CN206114119U - A infrared temperature measuring device for optical lens face - Google Patents
A infrared temperature measuring device for optical lens face Download PDFInfo
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- CN206114119U CN206114119U CN201621171430.0U CN201621171430U CN206114119U CN 206114119 U CN206114119 U CN 206114119U CN 201621171430 U CN201621171430 U CN 201621171430U CN 206114119 U CN206114119 U CN 206114119U
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Abstract
The utility model discloses an infrared temperature measuring device for optical lens face has solved the difficult problem that current infrared temperature measuring instrument can not the optical lens face temperature that accurate measurement infrared band emissivity is low, the reflectivity is high. This infrared temperature measuring device is including surveying the module, gather the radiation lens, gather the radiation housing and be used for the connection to survey the module and gather the housing seat that radiates the housing, the housing stationary ladle is drawn together to connect and is fixed in the connecting plate of surveying the module tip, is located connecting plate one side, the connecting seat integrative with the connecting plate, gather the radiation housing and be frustum shape, annular portion that the less one end setting of its diameter and connecting seat are connected, it installs in gathering the radiation housing to gather the radiation lens, the center of housing seat has and surveys the through -hole that the probe shape is corresponding of module, and the probe of surveying the module stretches into in the through -hole of connecting seat, the light incidence end of probe and the bottom surface parallel and level of connecting seat internal surface. The utility model discloses can effectively put forward mirror surface temperature measurement's precision.
Description
Technical field
This utility model is related to infrared temperature-test technology field, more particularly to a kind of infrared measurement of temperature for optical mirror plane is filled
Put.
Background technology
Temperature is one of key factor of impact optical device image quality, and the impact as matter is mainly included：Optical frames
The temperature difference of face and air rises and falls up can form one layer of turbulent flow in air, produce minute surface seeing（mirror seeing）；Light
Thermal deformation and variations in refractive index that mirror body temperature change causes are learned, makes reflection or the corrugated after transmission deviate from preferable corrugated, produced
Heat causes aberration；The change of the optical element other performance parameter that temperature causes.Temperature is studied and eliminated to optical imaging apparatus
Impact, it is the ring that can not be lacked that optical mirror is particularly the temperature accurate measurement of optical mirror plane.Current optical mirror plane temperature
Measurement method has two kinds of contact thermography and indirect thermometric, but both has certain limitation：Contact thermography in minute surface by arranging
Temperature probe obtains temperature.In actual thermal environment, mirror temperature distribution is more complicated, it is necessary to have enough thermometric points ability anti-
Reflect Temperature Distribution.Because the superelevation of optical mirror plane film layer and surface figure accuracy is required, it is impossible to arrange many temperature probes in minute surface.Between
It is, based on minute surface back contact thermometric, by numerical computations mirror temperature to be reflected indirectly to connect thermometric.The thermal environment parameter of mirror body is difficult
To survey, including the complicated conduction of heat of mirror body and supporting construction, convection current complicated and changeable and radiation heat transfer etc., cause what is calculated
Mirror temperature is inaccurate.
Non-contact temperature measuring does not interfere with minute surface film layer dough-making powder shape, there is obvious advantage compared with contact thermography.Noncontact is surveyed
Temperature technique species is various, mainly includes being applied to near-infrared thermometric, color comparison temperature measurement, brightness thermometric and the multispectral spoke of high temp objects
Penetrate thermometric etc., the laser interference thermometric based on distortion measurement and holographic interference thermometry etc..The optical mirror plane of imaging device
Temperature more be in room temperature scope, be adapted to room temperature object non-contact temperature measuring instrument be in, LONG WAVE INFRARED temperature measuring equipment.Optical mirror plane is plated
There are the various film layers for improving reflection or transmission capacity, the infrared band reflectance height of minute surface and thermal emissivity very little, periphery
Environment has a strong reflected radiation in minute surface, severe jamming temperature measurement accuracy.At present infrared temperature-test technology can be to overflowing emitter（It is bright
Primary body）Accurate thermometric is carried out, is inaccurate to the infrared measurement of temperature of the high reflectivity surface such as optical mirror plane.Traditional medium wave, long wave
Infrared measurement of temperature equipment and temp measuring method are difficult to the reason for accurately measuring mirror temperature and are mainly reflected in three below aspect：
1）Environmental radiation of optical mirror plane itself heat radiation less than its reflection.The high room temperature minute surface of infrared band reflectance,
Its own heat radiation is less than surrounding enviroment even reflection of the Downward atmospheric long-wave radiation in minute surface.Traditional infrared temperature measuring equipment carries out minute surface
During thermometric, the infra-red radiation that Infrared Detectorss receive is mainly the environmental radiation and non-specular surface itself heat radiation for reflecting.
2）Optical mirror plane thermal emissivity is low, and itself heat radiation of room temperature minute surface is weak, part ultra-high reflectivity minute surface itself
Heat radiation is less than the actinometry lower limit that traditional infrared temperature measuring equipment is demarcated.
3）Traditional infrared temperature measuring equipment, can only collect minute surface itself heat radiation into little angle with mirror normal, with normal
Minute surface in little angle orientation thermal emissivity is less, less than its mitre orientation thermal emissivity.The minute surface that infrared radiation thermometer is collected
Heat radiation only accounts for the total thermal-radiating sub-fraction of minute surface.
In order to improve the precision of infrared measurement of temperature, German National metering institute（PTB）C.Monte, B.Gutschwager,
J.Hollandt and full Russia's optical physics academy（VNIIOFI）S.P.Morozova co-design one kind possess high accuracy
The equipment of infrared measurement of temperature and emissivity measurement, represents the forward position level of current infrared measurement of temperature.In order to eliminate the anti-of surrounding enviroment
Radiation interference is penetrated, equipment key component and light path have all carried out liquid nitrogen cooling, and light path and chamber are in vacuum environment.The equipment is made
Valency is extremely expensive and can only carry out thermometric to the minute surface for being positioned over measurement intracavity, can not be to the minute surface temperature under measurement running status
Degree.The vacuum infrared temperature standard equipment that China National Measuring Science Research Inst. develops（VRTSF）, succeeded in developing in 2015.Equipment
Inside is built-in with Fourier's red-light spectrum instrument using liquid nitrogen refrigerating and vacuum design（BrukerVERTEX80V）.VRTSF is represented
The forward position level of domestic infrared radiation measurement, but the mirror temperature for being positioned over its measurement intracavity can only be measured, be unsatisfactory for operation
Minute surface thermometric under state is required.The low-launch-rates such as optical mirror plane, high reflectance body surface are always treated as conventional red exterior measuring
Blind area in warm field, not yet finds precisely to survey the mirror temperature of room temperature scope under running status on current open source literature
Quantifier elimination is reported.
Utility model content
This utility model overcomes shortcoming of the existing infrared temperature-test technology in minute surface thermometric, there is provided a kind of high-precision
For the infrared temperature measurement apparatus of optical mirror plane.
In order to solve the problems, such as that this utility model is by the following technical programs during traditional infrared temperature measuring equipment minute surface thermometric
Realize：
A kind of infrared temperature measurement apparatus for optical mirror plane, including detecting module, poly- radiation lens, poly- radiation case and use
In connection detecting module and the case seat of poly- radiation case；The case seat includes being connected and fixed on the connection of detecting module end
Plate, positioned at connecting plate side and the connecting seat of connecting plate one；The poly- radiation case is in taper type, the less one end of its diameter
The ring part that setting is connected with connecting seat；The poly- radiation lens are installed in poly- radiation case, the center tool of the case seat
The probe for having through hole corresponding with the probe shape of detecting module, detecting module is stretched in the through hole of connecting seat；The probe
Light incidence end is concordant with the bottom surface for being connected base inner surface.
The detecting module is the detecting module of refrigeration mode thermal infrared imager.
The poly- radiation lens are the single element lens with infra-red radiation aggregate capabilities or lens group；The poly- radiation lens
It is mounted in poly- radiation case by lens locating ring and trim ring；The poly- radiation lens plated surface anti-reflection film.
The material of the poly- radiation case, case seat, lens locating ring and trim ring is the metal material with high thermal conductivity coefficient
Matter, poly- radiation case inner surface, the bottom surface of connection base inner surface, lens locating ring and trim ring surface are coated with to infrared band
The high film layer of radiant reflectance.
The lens locating ring is processed with poly- radiation case using integrated design.
The gap filling that the trim ring, poly- radiation case are formed with poly- radiation lens three has heat conductive silica gel.
The outer surface of the poly- radiation case and connecting seat is provided with based on the temperature control layer of semiconductor temperature technology.
