CN206347933U - A kind of survey gyp tool and system for rotary module center - Google Patents
A kind of survey gyp tool and system for rotary module center Download PDFInfo
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- CN206347933U CN206347933U CN201621346576.4U CN201621346576U CN206347933U CN 206347933 U CN206347933 U CN 206347933U CN 201621346576 U CN201621346576 U CN 201621346576U CN 206347933 U CN206347933 U CN 206347933U
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- connecting rod
- rotary module
- instrument
- recording mechanism
- survey
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- 239000007787 solid Substances 0.000 claims 2
- 230000003287 optical Effects 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001808 coupling Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Abstract
The utility model discloses a kind of survey gyp tool and system for rotary module center, the survey gyp tool includes：Firm banking；Recording mechanism, leaves a trace for the disk surfaces when the rotary module rotates thereon；Bindiny mechanism, be connected the firm banking and the recording mechanism, and the distance between its recording mechanism and the rotary module is kept constant when the rotary module rotates.By the above-mentioned means, when surveying the center of school rotary module with the utility model, saving manpower and materials, simplify operation.
Description
Technical field
The utility model is related to semiconductor applications, and more particularly to a kind of survey gyp for rotary module center has and is
System.
Background technology
In semiconductor fabrication, rotary module is commonly used, and most of rotary module is to the positioning accurate of pivot
Degree requires all higher, so the precision that kind equipment will be periodically to pivot carries out detection calibration.
Traditional survey calibration method is required for being judged by the job result of trial target, partly also needs to be surveyed using instrument
Measure and calculate, very labor intensive material resources, while the service efficiency of equipment can be influenceed.
The content of the invention
The utility model is mainly solving the technical problems that providing a kind of survey gyp tool for rotary module center and being
System, can easily calibrate the center of rotary module.
In order to solve the above technical problems, the scheme that the utility model is used is：A kind of be used in rotary module is provided
The survey gyp tool of the heart, including：
Firm banking；
Recording mechanism, leaves a trace for the disk surfaces when the rotary module rotates thereon；
Bindiny mechanism, be connected the firm banking and the recording mechanism, and is at least rotated in the rotary module
When the distance between its recording mechanism and described rotary module is kept constant.
Wherein, the instrument further comprises：
Retaining mechanism, for the recording mechanism to be lock onto into the bindiny mechanism.
Wherein, the retaining mechanism includes bottom plate, holder and locking member, and the bottom plate and holder are by the connection
Mechanism is clamped in centre, and described bottom plate one end is fixed in folded gripping member one end, and the other end is fixed on described by the locking member
The bottom plate other end.
Wherein, the bindiny mechanism includes fixture and at least two pieces connecting rod, and at least one described connecting rod one end is consolidated
Due to the firm banking, an at least other connecting rod, which is fixed between the recording mechanism, the connecting rod, passes through institute
Fixture is stated to be connected.
Wherein, the fixture is any one in screw assembly, magnetic, vacuum cup, bandage.
Wherein, the connecting rod is plastic bar or metallic rod.
Wherein, the recording mechanism can be moved in the connecting rod and fixed, and can be rotated against, shift position or
The anglec of rotation is different, and the distance between the recording mechanism and described firm banking or angle are different.
Wherein, the recording mechanism is lettering pen, nozzle or generating laser.
Wherein, the firm banking is any one in weight block, vacuum cup.
In order to solve the above technical problems, another technical scheme that the utility model is used is：There is provided a kind of for rotating
The survey calibration system of module centers, including：
Rotary module；And
Any survey gyp for rotary module center has in such scheme.
The beneficial effects of the utility model are：By firm banking, bindiny mechanism and recording mechanism group in the utility model
The survey gyp tool dressed up can easily survey the center of school rotary module, effectively save human and material resources, simplify operation.
