CN206556608U - A kind of contactless three coordinate measuring machine of high-speed, high precision - Google Patents
A kind of contactless three coordinate measuring machine of high-speed, high precision Download PDFInfo
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- CN206556608U CN206556608U CN201720213968.1U CN201720213968U CN206556608U CN 206556608 U CN206556608 U CN 206556608U CN 201720213968 U CN201720213968 U CN 201720213968U CN 206556608 U CN206556608 U CN 206556608U
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 37
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- 239000000523 sample Substances 0.000 claims description 17
- 239000004579 marble Substances 0.000 claims description 3
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- 238000004519 manufacturing process Methods 0.000 abstract description 8
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Abstract
The utility model discloses a kind of contactless three coordinate measuring machine of high-speed, high precision, including lathe, lathe, which is provided with attaching on main shaft, main shaft, objective table, and clamping workpiece is on objective table；First direction feed mechanism and second direction feed mechanism are additionally provided with lathe；Main shaft drives workpiece rotation, and laser displacement sensor is scanned to workpiece surface by first direction feed mechanism and second direction feed mechanism and gathers the position data of the point on workpiece, and the three-dimensional appearance of workpiece is obtained through data processing.The utility model changes the forms of motion of traditional three coordinate measuring machine, the linear motion for measuring first direction is changed into the rotary motion of measured workpiece, overcome traditional three coordinate measuring machine because of frequent acceleration and deceleration and caused by measuring speed it is low the problem of, measurement head uses high-precision laser displacement sensor simultaneously, the precision of the measurement of three coordinates can be increased substantially, the demand to measurement accuracy in modern production manufacture is met.
Description
Technical field
The utility model belongs to field of precision measurement, and in particular to a kind of contactless three-dimensional coordinates measurement of high-speed, high precision
Machine.
Background technology
Three coordinate measuring machine is as the high high precision measuring system of a kind of highly versatile, automaticity, in machinery, electronics
It is used widely Deng field.Three coordinate measuring machine is in the course of the work by the measures conversion of the various geometric elements of measured workpiece
For the measurement of point set coordinate on geometric element.After the coordinate position of these points is measured, then by software according to certain algorithm and
Assessment criteria calculates size, shape, relative position of tested geometric element etc..At present, according to the shape of three coordinate measuring machine gauge head
Three coordinate measuring machine, can be divided into Contacting three coordinates measurement machine and contactless three coordinate measuring machine by formula.Contactless three sit
Co-ordinate measuring machine mainly has laser spots measurement and line laser structured light to measure two kinds of forms at present.For Contacting three coordinates measurement machine and
For non-contact laser point measurement three coordinate measuring machine, measurement process needs frequently to accelerate, slowed down, and causes measuring speed
It is slower.Contactless line laser structured light measurement acceleration and deceleration process in measurement is less, and measuring speed can be greatly improved,
But be due to line laser measurement head itself error be more than 3 μm, add the kinematic error of measuring machine in itself, the measurement error of system
Typically no less than 5 μm so that its measurement accuracy significantly declines.Modern Precision Machining and scientific research often pursues micron
The precision of level, typically requires that uncertainty of measurement is less than the 1/3~1/5 of manufacturing tolerance in production.Therefore no matter for measurement
The of a relatively high contact type measurement of precision, or non-cpntact measurement, can not complete high-precision measurement work.
Done a lot of work at present in terms of three-dimensional coordinates measurement and non-contact measurement, such as " one kind is based on sharp for patent
The non-contact measurement apparatus (201520858271.0) of ligh-ranging " and a kind of patent " contactless three coordinate measuring machine
(201620175137.5) ", all using laser measuring device for measuring, relatively conventional contact type measurement, measurement accuracy increases, but
It is all by the way of traditional three axles movement, to cause measuring speed low.A kind of patent " line laser structured light measuring three-dimensional profile
In method and device (201410087213.2) ", a wordline laser is in the control lower swing of magnetostriction microdisplacement controller, shape
Into the scanning plane of object to be detected, but the limitation of the device camera subject depth of field and camera imaging plane, cause range small.Simultaneously
Relation that can not be between Accurate Calibration laser and camera, therefore the precision determined is not high.
Utility model content
The purpose of this utility model is to overcome in place of the deficiencies in the prior art that there is provided a kind of high-speed, high precision noncontact
Formula three coordinate measuring machine, changes the forms of motion of traditional three coordinate measuring machine, and the linear motion for measuring first direction is changed
Be changed into the rotary motion of measured workpiece, overcome traditional three coordinate measuring machine because of frequent acceleration and deceleration and caused by measuring speed it is low
The problem of, while measurement head uses high-precision laser displacement sensor, the precision of the measurement of three coordinates can be increased substantially, it is full
To the demand of measurement accuracy in sufficient modern production manufacture.
The utility model solves the technical scheme that its technical problem used：
A kind of contactless three coordinate measuring machine of high-speed, high precision, including：
Lathe；
Workbench, is installed in lathe；
Main shaft, is installed in lathe and passes workbench；
Objective table, if on the table and being installed in main shaft, objective table can pass through main shaft and drive rotation and the two gyroaxis
Line is overlapped；The objective table includes discoidal objective table main body, and the objective table main body is provided with annular groove, the annular groove
Sliding installation have two can be by fixed balance weight；
Workpiece, is installed in objective table and can drive rotation by objective table；
Framework, is installed in workbench；
First direction feed mechanism, is installed in framework；
Second direction feed mechanism, attaching feed mechanism in a first direction；
Laser displacement sensor, is installed in second direction feed mechanism, and its measurement direction is relative with workpiece；The laser displacement
The measurement accuracy of sensor is better than 10nm, and maximum sample frequency is not less than 492kHz；
On-line dynamic balancing instrument, is connected with framework and objective table；
Controller for controlling first direction feed mechanism and second direction feed mechanism, with first direction feed mechanism
It is connected with second direction feed mechanism；
Workpiece is driven to rotate by main shaft, laser displacement sensor is carried out by first direction feed mechanism to workpiece surface
The position data of the point of workpiece surface is scanned and gathers, processing obtains the three-dimensional appearance of workpiece.
In one embodiment：The on-line dynamic balancing instrument is including the vibrating sensor being connected with each other, speed probe and moves flat
Weigh instrument main frame, and the vibrating sensor is connected with framework, and the speed probe is installed in workbench and is connected with objective table.
In one embodiment：The balance weight is provided with holding screw, and balance weight is fixed on into annular by the holding screw
In chute.
In one embodiment：The positioning precision of the first direction feed mechanism is better than 10nm.
In one embodiment：The first direction feed mechanism is linear electric motors；The second direction feed mechanism is straight line
Motor.
In one embodiment：The feeding axis of the first direction feed mechanism to the error of perpendicularity of main shaft gyration axis not
More than 1 μm/200mm.
In one embodiment：The first direction is mutually perpendicular to second direction.
In one embodiment：The lathe is made up of natural marble.
The technical program is compared with background technology, and it has the following advantages that：
1. the contactless three coordinate measuring machine of high-speed, high precision of the present utility model and its measuring method, change tradition three
The forms of motion of coordinate measuring machine, the linear motion for measuring first direction is changed into the rotary motion of measured workpiece, overcome
Traditional three coordinate measuring machine because frequent acceleration and deceleration and caused by measuring speed it is low the problem of, while measurement head is using high accuracy
Laser displacement sensor, the precision of the measurement of three coordinates can be increased substantially, meet modern production manufacture in measurement accuracy
Demand., can also easily scratch etc. should not be using contact, surface softer to material as a result of contactless metering system
The workpiece of formula metering system is measured.
2. the utility model is by improving the rotary speed of measured workpiece, 10nm laser displacement sensors are better than with reference to precision,
So that sample frequency is sufficiently high, 400KHz can be up to.And the metering system of traditional contact, due to there is Mechanical Contact,
Sample frequency is very low, therefore measuring speed is very slow.Therefore the utility model is surveyed for Regular contact measuring method
Accuracy of measurement can improve an order of magnitude.
Brief description of the drawings
The utility model is described in further detail with reference to the accompanying drawings and examples.
Fig. 1 is the contactless three coordinate measuring machine structural representation of high-speed, high precision of the present utility model.
Fig. 2 is the contactless three coordinate measuring machine schematic top plan view of high-speed, high precision of the present utility model.
Fig. 3 is objective table result schematic diagram of the present utility model.
Fig. 4 is measuring principle schematic diagram of the present utility model.
Fig. 5 is the 3D mathematical model schematic diagrames of the workpiece obtained in the utility model embodiment.
Reference：Lathe 1, workbench 2, main shaft 3, framework 4, X is to linear electric motors 5, Z-direction linear electric motors 6, laser displacement
Sensor 7, objective table 8, objective table main body 8a, balance weight 8b, holding screw 8c；Workpiece 9.
Embodiment
Content of the present utility model is illustrated below by embodiment：
It refer to Fig. 1 and Fig. 2, a kind of contactless three coordinate measuring machine of high-speed, high precision, including：
Lathe 1, is made up of natural marble, with less thermal deformation, ensure that the measurement accuracy of measuring machine；
Workbench 2, is installed on lathe 1；
Main shaft 3, is installed in lathe 1 to vertical arrangement and its spindle nose passes workbench 2 upwards；
Objective table 8, is located on workbench 2 and is installed in the spindle nose of main shaft 3, and objective table 8 can drive rotation and two by main shaft 3
Person's axis of rotation is overlapped；The objective table 8 includes discoidal objective table main body 8a, and objective table main body 8a is sliding provided with annular
Sliding installation has two balance weight 8b in groove, the annular groove；Holding screw 8c is equipped with two balance weight 8b, by tight
Determining screw 8c can be fixed on balance weight 8b in annular groove, such as Fig. 3；
Workpiece 9, clamping is in objective table 8 and can drive rotation by objective table 8；
Framework 4, is installed on workbench 2；
First direction feed mechanism, be high-precision X to linear electric motors 5, be flatly installed in framework 4, its positioning precision
Better than 10nm, while feed speed scope should try one's best greatly；Among the present embodiment, X is to for horizontal direction, and the X is to linear electric motors 5
Feeding axis is not more than 1 μm/200mm to the error of perpendicularity of the axis of rotation of main shaft 3；
Second direction feed mechanism, is Z-direction linear electric motors 6, is installed in X on the mover of linear electric motors 5；The present embodiment it
In, Z-direction is vertical above-below direction；
Laser displacement sensor (such as Keyemce LK-H008 types laser displacement sensor) 7, is installed in Z-direction linear electric motors 6
On mover, its measurement direction is relative with workpiece 9 straight down；The measurement accuracy of the laser displacement sensor 7 is better than 10nm, maximum
Sample frequency is not less than 492kHz, and (the maximum sample frequency is the device parameter of laser displacement sensor, is laser displacement sensing
The maximum sample frequency of the maximum that device sample frequency can reach, such as laser displacement sensor is 492kHz, then shows this
The sample frequency of laser displacement sensor is 0~492kHz)；
On-line dynamic balancing instrument, includes vibrating sensor, speed probe and the dynamic balance instrument main frame of interconnection, the vibration
Sensor is adsorbed in framework 4, and the speed probe is installed in workbench 5 and is connected with objective table 8；Vibrating sensor and rotating speed are passed
The Vibration Condition of framework 4 and the rotary speed data of objective table 8 can be transferred to dynamic balance instrument main frame by sensor respectively；
Controller, is connected to linear electric motors 5 and Z-direction linear electric motors 6 with X, X can be controlled straight to linear electric motors 5 and Z-direction
The motion of line motor 6.
The measuring method of the contactless three coordinate measuring machine of high-speed, high precision of the present utility model is as follows：
1) clamping of workpiece 9 makes the barycenter of workpiece 9 be weighed as far as possible with the axis of rotation of objective table 8 and main shaft 3 in objective table 8
Close；Unscrew two holding screw 8c on objective table 8 so that two balance weight 8b can be in annular groove slidably；
2) main shaft 3 drives workpiece 9 to rotate, and entirety is carried out to main shaft 3, objective table 8 and workpiece 9 using on-line dynamic balancing instrument exists
Line dynamic balancing, i.e. dynamic balance instrument main frame provide adjustment prompting according to the vibration and rotary speed information that detect, by adjusting and locking
Positions of two balance weight 8b in annular groove carries out on-line dynamic balancing on objective table 8, causes rotary motion by regulation
Vibration is not more than 10nm caused by uneven, reaches the balance accuracy grade of needs；
3) height that Z-direction linear electric motors 6 adjust the opposite piece 9 of laser displacement sensor 7 is regulated and controled by controller, it is determined that surveying
Starting point is measured, and workpiece 9 is located in the range ability of laser displacement sensor 7；
4) starting main shaft 3 drives workpiece 9 to be rotated with the rotating speed of setting, and regulate and control X by controller swashs to the drive of linear electric motors 5
Optical displacement sensor 7 is by measurement starting point, from the periphery of workpiece 9 with the feed speed that sets along the radial direction of objective table 8 to workpiece 9
Feeding, X is combined to the linear motion of linear electric motors 5 with the rotary motion of workpiece 9 so that laser displacement sensor 7 was fed
Spiral scan is carried out to the surface of workpiece 9 in journey and the position data of the point on workpiece is gathered；When scanning to the centre of gyration of workpiece 9
During position, X stops scanning to the stop motion of linear electric motors 5, laser displacement sensor 7, and measurement terminates；
5) position data of the point on the workpiece 9 collected is imported into matlab data processing softwares, obtained by processing
The coordinate data and the regularity of distribution of point on workpiece 9, the three-dimensional appearance of workpiece 9 can be drawn out according to those information, obtain workpiece 9
3D mathematical models.
6) the Design CAD model of the 3D mathematical models of workpiece 9 and workpiece 9 is compared by software, can be several to each
The scale error of what feature, the site error between form error and each feature etc. is evaluated.
It is preferred it should be noted that the measurement starting point should be located at the outer 3~5mm of the Maximum turning radius of workpiece 9, to ensure
Laser displacement sensor 7 has just accelerated to the feed speed of setting before scanning to workpiece 9 measuring starting point, it is ensured that sweep
Retouch process to carry out according to the feed speed of setting all the time, while being unlikely to too remote again.
Illustrate below by specific example：
1) by a diameter of 75mm, upper surface is that the workpiece of different in nature curved surface is fixed on objective table by way of mechanical clamping,
The barycenter of workpiece is set to be overlapped as far as possible with the axis of rotation of objective table and main shaft；Unscrew two holding screws on objective table so that
Two balance weights can be in annular groove slidably；
2) main shaft drives workpiece rotation, main shaft, objective table and workpiece is carried out using on-line dynamic balancing instrument overall online dynamic
Balance, i.e. dynamic balance instrument main frame provide adjustment prompting according to the vibration and rotary speed information that detect, by adjusting and locking loading
Position of two balance weights in annular groove carries out on-line dynamic balancing on platform, causes rotating speed in 0~200rpm by regulation
In the range of when, frame vibration amplitude caused by rotary motion is uneven is not more than 10nm；
3) height of laser displacement sensor opposite piece is adjusted by Z-direction linear electric motors, it is determined that measurement starting point, and make
Workpiece is located in the range ability of laser displacement sensor；Among the present embodiment, measurement starting point is relative to workpiece axis of rotation
The radius of gyration be 41mm, it is ensured that can measure the overall picture of workpiece, and since laser displacement sensor scan measuring starting point
The feed speed of setting has just been accelerated to before to workpiece；
4) starting main shaft drives workpiece to be rotated with rotating speed 200rpm, sets X to the feed speed of linear electric motors as f=
0.03mm/s, the sample frequency of laser displacement sensor is fs=100KHz, drives laser displacement to sense by X to linear electric motors
Device is radially fed, when X adds to linear electric motors with feed speed from workpiece periphery by measurement starting point along objective table to workpiece
After speed to setting feed speed, laser displacement sensor starts to set sample frequency gathered data, and control system provides laser
Measurement point and the distance of the centre of gyration are initial measurement radius r=when displacement transducer gathers the position data of first point
40mm；During feeding, X is combined to the linear motion of linear electric motors with the rotary motion of workpiece so that laser displacement is sensed
Spiral scan is carried out to workpiece surface during device feeding and the position data of the point on workpiece is gathered；When scanning to workpiece is returned
When turning center, X stops scanning to linear electric motors stop motion, laser displacement sensor, and measurement terminates；
5) from step 4), the scanning track that laser displacement sensor measurement point carries out spiral scan meets pole seat
Equation ρ=40-0.0045 θ are marked, wherein θ (represents that disc objective table is at a time relative for the corner of disc objective table
The angle that turns over of disk when laser displacement sensor gathers at the first), such as Fig. 4, and often turn over the radian laser position of π/15000
Displacement sensor adopts a point.According to above-mentioned rule, the position data of the point on the workpiece collected is imported at matlab data
Software is managed, the coordinate data and the regularity of distribution of the point on workpiece are obtained by processing, workpiece can be drawn out according to those information
Three-dimensional appearance, obtains the 3D mathematical models of workpiece, such as Fig. 5.
6) the Design CAD model of the 3D mathematical models of workpiece and workpiece is compared by software, can be to each geometry
The scale error of feature, the site error between form error and each feature etc. is evaluated.
It is described above, only the utility model preferred embodiment, therefore the utility model implementation can not be limited according to this
Scope, i.e., the equivalent changes and modifications made according to the utility model the scope of the claims and description all should still belong to this practicality new
In the range of type covers.
Claims (8)
1. a kind of contactless three coordinate measuring machine of high-speed, high precision, it is characterised in that：Including：
Lathe；
Workbench, is installed in lathe；
Main shaft, is installed in lathe and passes workbench；
Objective table, if on the table and being installed in main shaft, objective table can pass through main shaft and drive rotation and the two axis of rotation weight
Close；The objective table includes discoidal objective table main body, and the objective table main body is provided with annular groove, the annular groove and slided
Attaching have two can be by fixed balance weight；
Workpiece, is installed in objective table and can drive rotation by objective table；
Framework, is installed in workbench；
First direction feed mechanism, is installed in framework；
Second direction feed mechanism, attaching feed mechanism in a first direction；
Laser displacement sensor, is installed in second direction feed mechanism, and its measurement direction is relative with workpiece；The laser displacement is sensed
The measurement accuracy of device is better than 10nm, and maximum sample frequency is not less than 492kHz；
On-line dynamic balancing instrument, is connected with framework and objective table；
Controller for controlling first direction feed mechanism and second direction feed mechanism, with first direction feed mechanism and
Two direction feed mechanisms are connected；
Workpiece is driven to rotate by main shaft, laser displacement sensor is scanned by first direction feed mechanism to workpiece surface
And the position data of the point of workpiece surface is gathered, processing obtains the three-dimensional appearance of workpiece.
2. the contactless three coordinate measuring machine of high-speed, high precision according to claim 1, it is characterised in that：It is described online dynamic
Equilibristat includes vibrating sensor, speed probe and the dynamic balance instrument main frame being connected with each other, the vibrating sensor and framework phase
Even, the speed probe is installed in workbench and is connected with objective table.
3. the contactless three coordinate measuring machine of high-speed, high precision according to claim 1, it is characterised in that：The balance weight
Holding screw is provided with, balance weight is fixed in annular groove by the holding screw.
4. the contactless three coordinate measuring machine of high-speed, high precision according to claim 1, it is characterised in that：The first party
It is better than 10nm to the positioning precision of feed mechanism.
5. the contactless three coordinate measuring machine of high-speed, high precision according to claim 1, it is characterised in that：The first party
It is linear electric motors to feed mechanism；The second direction feed mechanism is linear electric motors.
6. the contactless three coordinate measuring machine of high-speed, high precision according to claim 1, it is characterised in that：The first party
1 μm/200mm is not more than to the error of perpendicularity of main shaft gyration axis to the feeding axis of feed mechanism.
7. the contactless three coordinate measuring machine of high-speed, high precision according to claim 1, it is characterised in that：The first party
It is mutually perpendicular to second direction.
8. the contactless three coordinate measuring machine of high-speed, high precision according to claim 1, it is characterised in that：The lathe by
Natural marble is made.
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| CN201720213968.1U CN206556608U (en) | 2017-03-07 | 2017-03-07 | A kind of contactless three coordinate measuring machine of high-speed, high precision |
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| CN201720213968.1U CN206556608U (en) | 2017-03-07 | 2017-03-07 | A kind of contactless three coordinate measuring machine of high-speed, high precision |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106679589A (en) * | 2017-03-07 | 2017-05-17 | 华侨大学 | High-speed high-precision non-contact type coordinate measuring machine and measuring method thereof |
| CN107883893A (en) * | 2017-10-31 | 2018-04-06 | 湖北工业大学 | A kind of solar concentrator curved surface automatic checkout system and method |
| CN110763680A (en) * | 2019-11-07 | 2020-02-07 | 郑州铁路职业技术学院 | Medical 3D printing model measurement and analysis system |
| CN112985301A (en) * | 2021-02-25 | 2021-06-18 | 北京空间机电研究所 | Method for measuring off-axis aspheric surface by using non-contact aspheric surface contourgraph |
-
2017
- 2017-03-07 CN CN201720213968.1U patent/CN206556608U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106679589A (en) * | 2017-03-07 | 2017-05-17 | 华侨大学 | High-speed high-precision non-contact type coordinate measuring machine and measuring method thereof |
| CN107883893A (en) * | 2017-10-31 | 2018-04-06 | 湖北工业大学 | A kind of solar concentrator curved surface automatic checkout system and method |
| CN107883893B (en) * | 2017-10-31 | 2019-10-11 | 湖北工业大学 | A kind of solar concentrator curved surface automatic checkout system and method |
| CN110763680A (en) * | 2019-11-07 | 2020-02-07 | 郑州铁路职业技术学院 | Medical 3D printing model measurement and analysis system |
| CN112985301A (en) * | 2021-02-25 | 2021-06-18 | 北京空间机电研究所 | Method for measuring off-axis aspheric surface by using non-contact aspheric surface contourgraph |
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