CN206357455U - Accurate control silicon chip slicing device - Google Patents

Accurate control silicon chip slicing device Download PDF

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Publication number
CN206357455U
CN206357455U CN201621320966.4U CN201621320966U CN206357455U CN 206357455 U CN206357455 U CN 206357455U CN 201621320966 U CN201621320966 U CN 201621320966U CN 206357455 U CN206357455 U CN 206357455U
Authority
CN
China
Prior art keywords
cutting
base
slide way
screw mandrel
longitudinal rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201621320966.4U
Other languages
Chinese (zh)
Inventor
尤梦蝶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Mingzhu Turbocharger Manufacturing Co Ltd
Original Assignee
Wuxi Mingzhu Turbocharger Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuxi Mingzhu Turbocharger Manufacturing Co Ltd filed Critical Wuxi Mingzhu Turbocharger Manufacturing Co Ltd
Priority to CN201621320966.4U priority Critical patent/CN206357455U/en
Application granted granted Critical
Publication of CN206357455U publication Critical patent/CN206357455U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model is related to silicon wafer processing equipment technical field, specially a kind of accurate control silicon chip slicing device, it can realize the sectioning of silicon chip automatically, ensure cutting accuracy, it includes base, the cross slide way of two symmetrical parallel arrangements is installed on base, Cutting platform is provided with by transverse slider on cross slide way, cutting clamper is installed on Cutting platform, in the middle of two cross slide ways, screw mandrel is installed on base, Cutting platform passes through feed screw nut's connection wire rod, screw mandrel connection wire rod motor, on the outside of two cross slide ways, it is provided with base and the orthogonal longitudinal rail of cross slide way, cleavage block is provided with by longitudinal sliding block on longitudinal rail, rotating shaft is installed on cleavage block, rotating shaft one end close to cross slide way is provided with cutting wheel, cleavage block connects zigzag tread patterns cylinder, in longitudinal rail side, scale parallel with it is installed on base.

Description

Accurate control silicon chip slicing device
Technical field
The utility model is related to silicon wafer processing equipment technical field, is specially a kind of accurate control silicon chip slicing device.
Background technology
Because element silicon is one of reserves most abundant element in the earth's crust, silicon chip is the most important material of photovoltaic industry, is led to Cross the integrated substantial amounts of transistor formation microelectronic chip on silicon chip.Silicon chip is typically all by silicon rod dicing, existing one As be all by manually complete cutting, cutting efficiency is low, and cutting accuracy is also low, it is impossible to ensure Si wafer quality.
Utility model content
In order to solve the above problems, the utility model provides a kind of accurate control silicon chip slicing device, and it can be automatic Realize the sectioning of silicon chip, it is ensured that cutting accuracy.
Its technical scheme is such:A kind of accurate control silicon chip slicing device, it is characterised in that it includes base, institute State and cutting is provided with by transverse slider on the cross slide way that two symmetrical parallel arrangements are provided with base, the cross slide way Cutting clamper is installed on platform, the Cutting platform, in the middle of two cross slide ways, silk is installed on the base Bar, the Cutting platform connects the screw mandrel, the screw mandrel connection wire rod motor, in two horizontal strokes by feed screw nut On the outside of direction guiding rail, be provided with the base with the orthogonal longitudinal rail of the cross slide way, lead on the longitudinal rail Cross longitudinal sliding block and be provided with cleavage block, the cleavage block and rotating shaft is installed, close to described rotating shaft one end of the cross slide way Cutting wheel is installed, the rotating shaft other end passes through driven pulley, belt and driving wheel connection cutting motor, the cleavage block Zigzag tread patterns cylinder is connected, scale parallel with it is installed on the longitudinal rail side, the base, the transverse direction is led Rail two ends are separately installed with limited block, and the distance of the limited block to the cutting wheel is corresponding with the size of the Cutting platform.
After structure of the present utility model, it would be desirable to which the silicon rod of cutting is arranged on cutting clamper, zigzag tread patterns cylinder Driving cleavage block movement moves into place cutting wheel, and screw mandrel motor, which works, realizes the movement of Cutting platform, and silicon rod is by cutting Automatic realize of wheel is cut to cut, and longitudinal rail side is provided with scale, can accurately control the position of cutting wheel, realization is cut out Silicon chip accurate size, limited block play a part of limit Cutting platform, it is ensured that the cutting of silicon chip is in place.
Brief description of the drawings
Fig. 1 is the utility model structural representation.
Embodiment
As shown in Figure 1, a kind of accurate control silicon chip slicing device, it includes being provided with two on base 1, base 1 symmetrically It is provided with Cutting platform 3, Cutting platform 3 and is provided with by transverse slider on the cross slide way 2 of parallel arrangement, cross slide way 2 Cutting clamper 4, in the middle of two cross slide ways 2, is provided with screw mandrel 5, Cutting platform 3 passes through feed screw nut's connecting filament on base 1 Bar 5, the connection wire rod motor 7 of screw mandrel 5 is provided with two outsides of cross slide way 2, base 1 and mutually hung down with cross slide way 2 It is provided with straight longitudinal rail 8, longitudinal rail 8 by longitudinal sliding block on cleavage block 9, cleavage block 9 and rotating shaft 10 is installed, it is close One end of rotating shaft 10 of cross slide way 2 is provided with cutting wheel 11, and the other end of rotating shaft 10 is connected by driven pulley, belt 12 and driving wheel 13 Cutting motor 14 is connect, the connection zigzag tread patterns of cleavage block 9 cylinder 15 is provided with therewith on the side of longitudinal rail 8, base 1 Parallel scale 16, the two ends of cross slide way 2 are separately installed with limited block 6, the distance and Cutting platform of limited block 6 to cutting wheel 11 3 size correspondence.

