CN206271668U - A kind of machine vision flight system - Google Patents
A kind of machine vision flight system Download PDFInfo
- Publication number
- CN206271668U CN206271668U CN201620520936.1U CN201620520936U CN206271668U CN 206271668 U CN206271668 U CN 206271668U CN 201620520936 U CN201620520936 U CN 201620520936U CN 206271668 U CN206271668 U CN 206271668U
- Authority
- CN
- China
- Prior art keywords
- semi
- pick
- gear
- head
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Abstract
The utility model provides a kind of machine vision flight system, including pedestal, pick-up head for picking up chip, CCD camera, speculum, semi-permeable and semi-reflecting mirror, substrate and guide rail, substrate opposite base is fixedly installed, pedestal can be moved left and right along guide rail, CCD camera is fixedly installed on the top of pedestal, first gear and second gear are further fixedly arranged on pedestal, connect or be intermeshed by belt transmission between first gear and second gear, the sidepiece of pick-up head is fixedly installed the spur rack engaged with first gear and/or second gear, first gear and/or second gear are rotated and spur rack can be driven to move up and down so as to drive pick-up head to move up and down, be could be aware that more than, by gear parameter reasonable in design, can be with so that speculum and pick-up head will not be interfered in motion process.
Description
Technical field
The utility model is related to flip-chip mounting technology field, and in particular to a kind of machine vision flight system.
Background technology
Machine vision refers to imitate human eye using machine to measure and judge, to realize production flexibilityization with automation
Technological means.NI Vision Builder for Automated Inspection in upside-down mounting equipment is to obtain core on production line by image-pickup device (CMOS or CCD)
The image of piece or substrate, and electric signal is converted thereof into, special image processing system is sent to, to obtain the form of object
Information, then according to information such as pixel distribution, brightness and the colors for obtaining, is transformed into data signal, then by picture system pair
These signals carry out various computings to extract the feature of photographic subjects, and then are moved come the equipment for controlling scene according to the result for differentiating
Make.
Workpiece is accurately clearly obtained in upside-down mounting equipment and the image of station is installed, CCD camera in vision system with
Good optical centering mode is set up between subject, i.e., during mechanism for picking absorption workpiece to attachment, CCD
Camera can capture the image of workpiece by the light path for designing, and image will clearly be easy to analyzing and processing enough；Similarly, pick up
Take mechanism and move to and install after station using designed light path, CCD camera can absorb the image for installing station.To meet
Upside-down mounting equipment high accuracy, high-quality, efficient demand, reach the purpose of efficient fast imaging, and design is a kind of simple, effective
Optical centering mode is most important.
The optical centering system of current most upside-down mounting equipment uses two CCD cameras, and one is installed on straight up
Fixed position between pickup position and attachment position, so during pick-up head absorption chip is to substrate motion, by shooting
Machine top, just can get the image of element；Another is fixedly mounted on mechanism for picking, when pickup model reaches attachment work
During position, the image for installing station just can be absorbed.This optical centering system is simpler, and image quality is preferable and beneficial to control,
But have the disadvantage to need in element imaging process by mechanism for picking move to it is static look up CCD tops and make short stay, reduce
The operating efficiency of attachment, and mechanism for picking needs during motion to increase extra start and stop, increases to a certain extent
The vibration of pick-up head, influences paster quality.Another scheme is only to obtain element and substrate position using a set of CCD camera system
The scheme put, when mechanism for picking absorption chip moves to installation station top, is now placed in chip and peace by a set of light path system
Between dress position, by the image of light path design acquisition chip and substrate simultaneously, with the optics pair realized chip and install station.Should
The alignment precision of scheme is higher, but needs to remove light path system during chip bonding, reduces the operating efficiency of attachment.
Utility model content
In view of the above, in order to solve at least one of which technical problem, the utility model is necessary to provide a kind of machine
Device visual flight system.