This utility model does not have the optical imaging lens of traditional infrared temperature measuring equipment, by poly- radiation case reflection during measurement
Minute surface radiation is collected, by poly- radiation lens converging lenses surface radiation is reflected.Compared with prior art, this utility model has as follows
Advantage：
（1）This utility model can improve minute surface radiation collection ability.Traditional infrared temperature measuring equipment is collected and directly fallen in visual field
Radiate in the minute surface of camera lens, as shown in fig. 7, equipment collects subtended angle at field of view center radiating for the minute surface of ψ.Traditional infrared thermometric sets
In standby light path after the poly- radiation case of addition, by case secondary reflection, the minute surface that former center subtended angle is θ can be collected and radiated, such as
Shown in Fig. 8, θ is more than ψ, and minute surface radiation subtended angle also has similar increase at the other positions of collection.This utility model is in conventional red
In outer thermometric equipment Foundations, optical imaging lens are replaced with poly- radiation case and poly- radiation lens, as shown in Figure 1.The device can
Collection Jing gathers the reflection of radiation case inner surface and lens reflect convergence into the minute surface radiation of the more large angle of detector.Measurement dress
Put using the convergence radianting capacity of lens, do not consider the temperature space resolution of tested mirror sections, can select and converge radioactivity
Good short focus lens.Due to there is poly- radiation case between lens and probe, even if the aberration of poly- radiation lens is very big, through lens
Radiate with minute surface of the optical axis in mitre afterwards, also can reflected entrance detector.Minute surface radiation collection ability of the present utility model
Much larger than traditional infrared temperature measuring equipment.Illustrate, it is a that the F numbers that FLIR companies of the U.S. produce are 1 photo640 movements
Short focus thermal infrared imager movement, is to collect one of most strong model of testee surface emissivity ability in photo series movements.Meter
Calculate and show, the device is that 0.5, germainium lens are in the transmitance of photo640 service bands from the F numbers of poly- radiation germainium lens
99%, the infrared band reflectance of poly- radiation case inner surface film layer is the 95%, port surface on poly- radiation case top and probe light
When the distance of line incidence end is equal to photo640 movements minimum focusing distance, the minute surface radiation collection ability of temperature measuring equipment is about
16.1 times of photo640.
（2）This utility model has the ability of cancellation element itself heat radiation interference of stray light.In the device thermometric light path
Heat radiation veiling glare be mainly derived from poly- radiation encloser inner wall, the bottom surface of connection base inner surface, lens locating ring and trim ring, heat
Radiation dispersion light directly incident or reflected entrance detector and can affect minute surface thermometric.To weaken heat radiation veiling glare, poly- spoke
Penetrate case inner surface, the bottom surface of connection base inner surface, locating ring and trim ring and be coated with the film layer high to infrared band radiant reflectance,
The thermal emissivity of film layer is very low, and film layer heat radiation is less than original case inner surface, connection base inner surface, locating ring and trim ring table
The heat radiation in face.Optical mirror plane is particularly reflective optic minute surface more and is coated with the film layers such as gold, silver, aluminum, minute surface thermal emissivity and poly-
The thermal emissivity of institute's film plating layers such as radiation case is more or less the same, and the heat radiation of institute's plated film layer surface can not be ignored.In order to eliminate film
Layer itself heat radiation interference, temperature control is carried out using semiconductor temperature technology to the outer surface for gathering radiation case and connecting seat.Lens
Locating ring, trim ring and poly- radiation case are high thermal conductivity coefficient metal material, and locating ring is set with poly- radiation case using integrated
Meter processing.Gap filling between trim ring, poly- radiation case, poly- radiation lens has heat conductive silica gel, to reduce trim ring and poly- radiation
Thermal contact resistance between case.Poly- radiation case and connecting seat by after temperature control, the temperature of case inner surface film layer and locating ring with
Temperature control value is of substantially equal and stablizes constant, and lens trim ring temperature is also basicly stable, the caloradiance and spatial distribution base of film layer
This is stable.Plating anti-reflection film after, germainium lens detecting module service band transmitance up to more than 99%, germainium lens are from fever of the body spoke
Penetrate level little, its heat radiation fluctuations is extremely faint.The heat radiation veiling glare that temperature measuring equipment detector is collected（Including the hot spoke of film layer
Penetrate and lens heat radiation）It is basicly stable constant, it is a constant, the minute surface radiation of collection then becomes with mirror temperature.One often
Number, a parameter, allow this utility model temperature measuring equipment to be provided with the ability for eliminating heat radiation interference of stray light.Using following surveys
Warm calibrating method, can eliminate impact of the heat radiation veiling glare to minute surface thermometric：
Step 1, the sample mirror calibration of measurement apparatus
