CN206925878U - A kind of crystalline silicon rod carries transplant robot - Google Patents

A kind of crystalline silicon rod carries transplant robot Download PDF

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Publication number
CN206925878U
CN206925878U CN201720595857.1U CN201720595857U CN206925878U CN 206925878 U CN206925878 U CN 206925878U CN 201720595857 U CN201720595857 U CN 201720595857U CN 206925878 U CN206925878 U CN 206925878U
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axis track
track
fixture
axis
crystalline silicon
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CN201720595857.1U
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Chinese (zh)
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吴跃新
周俊强
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SHANGHAI BOSIN ROBOTIC TECHNOLOGY Co Ltd
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SHANGHAI BOSIN ROBOTIC TECHNOLOGY Co Ltd
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Abstract

Haulage equipment is the utility model is related to, particularly a kind of crystalline silicon rod carries transplant robot.Including being erected at aerial three-dimensional track and the fixture of orbiting by column, the X-axis track of the three-dimensional track including horizontal direction, vertical be erected on X-axis track can be along the Z axis tracks of Y-axis track level run along the Y-axis track and vertical be erected on Y-axis track of X-axis track level run, the fixture is arranged on Z axis track, can lift operation along Z axis track and flange splint takes, puts glove material.The technical solution of the utility model has the advantages that large span, heavy load, is adapted to the translation of long range, heavy material to carry;Rack pinion mode splices that close, handling process is steady, and operation is smooth;Hydraulic jack controls fixture folding, and grip is strong, retention time length after fixture gripping material;Modularized design, segmentation installation, Customization Module can be carried out according to different operating demand, be allowed to be more suitable for onsite moving needs.

