CN207181460U - Full-automatic probe station with material pressing device - Google Patents

Full-automatic probe station with material pressing device Download PDF

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Publication number
CN207181460U
CN207181460U CN201721172954.6U CN201721172954U CN207181460U CN 207181460 U CN207181460 U CN 207181460U CN 201721172954 U CN201721172954 U CN 201721172954U CN 207181460 U CN207181460 U CN 207181460U
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China
Prior art keywords
measured
workbench
table top
pressing device
full
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CN201721172954.6U
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Chinese (zh)
Inventor
刘振辉
林生财
王胜利
杨波
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Silicon electric semiconductor equipment (Shenzhen) Co., Ltd
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SHENZHEN SIDEA SEMICONDUCTOR EQUIPMENT CO Ltd
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Priority to CN201721172954.6U priority Critical patent/CN207181460U/en
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Publication of CN207181460U publication Critical patent/CN207181460U/en
Priority to TW107212352U priority patent/TWM574687U/en
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Abstract

The utility model discloses a kind of full-automatic probe station with material pressing device, including：Frame, the frame include：First table top and with spaced apart second table top of first table top；It is movable be assemblied in first table top, it is between first table top and second table top, for place part to be measured and drive the part to be measured movement, so that the part to be measured is adsorbed into fixed workbench；Be arranged at material pressing device on second table top, when being placed with the movable workbench a to specified location for the part to be measured the part to be measured being pressed on the workbench；And the workbench is controlled to carry out the control centre that the shift action, the material pressing device progress compression action and the workbench carry out the absorption action successively.By the pressuring action of material pressing device to reduce the gap between part and workbench to be measured, reach follow-up part to be measured and be easy to by the fixed purpose of workbench absorption.