The technical solution adopted in the utility model is：A kind of machine vision flight system, including pedestal, for picking up chip
Pick-up head, CCD camera, speculum, semi-permeable and semi-reflecting mirror, substrate and guide rail, substrate opposite base is fixedly installed, and pedestal can
Moved left and right along guide rail, CCD camera is fixedly installed on the top of pedestal, first gear and are further fixedly arranged on pedestal
Two gears, are connected or are intermeshed between first gear and second gear by belt transmission, and the sidepiece of pick-up head is fixed and set
The spur rack engaged with first gear and/or second gear is put, first gear and/or second gear are rotated and can driven on spur rack
So as to drive pick-up head to move up and down, speculum is driven by first gear and is in oblique movement, half with the base of pedestal for lower movement
The saturating inclined base angle for being fixed on pedestal of half-reflecting mirror, speculum is moved downward first gear driving effect is oblique, together
When pick-up head pickup chip and move upwards, after pick-up head reaches precalculated position, chip can pass through in the imaging of speculum
Semi-permeable and semi-reflecting mirror is captured by CCD camera.
Further, the reflecting surface of semi-permeable and semi-reflecting mirror in top and transmission plane in bottom, semi-permeable and semi-reflecting mirror and pedestal
On set in 45 ° of angles near the base angle of the transmission plane side of semi-permeable and semi-reflecting mirror；
Speculum is set with the base angle of relative semi-permeable and semi-reflecting mirror side in 135 ° of angles.
Further, pick-up head includes upper and lower two extreme positions；
Pick-up head picks up chip in lower limit position, and speculum avoids pick-up head completely；
Pick-up head has been completed to pick up the action of chip in upper extreme position, and speculum is moved obliquely so that chip exists
The imaging of speculum can be captured by semi-permeable and semi-reflecting mirror by CCD camera.
Further, pick-up head also includes motion control mechanism, and motion control mechanism is used to control and optionally adjust
The radial direction and axial movement of whole pick-up head and/or substrate.
Further, machine vision flight system also includes analysis and processing module, analysis and processing module and motion control machine
Structure signal is connected, and analysis and processing module is used to obtain the image of CCD camera capture and carry out treatment to be calculated control signal, point
Analysis processing module sends control signals to motion control mechanism and then controls pick-up head to be moved.
Further, machine vision flight system also includes the first lamp source and the second lamp source, and the first lamp source is located at semi-transparent
The side of the reflecting surface of half-reflecting mirror, and the second lamp source is located at the side of the transmission plane of semi-permeable and semi-reflecting mirror.
Further, pick-up head complete pickup chip and be in upper extreme position after, pick-up head along side from guide rail to substrate
To motion until the alignment lenses substrate of CCD camera, now keeps the second lamp source to close, the first lamp source is opened, so as to trigger CCD
Camera is taken pictures and is sent to analysis and processing module and processed, and analysis and processing module is calculated and sends a control signal to motion
Controlling organization, so as to control the pick-up head to carry out position and angle calibration system to chip.
Further, after pick-up head is completed to the position of chip and angle calibration system, the first lamp source is closed, opens the second lamp
Source, CCD camera obtains the position of substrate and the image of angle, and sends to analysis and processing module, analysis and processing module and then meter
Calculation draws control signal, and powered motion controlling organization carries out the calibration of position and angle to substrate.
Further, machine vision flight system is at the position of calibration substrate and angle, the light path of chip to CCD camera
Distance is equal with the optical path distance of substrate to CCD camera.
Compared to prior art, machine vision flight system of the present utility model, using gear mechanism by the liter of pick-up head
Drop conversion of motion is the flexible reciprocating motion of speculum, by design gear parameter, it is possible to achieve speculum is moved not interfere and picked up
Take head picks up playing function.
Preferred embodiment of the present utility model and its advantage, will be with reference to specific embodiment further specifically
It is bright.
Brief description of the drawings
Accompanying drawing is further understood to of the present utility model for providing, and constitutes a part for specification, and following
Specific embodiment is used to explain the utility model together, but should not constitute to limitation of the present utility model.In the accompanying drawings,
Fig. 1：The organigram of machine vision flight system of the present utility model.
Fig. 2：The pick-up head of the machine vision flight system shown in Fig. 1 completes the schematic diagram of pickup chip.