Description

A kind of crystalline silicon rod carries transplant robot
Technical field
Haulage equipment is the utility model is related to, particularly a kind of crystalline silicon rod carries transplant robot.
Background technology
Increasing production and processing factory, logistics warehouse are related to material carrying at present.Come for semiconductor manufactures Say, crystallized because monocrystalline silicon grows along vertical direction, need crystalline silicon rod carrying out carrying transplanting after crystallization, due to crystal silicon The ratio of rod is great, and fragility is strong, and single silicon rod weight is all more than 100 kilograms, the not only labor during silicon rod takes out and carries Fatigue resistance is big, and risk is big, and operation slightly imprudence is just easily caused silicon rod and falls down fracture, it is necessary to be set by means of automation It is standby that carrying transplanting is carried out to crystalline silicon rod.
Utility model content
For above demand, crystalline silicon rod of the present utility model carries transplant robot, the span carried for crystalline silicon rod is big, The features such as loading weight, easy fragmentation, artificial carrying is substituted with automated handling, saves manually, improves handling efficiency.
The technical solution of the utility model is:
A kind of crystalline silicon rod carries transplant robot, including is erected at aerial three-dimensional track and along track by column The fixture of operation, X-axis track of the three-dimensional track including horizontal direction, vertical be erected on X-axis track can be along X-axis rails The Y-axis track of road level run and be vertically erected on Y-axis track can be along the Z axis track of Y-axis track level run, the fixture It is arranged on Z axis track, operation can be lifted along Z axis track and flange splint takes, puts glove material.
The crystalline silicon rod, which carries transplant robot, also includes electric cabinet, motor and speed reducer, and the electric cabinet is used to receive External command, the operation of Y-axis track and Z axis track is controlled by motor and speed reducer.
The X-axis track and Y-axis track, Y-axis track and Z axis track are driven using rack-and-pinion mode, i.e. in Y-axis On track, Z axis track be provided with Trolley case, the Trolley case is internally provided with gear, on X-axis track with Y-axis track roll On roller box phase-contact surface, Y-axis track guide-rail plate and rack, the gear and tooth are provided with Z axis track roller case phase-contact surface Transmission is realized in bar intermeshing.
The fixture controls its lifting operation or folding by lift cylinder and clamping cylinder, and the lift cylinder is used to make Fixture lifting operation, the clamping cylinder are used to make fixture folding.
The fixture also includes clamping plate, limit switch and the several wear plates being arranged on clamping plate, the clamping plate and wear-resisting Piece is used to grip material, and the limit switch is used to sense when the center of the several wear plate compositions of material arrival, sends letter Fixture number is set to perform gripping material action.
The X-axis track has two, and the Y-axis track has two, and the Z axis track has four, divides on every Y-axis track She Zhi not two Z axis tracks.
The X-axis track length is 10-50 rice, and Y-axis track length is 5-15 rice, and Z axis track length is 2.5-3.4 rice.
The speed of service of the Y-axis track is 400--712mm/s, and the speed of service of Z axis track is 400--712mm/s, The speed of service of fixture is 400--474.7mm/s.
The technical solution of the utility model has advantages below:
1st, there is large span, heavy load, be adapted to the translation of long range, heavy material to carry;
2nd, rack pinion mode splices that close, handling process is steady, and operation is smooth, reduces the sensitive materials such as crystalline silicon rod Damage;
3rd, hydraulic jack control fixture folding, grip is strong, retention time length after fixture gripping material, the holding torque time Up to 1 hour;
4th, modularized design, segmentation installation, Customization Module can be carried out according to different operating demand, changes length, width and height chi It is very little, it is allowed to be more suitable for onsite moving needs.
Brief description of the drawings
Fig. 1 is that the utility model crystalline silicon rod carries transplant robot overall structure figure;
Fig. 2 is the utility model X-axis track structure figure;
Fig. 3 is structure chart of the utility model Y-axis track frame on X-axis track;
Fig. 4 is structure chart of the utility model Z axis track frame on Y-axis track;
Fig. 5 is the utility model clamp structure figure;
Fig. 6 is that the utility model crystalline silicon rod carries the schematic diagram that transplant robot slings crystalline silicon rod.
Embodiment
Design, concrete structure and caused technique effect of the present utility model are made furtherly below with reference to accompanying drawing It is bright, to be fully understood from the purpose of this utility model, feature and effect.
Fig. 1-Fig. 6 is embodiment of the present utility model.