Brief description of the drawings
Fig. 1 is that the utility model is used for the structural representation that gyp has an embodiment of surveying at rotary module center；
Fig. 2 is that the utility model is used for the structural representation that gyp has connecting rod in another embodiment of surveying at rotary module center
Figure；
Fig. 3 is that the utility model is used for the structural representation that gyp has connecting rod in another embodiment of surveying at rotary module center
Figure；
Fig. 4 is that the utility model is used for the structural representation that gyp has another embodiment of surveying at rotary module center；
Fig. 5 is to use to survey the operating diagram that gyp's tool surveys school rotary module center in Fig. 4；
Fig. 6 is the schematic diagram after disk is removed in Fig. 5；
Fig. 7 is the structural representation for the survey embodiment of calibration system one that the utility model is used for rotary module center.
Embodiment
The utility model is described in detail with embodiment below in conjunction with the accompanying drawings.
It is used for the structural representation that gyp has an embodiment of surveying at rotary module center referring to Fig. 1, Fig. 1 is the utility model
Figure, the instrument includes：
Firm banking 11, the firm banking can be any one in weight block, vacuum cup.
Recording mechanism 12, leaves a trace for the disk surfaces when the rotary module rotates thereon, the record
Mechanism 12 can be any one in lettering pen, nozzle and generating laser, as long as can be left clearly in disk surfaces
Vestige.
Bindiny mechanism 13, including fixture 131 and at least two pieces connecting rod 132,132, for the fixation that is connected
Base 11 and the recording mechanism 12, the attachment structure 13 can make recording mechanism 12 and institute when the rotary module rotates
State the distance between rotary module and keep constant.
The connecting rod 132 is elongated, and bending is angled in the middle of the connecting rod 133, the connecting rod 133
One end and the firm banking 11 are fixedly connected, and the other end is connected by one end of fixture 131 and the connecting rod 132
It is fixed.
The fixture 131 can be any one in screw assembly, magnetic, vacuum cup, bandage, be easy to the work
The installation of tool, regulation and dismantle, while by unclamping the fixture 131, the connecting rod 132 and the connecting rod 133 it
Between adjustable angle.It is understood that the fixture 131 can also be integrated in the connecting rod 132 or connecting rod 133
In so that the connecting rod 132, connecting rod 133 can also be connected without foreign object.
The instrument also includes retaining mechanism 14, the company for the recording mechanism 12 to be locked to the attachment structure 13
On extension bar 132.The retaining mechanism includes bottom plate 141, holder 142 and locking member 143, the bottom plate 141 and holder
The connecting rod 132 is clamped in centre by 142, and described one end of holder 142 is fixed and described one end of bottom plate 141, the clamping
The other end of part 142 is fixed on the other end of the bottom plate 141 by the locking member 143.The tight latch fitting 143 can be spiral shell
Silk component, unclamps the screw assembly, the position of retaining mechanism 14 can be moved up and down, while recording mechanism 12 can also be rotated
The distance between the difference of angle, shift position or the anglec of rotation, the recording mechanism 12 and described firm banking 11 or angle
It is different.
The connecting rod 132 and connecting rod 133 can be plastic bar or metallic rod.
In other embodiments, sliding sleeve can be provided with the connecting rod 133 and the connecting rod 132, then passes through institute
Fixture 131 is stated to be connected.Referring to Fig. 2, Fig. 2, which is the present invention, surveys the structure that gyp has connecting rod 133 in another embodiment
Schematic diagram.
Refering to Fig. 2, in the present embodiment, the connecting rod 133 is provided with a sliding sleeve 1331 and the sliding sleeve
The bolt 1332 of 1331 couplings, when unclamping the bolt 1332, the sliding sleeve 1331 can be slided in the connecting rod 133
Dynamic, when tightening the bolt 1332, the sliding sleeve 1331 is fixed in the connecting rod 133.
Referring to Fig. 3, in the present embodiment, a sliding sleeve 1321 and the slip also are provided with the connecting rod 132
The bolt 1322 that sleeve pipe 1321 is coupled, when unclamping the bolt 1322, the sliding sleeve 1321 can be in the connecting rod 132
Upper to slide, when tightening the bolt 1322, the sliding sleeve 1321 is fixed in the connecting rod 132.