The upper surface of cylinder sample mirror and the optical mirror plane for treating thermometric be coated with film layer, the thickness of sample mirror is less than diameter
1/50 ， Jing Pei materials be high thermal conductivity metal；Sample mirror post side and bottom surface are provided with high accurately temperature control equipment, for controlling
Sample preparation mirror temperature.Temperature control equipment has rational temperature control scope, and temperature control scope covers the temperature change of optical mirror plane to be measured
Scope；
Before the calibration of sample mirror, the temperature control value of the temperature control of the poly- radiation case and connecting seat of measurement apparatus is T_s, T_s
Can freely arrange, for the ease of temperature control, T_s may be configured as the operating ambient temperature average of optical mirror plane to be measured；Measurement apparatus
Poly- radiation case and sample mirror minute surface between distance be set to constant space H_s, on the premise of touchless minute surface risk is ensured, H_
S should be as little as possible, e.g., less than the 1/50 of case opening surface diameter；
When sample mirror is calibrated, sample mirror temperature control value is adjusted with fixed temperature variation T and to record detection device corresponding fixed
Mapping value；The detector of detection device is infrared focal plane array seeker, and the calibration measured value is infrared focus plane battle array
The meansigma methodss of each pixel output valve of row detector；Set up the calibration data storehouse based on sample mirror temperature and calibration measured value, data base
In each sample mirror temperature value T（i）One calibration measured value Y of correspondence（i）；
Step 2：Measurement apparatus survey optics of telescope minute surface
The tested region of optical mirror plane is chosen, near the mirror sections, spacing is H_s to the poly- radiation case of measurement apparatus；
The temperature control of poly- radiation case and connecting seat is T_s；After poly- radiation case and connecting seat constant temperature, measurement apparatus start to measure mirror
Face temperature, obtains measured value；According to measured value and calibration data storehouse, corresponding mirror temperature value T is obtained（i）；Measured value is located at
When between two calibration measured values of data base, using linear interpolation method corresponding temperature value is obtained.
（3）This utility model eliminates the reflection interference of the environment infra-red radiation in minute surface of minute surface periphery.It adopts poly- spoke
The thermometric design that case presses close to minute surface is penetrated, environment heat radiation can be effectively shielded.During thermometric, the poly- radiation case of device presses close to tested
Minute surface, on the premise of minute surface is not touched, gap between the two should be as little as possible, e.g., less than gathers radiation case top end opening
The 1/50 of face diameter.Most environment heat radiations are shielded in outside poly- radiation case, and small part environmental radiation is by poly-
Gap between radiation case and minute surface enters poly- radiation case, is absorbed by poly- radiation case Jing after multiple reflections.
Description of the drawings
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or the accompanying drawing to be used needed for description of the prior art is briefly described, it should be apparent that, drawings in the following description are only
It is some embodiments of the present utility model, for those of ordinary skill in the art, in the premise for not paying creative work
Under, can be with according to these other accompanying drawings of accompanying drawings acquisition.
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of case seat in Fig. 1.
Fig. 3 is the structural representation of detecting module in Fig. 1.
Fig. 4 is the structural representation for gathering radiation case in Fig. 1.
Fig. 5 is the enlarged drawing of part A in Fig. 4.
Fig. 6 is the sectional schematic diagram of poly- radiation case, and the sectional drawing of connecting seat is same.
Fig. 7 is the principle schematic that traditional temperature measuring equipment collects minute surface radiation.
Fig. 8 is that traditional temperature measuring equipment installs the principle schematic that minute surface radiation is collected after poly- radiation case additional.
Specific embodiment
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model, rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under the premise of creative work is paid
The every other embodiment for being obtained, belongs to the scope of this utility model protection.
For the infrared temperature measurement apparatus of optical mirror plane shown in Fig. 1-6, including detecting module 1, poly- radiation lens 3, poly- radiation
Case 2 and the case seat 4 for connecting detecting module 1 and poly- radiation case 2；The case seat 2 includes being connected and fixed on detection
The connecting plate 5 of the end of module 1, positioned at the side of connecting plate 5 and the connecting seat 6 of the one of connecting plate 5；The poly- radiation case 2 is in cone
Platform shape, less one end of its diameter arranges the ring part 8 being connected with connecting seat 6；The poly- radiation lens 3 are installed on poly- radiation case
In 2, the center of the case seat 4 has through hole corresponding with the shape of probe 7 of detecting module 1, and the probe 7 of detecting module 1 is stretched
Enter in the through hole of connecting seat, the light incidence end 11 of the probe 7 is concordant with the bottom surface of the inner surface of connecting seat（Connecting seat direction
One end of poly- radiation case is referred to as bottom surface）.