With reference to figure 1, crystalline silicon rod of the present utility model carries transplant robot, including is set up in the air by 12 root posts 11 Three-dimensional track and orbiting fixture 31, the three-dimensional track includes two X-axis tracks of horizontal direction 10, X1, X2, vertically across frame in two Y-axis tracks 20 on X1, X2, Y1, Y2, and four be erected on Y1, Y2 are respectively perpendicular Z axis track 30, Z1, Z2, Z3, Z4, the every lower section of Z axis track 30 are provided with fixture 31, and operation can be lifted along Z axis track 30 and is opened Co-clip takes, puts glove material.In order that fixture 31 can slide glibly along Z axis track 30, there is a set of lube system on each Z axis System.
Crystalline silicon rod, which carries transplant robot, also includes two electric cabinets 40, electric cabinet A and electric cabinet B, electric supplemented by electric cabinet A Case is controlled, it is main electric cabinet to control Y1 and corresponding Z1, Z2, electric cabinet B, controls Y2 and corresponding Z3, Z4, every Y-axis track, Z Motor 41 and reductor 42 are provided with axle track, the electric cabinet 40 is used to receive external command, by motor 41 and slows down Machine 42 controls the operation of Y-axis track 20 and Z axis track 30.Such as Fig. 6, carry transplant robot when crystalline silicon rod of the present utility model and hang When playing longer crystalline silicon rod or other materials, two sleeve clamps 31 on Y-axis track 20 capture simultaneously;When slinging shorter crystalline silicon rod Or during other materials, single clamp 31 captures.
The X-axis track 10, Y-axis track 20, Z axis track 30 are driven using rack-and-pinion mode, with reference to figure 2, Fig. 3 and Fig. 4, on Y-axis track 20, Trolley case 50 is provided with Z axis track 20, the Trolley case 50 is internally provided with gear, in X-axis rail On road 10 with the phase-contact surface of 20 Trolley case of Y-axis track 50, Y-axis track 20 with the phase-contact surface of 30 Trolley case of Z axis track 50 Provided with guide-rail plate 52 and rack 53, transmission is realized in the intermeshing of wheel and rack 53.
With reference to figure 5, the fixture 31 controls its lifting operation or folding, institute by lift cylinder 431 and clamping cylinder 432 State lift cylinder 431 to be used to make the lifting operation of fixture 31, the clamping cylinder 432 is used to make the folding of fixture 31.The fixture 31 Also include clamping plate 311, limit switch 313 and four wear plates 312 being arranged on clamping plate 311, the clamping plate 311 and wear plate 312 are used to grip material, and the limit switch 313 is used to sense the center formed when material four wear plates 312 of arrival, Sending signal makes fixture 31 perform gripping material action.
It is as follows that crystalline silicon rod of the present utility model carries transplant robot items design parameter:
Crystalline silicon rod of the present utility model carries the method for carrying of transplant robot, comprises the following steps:
Step 1:Extraction point and position of the set-point on three-dimensional of material are inputted in electric cabinet 40;
Step 2:Electric cabinet 40 sends Y-axis run signal, and the motor 41 on Y-axis track 20 drives Y-axis track 20 along X-axis rail Road 10 is run, in place after, reducing motor 42 drive Y-axis track 20 it is out of service;Now, fixture 31 is located in material extraction tiltedly Side;
Step 3:Electric cabinet 40 sends Z axis run signal, and the motor 41 on Z axis track 30 drives Z axis track 30 along Y-axis rail Road 20 is run, in place after, reducing motor 42 drive Z axis track 30 it is out of service;Now, fixture 31 is being located at material extraction point just Top;
Step 4:Electric cabinet 40 sends the downstream signal of fixture 31, and the lift cylinder 431 on fixture 31 drives fixture to 31 along Z axis Track 30 is run downwards;
Step 5:When fixture 31 drops to material positioned at the center that four wear plates 312 form, triggering limit switch 313 send material folding signal, and clamping cylinder 432 acts, and drive both sides clamping plate 311 to clamp extraction material;
Step 6:Electric cabinet 40 sends the upward signal of fixture 31, and the lift cylinder 431 on fixture 31 drives fixture to 31 along Z axis Track 30 runs up specified altitude assignment and stopped, and the specified altitude assignment is higher than set-point height;
Step 7:Electric cabinet 40 sends the run signal of Z axis track 30, and the motor 41 on Z axis track 30 drives Z axis track 30 Run along Y-axis track 20, in place after, reducing motor 42 drive Z axis track 30 it is out of service;Now, it is oblique to be located at set-point for material Top;
Step 8:Electric cabinet 40 sends the run signal of Y-axis track 20, and the motor 41 on Y-axis track 20 drives Y-axis track 20 Run along X-axis track 10, in place after, reducing motor 42 drive Y-axis track 20 it is out of service;Now, material is being located at set-point just Top;
Step 9:Electric cabinet 40 sends the downstream signal of fixture 31, and the lift cylinder 431 on fixture 31 drives fixture to 31 along Z axis Track 30 runs down to material set-point and highly stopped;
Step 10:Electric cabinet 40 sends blowing signal, and clamping cylinder 432 acts, and drives both sides clamping plate 311 to unclamp and places thing Material.
Step 11:Electric cabinet 40 sends return signal, and fixture 31 rises to initial position height, Z axis track 30, Y-axis rail Road 20 returns to initial position successively.
Disclosed above is only embodiment of the present utility model, and still, the utility model is not limited to this, any ability What the technical staff in domain can think change should all fall into the scope of protection of the utility model.

