection is formed by bonding a metal wire 15 of a certain diameter at a specific position of the electronic component 14 and the wiring layer 18. Here, the thickness of the metal wire 15 should be based on the size of the bonding point, the required co-current capability, and In general, the diameter of a single metal wire 15 should not be greater than 400 μm and should not be less than 15 μm. For the connection of power devices, multiple 400 μm aluminum wires can be used in parallel. For the connection of functional devices, a single 38μm aluminum wire can be considered for bonding.
图11示出了注塑的工序。Fig. 11 shows the process of injection molding.
图11表示使用模具由密封树脂密封基板16的工序的剖面图。FIG. 11 is a cross-sectional view showing a step of sealing the substrate 16 with a sealing resin using a mold.
首先,在无氧环境中对基板16进行烘烤,烘烤时间不应小于2小时,烘烤温度和选择125℃。Firstly, the substrate 16 is baked in an oxygen-free environment, the baking time should not be less than 2 hours, and the baking temperature should be 125°C.
将配置好引脚11的基板16搬送到上模44与下模45之间。通过使引脚11的特定部分与固定装置46接触,基板16定位在下模45上。The substrate 16 on which the pins 11 are arranged is transported between the upper mold 44 and the lower mold 45 . The substrate 16 is positioned on the lower mold 45 by bringing a specific portion of the pin 11 into contact with the fixture 46 .
合模时,在形成于模具内部的模腔中放置基板16,然后由浇口53注入密封树脂。进行密封的方法为使用热硬性树脂的注入模模制。而且,对应自浇口53注入的密封树脂模腔内部的气体通过排气口54排放到外部。When closing the mold, the substrate 16 is placed in the cavity formed inside the mold, and then the sealing resin is injected through the gate 53 . The sealing method is injection molding using a thermosetting resin. Also, the gas corresponding to the inside of the sealing resin cavity injected from the gate 53 is discharged to the outside through the exhaust port 54 .
密封树脂进入模腔后将模腔填满,在此,密封树脂将基板16的侧壁16A完全密封,而基板16的底部未被密封树脂覆盖。The sealing resin fills the mold cavity after entering the mold cavity. Here, the sealing resin completely seals the side wall 16A of the substrate 16 , while the bottom of the substrate 16 is not covered by the sealing resin.
图12是示出了对引脚11切筋成型并进行测试的工序,智能功率模块10经由此工序作为制品完成。FIG. 12 shows the process of trimming and testing the pin 11 , and the intelligent power module 10 is completed as a product through this process.
在前工序即传递模模装工序使除引脚11、基板16的底部以外的其他部分都被树脂密封。本工序根据使用的长度和形状需要,例如,在虚线51的位置将外部引脚11切断成一定形状,便于后续装配。In the previous process, that is, the transfer molding process, the parts other than the pins 11 and the bottom of the substrate 16 are resin-sealed. In this process, according to the length and shape required, for example, the external pin 11 is cut into a certain shape at the position of the dotted line 51 to facilitate subsequent assembly.
然后将模块放入测试设备中,进行常规的电参数测试,一般包括绝缘耐压、静态功耗、迟延时间等测试项目,测试合格者为成品。Then put the module into the test equipment and conduct conventional electrical parameter tests, which generally include test items such as insulation withstand voltage, static power consumption, and delay time. Those who pass the test are finished products.
利用上述工序,完成图1-图3所示的智能功率模块10。Using the above process, the smart power module 10 shown in FIGS. 1-3 is completed.
如图13所示,本实用新型实施例的智能功率模块10的制造方法包括:在铝基板16表面上设置绝缘层17的工序;在绝缘层17的表面上形成布线层18、焊盘18AA的工序;制成带镀层的引脚11的工序;在布线层18连接电子元件14、在焊盘18AA连接引脚 11和贯穿脚的工序;清洗的工序;用金属线15连接电子元件14和布线层18的工序;烘烤并模制的工序;对引脚11进行成型的工序。工序图如图所示。As shown in FIG. 13 , the manufacturing method of the intelligent power module 10 according to the embodiment of the present invention includes: the process of disposing the insulating layer 17 on the surface of the aluminum substrate 16; Process; the process of making the pin 11 with plating; the process of connecting the electronic component 14 at the wiring layer 18, connecting the pin 11 and the through pin at the pad 18AA; the process of cleaning; connecting the electronic component 14 and wiring with a metal wire 15 The process of layer 18; the process of baking and molding; the process of forming the pin 11. The process diagram is shown in the figure.
根据本实用新型上述的智能功率模块10的制造方法,可以使现有的流程得到优化,不用单独为基板16开模,可以一次制得多个基板16,可以降低智能功率模块10的生产成本,且制得的智能功率模块10密封性能好,水气不易从密封树脂层12与基板16之间的间隙侵入。According to the above-mentioned manufacturing method of the intelligent power module 10 of the present invention, the existing process can be optimized, and multiple substrates 16 can be produced at one time without separately opening a mold for the substrate 16, which can reduce the production cost of the intelligent power module 10, Moreover, the prepared smart power module 10 has good sealing performance, and moisture is not easy to intrude from the gap between the sealing resin layer 12 and the substrate 16 .
在本说明书的描述中,参考术语“一个实施例”、“一些实施例”、“示意性实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本实用新型的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, reference to the terms "one embodiment," "some embodiments," "exemplary embodiments," "example," "specific examples," or "some examples" is intended to mean that the implementation Specific features, structures, materials or characteristics described in an embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
尽管已经示出和描述了本实用新型的实施例,本领域的普通技术人员可以理解:在不脱离本实用新型的原理和宗旨的情况下可以对这些实施例进行多种变化、修改、替换和变型,本实用新型的范围由权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications, substitutions and modifications, the scope of the present invention is defined by the claims and their equivalents.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107731760A (en) * | 2017-07-31 | 2018-02-23 | 广东美的制冷设备有限公司 | SPM and its manufacture method |
| CN115020355A (en) * | 2022-03-31 | 2022-09-06 | 广东汇芯半导体有限公司 | Semiconductor circuit with a voltage regulator circuit |
| CN115206891A (en) * | 2022-05-26 | 2022-10-18 | 广东汇芯半导体有限公司 | Semiconductor circuit for improving bonding force of substrate and sealing layer and manufacturing method thereof |
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2017
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107731760A (en) * | 2017-07-31 | 2018-02-23 | 广东美的制冷设备有限公司 | SPM and its manufacture method |
| CN115020355A (en) * | 2022-03-31 | 2022-09-06 | 广东汇芯半导体有限公司 | Semiconductor circuit with a voltage regulator circuit |
| CN115206891A (en) * | 2022-05-26 | 2022-10-18 | 广东汇芯半导体有限公司 | Semiconductor circuit for improving bonding force of substrate and sealing layer and manufacturing method thereof |
| CN115206891B (en) * | 2022-05-26 | 2026-04-17 | 广东汇芯半导体有限公司 | A semiconductor circuit for improving the adhesion between the substrate and the sealing layer, and a method for manufacturing the same. |
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Effective date of registration: 20230120 Address after: 400064 plant 1, No. 70, Meijia Road, Nan'an District, Chongqing Patentee after: Meiken Semiconductor Technology Co.,Ltd. Address before: 528311 refrigeration complex building, East District, Midea industrial city, Beijiao Town, Shunde District, Foshan City, Guangdong Province Patentee before: GD MIDEA AIR-CONDITIONING EQUIPMENT Co.,Ltd. |