CN206602099U - A kind of wafer and glass separation device - Google Patents
A kind of wafer and glass separation device Download PDFInfo
- Publication number
- CN206602099U CN206602099U CN201720201318.5U CN201720201318U CN206602099U CN 206602099 U CN206602099 U CN 206602099U CN 201720201318 U CN201720201318 U CN 201720201318U CN 206602099 U CN206602099 U CN 206602099U
- Authority
- CN
- China
- Prior art keywords
- suction cup
- cup assembly
- sucker
- support beam
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of wafer and glass separation device, the separator includes frame, upper Suction cup assembly, lower Suction cup assembly below upper Suction cup assembly, the lower Suction cup assembly includes fixed lower sucker, it is fitted in the lower heater under lower sucker, it is located in many support columns that can be lifted in lower sucker, the upper Suction cup assembly includes upper sucker, it is fitted in the upper heater on sucker, the drive component that can drive that the upper Suction cup assembly is vertical and moves left and right is additionally provided with the frame, the top surface of the support column has suction nozzle, there is pressure sensor in the upper Suction cup assembly, temperature sensor is respectively provided with the upper heater and the lower heater.The utility model can be realized carries out safe separating by glass and wafer, has the advantages that separative efficiency height, breakage rate are low.
Description
Technical field
The utility model belongs to semiconductor chip manufacturing equipment technical field, more particularly to it is a kind of by wafer from its glue
The device separated on the sheet glass of conjunction.
Background technology
It is to divide the wafer with function from the sheet glass glued with it to have a link in the manufacturing process of fingerprint chip
Leave and.In the prior art, it is to first pass through tool to heat chip glass wafer veneer, is then manually separated.By
Grasp uneven in the random too big, power of manually operation power size and Orientation, so fragment rate is high；Same the reason for, causes
Continuity is bad during artificial operation, so needing manual intervention, have impact on efficiency.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of separation wafer and glass safety height, fragment rate
Low, separative efficiency high wafer and glass separation device, to overcome the shortcomings of that prior art is present.
In order to solve the above technical problems, the utility model is adopted the following technical scheme that：
A kind of wafer and glass separation device, it is characterised in that；Including frame, upper Suction cup assembly, positioned at upper Suction cup assembly
The lower Suction cup assembly of lower section, the lower Suction cup assembly include fixed lower sucker, be fitted under lower sucker lower heater,
The many support columns that can be lifted in lower sucker are located in, the upper Suction cup assembly includes upper sucker, is fitted on sucker
The drive component that can drive that the upper Suction cup assembly is vertical and moves left and right is additionally provided with upper heater, the frame, it is described
The top surface of support column have in vacuum slot, the upper Suction cup assembly have pressure sensor, the upper heater and it is described under
Temperature sensor is respectively provided with heater.
Using above-mentioned technical proposal, the utility model, which can be realized, is separated glass and wafer, with security
High, separative efficiency is high, breakage rate is low, have the advantages that higher automation.
Brief description of the drawings
The utility model is described in detail with reference to the accompanying drawings and detailed description：
Fig. 1 is dimensional structure diagram of the present utility model.
Fig. 2 is the structural representation of lower Suction cup assembly；
Fig. 3 is the structural representation of upper Suction cup assembly；
Fig. 4 is structural representation of the upper Suction cup assembly under another visual angle；
Fig. 5 A- Fig. 5 D are the action schematic diagram of each step of separation method.
Embodiment
As shown in figure 1, wafer of the present utility model and glass separation device, including frame 100, base 200, upper sucker group
Part 300, lower Suction cup assembly 400 and drive component 500.
As shown in Fig. 2 lower Suction cup assembly 400 includes lower sucker 410, lower heater 420, four support columns 430.Its
In, lower sucker 410 and lower heater 420 are discoid and are each attached on base 200, and lower heater 420 is located at lower sucker
410 lower section simultaneously fits together.Multiple suction holes 601 are distributed with and many with what is be distributed with one heart in the upper surface of lower sucker 410
Individual annular air-breathing groove 602 and the bar shaped air-breathing groove 603 for connecting suction hole 601 with annular air-breathing groove 602.
Also circumferential array has four through holes 431 on lower sucker 410 and lower heater 420, and four support columns 430 are worn respectively
It is located in four through holes 431, the lifting drive provided with driving support column 430 inside base 200 (is hidden by base 200
Do not shown in gear, figure).Lifting drive can be pneumatic means (such as cylinder) or hydraulic means (such as oil cylinder) or electric device
(such as motor).The top of support column 430 has vacuum noz(zle), and the vacuum noz(zle) is made up of the suction hole for being opened in the top surface of support column 430.
As shown in Figure 3 and Figure 4, upper Suction cup assembly 300 includes sucker 310, upper heater 320, fine motion seat 330, branch
Support beam 340, link 350 and pressure sensor 360.