Fig. 3：The schematic diagram of the acquisition chip image of the machine vision flight system shown in Fig. 1.
Fig. 4：The schematic diagram of the acquisition substrate image of the machine vision flight system shown in Fig. 1.
Fig. 5：The semi-permeable and semi-reflecting mirror of the machine vision flight system shown in Fig. 1 is with speculum when substrate image is obtained
Relative position schematic diagram.
Each component names and its label
| Pick-up head：1 | Substrate：5 | Chip：9 | Guide rail：13 |
| CCD camera：2 | First gear：6 | First lamp source：10 | |
| Speculum：3 | Second gear：7 | Second lamp source：11 | |
| Semi-permeable and semi-reflecting mirror：4 | Spur rack：8 | Pedestal：12 |
Specific embodiment
Specific embodiment of the present utility model is described in detail below in conjunction with accompanying drawing.It should be appreciated that herein
Described specific embodiment is merely to illustrate and explains the utility model, is not limited to the utility model.
Fig. 1, Fig. 2 are referred to, the utility model preferred embodiment provides a kind of machine vision flight system, the machine vision
Flight system includes pedestal 12, the pick-up head 1 for picking up chip, CCD camera 2, speculum 3, semi-permeable and semi-reflecting mirror 4, substrate 5
And guide rail 13, the opposite base 12 of substrate 5 is fixedly installed, and pedestal 12 can be moved left and right along guide rail 13, such that it is able to drive
Pick-up head 1 and CCD camera 2 are moved left and right, and CCD camera 2 is fixedly installed on the top of pedestal 12, is also fixedly installed on pedestal 12
There are first gear 6 and second gear 7, connect or be intermeshed by belt transmission between first gear 6 and second gear, pick up
The sidepiece for taking first 1 is fixedly installed the spur rack 8 engaged with first gear 6 and/or second gear 7, first gear 6 and/or second
Gear 7 is rotated can drive spur rack 8 to move up and down so as to drive pick-up head 1 to move up and down, and speculum 3 is driven by first gear 6
And with the base of pedestal 12 be in oblique movement, the inclined base angle for being fixed on pedestal 12 of semi-permeable and semi-reflecting mirror 4, speculum 3
Move downward the driving effect of first gear 6 is oblique, while the pickup chip 9 of pick-up head 1 and moving upwards, reached in pick-up head 1
After precalculated position, chip 9 can be captured by semi-permeable and semi-reflecting mirror 4 in the imaging of speculum 3 by CCD camera 2.
By above description, those skilled in the art could be aware that, by gear parameter reasonable in design, it is possible to
So that speculum 3 and pick-up head 1 will not be interfered in motion process.Preferably, referring to Fig. 2-Fig. 4, according to the present embodiment
A central preferred embodiment, the reflecting surface of semi-permeable and semi-reflecting mirror 4 is in top and transmission plane in bottom, semi-permeable and semi-reflecting mirror
4 are set with the base angle of the transmission plane side of close semi-permeable and semi-reflecting mirror 4 on pedestal 12 in 45 ° of angles；Speculum 3 with it is relative
The base angle of the side of semi-permeable and semi-reflecting mirror 4 is set in 135 ° of angles.Can so cause that chip 9 can be with the imaging of speculum 3
More clear and complete is captured by semi-permeable and semi-reflecting mirror 4 by CCD camera 2.
Similarly, as shown in Fig. 2 after chip 9 has been drawn or mounted to pick-up head 1, being lifted up, first gear is driven
6 rotate counterclockwises, first gear 6 passes through the rotate counterclockwise of belt drive second gear 7, so that speculum 3 is in first gear 6
Extended downwardly under driving, the imaging operation of the chip 9 after being easy to.
As shown in figure 1, when pick-up head 1 moves downward absorption chip 9 or pasting chip 9, first gear 6 with pick-up head
Make clockwise rotation under the engagement of spur rack 8 on 1, and dextrorotation transhipment is made by belt drive second gear 7
Dynamic, first gear 6 is engaged by with the spur rack on speculum 3, speculum 3 is bounced back upwards, so as to avoid and pick-up head 1
Interfere, influence the absorption of chip 9.
