CN206235437U - A kind of helium leak check instrument of wide scope leak detection - Google Patents
A kind of helium leak check instrument of wide scope leak detection Download PDFInfo
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- CN206235437U CN206235437U CN201621168283.1U CN201621168283U CN206235437U CN 206235437 U CN206235437 U CN 206235437U CN 201621168283 U CN201621168283 U CN 201621168283U CN 206235437 U CN206235437 U CN 206235437U
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- densimeter
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- leak
- detection apparatus
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Abstract
The utility model discloses a kind of helium leak check instrument of wide scope leak detection, it includes sensitivity leakage detection apparatus high, sensitivity leakage detection apparatus high include the analyzer tube, turbomolecular pump, the auxiliary pump that are sequentially communicated, characterized in that, being provided with low sensitivity leakage detection apparatus in parallel between turbomolecular pump and auxiliary pump；Low sensitivity leakage detection apparatus include：General densimeter, the inlet end of general densimeter is connected by the first valve with the discharge duct of auxiliary pump, and the end of discharge duct is provided with exhaust outlet；The inlet end of general densimeter is also connected by the second valve with the admission line of auxiliary pump；The exhaust port of general densimeter is provided with discharge duct, and the end of discharge duct is provided with exhaust outlet；Low sensitivity suction probe, it is connected with the exhaust port of general densimeter.
Description
Technical field
The utility model is related to leakage detecting instrument, more particularly to the helium leak check instrument that a kind of wide scope is hunted leak.
Background technology
Helium leak check instrument uses helium as detection gas, due to helium have the small light weight of molecule, diffusion penetrability it is strong,
The features such as stabilization is cut in reaction soon, makes helium leak detector be taken seriously and widely use.The structure of helium leak check instrument is commonly used at present
Schematic diagram as shown in figure 1, it includes magnetic field skewed popularity quality analysis pipe a, after the quality analysis for carrying out magnetic field deflection type, point
Pressure in analysis pipe a needs to be maintained at 10-2Below Pa.Therefore, setting leading for the different compression ratios being connected from turbomolecular pump b
Inbound port g~i, to analyzer tube (1), compression ratio importing port 3 (9) higher, by vacuum meter, when the pressure in test body reaches
It is attached during to 1000~2000Pa or so, starts detection.Helium, due to being the molecule of very little, the phase in turbomolecular pump
Instead up walk, analyzer tube (1) is reached, 10-4~10-9Pa·m3/ s extent and scopes are detected.
The principle same with this, imports port h, is connected under 100~200Pa, 10-6~10-11Pa·m3/ s degree is entered
Row detection, imports port g, is attached under 10~20Pa, 10-7~10-12Pa·m3/ s degree is detected, according to this
The mode of sample is carried out.The quantity of port is imported, 2 kinds of situations is also had according to design, about 10-4~10-12Pa·m3/ s degree is
The detection range of helium leak check instrument.In the case of carrying out inhalation, suction probe m is connected with introducing port c.Suction probe m, greatly
Air pressure uses capillary or structure as input hole with the pressure difference of the connection pressure for importing port, is typically entered by importing port h
Row connection.Its measurement range, typically 10-4~10-8Pa·m3The degree of/s.To sum up, helium leak check instrument is detected in differential pressure type and tried
10 cannot be detected in testing-6Pa·m3The smaller of/below s is sewed.When substantial amounts of helium has been sucked, helium leak check instrument can be produced
Backstage rises, and sensitivity is too high, beyond the problem that the larger position sewed of detection range cannot find out.
In order to overcome prior art presence to measure the defect of minute leakage, the utility model proposes a kind of wide scope
The helium leak check instrument of leak detection, in the not clear leak test of the size of detection object leak volume, although leak volume is larger, but also belongs to
In proper range, it is also possible to carry out leak volume leak detection.
Utility model content
The utility model proposes a kind of helium leak check instrument of wide scope leak detection, it includes sensitivity leakage detection apparatus high, institute
Stating sensitivity leakage detection apparatus high includes the analyzer tube, turbomolecular pump, the auxiliary pump that are sequentially communicated, in the turbomolecular pump and institute
State and be provided with low sensitivity leakage detection apparatus in parallel between auxiliary pump；The low sensitivity leakage detection apparatus include：General densimeter, institute
The inlet end for stating general densimeter is connected by the first valve with the discharge duct of the auxiliary pump, the end of the discharge duct
It is provided with exhaust outlet；The inlet end of the general densimeter is also connected by the second valve with the admission line of the auxiliary pump；Institute
The exhaust port for stating general densimeter is provided with discharge duct, and the end of the discharge duct is provided with exhaust outlet；Low sensitivity suction
Probe, it is connected with the exhaust port of the general densimeter.