Wherein, upper sucker 310 and upper heater 320 are lower section that is discoid and being fixed on fine motion seat 330, upper sucker
310 are located at the lower section of upper heater 320 and fit together.Equally, the lower surface of upper sucker 310 be also distributed with multiple suction holes,
And the bar shaped air-breathing groove connected with the multiple annular air-breathing grooves being distributed with one heart and by suction hole with annular air-breathing groove.
Support beam 340 is set a roof beam in place for cross, has side frame 341 in both sides, the side frame 341 by spring 342 by fine motion seat 330
The lower section of support beam 340 is suspended in, the crossbeam of side frame 341 is provided with the regulating bolt 343 being connected with spring 342.
Linear bearing 344 is respectively equipped with the beam body of the four direction of support beam 340, in the upper surface correspondence of fine motion seat 330
The position of linear bearing 344 has lead 331, and lead 331 is located in linear bearing 344, in fine motion about 330 fine motions of seat
Guide effect is played in journey.
Link 350 is made up of the bottom plate 352 of riser 351 and connection riser 351 lower end, and bottom plate 352 is fixed on support beam
The center of 340 upper surfaces.
There is centre frame 332 in the center of fine motion seat 330, the center both sides of support beam 340 have through hole
345, the column of centre frame 332 is located in through hole 345, the lower end connection fine motion seat 330 of column, the crossbeam position of centre frame 332
In support beam 340 and the top of bottom plate 352.The upper surface of bottom plate 352 is provided with boss 353, and the crossbeam of centre frame 332 is provided with branch
Staybolt 354, the lower end of carrying bolt 354 is acted on boss 353.By adjusting the carrying bolt 354 so that fine motion seat
330 can be supported and adjust the spacing of fine motion seat 330 and support beam 340 by support beam 340.
The lower surface center of support beam 340 is provided with pressure sensor 360 so that the deformation ball of pressure sensor 360
Down, it is additionally provided with protruding block 333 in the upper surface center of fine motion seat 330.
Upper heater 320 and lower heater 420 are metal material, and inside is connected with heating tube.Upper heater 320 and it is lower plus
Temperature sensor is respectively provided with hot device 420.
Suction hole on upper sucker 310, lower sucker 410 and support column 430 is connected to controllable vacuum source by tracheae.
As shown in figure 1, drive component 500 includes transversal driving mechanism and vertical drive mechanism.Transversal driving mechanism bag
Include horizontal slide rail 501, cross slide 502, cross motor 503, cross lead screw nut component 504；Vertical drive mechanism includes perpendicular
To slide rail 506, vertical slide 507, vertical motor 508, vertical feed screw nut's assembly 509.Wherein, horizontal slide rail 410 is fixed on
In frame 100, cross slide 502 is located in horizontal slide rail 501, and cross motor 503 is located at the termination of transverse slider 410 and passed through
Cross lead screw nut component 504 is driven to drive cross slide 502 to do horizontal side-to-side movement.Vertical rails 506 are fixed on transverse direction
On slide 502, vertical slide 502 is located in vertical rails and is connected with link 350, and vertical motor 508 is located at vertical rails
506 upper end simultaneously drives vertical slide 507 to do perpendicular in vertical rails 506 by the transmission of vertical feed screw nut's assembly 504
To up and down motion.
In the utility model, pressure sensor 360, each heating tube, each temperature sensor, laterally vertical motor 508, electricity
Machine 503, the cylinder of driving support column lifting, each control valve of control controllable vacuum source are electrically connected with the controller, and realize pressure
Power, the computer heating control of the automatic feedback monitoring of temperature and heater, the laterally vertical up and down action control of drive component, left and right
The lifting action control of action control, support column, the absorption action control of upper and lower sucker and support column.
It is adjustable so that pressure sensor by adjusting regulating bolt 343 and carrying bolt 354 in the utility model
350 deformation ball is contacted just with protruding block 333 and deformation quantity is just zero, and now the pressure value of pressure sensor is
Zero.After mixing up, when upper sucker 310 is contacted and pushes glass wafer veneer, the pressure value of pressure sensor 360 is upper suction
Disk component 300 can be output to controller in real time to the pressure of glass wafer piece, the pressure data, and controller is to vertical motion machine
Structure can carry out safe regulation and control, it is ensured that glass wafer veneer not fragmentation.
It is exactly above wafer of the present utility model and glass separation device, its working method is：
When initial, upper Suction cup assembly 300 is located at the top of lower Suction cup assembly 400；
First, lifting column 430 rises, and glass wafer veneer 10 is delivered on lifting column 430 by manipulator, lifting column
The suction hole of 430 upper surfaces adsorbs glass wafer veneer 10, as shown in Figure 5A.Then lifting column 430 slowly declines, most
Whole glass wafer veneer 10 is positioned on lower sucker 410 and fixed by the lower vacuum suction of sucker 410, as shown in Figure 5 B.Drive
Suction cup assembly 300, which declines and fitted, on dynamic Component driver adsorbs the upper surface of veneer 10, anti-in the data of pressure sensor 360
Under feedback and monitoring control devices, control drive component applies pressure to glass wafer veneer, and the accurate upper sucker 310 of control is put on
Pressure on veneer, is allowed to avoid fragmentation, as shown in Figure 5 C.Subsequently upper heater 320 and lower heater 420 add simultaneously
Temperature sensor temperature in heat, device to be heated reaches design temperature, and keeps setting time to treat glass wafer glue in the temperature
Solid-state glue in the middle of zoarium 10 melts and glued power is dropped to after predetermined extent, and control drive component drives upper sucker 310 to hold glass
Glass does transverse horizontal motion so as to by glass and wafer separate；Upper sucker 310 holds glass and is placed at blanking, such as Fig. 5 D institutes
Show.Wafer after separation is risen by 4 support columns, is sent back to by manipulator at feeding.
Pass through foregoing detailed description, it can be seen that the utility model can be realized carries out safety point by glass and wafer
From having the advantages that separative efficiency is high, breakage rate is low.
But, those of ordinary skill in the art is it should be appreciated that the embodiment of the above is intended merely to explanation originally
Utility model, and be not used as it is of the present utility model limit, if in spirit of the present utility model, to
Change, the modification of the upper embodiment will all fall in Claims scope of the present utility model.
Claims (5)
1. a kind of wafer and glass separation device, it is characterised in that；Including frame, upper Suction cup assembly, under upper Suction cup assembly
The lower Suction cup assembly of side, the lower Suction cup assembly includes fixed lower sucker, the lower heater being fitted under lower sucker, worn
The many support columns that can be lifted in lower sucker are located at, the upper Suction cup assembly includes upper sucker, is fitted in upper on sucker
The drive component that can drive that the upper Suction cup assembly is vertical and moves left and right, the branch are additionally provided with heater, the frame
The top surface of dagger, which has, has pressure sensor, the upper heater and the lower heater in suction nozzle, the upper Suction cup assembly
In be respectively provided with temperature sensor.
2. wafer according to claim 1 and glass separation device, it is characterised in that：The upper Suction cup assembly also includes micro-
Dynamic seat and support beam, the fine motion seat are suspended in below the support beam, the pressure sensor be arranged on fine motion seat and
Between the support beam；The upper heater is fixed on the lower section of the fine motion seat, and the support beam connects with the drive component
Connect.
3. wafer according to claim 2 and glass separation device, it is characterised in that：The support beam both sides set side frame,
Fine motion seat is suspended in the lower section of the support beam by spring by the side frame.
4. wafer according to claim 3 and glass separation device, it is characterised in that：The center tool of the fine motion seat
There is centre frame, the center position both sides of the support beam have through hole, and the column of the centre frame is located in the through hole, institute
The lower end for stating column connects the fine motion seat, and the crossbeam of the centre frame is located at the top of the support beam, the centre frame
Crossbeam supports the carrying bolt in the support beam provided with lower end.
5. wafer according to claim 4 and glass separation device, it is characterised in that：The pressure sensor is arranged on institute
Support beam lower surface is stated, the fine motion seat upper surface center has protruding block, passes through the deformation ball of the pressure sensor
Just contacted with the protruding block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720201318.5U CN206602099U (en) | 2017-03-03 | 2017-03-03 | A kind of wafer and glass separation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720201318.5U CN206602099U (en) | 2017-03-03 | 2017-03-03 | A kind of wafer and glass separation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206602099U true CN206602099U (en) | 2017-10-31 |
Family
ID=60147377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720201318.5U Expired - Fee Related CN206602099U (en) | 2017-03-03 | 2017-03-03 | A kind of wafer and glass separation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206602099U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783699A (en) * | 2017-03-03 | 2017-05-31 | 爱立发自动化设备（上海）有限公司 | A kind of wafer and glass separation device and method |
| CN113299576A (en) * | 2020-02-21 | 2021-08-24 | 济南晶正电子科技有限公司 | Mechanical film separating device |
-
2017
- 2017-03-03 CN CN201720201318.5U patent/CN206602099U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783699A (en) * | 2017-03-03 | 2017-05-31 | 爱立发自动化设备（上海）有限公司 | A kind of wafer and glass separation device and method |
| CN113299576A (en) * | 2020-02-21 | 2021-08-24 | 济南晶正电子科技有限公司 | Mechanical film separating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171031 Termination date: 20210303 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |