CN206925878U - A kind of crystalline silicon rod carries transplant robot - Google Patents
A kind of crystalline silicon rod carries transplant robot Download PDFInfo
- Publication number
- CN206925878U CN206925878U CN201720595857.1U CN201720595857U CN206925878U CN 206925878 U CN206925878 U CN 206925878U CN 201720595857 U CN201720595857 U CN 201720595857U CN 206925878 U CN206925878 U CN 206925878U
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- axis track
- track
- fixture
- axis
- crystalline silicon
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- 229910021419 crystalline silicon Inorganic materials 0.000 title claims abstract description 30
- 239000000463 material Substances 0.000 claims abstract description 31
- 241000209094 Oryza Species 0.000 claims description 6
- 235000007164 Oryza sativa Nutrition 0.000 claims description 6
- 235000009566 rice Nutrition 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000011068 load Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract description 2
- 230000014759 maintenance of location Effects 0.000 abstract description 2
- 230000011218 segmentation Effects 0.000 abstract description 2
- 238000000605 extraction Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000000875 corresponding Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003638 reducing agent Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000005712 crystallization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001340 slower Effects 0.000 description 1
Abstract
Haulage equipment is the utility model is related to, particularly a kind of crystalline silicon rod carries transplant robot.Including being erected at aerial three-dimensional track and the fixture of orbiting by column, the X-axis track of the three-dimensional track including horizontal direction, vertical be erected on X-axis track can be along the Z axis tracks of Y-axis track level run along the Y-axis track and vertical be erected on Y-axis track of X-axis track level run, the fixture is arranged on Z axis track, can lift operation along Z axis track and flange splint takes, puts glove material.The technical solution of the utility model has the advantages that large span, heavy load, is adapted to the translation of long range, heavy material to carry；Rack pinion mode splices that close, handling process is steady, and operation is smooth；Hydraulic jack controls fixture folding, and grip is strong, retention time length after fixture gripping material；Modularized design, segmentation installation, Customization Module can be carried out according to different operating demand, be allowed to be more suitable for onsite moving needs.
Description
Technical field
Haulage equipment is the utility model is related to, particularly a kind of crystalline silicon rod carries transplant robot.
Background technology
Increasing production and processing factory, logistics warehouse are related to material carrying at present.Come for semiconductor manufactures
Say, crystallized because monocrystalline silicon grows along vertical direction, need crystalline silicon rod carrying out carrying transplanting after crystallization, due to crystal silicon
The ratio of rod is great, and fragility is strong, and single silicon rod weight is all more than 100 kilograms, the not only labor during silicon rod takes out and carries
Fatigue resistance is big, and risk is big, and operation slightly imprudence is just easily caused silicon rod and falls down fracture, it is necessary to be set by means of automation
It is standby that carrying transplanting is carried out to crystalline silicon rod.
Utility model content
For above demand, crystalline silicon rod of the present utility model carries transplant robot, the span carried for crystalline silicon rod is big,
The features such as loading weight, easy fragmentation, artificial carrying is substituted with automated handling, saves manually, improves handling efficiency.
The technical solution of the utility model is：
A kind of crystalline silicon rod carries transplant robot, including is erected at aerial three-dimensional track and along track by column
The fixture of operation, X-axis track of the three-dimensional track including horizontal direction, vertical be erected on X-axis track can be along X-axis rails
The Y-axis track of road level run and be vertically erected on Y-axis track can be along the Z axis track of Y-axis track level run, the fixture
It is arranged on Z axis track, operation can be lifted along Z axis track and flange splint takes, puts glove material.
The crystalline silicon rod, which carries transplant robot, also includes electric cabinet, motor and speed reducer, and the electric cabinet is used to receive
External command, the operation of Y-axis track and Z axis track is controlled by motor and speed reducer.
The X-axis track and Y-axis track, Y-axis track and Z axis track are driven using rack-and-pinion mode, i.e. in Y-axis
On track, Z axis track be provided with Trolley case, the Trolley case is internally provided with gear, on X-axis track with Y-axis track roll
On roller box phase-contact surface, Y-axis track guide-rail plate and rack, the gear and tooth are provided with Z axis track roller case phase-contact surface
Transmission is realized in bar intermeshing.
The fixture controls its lifting operation or folding by lift cylinder and clamping cylinder, and the lift cylinder is used to make
Fixture lifting operation, the clamping cylinder are used to make fixture folding.
The fixture also includes clamping plate, limit switch and the several wear plates being arranged on clamping plate, the clamping plate and wear-resisting
Piece is used to grip material, and the limit switch is used to sense when the center of the several wear plate compositions of material arrival, sends letter
Fixture number is set to perform gripping material action.
The X-axis track has two, and the Y-axis track has two, and the Z axis track has four, divides on every Y-axis track
She Zhi not two Z axis tracks.
The X-axis track length is 10-50 rice, and Y-axis track length is 5-15 rice, and Z axis track length is 2.5-3.4 rice.
The speed of service of the Y-axis track is 400--712mm/s, and the speed of service of Z axis track is 400--712mm/s,
The speed of service of fixture is 400--474.7mm/s.
The technical solution of the utility model has advantages below：
1st, there is large span, heavy load, be adapted to the translation of long range, heavy material to carry；
2nd, rack pinion mode splices that close, handling process is steady, and operation is smooth, reduces the sensitive materials such as crystalline silicon rod
Damage；
3rd, hydraulic jack control fixture folding, grip is strong, retention time length after fixture gripping material, the holding torque time
Up to 1 hour；
4th, modularized design, segmentation installation, Customization Module can be carried out according to different operating demand, changes length, width and height chi
It is very little, it is allowed to be more suitable for onsite moving needs.
Brief description of the drawings
Fig. 1 is that the utility model crystalline silicon rod carries transplant robot overall structure figure；
Fig. 2 is the utility model X-axis track structure figure；
Fig. 3 is structure chart of the utility model Y-axis track frame on X-axis track；
Fig. 4 is structure chart of the utility model Z axis track frame on Y-axis track；
Fig. 5 is the utility model clamp structure figure；
Fig. 6 is that the utility model crystalline silicon rod carries the schematic diagram that transplant robot slings crystalline silicon rod.
Embodiment
Design, concrete structure and caused technique effect of the present utility model are made furtherly below with reference to accompanying drawing
It is bright, to be fully understood from the purpose of this utility model, feature and effect.
Fig. 1-Fig. 6 is embodiment of the present utility model.
With reference to figure 1, crystalline silicon rod of the present utility model carries transplant robot, including is set up in the air by 12 root posts 11
Three-dimensional track and orbiting fixture 31, the three-dimensional track includes two X-axis tracks of horizontal direction
10, X1, X2, vertically across frame in two Y-axis tracks 20 on X1, X2, Y1, Y2, and four be erected on Y1, Y2 are respectively perpendicular
Z axis track 30, Z1, Z2, Z3, Z4, the every lower section of Z axis track 30 are provided with fixture 31, and operation can be lifted along Z axis track 30 and is opened
Co-clip takes, puts glove material.In order that fixture 31 can slide glibly along Z axis track 30, there is a set of lube system on each Z axis
System.
Crystalline silicon rod, which carries transplant robot, also includes two electric cabinets 40, electric cabinet A and electric cabinet B, electric supplemented by electric cabinet A
Case is controlled, it is main electric cabinet to control Y1 and corresponding Z1, Z2, electric cabinet B, controls Y2 and corresponding Z3, Z4, every Y-axis track, Z
Motor 41 and reductor 42 are provided with axle track, the electric cabinet 40 is used to receive external command, by motor 41 and slows down
Machine 42 controls the operation of Y-axis track 20 and Z axis track 30.Such as Fig. 6, carry transplant robot when crystalline silicon rod of the present utility model and hang
When playing longer crystalline silicon rod or other materials, two sleeve clamps 31 on Y-axis track 20 capture simultaneously；When slinging shorter crystalline silicon rod
Or during other materials, single clamp 31 captures.