A preferred embodiment according to the present embodiment, pick-up head 1 includes upper and lower two extreme positions, and pick-up head 1 exists
During lower limit position, chip 9 is picked up, speculum 3 avoids pick-up head 1 completely；
Pick-up head 1 has been completed to pick up the action of chip 9 in upper extreme position, and speculum 3 is moved obliquely so that core
Piece 9 can be captured by semi-permeable and semi-reflecting mirror 4 in the imaging of speculum 3 by CCD camera 2.
A preferred embodiment according to the present embodiment, pick-up head 1 also includes motion control mechanism, motion control mechanism
Adjust for controlling and optionally radial direction and the axial movement of pick-up head 1 and/or substrate 5.
A preferred embodiment according to the present embodiment, machine visual flight system also includes analysis and processing module,
Analysis and processing module is connected with motion control mechanism signal, and the image that analysis and processing module is used to obtain CCD camera capture is gone forward side by side
Row treatment is calculated control signal, and analysis and processing module sends control signals to motion control mechanism and then controls pick-up head
Moved.Referring to Fig. 3 and Fig. 4, the machine vision flight system of the present embodiment also includes the first lamp source 10 and the second lamp source
11, the first lamp source 10 is located at the side of the reflecting surface of semi-permeable and semi-reflecting mirror 4, and the second lamp source 11 is located at semi-permeable and semi-reflecting mirror 4
The side of transmission plane.
In imaging session, when pick-up head 1 has drawn flip-chip 9, pedestal 12 is moved through along guide rail 13 to the direction of substrate 5
Cheng Zhong, triggers the first lamp source 10 first, opens the first lamp source 10, keeps the second lamp source 11 to close, and trigger CCD camera 2 and clap
According to.Now, in the presence of the light intensity of upside, semi-permeable and semi-reflecting mirror 4 is changed into a completely reflecting mirror, combines by with speculum 3
Effect, makes CCD camera 2 photograph the image of chip 9, and motion control mechanism completes the calibration to chip 9, the calibration to chip 9
Mainly its position and angle are adjusted.
Pick-up head 1 completes, to after the position of chip 9 and angle calibration system, closing the first lamp source 10, to open the second lamp source 11, this
When, in the presence of the light intensity of downside, semi-permeable and semi-reflecting mirror 4 is changed into a full impregnated mirror, and CCD camera 2 can directly photograph substrate 5
Image, therefore CCD camera 2 obtain substrate 5 the image comprising position and angle information, and send to analysis and processing module,
Analysis and processing module and then control signal is calculated, powered motion controlling organization carries out the calibration of position and angle to substrate 5.
For single CCD camera imaging system be likely encountered due to chip 9 and substrate 5 and the optical path distance of CCD camera 2
The different and focusing problem that is likely to occur, only need to be adjusted to suitable position by light path system, make chip 9 to the light of CCD camera 2
Road distance is equal with the optical path distance of substrate 5 to CCD camera 2 can be avoided.As shown in figure 5, need to only make L1+L2=L3, then core
Piece 9 is then equal to substrate 5 to the optical path distance of CCD camera 2 to the optical path distance of CCD camera 2, it is to avoid the automatic tune of CCD camera
Jiao, such that it is able to select tight shot.
The flow of whole chip attachment, seeks to complete the alignment between chip and substrate attachment station.Pick-up head is drawn
The position of chip is unknown, and the orientation that substrate is laid is also unknown, in order to obtain the relative position between chip and substrate,
Just it is to be understood that the relative position between chip and equipment (fixed coordinate system) and the relative position between substrate and equipment, Ran Houjing
Coordinate transform is crossed to obtain the position deviation on chip and substrate between chip attachment station.Chip has been picked up to base in pick-up head
During plate is moved, what system was absorbed first is the image of chip, at this time first corrects chip (fixed to sit relative to equipment
Mark system) deviation, when reach surface when, at this time system intake to substrate image, the XY on by workbench
Motion platform adjusts the deviation between substrate directional correction chip attachment station and equipment, such that it is able to reach chip and substrate patch
Dress station to bit alignment.