Claims (1)

1. a kind of accurate control silicon chip slicing device, it is characterised in that it includes being provided with two on base, the base symmetrically It is provided with Cutting platform, the Cutting platform and is pacified by transverse slider on the cross slide way of parallel arrangement, the cross slide way Equipped with cutting clamper, in the middle of two cross slide ways, screw mandrel is installed on the base, the Cutting platform passes through screw mandrel Nut connects the screw mandrel, and the screw mandrel connection wire rod motor on the outside of two cross slide ways, is pacified on the base Equipped with the orthogonal longitudinal rail of the cross slide way, cleavage block is provided with by longitudinal sliding block on the longitudinal rail, Rotating shaft is installed on the cleavage block, described rotating shaft one end close to the cross slide way is provided with cutting wheel, and the rotating shaft is another One end is by driven pulley, belt and driving wheel connection cutting motor, and the cleavage block connects zigzag tread patterns cylinder, described Scale parallel with it is installed, the cross slide way two ends are separately installed with limited block on longitudinal rail side, the base, The distance of the limited block to the cutting wheel is corresponding with the size of the Cutting platform.
CN201621320966.4U 2016-12-05 2016-12-05 Accurate control silicon chip slicing device Expired - Fee Related CN206357455U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621320966.4U CN206357455U (en) 2016-12-05 2016-12-05 Accurate control silicon chip slicing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621320966.4U CN206357455U (en) 2016-12-05 2016-12-05 Accurate control silicon chip slicing device

Publications (1)

Publication Number Publication Date
CN206357455U true CN206357455U (en) 2017-07-28

Family

ID=59371846

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201621320966.4U Expired - Fee Related CN206357455U (en) 2016-12-05 2016-12-05 Accurate control silicon chip slicing device

Country Status (1)

Country Link
CN (1) CN206357455U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106696102A (en) * 2016-12-05 2017-05-24 无锡明珠增压器制造有限公司 Precisely controlled silicon wafer slicing device
CN110919383A (en) * 2019-12-24 2020-03-27 深圳市景方盈科技有限公司 Mechanical claw welding and milling assembly equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106696102A (en) * 2016-12-05 2017-05-24 无锡明珠增压器制造有限公司 Precisely controlled silicon wafer slicing device
CN110919383A (en) * 2019-12-24 2020-03-27 深圳市景方盈科技有限公司 Mechanical claw welding and milling assembly equipment

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Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170728

Termination date: 20171205

CF01 Termination of patent right due to non-payment of annual fee