CN206825709U - Silicon single crystal rod electric cutting device based on diamond wire roller - Google Patents

Silicon single crystal rod electric cutting device based on diamond wire roller Download PDF

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Publication number
CN206825709U
CN206825709U CN201621136205.3U CN201621136205U CN206825709U CN 206825709 U CN206825709 U CN 206825709U CN 201621136205 U CN201621136205 U CN 201621136205U CN 206825709 U CN206825709 U CN 206825709U
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China
Prior art keywords
workbench
single crystal
silicon single
crystal rod
diamond wire
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CN201621136205.3U
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Chinese (zh)
Inventor
吴学军
张建新
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Ningxia Xu Sakura Amperex Technology Ltd
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Ningxia Xu Sakura Amperex Technology Ltd
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Priority to CN201621136205.3U priority Critical patent/CN206825709U/en
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Abstract

It the utility model is related to a kind of silicon single crystal rod electric cutting device based on diamond wire roller, including workbench, lift fixed station and cutting roll assembly, at least one groove being adapted with silicon single crystal rod shape is provided with described workbench, described lift fixed station is arranged above workbench, and it is provided with and the one-to-one hold-down bars of described groove below described lift fixed station, described cutting roll assembly includes more line of rabbet joint rollers, the diamond wire and line roller fixed mount being wound on described more line of rabbet joint rollers, described line roller fixed mount can move forward and backward relative to described workbench, using the silicon single crystal rod electric cutting device based on diamond wire roller of this kind of structure, limit switch is provided with workbench and fixed station, prevent in moving process, both bump against and cause equipment fault;The lifting of workbench and fixed station is realized using roller and being slidably matched for guide rail, it is simple in construction, using conveniently, there is wider application.