Claims (8)

1. a kind of crystalline silicon rod carries transplant robot, it is characterised in that including setting up skyborne three-dimensional side by column (11) To track and the fixture of orbiting (31), the three-dimensional track includes X-axis track (10), the vertical rack of horizontal direction Be located on X-axis track (10) can along X-axis track (10) level run Y-axis track (20) and be vertically erected at Y-axis track (20) On can be arranged on along the Z axis track (30) of Y-axis track (20) level run, the fixture (31) on Z axis track (30), can be along Z Axle track (30) lifting operation and flange splint take, put glove material.
2. crystalline silicon rod according to claim 1 carries transplant robot, it is characterised in that the crystalline silicon rod carries transplanter Device people also includes electric cabinet (40), motor (41) and reductor (42), and the electric cabinet (40) is used to receive external command, passed through The operation of motor (41) and reductor (42) control Y-axis track (20) and Z axis track (30).
3. crystalline silicon rod according to claim 2 carries transplant robot, it is characterised in that the X-axis track (10) and Y-axis Track (20), Y-axis track (20) and Z axis track (30) are driven using rack-and-pinion mode, i.e. on Y-axis track (20), Z Axle track (20) is provided with Trolley case (50), and the Trolley case (50) is internally provided with gear, on X-axis track (10) and Y Being set with Z axis track (30) Trolley case (50) phase-contact surface on axle track (20) Trolley case (50) phase-contact surface, Y-axis track (20) There are guide-rail plate (52) and rack (53), transmission is realized in wheel and rack (53) intermeshing.
4. crystalline silicon rod according to claim 2 carries transplant robot, it is characterised in that the fixture (31) passes through lifting Cylinder (431) and clamping cylinder (432) control its lifting operation or folding, and the lift cylinder (431) is used to make fixture (31) Lifting operation, the clamping cylinder (432) are used to make fixture (31) folding.
5. crystalline silicon rod according to claim 4 carries transplant robot, it is characterised in that the fixture (31) also includes folder Plate (311), limit switch (313) and the several wear plates (312) being arranged on clamping plate (311), the clamping plate (311) and wear-resisting Piece (312) is used to grip material, and the limit switch (313) is used to sense when material reaches several wear plate (312) compositions Center, sending signal makes fixture (31) perform gripping material action.
6. crystalline silicon rod according to claim 1 carries transplant robot, it is characterised in that the X-axis track (10) has two Root, the Y-axis track (20) have two, and the Z axis track (30) has four, and two Z are set respectively on every Y-axis track (20) Axle track (30).
7. crystalline silicon rod according to claim 6 carries transplant robot, it is characterised in that X-axis track (10) length For 10-50 rice, Y-axis track (20) length is 5-15 rice, and Z axis track (30) length is 2.5-3.4 rice.
8. crystalline silicon rod according to claim 6 carries transplant robot, it is characterised in that the fortune of the Y-axis track (20) Scanning frequency degree is 400--712mm/s, and the speed of service of Z axis track (30) is 400--712mm/s, and the speed of service of fixture (31) is 400--474.7mm/s。
CN201720595857.1U 2017-05-25 2017-05-25 A kind of crystalline silicon rod carries transplant robot Active CN206925878U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720595857.1U CN206925878U (en) 2017-05-25 2017-05-25 A kind of crystalline silicon rod carries transplant robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720595857.1U CN206925878U (en) 2017-05-25 2017-05-25 A kind of crystalline silicon rod carries transplant robot

Publications (1)

Publication Number Publication Date
CN206925878U true CN206925878U (en) 2018-01-26

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Country Status (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107214724A (en) * 2017-05-25 2017-09-29 上海博信机器人科技有限公司 A kind of crystalline silicon rod carries transplant robot and method for carrying
CN108381545A (en) * 2018-05-04 2018-08-10 福建省盛荣生态花卉研究院有限责任公司 A kind of high-end transfer robot

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107214724A (en) * 2017-05-25 2017-09-29 上海博信机器人科技有限公司 A kind of crystalline silicon rod carries transplant robot and method for carrying
CN108381545A (en) * 2018-05-04 2018-08-10 福建省盛荣生态花卉研究院有限责任公司 A kind of high-end transfer robot

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