It is of course also possible to two successive steps are merged into a successive step, i.e., calculate chip to chip image in system intake
Do not adjusted first with after Deviation of equipments.When pick-up head reaches surface, system intake calculates core on substrate to substrate image
Between piece mounting position and equipment after deviation, by coordinate transform, chip is calculated relative between mounting position on substrate
Deviation, then control pick-up head to adjust chip, complete once to bit alignment.
A kind of specific job step of the machine vision flight system according to the present embodiment：
(1) pedestal moves to invertible head top from initial position, and pick-up head moves downward absorption chip, and now speculum is oblique
Retract upwards, it is to avoid interference.
(2) pick-up head has been drawn chip and has been moved upwards, and speculum stretches out obliquely, is easy to the imaging operation of rear operation.
(3), to substrate motion, in motion process, the first lamp source of triggering is bright for pick-up head, becomes semi-permeable and semi-reflecting mirror and helps
Speculum, while CCD camera starts to take pictures, in the presence of light path system, CCD camera obtains the image of chip, now passes through
Analysis and processing module and motion control mechanism, correct position deviation and the angular deviation of chip.
(4) after correcting position and the angular deviation of chip, the first lamp source is closed, pedestal continues, to substrate motion, to work as arrival
During surface, the second lamp source is opened, and now, semi-permeable and semi-reflecting mirror becomes full impregnated mirror, and CCD camera directly obtains the figure of substrate
Picture, in the presence of analysis and processing module and motion control mechanism, adjusts the alignment of the position of substrate, completing substrate and chip.
(5) after completing alignment, the second lamp source is closed, pick-up head is moved downward carries out chip attachment, and now speculum is oblique
Upper retraction, it is to avoid interference.
(6) after having mounted chip, pick-up head is moved upwards, and speculum stretches out obliquely.
(7) (1) is repeated.
Without departing from the thought that the utility model is created, any group is carried out to various different embodiments of the present utility model
Close, should be considered as the utility model disclosure；In range of the technology design of the present utility model, technical scheme is carried out
Any combination of the thought created without prejudice to the utility model that various simple modifications and different embodiments are carried out, all should be at this
Within the protection domain of utility model.
Claims (6)
1. it is a kind of machine vision flight system, including pedestal, the pick-up head for picking up chip, CCD camera, speculum, semi-transparent
Half-reflecting mirror, substrate and guide rail, it is characterised in that：The relatively described pedestal of the substrate is fixedly installed, and the pedestal can be along institute
State guide rail to be moved left and right, the CCD camera is fixedly installed on the top of the pedestal, is further fixedly arranged on the pedestal
First gear and second gear, are connected or are intermeshed, institute between the first gear and second gear by belt transmission
The sidepiece for stating pick-up head is fixedly installed the spur rack engaged with the first gear and/or second gear, the first gear and/
Or second gear is rotated and the spur rack can be driven to move up and down so as to drive the pick-up head to move up and down, the speculum quilt
The first gear drives and is in oblique movement with the base of the pedestal, the semi-permeable and semi-reflecting mirror is inclined be fixed on it is described
One base angle of pedestal, the speculum is moved downward the first gear driving effect is oblique, while the pick-up head is picked up
Coring piece is simultaneously moved upwards, and after the pick-up head reaches precalculated position, the chip can lead in the imaging of the speculum
The semi-permeable and semi-reflecting mirror is crossed to be captured by the CCD camera.
2. machine vision flight system according to claim 1, it is characterised in that：The reflecting surface of the semi-permeable and semi-reflecting mirror
In top and transmission plane in bottom, near the transmission plane of the semi-permeable and semi-reflecting mirror on the semi-permeable and semi-reflecting mirror and the pedestal
The base angle of side is set in 45 ° of angles；
The speculum is set with the base angle of the relative semi-permeable and semi-reflecting mirror side in 135 ° of angles.