Description

Silicon single crystal rod electric cutting device based on diamond wire roller
Technical field
It the utility model is related to single silicon field, more particularly to monocrystalline silicon manufacturing technology field, in particular to one kind Silicon single crystal rod electric cutting device based on diamond wire roller.
Background technology
Silicon rod is the main production material in semiconductor and photovoltaic field.Silicon rod multi-wire cutting technology is to use at present Widest silicon rod process technology, it is different from the cutting modes such as traditional cutter piece, grinding wheel, swashs also different from more advanced Light is cut and inner circle cutting mode, and its principle is to drive the cutting sand being attached on steel wire by the steel wire of a high-speed motion Slurry, rubs to silicon rod, so as to reach cutting effect.
But the amount of feeding of the wire cutting mechanism of current monocrystalline silicon is uneven, it can often cause cutting inequality, waste paper relatively more, Injury simultaneously also to steel wire is larger, influences the physical life of steel wire, for the silicon single crystal rod of circuit-level, is even more difficult to reach To its requirement for thickness and surface smoothness.
Utility model content
The purpose of this utility model is the shortcomings that overcoming above-mentioned prior art, there is provided a kind of list based on diamond wire roller Crystalline silicon rod electric cutting device, it is existing to the abrasion of silicon single crystal rod thickness to solve silicon single crystal rod cutter device of the prior art The problem of more and efficiency is low.
To achieve these goals, the utility model has following form:The silicon single crystal rod based on diamond wire roller is electronic Shearing device, it is mainly characterized by, and described device includes workbench, lift fixed station and cutting roll assembly, described work Make to be provided with least one groove being adapted with silicon single crystal rod shape on platform, described lift fixed station is arranged at workbench Top, and be provided with and the one-to-one hold-down bars of described groove, described cutting roller below described lift fixed station Component includes more line of rabbet joint rollers, the diamond wire and line roller fixed mount that are wound on described more line of rabbet joint rollers, and described line roller is fixed Frame can move forward and backward relative to described workbench, and described line roller fixed mount is lift fixed mount.
It is preferred that described workbench is lifting type workbench.
More preferably, described device also includes frame, and movable workbench guide rail and lift are provided with described frame Fixed station moving guide rail, described workbench one end are arranged at by the first roll wheel assembly in described movable workbench guide rail, Described lift fixed station one end is arranged at by the second roll wheel assembly in described lift fixed station moving guide rail.
Further, the first described roll wheel assembly is connected with the first motor, and the second described roll wheel assembly connects It is connected to the second motor.
Yet further, the upper end of described workbench is provided with upper limit position switch, under described lift fixed station End is provided with lower position switch, and described upper limit position switch is connected with the first motor, described lower position switch and institute The second motor stated is connected.
It is preferred that described diamond wire includes metal wire, the outer surface of described metal wire is enclosed with resin bed, described Diamond particles are fixed with resin bed.
It is preferred that the surface of the groove on described workbench is provided with foam-rubber cushion.
It is preferred that the lower surface of described hold-down bars is provided with rubber blanket.
The silicon single crystal rod electric cutting device based on diamond wire roller in the utility model is employed, is had following beneficial to effect Fruit:(1)Solve that existing silicon single crystal rod cutter device is existing to wear that more and efficiency is low to ask to silicon single crystal rod thickness Topic.Silicon single crystal rod shearing device of the present utility model utilizes diamond wire and more line of rabbet joint rollers by the grinding in silicon single crystal rod production process Processing is changed to machining, not only substantially increases production efficiency, reduces the thickness damage of silicon single crystal rod, and also improves The surface smoothness of silicon single crystal rod;(2)Limit switch is provided with workbench and fixed station, is prevented in moving process, Both bump against and cause equipment fault;The lifting of workbench and fixed station, structure are realized using roller and being slidably matched for guide rail Simply, using conveniently, there is wider application.
Brief description of the drawings
Fig. 1 is the structural representation of the silicon single crystal rod electric cutting device of the present utility model based on diamond wire roller.
Reference:1 lift fixed station, 2 workbench, 3 cutting roll assemblies, 4 frames.
Embodiment
In order to more clearly describe technology contents of the present utility model, enter traveling one with reference to specific embodiment The description of step.
The utility model provides a kind of silicon single crystal rod electric cutting device based on diamond wire roller, and described device includes Workbench 2, lift fixed station 1 and cutting roll assembly 3, it is provided with described workbench 2 at least one with monocrystalline silicon rod The adaptable groove of shape, described lift fixed station 1 are arranged at the top of workbench 2, and the described lower section of lift fixed station 1 Be provided with the one-to-one hold-down bars of described groove, described cutting roll assembly 3 include more line of rabbet joint rollers, be wound in it is described Diamond wire and line roller fixed mount on more line of rabbet joint rollers, described line roller fixed mount can move relative to described workbench 2 is front and rear Dynamic, described line roller fixed mount is lift fixed mount.
In a kind of preferably embodiment, described workbench 2 is lifting type workbench 2.
In a kind of more preferably embodiment, described device also includes frame 4, and work is provided with described frame 4 The moving guide rail of platform 2 and the moving guide rail of lift fixed station 1, described one end of workbench 2 are arranged at institute by the first roll wheel assembly In the moving guide rail of workbench 2 stated, described one end of lift fixed station 1 is arranged at described lifting by the second roll wheel assembly In the moving guide rail of formula fixed station 1.
In a kind of further embodiment, the first described roll wheel assembly is connected with the first motor, described The second roll wheel assembly be connected with the second motor.
In a kind of further embodiment, the upper end of described workbench 2 is provided with upper limit position switch, described The lower end of lift fixed station 1 is provided with lower position switch, and described upper limit position switch is connected with the first motor, described Lower position switch be connected with the second described motor.
In the course of the work, workbench 2 is lifted to operating position first, placed in corresponding groove silicon rod it Afterwards, the height of lift fixed station 1 is adjusted, hold-down bars is contacted with silicon rod, the position to fixed silicon rod does not shift, so Silicon rod cutting is carried out using cutting roll assembly 3 afterwards, line roller fixed mount is moved to operating position first, then passes through the liter of line roller Drop movement is cut to silicon rod.When not in use, workbench 2 is reduced to extreme lower position, lift fixed station 1 is increased to Extreme higher position, line roller fixed mount are moved to apart from the highest distance position of workbench 2.
In a kind of preferably embodiment, described diamond wire includes metal wire, the appearance bread of described metal wire Resin bed is wrapped with, diamond particles are fixed with described resin bed.
Diamond wire is set around on more line of rabbet joint rollers and forms a plurality of scroll saw by silicon single crystal rod cutting equipment of the present utility model, uses When, by the high-speed rotation of more line of rabbet joint rollers, diamond wire is driven in silicon rod surface high-speed motion to carry out the cutting of silicon single crystal rod.By It is integrally fixed in diamond particles in the resin bed of steel wire outer surface or Direct Electroplating is to steel wire surface, its movement velocity and steel The speed of line 11 is consistent, and therefore, its cutting power is substantially improved compared to traditional free be cut with.Simultaneously as diamond particles High rigidity, avoid influence of the harmful metal ion impurity to silicon rod surface, improve the semiconducting behavior of silicon single crystal rod, and The distribution of diamond particles and grain type ratio are more uniform, and the damaging layer on silicon single crystal rod surface can substantially reduce, therefore can improve Cutting accuracy, cleaning difficulty is reduced, and then improve production efficiency, reduce production cost and Environmental costs.
In a kind of preferably embodiment, the surface of the groove on described workbench 2 is provided with foam-rubber cushion.
In a kind of preferably embodiment, the lower surface of described hold-down bars is provided with rubber blanket.
In the technical scheme of silicon single crystal rod electric cutting device of the present utility model based on diamond wire roller, wherein included Each function device and modular device can correspond to actual particular hardware circuit structure, therefore these modules and unit Merely with hardware circuit it is achieved that need not aid in that with specific control software corresponding work(can be realized automatically Energy.
The silicon single crystal rod electric cutting device based on diamond wire roller in the utility model is employed, is had following beneficial to effect Fruit:(1)Solve that existing silicon single crystal rod cutter device is existing to wear that more and efficiency is low to ask to silicon single crystal rod thickness Topic.Silicon single crystal rod shearing device of the present utility model utilizes diamond wire and more line of rabbet joint rollers by the grinding in silicon single crystal rod production process Processing is changed to machining, not only substantially increases production efficiency, reduces the thickness damage of silicon single crystal rod, and also improves The surface smoothness of silicon single crystal rod;(2)Limit switch is provided with workbench and fixed station, is prevented in moving process, Both bump against and cause equipment fault;The lifting of workbench and fixed station, structure are realized using roller and being slidably matched for guide rail Simply, using conveniently, there is wider application.
In this description, the utility model is described with reference to its specific embodiment.But it is clear that still can be with Various modification can be adapted and conversion is without departing from spirit and scope of the present utility model.Therefore, specification and drawings are considered as It is illustrative and not restrictive.