Fig. 2 and Fig. 3 is referred to together, and the sliding sleeve 1321 can be connected by fixture 131 and the sliding sleeve 1331
Fixation is connect, the fixture 131 can be any one in screw assembly, magnetic, vacuum cup, bandage.When by unclamping
During the fixture 131, the adjustable angle of the sliding sleeve 1321 and the sliding sleeve 1331, the connecting rod 132 with
Angle between the connecting rod 133 is different, so that the angle between recording mechanism 12 and the rotary module is different.Work as needs
When adjusting the distance between the recording mechanism 12 and described rotary module, the bolt 1332 is unclamped, the slip cap is slided
Pipe 1331, so that the horizontal range between the recording mechanism 12 and the rotary module is adjusted, while bolt can also be unclamped
1322, connecting rod 132 is adjusted, the vertical range between the recording mechanism 12 and the rotary module is adjusted.
Refering to Fig. 4, Fig. 4 is that the utility model is used for the structural representation that gyp has another embodiment of surveying at rotary module center
Figure, the instrument includes：Firm banking 21, recording mechanism 22, bindiny mechanism 23 and retaining mechanism 24.
The firm banking 21, recording mechanism 22 and locking mechanism 24 and the firm banking 11 in above-described embodiment, record
Mechanism 12 and the structure of retaining mechanism 14 are same or similar, will not be repeated here.
The bindiny mechanism 23 includes fixture 231, fixture 232, connecting rod 233, connecting rod 234 and connecting rod 235.
The fixture 231, fixture 232 can be any in screw assembly, magnetic, vacuum cup and bandage
Kind.
The connecting rod 233, connecting rod 234 and connecting rod 235 are strip, and one end of the connecting rod 233 leads to
Tension latch mechanism 24 and the recording mechanism 22 are tightly locked together, the other end pass through fixture 231 and the connecting rod 234 one
End is connected and fixed, and the other end of the connecting rod 234 is connected by one end of fixture 232 and the connecting rod 235
It is fixed together, the other end and the firm banking 21 of the bindiny mechanism 235 are fixedly connected.
The fixture can be any one in screw assembly, magnetic, vacuum cup, bandage.
In other embodiment, sliding sleeve and institute can be provided with the connecting rod 233, connecting rod 234 and connecting rod 235
The bolt that sliding sleeve is coupled is stated, then is fixedly connected by fixture 231 with fixture 232, the connecting rod 233, connection
Bar 234, connecting rod 235 and connecting rod in above-described embodiment 132, connecting rod 133 structure it is same or similar, herein no longer go to live in the household of one's in-laws on getting married
State.
By the setting of sliding sleeve, the recording mechanism 22, connecting rod 233, connecting rod 234 and connecting rod 235 are locked
Relative position can be relatively moved, and relative angle is adjustable, the regulation of relative position or angle between, adjust the survey school
The distance between instrument and the rotary module or angle.
Referring to Fig. 5, Fig. 5 is operating diagram when using the center of the instrument survey school rotary module in the present embodiment.This
Illustrated in embodiment using lettering pen as recording mechanism 22.
When surveying the center of school rotary module using survey gyp's tool in the present embodiment, disk 26 is placed in the rotating mould
On block 25, coordinate the regulation connecting rod 233, connecting rod 234, connecting rod 235 and recording mechanism 22 so that recording mechanism 22
Writing end flip the surface of the disk 26, by rotating the disk clockwise or counterclockwise 26 1 weeks, the record
Mechanism 22 will leave a circle vestige 27 on the surface of the disk 26, after the disk 26 rotation terminates, take out disk 26.
Referring to Fig. 6, Fig. 6 is the schematic diagram of the disk 26 taken out from the rotary module 25.
Vestige 27 is the vestige that the recording mechanism 22 leaves on the surface of disk 26, using vernier caliper measurement institute
State the relative position of vestige 27 and the disk 26：Measure the relatively described left side of disk 26 of the vestige 27 on same level straight line
Edge apart from a and the vestige 27 on c, and same level straight line of the relatively described right hand edge of disk 26 of the vestige 27
Relatively described disk top edge apart from b and the relatively described lower edge of disk 26 of the vestige 27 apart from d, when measure a,
After b, c, d value, it is assumed that a>C, b>D, then the actual center 272 of the rotary module with theoretic center 271 in the x direction
Offset be：(a-c) offset on/2, y directions is：(b-d)/2, according to the x directions of the calculating and the y directions
The practical center 272 of rotary module 25 described in offset calibration.