The utility model proposes the wide scope leak detection helium leak check instrument in, the sensitivity leakage detection apparatus bag high
Include：The sensitivity high suction probe connected with the turbomolecular pump；And the air bleeding valve connected with the turbomolecular pump.
The utility model proposes the wide scope leak detection helium leak check instrument in, the sensitivity leakage detection apparatus high enter one
Step includes：The vacuum meter connected with the turbomolecular pump.
The utility model proposes the wide scope leak detection helium leak check instrument in, the sensitivity leakage detection apparatus high enter one
Step is provided with test port, and it is connected with the vacuum meter, the air bleeding valve.
The utility model proposes the wide scope leak detection helium leak check instrument in, be further provided with correct leakage end, institute
Correction leakage end is stated to be connected with the test port and the turbomolecular pump.
The beneficial effects of the utility model are：The utility model proposes a kind of helium leak check instrument of wide scope leak detection,
In the not clear leak test of the size of detection object leak volume, although leak volume is larger, but still belongs to proper range, also may be used
To carry out leak volume leak detection.
Brief description of the drawings
Fig. 1 is the structural representation of helium leak check instrument in the prior art.
Fig. 2 is the structural representation of the utility model wide scope helium leak check instrument.
Specific embodiment
With reference to specific examples below and accompanying drawing, the utility model is described in further detail.Implement this practicality new
Process, condition, experimental technique of type etc., in addition to the following special content for referring to, are the universal knowledege of this area and known
General knowledge, the utility model is not particularly limited content.
Fig. 2 is shown the structural representation of the utility model wide scope helium leak check instrument.The utility model wide scope is examined
The helium leak check instrument of leakage is mainly made up of sensitivity leakage detection apparatus 100 high and low sensitivity leakage detection apparatus 200.Wherein, sensing high
Degree leakage detection apparatus 100 include the analyzer tube 1, turbomolecular pump 2, auxiliary pump 3, vacuum meter 4, test port 5, the correction that are sequentially communicated
Leakage end 6, air bleeding valve 11 and sensitivity high suction probe 13.Analyzer tube 1 is connected with turbomolecular pump 2, and turbomolecular pump 2 leads to
Auxiliary pump valve 10 is crossed to be connected with auxiliary pump 3.Turbomolecular pump 2 be provided with importing port 7,8,9, wherein, vacuum meter with import port 7
Connection, air bleeding valve 11 is connected with port 8 is imported, and sensitivity suction probe 13 high is by sucking probe valve 14 and turbomolecular pump 2
Connection.Wherein, the reduction due to pump oil to the Pollution restraint detectability of general densimeter, so auxiliary pump 3 uses scrolling type
Dry pump is preferred.
Low sensitivity leakage detection apparatus 200 include：General densimeter 15, low sensitivity suction the 16, first valve 17, second of probe
Valve 18.The inlet end of general densimeter 15 is connected by the first valve 17 with the discharge duct of auxiliary pump 3, the end of discharge duct
It is provided with exhaust outlet 19.The inlet end of general densimeter 15 is also connected by the second valve 18 with the admission line of auxiliary pump 3.It is general
The exhaust port of densimeter 15 is provided with discharge duct, and the end of discharge duct is provided with exhaust outlet 19.Low sensitivity suction probe 16,
It is connected with the exhaust port of general densimeter 15.
General densimeter 15 can determine the concentrations of helium of hundreds of ppm~10%.The present embodiment is the survey for carrying out gas velocity of sound
It is fixed, densimeter on the basis for determining the gas concentration being injected into, is being selected according to velocity of sound difference.The general densimeter 15 leads to
The bolt for crossing the upstream and downstream of auxiliary pump 3 is attached.By the exhaust outlet branch of auxiliary pump 3 by test port 5 general
Imported by subjects at densimeter 15, aspirated by auxiliary pump 3, gas then sucks probe 16 and enters logical by low sensitivity
With in densimeter 15.Because the inlet end of general densimeter 15 is directly connected by the first valve 17 with auxiliary pump 3, if flow is excessive
General densimeter 15 can be caused has internal pressure to rise, in fact it could happen that damaged or detection is bad.So the first valve of the present embodiment 17 is adopted
With can import to general densimeter 15 while not producing the input hole of the gas flow of pressure.Auxiliary pump 3 is at exhaust outlet 19
The gas that a part is discharged from test body is imported general densimeter 15 to detect concentrations of helium by branch by the first valve 17.By
The gas of detection, is discharged by exhaust outlet 19.In this way, magnetic field deflection type quality analysis pipe 1 can also detect the larger leakage outside pressure
Let out.
The utility model sews special low sensitivity suction probe 16 using larger.What common suction was popped one's head in sews examination
Scope is tested 10-4~10-8Pa·m3/ s, but if having used general densimeter 15, sewing detection can reach 10-4Pa·
m3/ more than s.Air and the helium from experiment body outflow that low sensitivity suction probe 16 is imported, by general densimeter 15, lead to
The first valve 17 with the input hole for the purpose of reducing flow is crossed, is exhausted by auxiliary pump 3.So without valves test institute
Having field can use the sniffer test of dry type.Import port 7 to be connected under 100~200Pa, leak-test scope is 10-6~
10-11Pa·m3/ s, imports port 8 and is attached under 10~20Pa, and leak-test scope is 10-7~10-12Pa·m3/ s, presses
Mode after this manner is carried out.Therefore the leak-test ranges of the helium leak check instrument of the utility model wide scope leak detection are 10-4
~10-8Pa·m3/s。
Protection content of the present utility model is not limited to above example.In the spirit and model conceived without departing substantially from utility model
Under enclosing, those skilled in the art it is conceivable that change and advantage be all included in the utility model, and with appended power
Sharp claim is protection domain.
Claims (5)
1. the helium leak check instrument that a kind of wide scope is hunted leak, it includes sensitivity leakage detection apparatus (100) high, the sensitivity leak detection high
Device (100) includes the analyzer tube (1), turbomolecular pump (2), the auxiliary pump (3) that are sequentially communicated, it is characterised in that in the whirlpool
Low sensitivity leakage detection apparatus (200) are provided with parallel between wheel molecular pump (2) and the auxiliary pump (3)；The low sensitivity inspection
Leakage device (200) includes：
General densimeter (15), the inlet end of the general densimeter (15) passes through the first valve (17) and the auxiliary pump (3)
Discharge duct is connected, and the end of the discharge duct is provided with exhaust outlet (19)；The inlet end of the general densimeter (15) is also
It is connected with the admission line of the auxiliary pump (3) by the second valve (18)；The exhaust port of the general densimeter (15) sets
The end for having discharge duct, the discharge duct is provided with exhaust outlet (19)；
Low sensitivity suction probe (16), it is connected with the exhaust port of the general densimeter (15).
2. the helium leak check instrument that wide scope as claimed in claim 1 is hunted leak, it is characterised in that the sensitivity leakage detection apparatus high
(100) include：
The sensitivity high suction probe (13) connected with the turbomolecular pump (2)；And
The air bleeding valve (11) connected with the turbomolecular pump (2).
3. the helium leak check instrument that wide scope as claimed in claim 2 is hunted leak, it is characterised in that the sensitivity leakage detection apparatus high
(100) further include：The vacuum meter (4) connected with the turbomolecular pump (2).
4. the helium leak check instrument that wide scope as claimed in claim 3 is hunted leak, it is characterised in that the sensitivity leakage detection apparatus high
(100) test port (5) is further provided with, it is connected with the vacuum meter (4), the air bleeding valve (11).
5. the helium leak check instrument that wide scope as claimed in claim 4 is hunted leak, it is characterised in that be further provided with correcting leakage end
(6), correction leakage end (6) connects with the test port (5) and the turbomolecular pump (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621168283.1U CN206235437U (en) | 2016-10-26 | 2016-10-26 | A kind of helium leak check instrument of wide scope leak detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621168283.1U CN206235437U (en) | 2016-10-26 | 2016-10-26 | A kind of helium leak check instrument of wide scope leak detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206235437U true CN206235437U (en) | 2017-06-09 |
Family
ID=58983699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621168283.1U Active CN206235437U (en) | 2016-10-26 | 2016-10-26 | A kind of helium leak check instrument of wide scope leak detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206235437U (en) |
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2016
- 2016-10-26 CN CN201621168283.1U patent/CN206235437U/en active Active
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