Claims (8)

  1. A kind of 1. silicon single crystal rod electric cutting device based on diamond wire roller, it is characterised in that described device include workbench, Lift fixed station and cutting roll assembly, it is provided with described workbench at least one adaptable with silicon single crystal rod shape recessed Groove, described lift fixed station are arranged above workbench, and be provided with below described lift fixed station with it is described The one-to-one hold-down bars of groove, described cutting roll assembly include more line of rabbet joint rollers, the gold being wound on described more line of rabbet joint rollers Firm line and line roller fixed mount, described line roller fixed mount can move forward and backward relative to described workbench, and described line roller is consolidated It is lift fixed mount to determine frame.
  2. 2. the silicon single crystal rod electric cutting device according to claim 1 based on diamond wire roller, it is characterised in that described Workbench is lifting type workbench.
  3. 3. the silicon single crystal rod electric cutting device according to claim 2 based on diamond wire roller, it is characterised in that described Device also includes frame, and movable workbench guide rail and lift fixed station moving guide rail are provided with described frame, described Workbench one end is arranged at by the first roll wheel assembly in described movable workbench guide rail, described lift fixed station one end It is arranged at by the second roll wheel assembly in described lift fixed station moving guide rail.
  4. 4. the silicon single crystal rod electric cutting device according to claim 3 based on diamond wire roller, it is characterised in that described First roll wheel assembly is connected with the first motor, and the second described roll wheel assembly is connected with the second motor.
  5. 5. the silicon single crystal rod electric cutting device according to claim 4 based on diamond wire roller, it is characterised in that described The upper end of workbench is provided with upper limit position switch, and the lower end of described lift fixed station is provided with lower position switch, described Upper limit position switch is connected with the first motor, and described lower position switch is connected with the second described motor.
  6. 6. the silicon single crystal rod electric cutting device according to claim 1 based on diamond wire roller, it is characterised in that described Diamond wire includes metal wire, and the outer surface of described metal wire is enclosed with resin bed, diamond is fixed with described resin bed Particle.
  7. 7. the silicon single crystal rod electric cutting device according to claim 1 based on diamond wire roller, it is characterised in that described The surface of groove on workbench is provided with foam-rubber cushion.
  8. 8. the silicon single crystal rod electric cutting device according to claim 1 based on diamond wire roller, it is characterised in that described The lower surface of hold-down bars is provided with rubber blanket.
CN201621136205.3U 2016-10-19 2016-10-19 Silicon single crystal rod electric cutting device based on diamond wire roller Active CN206825709U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621136205.3U CN206825709U (en) 2016-10-19 2016-10-19 Silicon single crystal rod electric cutting device based on diamond wire roller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621136205.3U CN206825709U (en) 2016-10-19 2016-10-19 Silicon single crystal rod electric cutting device based on diamond wire roller

Publications (1)

Publication Number Publication Date
CN206825709U true CN206825709U (en) 2018-01-02

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CN201621136205.3U Active CN206825709U (en) 2016-10-19 2016-10-19 Silicon single crystal rod electric cutting device based on diamond wire roller

Country Status (1)

Country Link
CN (1) CN206825709U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106426580A (en) * 2016-10-19 2017-02-22 成都迅德科技有限公司 Silicon single crystal rod electric cutting-off device based on diamond wire roller

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106426580A (en) * 2016-10-19 2017-02-22 成都迅德科技有限公司 Silicon single crystal rod electric cutting-off device based on diamond wire roller

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