Refering to Fig. 7, Fig. 7 is that the utility model is used for the structural representation for the embodiment of system one that rotary module central campus is surveyed
Figure, the system includes：
Disk can be laid on rotary module 32, the rotary module 32；And
It is used for the instrument 31 that rotary module central campus is surveyed described in any of the above-described embodiment, the instrument 31 is arranged on
The appropriate location of the rotary module 32, is easy to school to survey the center of the rotary module 32, and the center of rotary module 32 is surveyed in school
Method it is identical with the method in above-described embodiment, will not be repeated here.
It is different from the survey being assembled into prior art, the utility model by firm banking, bindiny mechanism and recording mechanism
Gyp's tool can easily survey the center of school rotary module, effectively save human and material resources, simplify operation.
Embodiment of the present utility model is the foregoing is only, the scope of the claims of the present utility model is not thereby limited, it is all
It is the equivalent structure or equivalent flow conversion made using the utility model specification and accompanying drawing content, or directly or indirectly uses
In other related technical fields, similarly it is included in scope of patent protection of the present utility model.
Claims (10)
1. a kind of survey gyp for rotary module center has, it is characterised in that including：
Firm banking；
Recording mechanism, leaves a trace for the disk surfaces when the rotary module rotates thereon；
Bindiny mechanism, be connected the firm banking and the recording mechanism, and at least makes when the rotary module rotates
The distance between its recording mechanism and described rotary module keep constant.
2. instrument as claimed in claim 1, it is characterised in that further comprise：
Retaining mechanism, for the recording mechanism to be lock onto into the bindiny mechanism.
3. instrument as claimed in claim 2, it is characterised in that
The retaining mechanism includes bottom plate, holder and locking member, and the bottom plate and holder clamp the bindiny mechanism
In centre, described bottom plate one end is fixed in folded gripping member one end, and it is another that the other end is fixed on the bottom plate by the locking member
End.
4. the instrument as described in any one of claims 1 to 3, it is characterised in that
The bindiny mechanism includes fixture and at least two pieces connecting rod, and at least one described connecting rod one end is fixed on described solid
Determine base, an at least other connecting rod is fixed to be connected between the recording mechanism, the connecting rod by the fixture
Connect fixation.
5. instrument as claimed in claim 4, it is characterised in that the fixture be screw assembly, magnetic, vacuum cup,
Any one in bandage.
6. instrument as claimed in claim 4, it is characterised in that the connecting rod is plastic bar or metallic rod.
7. instrument as claimed in claim 4, it is characterised in that the recording mechanism can be moved and solid in the connecting rod
Fixed, and can rotate against, shift position or the anglec of rotation are different, the distance between the recording mechanism and described firm banking or
Angle is different.
8. the instrument as described in any one of claims 1 to 3, it is characterised in that the recording mechanism is lettering pen, nozzle or swashed
Optical transmitting set.
9. the instrument as described in any one of claims 1 to 3, it is characterised in that the firm banking is weight block, vacuum cup
In any one.
10. a kind of survey calibration system for rotary module center, it is characterised in that including：
Rotary module；And
Instrument as described in any one of claim 1~9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621346576.4U CN206347933U (en) | 2016-12-08 | 2016-12-08 | A kind of survey gyp tool and system for rotary module center |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621346576.4U CN206347933U (en) | 2016-12-08 | 2016-12-08 | A kind of survey gyp tool and system for rotary module center |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206347933U true CN206347933U (en) | 2017-07-21 |
Family
ID=59323133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621346576.4U Active CN206347933U (en) | 2016-12-08 | 2016-12-08 | A kind of survey gyp tool and system for rotary module center |
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| Country | Link |
|---|---|
| CN (1) | CN206347933U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108452406A (en) * | 2018-05-03 | 2018-08-28 | 秦承志 | A kind of department of anesthesia's anaesthetic amount detecting device |
-
2016
- 2016-12-08 CN CN201621346576.4U patent/CN206347933U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108452406A (en) * | 2018-05-03 | 2018-08-28 | 秦承志 | A kind of department of anesthesia's anaesthetic amount detecting device |
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