The X-axis track 10, Y-axis track 20, Z axis track 30 are driven using rack-and-pinion mode, with reference to figure 2, Fig. 3 and
Fig. 4, on Y-axis track 20, Trolley case 50 is provided with Z axis track 20, the Trolley case 50 is internally provided with gear, in X-axis rail
On road 10 with the phase-contact surface of 20 Trolley case of Y-axis track 50, Y-axis track 20 with the phase-contact surface of 30 Trolley case of Z axis track 50
Provided with guide-rail plate 52 and rack 53, transmission is realized in the intermeshing of wheel and rack 53.
With reference to figure 5, the fixture 31 controls its lifting operation or folding, institute by lift cylinder 431 and clamping cylinder 432
State lift cylinder 431 to be used to make the lifting operation of fixture 31, the clamping cylinder 432 is used to make the folding of fixture 31.The fixture 31
Also include clamping plate 311, limit switch 313 and four wear plates 312 being arranged on clamping plate 311, the clamping plate 311 and wear plate
312 are used to grip material, and the limit switch 313 is used to sense the center formed when material four wear plates 312 of arrival,
Sending signal makes fixture 31 perform gripping material action.
It is as follows that crystalline silicon rod of the present utility model carries transplant robot items design parameter：
Crystalline silicon rod of the present utility model carries the method for carrying of transplant robot, comprises the following steps：
Step 1：Extraction point and position of the set-point on three-dimensional of material are inputted in electric cabinet 40；
Step 2：Electric cabinet 40 sends Y-axis run signal, and the motor 41 on Y-axis track 20 drives Y-axis track 20 along X-axis rail
Road 10 is run, in place after, reducing motor 42 drive Y-axis track 20 it is out of service；Now, fixture 31 is located in material extraction tiltedly
Side；
Step 3：Electric cabinet 40 sends Z axis run signal, and the motor 41 on Z axis track 30 drives Z axis track 30 along Y-axis rail
Road 20 is run, in place after, reducing motor 42 drive Z axis track 30 it is out of service；Now, fixture 31 is being located at material extraction point just
Top；
Step 4：Electric cabinet 40 sends the downstream signal of fixture 31, and the lift cylinder 431 on fixture 31 drives fixture to 31 along Z axis
Track 30 is run downwards；
Step 5：When fixture 31 drops to material positioned at the center that four wear plates 312 form, triggering limit switch
313 send material folding signal, and clamping cylinder 432 acts, and drive both sides clamping plate 311 to clamp extraction material；
Step 6：Electric cabinet 40 sends the upward signal of fixture 31, and the lift cylinder 431 on fixture 31 drives fixture to 31 along Z axis
Track 30 runs up specified altitude assignment and stopped, and the specified altitude assignment is higher than set-point height；
Step 7：Electric cabinet 40 sends the run signal of Z axis track 30, and the motor 41 on Z axis track 30 drives Z axis track 30
Run along Y-axis track 20, in place after, reducing motor 42 drive Z axis track 30 it is out of service；Now, it is oblique to be located at set-point for material
Top；
Step 8：Electric cabinet 40 sends the run signal of Y-axis track 20, and the motor 41 on Y-axis track 20 drives Y-axis track 20
Run along X-axis track 10, in place after, reducing motor 42 drive Y-axis track 20 it is out of service；Now, material is being located at set-point just
Top；
Step 9：Electric cabinet 40 sends the downstream signal of fixture 31, and the lift cylinder 431 on fixture 31 drives fixture to 31 along Z axis
Track 30 runs down to material set-point and highly stopped；
Step 10：Electric cabinet 40 sends blowing signal, and clamping cylinder 432 acts, and drives both sides clamping plate 311 to unclamp and places thing
Material.
Step 11：Electric cabinet 40 sends return signal, and fixture 31 rises to initial position height, Z axis track 30, Y-axis rail
Road 20 returns to initial position successively.
Disclosed above is only embodiment of the present utility model, and still, the utility model is not limited to this, any ability
What the technical staff in domain can think change should all fall into the scope of protection of the utility model.
Claims (8)
1. a kind of crystalline silicon rod carries transplant robot, it is characterised in that including setting up skyborne three-dimensional side by column (11)
To track and the fixture of orbiting (31), the three-dimensional track includes X-axis track (10), the vertical rack of horizontal direction
Be located on X-axis track (10) can along X-axis track (10) level run Y-axis track (20) and be vertically erected at Y-axis track (20)
On can be arranged on along the Z axis track (30) of Y-axis track (20) level run, the fixture (31) on Z axis track (30), can be along Z
Axle track (30) lifting operation and flange splint take, put glove material.