Description

Full-automatic probe station with material pressing device
Technical field
Electronic component detection technique field is the utility model is related to, it is more particularly to a kind of full-automatic with material pressing device Probe station.
Background technology
Full-automatic probe station is mainly used in the matter of semicon industry, photovoltaic industry, integrated circuit and electronic component Measure examination.With the development of science and technology, the volume of electronic component is less and less, generally multiple electronic components are integrated in a piece of It is convenient subsequently to be detected to form part to be measured on the bottom plate of shape.
In the prior art, it is necessary to which part to be measured first is positioned over into one offers negative pressure hole before being detected to part to be measured Workbench on, the passage in negative pressure hole and a negative pressure system is communicated with workbench, so as to open negative pressure system Part to be measured is fixed on workbench by negative pressure, increases stability of the part to be measured relative to workbench, in favor of to part to be measured Detected.
But when directly part to be measured is positioned on workbench, part to be measured and workbench be provided with negative pressure hole surface it Between gap easily be present, even if so as to open negative pressure system due to the presence in gap, part to be measured is also difficult to adsorbed fixation, And then it is unfavorable for subsequently detecting it.
Utility model content
The purpose of the utility model embodiment is to provide a kind of full-automatic probe station with material pressing device, solves to be measured Part, which is difficult to be adsorbed by workbench, to be fixed, and is unfavorable for subsequent detection part to be measured.
The utility model first aspect provides a kind of full-automatic probe station with material pressing device, including：
Frame, the frame include：First table top and with spaced apart second table top of first table top；
It is movable be assemblied in first table top, it is between first table top and second table top, be used for Place part to be measured and drive the part to be measured movement, so that the part to be measured is adsorbed into fixed workbench；
Be arranged at it is on second table top, when being placed with the movable workbench of the part to be measured to a specified location When the part to be measured is pressed in material pressing device on the workbench；And
The workbench is controlled to carry out the shift action successively, the material pressing device carries out the compression action and described Workbench carries out the control centre of the absorption action.
The full-automatic probe station of such scheme is realized, after part to be measured is positioned on workbench, workbench absorption is fixed Before part to be measured, control centre's control workbench drives part to be measured to be moved to a specified location, then control centre's control binder Device action reduces the gap between part and workbench to be measured, and then part to be measured is easy to so that part to be measured is pressed on workbench Adsorbed and fix by workbench, add the stability of part to be measured, be advantageous to subsequent detection part to be measured.
With reference in a first aspect, in the first possible implementation of first aspect, the material pressing device includes：
Fixing assembling is in the installed part of the second table top side；
With the installed part fixing assembling, by the control centre control power source component；And
By the power source Component driver and the part to be measured is pressed on so that the part to be measured is pressed in into the workbench On press part.
The full-automatic probe station of such scheme is realized, power source component is fixed on the second table top by installed part, and press part exists Part to be measured is compressed under the drive of power source component, so as to material pressing device not only Stability Analysis of Structures, it is easy to accomplish, and it is easily controllable and Maintenance.
With reference to the first possible implementation of first aspect, in second of possible implementation of first aspect In, the press part is flexible to carry out playing cushioning effect when the compression acts when the material pressing device.
The full-automatic probe station of such scheme is realized, on the premise of press part is flexible, press part compresses part to be measured When, because cushioning effect will not weigh the electronic component on part to be measured wounded；Flexible press part connects with part to be measured simultaneously It can adaptively be adjusted when touching not in place, further be advantageous to subsequent detection part to be measured.
With reference to second of possible implementation of first aspect, in the third possible implementation of first aspect In, the press part includes：
Fixing assembling is in the terminal pad of the power source component；
For abutting the platen of the part to be measured；And
Some elastic components located between the terminal pad and the platen.
The full-automatic probe station of such scheme is realized, terminal pad conveniently makes press part be fixedly installed in power source component, bullet Property part ensures that press part is flexible, and then press part fitted and removed easily, and simple in construction, stably.
With reference to the third possible implementation of first aspect, in the 4th kind of possible implementation of first aspect In, the elastic component is spring, and the press part also includes：One end and the terminal pad fixing assembling, be arranged in the bullet The guide pillar of buffer gap is left between in the property part, other end and the platen.
During realizing that the full-automatic probe station of such scheme, press part compress part to be measured, guide pillar has to elastic component Certain guide effect, and then press part structure in buffering is more preferably stable, is advantageous to compress part to be measured.
With reference to the third possible implementation of first aspect, in the 5th kind of possible implementation of first aspect In, the terminal pad and the platen are in rounded shape, the quantity of the elastic component for four groups and with the terminal pad, the pressure Disk coaxial line is evenly arranged.
Realize the full-automatic probe station of such scheme, the center of gravity that the arrangement of elastic component is more preferably uniformly advantageous to press part is close Axis, part to be measured is compressed so as to be advantageous to press part.
With reference to the first possible implementation of first aspect, in the 6th kind of possible implementation of first aspect In, the power source component is the cylinder being vertically arranged, and the press part fixing assembling is in the expansion link of the cylinder.
The full-automatic probe station of such scheme is realized, cylinder drives expansion link to do flexible reciprocating motion, and then expansion link band Dynamic press part moves up and down is adsorbed press part retraction after fixing, and structure peace with realization compression part to be measured and part to be measured Dress, convenient disassembly, low manufacture cost.
With reference to the first possible implementation of first aspect, in the 7th kind of possible implementation of first aspect In, the power source component includes：
With the installed part fixing assembling, the riser that is vertically arranged；
Two located at the side surface of riser one, vertical spaced and parallel arrangement, assemble for the press part slidingtype Guide rail；
Located at the riser it is the surface, between two guide rails, be vertically arranged and along its vertical axis The screw mandrel that line rotates freely；
Screw assembly is in the sliding sleeve of the screw mandrel；And
The motor of the screw mandrel rotation is driven located at described screw mandrel one end,
The press part fixing assembling is in the sliding sleeve.
Realize the full-automatic probe station of such scheme, motor work drives screw mandrel to rotate, and then drives sliding sleeve relative to leading Rail elevating movement, it is this to realize that press part compresses part to be measured on the table so as to drive press part along lifting rail Structure is more stable, is advantageous to compress part to be measured.
In summary, the utility model embodiment has the advantages that：
First, material pressing device is acted so that part to be measured is pressed on workbench, between reducing between part and workbench to be measured Gap, and then part to be measured is easy to adsorb fixation by workbench, adds the stability of part to be measured, is advantageous to subsequent detection part to be measured；
Second, Stability Analysis of Structures, material pressing device is easily controllable, makes, maintenance.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model embodiment one；
Fig. 2 is the structural representation of material pressing device in the utility model embodiment one；
Fig. 3 is the enlarged drawing at A in Fig. 2；
Fig. 4 is the structural representation of material pressing device in the utility model embodiment two.
Reference：1st, frame；11st, the first table top；12nd, the second table top；2nd, workbench；3rd, material pressing device；31st, install Part；32nd, power source component；321st, riser；322nd, guide rail；323rd, screw mandrel；324th, sliding sleeve；325th, motor；33rd, press part；331、 Terminal pad；332nd, platen；333rd, elastic component；334th, guide pillar.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made The every other embodiment obtained, belong to the scope of the utility model protection.
Embodiment one：A kind of full-automatic probe station with material pressing device, as shown in figure 1, including：Frame 1, workbench 2, Material pressing device 3 and control centre（Control centre discloses not in the drawings in the present embodiment）.
Frame 1 includes：First table top 11, with 11 spaced apart second table top 12 of the first table top and being supported in First Support member between the table top 12 of face 11 and second.
Workbench 2 is movable be assemblied in the first table top 11 with realize workbench 2 can relative to the first table top 11 laterally and/it is vertical To movement, workbench 2 is between the first table top 11 and the second table top 12 and is used to place part to be measured and drives part to be measured to move, The upper surface of workbench 2 offers negative pressure hole（Because visual angle relation is not shown in figures）, it is communicated with workbench 2 in negative The passage of hole and a negative pressure system is pressed, part to be measured absorption can be fixed on by workbench by negative pressure so as to open negative pressure system On 2.
Material pressing device 3 is installed on the second table top 12, when the workbench 2 for being placed with part to be measured is moved to material pressing device 3 During lower section, part to be measured is pressed on workbench 2 by material pressing device 3.
Control centre controls workbench 2 to move action successively, material pressing device 3 carries out compression action and workbench 2 enters Row absorption acts.
As shown in Fig. 2 material pressing device 3 includes：Installed part 31, power source component 32 and press part 33.Installed part 31 is fixed It is assemblied in the side of the second table top 12 and specially L-shaped metallic plate, power source component 32 and the fixing assembling of installed part 31 Controlled center control, press part 33 are driven by power source component 32 and press on part to be measured so that part to be measured is pressed in into workbench On 2, so as to the not only Stability Analysis of Structures of material pressing device 3, it is easy to accomplish, and easily controllable and maintenance.
Power source component 32 is the cylinder being vertically arranged, and the fixing assembling of press part 33 is in the expansion link of cylinder.
Press part 33 is flexible to play cushioning effect when material pressing device 3 carries out compression action, has in press part 33 Under the premise of flexible, when press part 33 compresses part to be measured, because cushioning effect will not be by the electronic component pressure on part to be measured Wound；It can adaptively be adjusted when flexible press part 33 and part to be measured do not reach simultaneously, be further advantageous to subsequently examine Survey part to be measured.
Press part 33 includes：Fixing assembling is in the terminal pad 331 of power source component 32；For abutting the platen of part to be measured 332；And some elastic components 333 located between terminal pad 331 and platen 332.Terminal pad 331 conveniently makes press part 33 solid Dingan County is loaded on power source component 32, and elastic component 333 ensures that press part 33 is flexible, and then press part 33 is easily installed and torn open Unload, and it is simple in construction, stably.Press part 33 can directly be flexible block rubber in other embodiments.
Terminal pad 331 and platen 332 are in rounded shape, the quantity of elastic component 333 for four groups and with terminal pad 331, platen 332 coaxial lines are evenly arranged, and the arrangement of elastic component 333 is more preferably uniformly advantageous to the center of gravity of press part 33 close to axis, so as to have Part to be measured is compressed beneficial to press part 33.
With reference to shown in Fig. 2 and Fig. 3, elastic component 333 is spring, in other embodiments elastic component 333 can also be shell fragment, Bullet block etc..
Press part 33 also includes：One end and the fixing assembling of terminal pad 331, be arranged in the elastic component 333, other end with The guide pillar 334 of buffer gap is left between platen 332, during press part 33 compresses part to be measured, guide pillar 334 is to elastic component 333 have certain guide effect, and then the structure in buffering of press part 33 is more preferably stable, is advantageous to compress part to be measured.
The course of work and principle：After part to be measured is positioned on workbench 2, before the fixed part to be measured of the absorption of workbench 2, Control centre's control workbench 2 drives part to be measured to be moved to a specified location, and then control centre's control material pressing device 3 acts, Cylinder drives expansion link to do flexible reciprocating motion, and then expansion link drives press part 33 to move up and down to realize compression part to be measured And part to be measured is adsorbed press part 33 after fixing and bounced back so that part to be measured is pressed on workbench 2, reduces part and workbench 2 to be measured Between gap, and then part to be measured is easy to adsorb fixation by workbench 2, adds the stability of part to be measured, is advantageous to subsequently examine Survey part to be measured.
Embodiment two：A kind of full-automatic probe station with material pressing device, as shown in figure 4, it is different from embodiment one it It is in power source component 32 includes：With the fixing assembling of installed part 31, the riser 321 that is vertically arranged；Two are located at riser 321 1 side surfaces, vertical spaced and parallel arrangements, guide rail 322 for the assembling of the slidingtype of press part 33；Located at riser 321 Screw mandrel 323 surface, between two guide rails 322, being vertically arranged and rotated freely along its vertical axis；Screw assembly In the sliding sleeve 324 of screw mandrel 323；And the motor 325 of the rotation of screw mandrel 323 is driven located at the one end of screw mandrel 323, press part 33 is fixed It is assemblied in sliding sleeve 324.
The course of work and principle：With reference to shown in Fig. 1 and Fig. 4, after part to be measured is positioned on workbench 2, workbench 2 is inhaled Before attached fixation part to be measured, control centre's control workbench 2 drives part to be measured to be moved to a specified location, and then control centre is controlled Material pressing device 3 processed acts, and the work of motor 325 drives screw mandrel 323 to rotate, and then drives sliding sleeve 324 to be lifted relative to guide rail 322 and transports It is dynamic, so as to drive press part 33 to be lifted along guide rail 322 so that part to be measured is pressed on workbench 2, reduce part to be measured and work Gap between platform 2, and then part to be measured is easy to adsorb fixation by workbench 2, adds the stability of part to be measured, is advantageous to follow-up Detect part to be measured.
Embodiments described above, the restriction to the technical scheme protection domain is not formed.It is any in above-mentioned implementation Modifications, equivalent substitutions and improvements made within the spirit and principle of mode etc., should be included in the protection model of the technical scheme Within enclosing.

Claims (8)

  1. A kind of 1. full-automatic probe station with material pressing device, it is characterised in that including：
    Frame (1), the frame (1) include：First table top (11) and with first table top (11) spaced apart second Table top (12)；
    It is movable be assemblied in first table top (11), between first table top (11) and second table top (12) , for place part to be measured and drive the part to be measured movement, so that the part to be measured is adsorbed into fixed workbench (2)；
    Be arranged at it is on second table top (12), when the workbench (2) for being placed with the part to be measured be moved to one specify The material pressing device (3) being pressed in the part to be measured during position on the workbench (2)；And
    The workbench (2) is controlled to carry out the shift action, the material pressing device (3) the progress compression action and institute successively State the control centre that workbench (2) carries out the absorption action.
  2. 2. full-automatic probe station according to claim 1, it is characterised in that the material pressing device (3) includes：
    Fixing assembling is in the installed part (31) of the second table top (12) side；
    With the installed part (31) fixing assembling, by the control centre control power source component (32)；And
    Driven by the power source component (32) and press on the part to be measured so that the part to be measured is pressed in into the workbench (2) press part (33) on.
  3. 3. full-automatic probe station according to claim 2, it is characterised in that the press part (33) is flexible to work as Material pressing device (3) is stated to carry out playing cushioning effect during the compression action.
  4. 4. full-automatic probe station according to claim 3, it is characterised in that the press part (33) includes：
    Fixing assembling is in the terminal pad (331) of the power source component (32)；
    For abutting the platen (332) of the part to be measured；And
    Some elastic components (333) located between the terminal pad (331) and the platen (332).
  5. 5. full-automatic probe station according to claim 4, it is characterised in that the elastic component (333) is spring, described to support Casting die (33) also includes：One end and the terminal pad (331) fixing assembling, be arranged in it is in the elastic component (333), another The guide pillar (334) of buffer gap is left between end and the platen (332).
  6. 6. full-automatic probe station according to claim 4, it is characterised in that the terminal pad (331) and the platen (332) it is in rounded shape, the quantity of the elastic component (333) for four groups and with the terminal pad (331), the platen (332) Coaxial line is evenly arranged.
  7. 7. full-automatic probe station according to claim 2, it is characterised in that the power source component (32) is to be vertically arranged Cylinder, press part (33) fixing assembling is in the expansion link of the cylinder.
  8. 8. full-automatic probe station according to claim 2, it is characterised in that the power source component (32) includes：
    With the installed part (31) fixing assembling, the riser (321) that is vertically arranged；
    Two located at the side surface of riser (321) one, vertical spaced and parallel arrangement, for the press part (33) slidingtype The guide rail (322) of assembling；
    Located at the riser (321) it is the surface, between two guide rails (322), be vertically arranged and along its The screw mandrel (323) that vertical axis rotates freely；
    Screw assembly is in the sliding sleeve (324) of the screw mandrel (323)；And
    The motor (325) of the screw mandrel (323) rotation is driven located at the screw mandrel (323) one end,
    Press part (33) fixing assembling is in the sliding sleeve (324).
CN201721172954.6U 2017-09-13 2017-09-13 Full-automatic probe station with material pressing device Active CN207181460U (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201721172954.6U CN207181460U (en) 2017-09-13 2017-09-13 Full-automatic probe station with material pressing device
TW107212352U TWM574687U (en) 2017-09-13 2018-09-10 Fully automatic probe station with pressing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721172954.6U CN207181460U (en) 2017-09-13 2017-09-13 Full-automatic probe station with material pressing device

Publications (1)

Publication Number Publication Date
CN207181460U true CN207181460U (en) 2018-04-03

Family

ID=61747240

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721172954.6U Active CN207181460U (en) 2017-09-13 2017-09-13 Full-automatic probe station with material pressing device

Country Status (2)

Country Link
CN (1) CN207181460U (en)
TW (1) TWM574687U (en)

Also Published As

Publication number Publication date
TWM574687U (en) 2019-02-21

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Address after: Longgang District of Shenzhen City, Guangdong province 518172 city street in the center city City Industrial Park Road No. 3 building E Tefalongfei business building two floor

Patentee after: Silicon electric semiconductor equipment (Shenzhen) Co., Ltd

Address before: Longgang District of Shenzhen City, Guangdong province 518172 city street in the center city City Industrial Park Road No. 3 building E Tefalongfei business building two floor

Patentee before: SHENZHEN SIDEA SEMICONDUCTOR EQUIPMENT Co.,Ltd.