3. machine vision flight system according to claim 2, it is characterised in that：The pick-up head includes upper and lower two
Extreme position；
The pick-up head picks up the chip in the lower limit position, and the speculum avoids the pick-up head completely；
The pick-up head has been completed to pick up the action of chip in the upper extreme position, and the speculum is moved, made obliquely
Obtaining the chip can be captured by the semi-permeable and semi-reflecting mirror in the imaging of the speculum by the CCD camera.
4. machine vision flight system according to claim 3, it is characterised in that：The pick-up head also includes motion control
Mechanism, the motion control mechanism be used for control and optionally adjust the radial direction of the pick-up head and/or the substrate with
And be axially moved.
5. machine vision flight system according to claim 4, it is characterised in that：The machine vision flight system is also wrapped
The first lamp source and the second lamp source are included, first lamp source is located at the side of the reflecting surface of the semi-permeable and semi-reflecting mirror, and described
Second lamp source is located at the side of the transmission plane of the semi-permeable and semi-reflecting mirror.
6. machine vision flight system according to claim 5, it is characterised in that：The machine vision flight system is in school
When the position of the accurate substrate and angle, optical path distance and the substrate to the CCD phases of the chip to the CCD camera
The optical path distance of machine is equal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620520936.1U CN206271668U (en) | 2016-05-31 | 2016-05-31 | A kind of machine vision flight system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620520936.1U CN206271668U (en) | 2016-05-31 | 2016-05-31 | A kind of machine vision flight system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206271668U true CN206271668U (en) | 2017-06-20 |
Family
ID=59036223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620520936.1U Withdrawn - After Issue CN206271668U (en) | 2016-05-31 | 2016-05-31 | A kind of machine vision flight system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206271668U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105914171A (en) * | 2016-05-31 | 2016-08-31 | 广东工业大学 | Machine visual flight system |
-
2016
- 2016-05-31 CN CN201620520936.1U patent/CN206271668U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105914171A (en) * | 2016-05-31 | 2016-08-31 | 广东工业大学 | Machine visual flight system |
| CN105914171B (en) * | 2016-05-31 | 2018-11-06 | 广东工业大学 | A kind of machine vision flight system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106272426B (en) | The positioning of solar battery sheet series welding anterior optic and angle sensing device and detection method | |
| CN109483531B (en) | Machine vision system and method for picking and placing FPC board by manipulator at fixed point | |
| US8782879B2 (en) | Workpiece transfer apparatus | |
| CN105993212B (en) | Kludge | |
| JP5721509B2 (en) | Component mounter | |
| CN105914171B (en) | A kind of machine vision flight system | |
| CN105607409B (en) | A kind of image acquisition device and its application method of the correction of dual camera module | |
| CN109142381B (en) | High-speed visual detection and identification equipment | |
| JP6684792B2 (en) | Mounting device, imaging processing method, and imaging unit | |
| CN105180905A (en) | Double-camera visual positioning system and method | |
| CN109225758A (en) | A kind of automatic AA kludge of the multistation of camera and its assemble method | |
| CN208337782U (en) | A kind of camera microspur focus control | |
| CN204788253U (en) | Diphase machine vision positioning system | |
| CN206271668U (en) | A kind of machine vision flight system | |
| CN107026179B (en) | A kind of automatic alignment apparatus and method of imaging sensor part | |
| CN108323154B (en) | SMT chip mounter multi-view flying camera and method for imaging data selection processing | |
| TWM501640U (en) | Die selection device with multiple detection capability | |
| JP5254106B2 (en) | Electronic component mounting equipment | |
| TWM461500U (en) | Laser carving machine | |
| JP5447351B2 (en) | Component mounting apparatus and component mounting method | |
| CN209902467U (en) | Multifunctional visual positioning laser main beam system | |
| CN107068589A (en) | A kind of crystal grain selection system and method based on image recognition | |
| CN209079471U (en) | Automatic cigarette case printing equipment | |
| CN209184686U (en) | A kind of big field-of-view image capturing apparatus for NI Vision Builder for Automated Inspection | |
| CN104808310B (en) | Double-lens focusing automatic adjusting device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170620 Effective date of abandoning: 20181106 |