2. crystalline silicon rod according to claim 1 carries transplant robot, it is characterised in that the crystalline silicon rod carries transplanter
Device people also includes electric cabinet (40), motor (41) and reductor (42), and the electric cabinet (40) is used to receive external command, passed through
The operation of motor (41) and reductor (42) control Y-axis track (20) and Z axis track (30).
3. crystalline silicon rod according to claim 2 carries transplant robot, it is characterised in that the X-axis track (10) and Y-axis
Track (20), Y-axis track (20) and Z axis track (30) are driven using rack-and-pinion mode, i.e. on Y-axis track (20), Z
Axle track (20) is provided with Trolley case (50), and the Trolley case (50) is internally provided with gear, on X-axis track (10) and Y
Being set with Z axis track (30) Trolley case (50) phase-contact surface on axle track (20) Trolley case (50) phase-contact surface, Y-axis track (20)
There are guide-rail plate (52) and rack (53), transmission is realized in wheel and rack (53) intermeshing.
4. crystalline silicon rod according to claim 2 carries transplant robot, it is characterised in that the fixture (31) passes through lifting
Cylinder (431) and clamping cylinder (432) control its lifting operation or folding, and the lift cylinder (431) is used to make fixture (31)
Lifting operation, the clamping cylinder (432) are used to make fixture (31) folding.
5. crystalline silicon rod according to claim 4 carries transplant robot, it is characterised in that the fixture (31) also includes folder
Plate (311), limit switch (313) and the several wear plates (312) being arranged on clamping plate (311), the clamping plate (311) and wear-resisting
Piece (312) is used to grip material, and the limit switch (313) is used to sense when material reaches several wear plate (312) compositions
Center, sending signal makes fixture (31) perform gripping material action.
6. crystalline silicon rod according to claim 1 carries transplant robot, it is characterised in that the X-axis track (10) has two
Root, the Y-axis track (20) have two, and the Z axis track (30) has four, and two Z are set respectively on every Y-axis track (20)
Axle track (30).
7. crystalline silicon rod according to claim 6 carries transplant robot, it is characterised in that X-axis track (10) length
For 10-50 rice, Y-axis track (20) length is 5-15 rice, and Z axis track (30) length is 2.5-3.4 rice.
8. crystalline silicon rod according to claim 6 carries transplant robot, it is characterised in that the fortune of the Y-axis track (20)
Scanning frequency degree is 400--712mm/s, and the speed of service of Z axis track (30) is 400--712mm/s, and the speed of service of fixture (31) is
400--474.7mm/s。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720595857.1U CN206925878U (en) | 2017-05-25 | 2017-05-25 | A kind of crystalline silicon rod carries transplant robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720595857.1U CN206925878U (en) | 2017-05-25 | 2017-05-25 | A kind of crystalline silicon rod carries transplant robot |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206925878U true CN206925878U (en) | 2018-01-26 |
Family
ID=61351963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720595857.1U Active CN206925878U (en) | 2017-05-25 | 2017-05-25 | A kind of crystalline silicon rod carries transplant robot |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206925878U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107214724A (en) * | 2017-05-25 | 2017-09-29 | 上海博信机器人科技有限公司 | A kind of crystalline silicon rod carries transplant robot and method for carrying |
| CN108381545A (en) * | 2018-05-04 | 2018-08-10 | 福建省盛荣生态花卉研究院有限责任公司 | A kind of high-end transfer robot |
-
2017
- 2017-05-25 CN CN201720595857.1U patent/CN206925878U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107214724A (en) * | 2017-05-25 | 2017-09-29 | 上海博信机器人科技有限公司 | A kind of crystalline silicon rod carries transplant robot and method for carrying |
| CN108381545A (en) * | 2018-05-04 | 2018-08-10 | 福建省盛荣生态花卉研究院有限责任公司 | A kind of high-end transfer robot |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |