CN206399607U - Special-shaped weldment auxiliary helium surveys device - Google Patents

Special-shaped weldment auxiliary helium surveys device Download PDF

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Publication number
CN206399607U
CN206399607U CN201720074036.3U CN201720074036U CN206399607U CN 206399607 U CN206399607 U CN 206399607U CN 201720074036 U CN201720074036 U CN 201720074036U CN 206399607 U CN206399607 U CN 206399607U
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CN
China
Prior art keywords
rank
order
plate
sealing ring
connecting tube
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Expired - Fee Related
Application number
CN201720074036.3U
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Chinese (zh)
Inventor
李瑞贤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuyao Semiconductor Kunshan Co ltd
Original Assignee
Rich Precision Component (kunshan) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by Rich Precision Component (kunshan) Co Ltd filed Critical Rich Precision Component (kunshan) Co Ltd
Priority to CN201720074036.3U priority Critical patent/CN206399607U/en
Application granted granted Critical
Publication of CN206399607U publication Critical patent/CN206399607U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model is related to tightness measuring device technical field, disclose a kind of special-shaped weldment auxiliary helium and survey device, including the first rank sealing plate, regulating bolt, first rank sealing ring, the first rank holddown plate, the first rank hold-down bolt, second-order sealing ring, second-order sealing plate, the 3rd rank sealing ring, the 3rd rank clamping screw, fourth order sealing ring, fourth order seal nipple component, special-shaped weldment are welded by flexible metallic hose and rigid metal plate;First rank sealing plate, the first rank sealing ring are locked by the first rank hold-down bolt and the first rank holddown plate and realize sealing in the non-solder end of flexible metallic hose, the positive lumen pore of rigid metal plate is locked second-order sealing plate by the 3rd rank clamping screw and sealed, and the air admission hole of second-order sealing plate is connected with fourth order seal nipple component and sets fourth order sealing ring.The problem of helium that the utility model solves the weldment product for possessing flexible metal pipe fitting surveys sealing.

Description

Special-shaped weldment auxiliary helium surveys device
Technical field
The utility model is related to tightness measuring device technical field, and more particularly to a kind of special-shaped weldment auxiliary helium surveys dress Put, it is adaptable to the helium testing field of semiconductor device, more particularly to the helium of special-shaped welding product sealing face seals is surveyed Examination field.
Background technology
For needing the product of the scalability metal tube fittings on multiple welding and product in the presence of flexibility, it is necessary to which helium is surveyed The sealing of trial work section checking welding, but the helium of prior art surveys servicing unit poor universality, input cost is high, newly purchase special The deficiency of equipment purchase cycle length, it is therefore desirable to which a kind of adjustable auxiliary fixture is sealed to welding product, test welding The sealing effectiveness of product.
Utility model content
In order to overcome similar weldment product helium to survey servicing unit poor universality, input cost is high, new purchase special equipment is adopted The deficiency of purchase cycle length, the utility model provides a kind of auxiliary helium test device simple in construction, easy to operate.
To achieve these goals, this new technique is adopted the following technical scheme that:Special-shaped weldment auxiliary helium surveys device, bag Include the first rank sealing plate, regulating bolt, the first rank sealing ring, the first rank holddown plate, the first rank hold-down bolt, second-order sealing Circle, second-order sealing plate, the 3rd rank sealing ring, the 3rd rank clamping screw, fourth order sealing ring, fourth order seal nipple, abnormity Weldment is welded by flexible metallic hose and rigid metal plate;First rank hold-down bolt passes through the first rank holddown plate and first Rank sealing plate is connected, and tightens the first rank hold-down bolt, by the first rank holddown plate by the non-solder end of flexible metallic hose, first Rank sealing plate is fixed together, and sets the first rank to seal between the non-solder end of flexible metallic hose and the first rank sealing plate Circle;Some regulating bolts are uniformly installed, the 3rd rank clamping screw is welded through second-order sealing plate, abnormity on the first rank sealing plate It is connected after the chamber of part with the first rank sealing plate, second-order sealing plate is being fixed on rigid metal plate just when tightening the 3rd rank clamping screw Face simultaneously makes the screw cap end of regulating bolt be against rigid metal back, is set between second-order sealing plate and rigid metal plate front Second-order sealing ring, the junction of the 3rd rank clamping screw and second-order sealing plate sets the 3rd rank sealing ring;Second-order sealing plate Provided with air admission hole, air admission hole is connected with fourth order seal nipple, and second-order sealing plate is set with fourth order seal nipple junction Fourth order sealing ring.
Further preferably, the fourth order seal nipple is close including the first connecting tube, the second connecting tube, clip, connecting tube Seal, connecting tube seal ring bracket, the first connecting tube are docked with the second connecting tube, and the first connecting tube is docked with the second connecting tube Place, which is opened up, sets connecting tube seal ring bracket in groove, groove, connecting tube sealing ring is enclosed on outside connecting tube seal ring bracket, passed through First connecting tube and the second connecting tube are locked together and compress connecting tube sealing ring by clip.Pass through the first connecting tube connection the The air admission hole of second order sealing plate, the second connecting tube connection ammonia surveys instrument, instrument rapid abutting joint can be surveyed with ammonia, using connecting tube sealing ring Support supports connecting tube sealing ring, and connecting tube sealing ring will not be deformed, easy for installation, good airproof performance.
Further preferably, the first rank sealing ring is placed into the sealed groove of the first rank sealing plate, and the first rank sealing plate is set Sealed groove is put, it is convenient that first rank sealing ring, good airproof performance are installed.
Further preferably, second-order sealing ring is placed into the positive sealed groove of rigid metal plate, and rigid metal plate is just Face sets sealed groove, convenient to install second-order sealing ring, good airproof performance.
The problem of helium that the utility model solves the weldment product for possessing flexible metal pipe fitting surveys sealing, by the Single order sealing plate, the first rank sealing ring and the first rank holddown plate realize the sealing of flexible metal pipe end, close by second-order Seal, second-order sealing plate realize the sealing of rigid metal plate end passway, and the perforate connection the on second-order sealing plate Quadravalence seal nipple, can quickly connect ammonia and survey instrument progress performing leak test, the utility model reliably solves welding product Helium tests the sealing problem of link.The utility model has simple in construction, and cost is low, the beneficial effect such as efficiency height.
Brief description of the drawings
Fig. 1 is the utility model assembling schematic diagram one;
Fig. 2 is the utility model assembling schematic diagram two.
Fig. 3 is explosive view one of the present utility model;
Fig. 4 is explosive view two of the present utility model.
Fig. 5 is sectional structure chart of the present utility model;
Fig. 6 is enlarged drawing at the B in Fig. 5.
In figure:1. the rank of 2. 3. first rank sealing ring of adjustment bolt of the first rank sealing plate, 4. product main body 5. first compresses The rank of 6. first rank hold-down bolt of cover plate, 7. second-order sealing ring, 8. the 3rd rank sealing ring 10. of second-order sealing plate 9. the 3rd The connecting tube 122. of 11. fourth order sealing ring of clamping screw, 12. fourth order seal nipple, 13. welding region 121. first The connecting tube seal ring bracket of two connecting tubes, 123. clip, 124. connecting tube sealing ring 125..
Embodiment
The utility model is further described below in conjunction with the accompanying drawings:
Reference picture 1-6, special-shaped weldment product main body 4 is welded by flexible metallic hose and rigid metal plate, in order to weld The sealing of region 13 is connect, to evaluate whether weld seam meets the requirements, ammonia test need to be carried out and tested, as Figure 1-5 different is designed for this Shape weldment auxiliary helium surveys device, including the first rank sealing plate 1, adjustment bolt 2, the first rank sealing ring 3, the first rank holddown plate 5th, the first rank hold-down bolt 6, second-order sealing ring 7, second-order sealing plate 8, the 3rd rank sealing ring 9, the 3rd rank clamping screw 10, Fourth order sealing ring 11, fourth order seal nipple 12;Adjustment bolt 2 is first installed to (spiral shell on the first rank sealing plate 1 when using Bolt length direction is presetting consistent), then the first rank sealing ring 3 is placed into the sealed groove of the first rank sealing plate 1, then by the Single order hold-down bolt 6 passes through the first rank holddown plate 5, then is passed through the flexible metallic hose of product main body 4, and the first rank is sealed Plate 1, product main body 4, the 5 three part lockings of the first rank holddown plate are an entirety, complete the sealing of the first rank.Complete first After rank sealing assembling, adjust the height of adjustment bolt 2, make eight highly consistent, and nut portion all with the back side of product main body 4 Contact, plays a supporting role.Then second-order sealing ring 7 is placed into the sealed groove of product main body 4, then by second-order Sealing plate 8 is covered in product main body 4, then the 3rd rank sealing ring 9 is inserted in into the 3rd rank clamping screw 10, then by 10 points of clamping screw It Chuan Guo not be connected with the first rank sealing plate 1 after second-order sealing plate 8, the first rank holddown plate 5 and lock into an entirety, simultaneously Second and third rank is completed sealedly to assemble.Fourth order sealing ring 11 is inserted in fourth order seal nipple component 12 again, then by quadravalence Seal nipple component 12 is assembled to second-order sealing plate 8, completes the sealing assembling of fourth order.
More particularly, as shown in figure 5, the fourth order seal nipple 12 includes the first connecting tube 121, the second connecting tube 122nd, clip 123, connecting tube sealing ring 124, connecting tube seal ring bracket 125, the first connecting tube 121 and the second connecting tube 122 The joint of docking, the first connecting tube 121 and the second connecting tube 122, which is opened up, sets connecting tube seal ring bracket in groove, groove 125, connecting tube sealing ring 124 is enclosed on outside connecting tube seal ring bracket 125, by clip 123 by the first connecting tube 121 and second Connecting tube 122 is locked together and compresses connecting tube sealing ring 124, and the first connecting tube 121 connects entering for second-order sealing plate 8 Stomata, the second connecting tube 122 connection ammonia surveys instrument.Using the support connecting tube of connecting tube seal ring bracket 125 sealing ring 124, connection Seal of tube circle 124 will not be deformed, easy for installation, good airproof performance.
Above-described embodiment is simple in construction, less input, fabrication cycle is short, successfully solves and possesses flexible metal pipe fitting The helium of weldment product can not use general helium to survey device and realize that helium surveys the problem of test when surveying sealing.

Claims (4)

1. a kind of special-shaped weldment auxiliary helium surveys device, including the first rank sealing plate, regulating bolt, the first rank sealing ring, first Rank holddown plate, the first rank hold-down bolt, second-order sealing ring, second-order sealing plate, the 3rd rank sealing ring, the 3rd rank locking screw Bolt, fourth order sealing ring, fourth order seal nipple, special-shaped weldment are welded by flexible metallic hose and rigid metal plate;Its It is characterized in:First rank hold-down bolt is connected through the first rank holddown plate with the first rank sealing plate, tightens the first rank hold-down bolt, The non-solder end of flexible metallic hose, the first rank sealing plate are fixed together by the first rank holddown plate, and in flexible metal First rank sealing ring is set between the non-solder end of pipe and the first rank sealing plate;Some regulations are uniformly installed on first rank sealing plate Bolt, the 3rd rank clamping screw tightens the through being connected with the first rank sealing plate after second-order sealing plate, the chamber of special-shaped weldment Second-order sealing plate is fixed on rigid metal plate front and the screw cap end of regulating bolt is against rigid gold during three rank clamping screws Belong to back, second-order sealing ring, the 3rd rank clamping screw and the are set between second-order sealing plate and rigid metal plate front The junction of second order sealing plate sets the 3rd rank sealing ring;Second-order sealing plate is provided with air admission hole, and air admission hole connects with fourth order sealing Head connection, second-order sealing plate sets fourth order sealing ring with fourth order seal nipple junction.
2. special-shaped weldment auxiliary helium according to claim 1 surveys device, it is characterized in that:The fourth order seal nipple bag The first connecting tube, the second connecting tube, clip, connecting tube sealing ring, connecting tube seal ring bracket are included, the first connecting tube connects with second The joint of adapter docking, the first connecting tube and the second connecting tube opens up and connecting tube seal ring bracket is set in groove, groove, even Adapter sealing ring is enclosed on outside connecting tube seal ring bracket, is locked together the first connecting tube and the second connecting tube simultaneously by clip Compress connecting tube sealing ring.
3. special-shaped weldment auxiliary helium according to claim 1 surveys device, it is characterized in that:First rank sealing ring is placed into In the sealed groove of single order sealing plate.
4. special-shaped weldment auxiliary helium according to claim 1 surveys device, it is characterized in that:Second-order sealing ring is placed into just In the property positive sealed groove of metallic plate.
CN201720074036.3U 2017-01-21 2017-01-21 Special-shaped weldment auxiliary helium surveys device Expired - Fee Related CN206399607U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720074036.3U CN206399607U (en) 2017-01-21 2017-01-21 Special-shaped weldment auxiliary helium surveys device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720074036.3U CN206399607U (en) 2017-01-21 2017-01-21 Special-shaped weldment auxiliary helium surveys device

Publications (1)

Publication Number Publication Date
CN206399607U true CN206399607U (en) 2017-08-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720074036.3U Expired - Fee Related CN206399607U (en) 2017-01-21 2017-01-21 Special-shaped weldment auxiliary helium surveys device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108458919A (en) * 2018-02-09 2018-08-28 中国石油大学(华东) A kind of sealed connection connector, cable crushing test system and connection method
WO2023004865A1 (en) * 2021-07-29 2023-02-02 长鑫存储技术有限公司 Leak detection trolley and leak detection method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108458919A (en) * 2018-02-09 2018-08-28 中国石油大学(华东) A kind of sealed connection connector, cable crushing test system and connection method
CN108458919B (en) * 2018-02-09 2024-04-05 中国石油大学(华东) Sealing connection joint, cable crushing test system and connection method
WO2023004865A1 (en) * 2021-07-29 2023-02-02 长鑫存储技术有限公司 Leak detection trolley and leak detection method

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GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: 215316 Huanqing Road 668, High-tech Industrial Park, Kunshan Development Zone, Suzhou City, Jiangsu Province

Patentee after: FUYAO SEMICONDUCTOR (KUNSHAN) Co.,Ltd.

Address before: 215316 Huanqing Road 668, High-tech Industrial Park, Kunshan Development Zone, Suzhou City, Jiangsu Province

Patentee before: FUYAO PRECISION COMPONENTS (KUNSHAN) CO.,LTD.

CP01 Change in the name or title of a patent holder
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170811

Termination date: 20220121

CF01 Termination of patent right due to non-payment of annual fee