CN206310893U - Drying oven hot air circulation structure - Google Patents

Abstract

A kind of drying oven hot air circulation structure, the drying oven（1）Including furnace chamber（11）, furnace chamber（11）One end top sets air inlet（111）, other end top sets out air port（112）；It is characterized in that：The furnace chamber（11）It is the uiform section body of insertion, and also including a hot air apparatus（2）, the hot air apparatus（2）Including a housing（21）, housing（21）Interior spread configuration heating rod（22）, housing（21）One end open through pipeline connect a blower fan（23）, and housing（21）Another end opening connect the furnace chamber through pipeline（11）Air inlet（111）；Housing（21）Inside it is additionally provided with temperature sensor（24）, temperature sensor（24）Temperature sensor produces signal to control heating rod（22）Work.

Description

Drying furnace hot air circulation structure

technical field

The utility model relates to a solar silicon chip manufacturing equipment, in particular to a hot air circulation structure of a drying furnace.

Background technique

In today's production process of silicon wafers for crystalline silicon solar cells, a drying furnace is required for drying the slurry.

The existing dry noise furnace includes a furnace cavity, and a large number of heating lamp tubes are arranged in the upper part of the furnace cavity, and a conveying network chain is passed from one end to the other end in the furnace cavity, and the upper surface of the conveying network chain is used to place silicon wafers. , One end of the furnace chamber is provided with an air inlet to let compressed air at normal temperature, and the other end is provided with an air outlet, that is, there is continuous air flow in the furnace chamber to take away the organic waste gas in the furnace chamber. There are following problems in prior art:

1. There is a partition baffle in the furnace cavity, which makes the air flow unsmooth, resulting in excessive accumulation of exhaust gas (organic matter) in the furnace, causing oil on the conveyor network chain and oil dripping in the furnace cavity;

2. Since the air inlet is fed with compressed air at normal temperature, and the furnace process requires a temperature of about 300°, it is easy to cause uneven temperature in the furnace, that is, eventually lead to uneven heating of the product.

Contents of the invention

The purpose of the utility model is to provide a drying furnace hot air circulation structure to solve the problems of poor air flow and uneven temperature in the furnace cavity.

In order to achieve the above purpose, the technical solution adopted by the utility model is: a drying furnace hot air circulation structure, the drying furnace includes a furnace chamber, the top of one end of the furnace chamber is provided with an air inlet, and the top of the other end is provided with an air outlet; the furnace chamber is It is a continuous body with equal cross-section, and also includes a hot air device. The hot air device includes a shell, and heating rods are arranged in the shell. One end opening of the shell is connected to a fan through a pipe, and the other end of the shell is connected to the air blower through a pipe. The air inlet of the furnace cavity is described; a temperature sensor is also provided in the casing, and the temperature sensor senses the temperature to generate a signal to control the work of the heating rod.

In the above solution, each of the heating rods is vertically arranged perpendicular to the horizontal direction; the opening of the casing connected to the fan and the opening connected to the air inlet are opened at both ends of the casing in the horizontal direction.

In the above solution, the hot air device is arranged on the outer top surface of the oven cavity of the drying oven.

The principle and advantages of the utility model: the utility model heats the air through the hot air device to generate hot air that meets the process temperature requirements in the furnace cavity, and sends the hot air into the furnace cavity to ensure the uniformity of heating the product, and because the furnace cavity is The through body of equal cross-section has no obstructions in the flow direction, so that the waste discharge has no wind resistance and solves the problem of poor waste discharge.

Description of drawings

Fig. 1 is the structural representation of the drying furnace applying the utility model embodiment;

Fig. 2 is a schematic cross-sectional view of A-A of Fig. 1 .

In the above drawings: 1. Drying furnace; 11. Furnace cavity; 111. Air inlet; 112. Air outlet; 12. Transmission network chain; 13 Heating lamp tube; 2. Hot air device; 21. Shell; ; 23, fan; 24, temperature sensor.

detailed description

Below in conjunction with accompanying drawing and embodiment the utility model is further described:

Embodiment: A hot air circulation structure of a drying furnace, as shown in Fig. 1 and Fig. 2:

Referring to Fig. 1 and Fig. 2, the drying furnace 1 includes a furnace cavity 11, a transmission network chain 12 and a heating lamp tube 13, an air inlet 111 is set on the top of one end of the furnace cavity 11, and an air outlet 112 is set on the top of the other end, and the furnace cavity 11 is A through body of equal cross-section.

Referring to Fig. 1 and shown in Fig. 2, the hot air circulation structure of the drying furnace also includes a hot air device 2. Heating rods 22 are arranged inside, and one end opening of the housing 21 is connected to a fan 23 through a pipe, while the other end opening of the housing 21 is connected to the air inlet 111 of the furnace chamber 11 through a pipe. A temperature sensor 24 is also provided in the casing 21 , and the temperature sensor 24 senses temperature to generate a signal to control the operation of the heating rod 22 .

Referring to Fig. 1 and Fig. 2, each of the heating rods 22 is arranged vertically perpendicular to the horizontal direction; both ends.

Referring to FIG. 1 and FIG. 2 , the hot air device 2 is arranged on the outer top surface of the oven cavity of the drying furnace 1 .

Specifically, the heating rod 22 may be an electric heating rod or a heating lamp, and the temperature sensor 24 may be a thermocouple.

When this embodiment is working, the air is sucked into the hot air device 2 by the fan 23, and the heating rod 22 of the hot air device 2 heats the air, and the air is heated to become hot air that meets the process temperature requirements in the furnace cavity (control accuracy can reach ±2°) , the hot air is sent into the furnace chamber 11 to make the temperature in the furnace chamber 11 more uniform and ensure the uniformity of heating the product. Moreover, since the furnace cavity 11 is a continuous body with equal cross-section, there is no obstruction in the flow direction, so that there is no wind resistance in waste discharge, and the problem of poor waste discharge is solved.

The above-mentioned embodiments are only to illustrate the technical conception and characteristics of the present utility model, and its purpose is to allow those familiar with this technology to understand the content of the utility model and implement it accordingly, and not to limit the protection scope of the utility model. All equivalent changes or modifications made according to the spirit of the utility model shall fall within the protection scope of the utility model.

Claims (3)

1. a kind of drying oven hot air circulation structure, the drying oven（1）Including furnace chamber（11）, furnace chamber（11）One end top sets air intake Mouthful（111）, other end top sets out air port（112）；It is characterized in that：The furnace chamber（11）It is the uiform section body of insertion, and Also include a hot air apparatus（2）, the hot air apparatus（2）Including a housing（21）, housing（21）Interior spread configuration heating rod（22）, Housing（21）One end open through pipeline connect a blower fan（23）, and housing（21）Another end opening connect the furnace chamber through pipeline （11）Air inlet（111）；Housing（21）Inside it is additionally provided with temperature sensor（24）, temperature sensor（24）Temperature sensor produces letter Number controlling heating rod（22）Work.

2. drying oven hot air circulation structure according to claim 1, it is characterised in that：Each described heating rod（22）Perpendicular to Horizontal direction is arranged vertically；The housing（21）Give a dinner for a visitor from afar machine（23）Opening and tap into air port（111）Opening be to be opened in shell Body（21）Two ends in horizontal direction.

3. drying oven hot air circulation structure according to claim 1, it is characterised in that：The hot air apparatus（2）It is arranged at dry Dry stove（1）The outer top surface of furnace chamber on.