The outer wall of the probe is not more than 0.05 ㎜ with the gap for being connected block hole, it is to avoid the through-hole inner surface of connecting seat 6
Itself heat radiation is entered in probe 7, disturbs minute surface infrared measurement of temperature.
The detecting module is the detecting module of refrigeration mode thermal infrared imager.Refrigeration mode infrared radiation thermometer is a kind of ripe
Industrial products, the detecting module 1 refer in refrigeration mode infrared radiation thermometer deduct optical imaging lens remainder, mainly by
Infrared Detectorss, control circuit, imaging circuit, reading circuit, refrigeration machine etc. are constituted.
The poly- radiation lens are the single element lens with infra-red radiation aggregate capabilities or lens group, by lens locating ring
12 and trim ring 13 be installed in poly- radiation case.
The lens locating ring and poly- radiation case are using integrated fabrication design.
The gap filling that the trim ring, poly- radiation case are formed with poly- radiation lens three has heat conductive silica gel.
The poly- radiation lens plate anti-reflection film to improve infrared radiation transmissivity.
The wave band of the infra-red radiation is the service band of detecting module 1.
The poly- radiation case, case seat material and lens support structure are the metal material with high thermal conductivity coefficient, are gathered
Radiation case inner surface, the bottom surface of connection base inner surface, lens locating ring and trim ring are coated with high to infra-red radiation reflectance
Film layer 10, such as golden film, silverskin.
The outer surface of the poly- radiation case and connecting seat is provided with based on the temperature control layer 9 of semiconductor temperature technology.According to
The overall dimensions customization semiconductor temperature layer of poly- radiation case 2 and connecting seat 4.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit this utility model
Within the spirit and principle of utility model, any modification, equivalent substitution and improvements made etc. should be included in this utility model
Protection domain within.
Claims (5)
1. a kind of infrared temperature measurement apparatus for optical mirror plane, it is characterised in that：Including detecting module, poly- radiation lens, poly- spoke
Penetrate case and the case seat for connecting detecting module and poly- radiation case；The case seat includes being connected and fixed on detecting module
The connecting plate of end, positioned at connecting plate side and the connecting seat of connecting plate one；The poly- radiation case is in taper type, and its is straight
The less one end in footpath arranges the ring part being connected with connecting seat；The poly- radiation lens are installed in poly- radiation case；The case
The center of seat has through hole corresponding with the probe shape of detecting module, and the probe of detecting module is stretched in the through hole of connecting seat；
The light incidence end of the probe is concordant with the bottom surface for being connected base inner surface.
2. the infrared temperature measurement apparatus of optical mirror plane are used for according to claim 1, it is characterised in that：The detecting module is system
The detecting module of cold mould thermal infrared imager.
3. infrared temperature measurement apparatus for optical mirror plane according to claim 1 or claim 2, it is characterised in that：The poly- radiation is saturating
Mirror is the single element lens with infra-red radiation aggregate capabilities or lens group；The poly- radiation lens are by lens locating ring and trim ring
It is mounted in poly- radiation case；The poly- radiation lens plated surface anti-reflection film.
4. the infrared temperature measurement apparatus of optical mirror plane are used for according to claim 3, it is characterised in that：The poly- radiation case,
The material of case seat, lens locating ring and trim ring is the metal material with high thermal conductivity coefficient, gathers radiation case inner surface, connects
The bottom surface of joint chair inner surface, lens locating ring and trim ring surface are coated with the film layer high to infrared band radiant reflectance.
5. infrared temperature measurement apparatus for optical mirror plane according to claim 1 or claim 2, it is characterised in that：The poly- radiation shield
The outer surface of shell and connecting seat is provided with based on the temperature control layer of semiconductor temperature technology.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621171430.0U CN206114119U (en) | 2016-10-26 | 2016-10-26 | A infrared temperature measuring device for optical lens face |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621171430.0U CN206114119U (en) | 2016-10-26 | 2016-10-26 | A infrared temperature measuring device for optical lens face |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206114119U true CN206114119U (en) | 2017-04-19 |
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ID=58524716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621171430.0U Active CN206114119U (en) | 2016-10-26 | 2016-10-26 | A infrared temperature measuring device for optical lens face |
Country Status (1)
| Country | Link |
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| CN (1) | CN206114119U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106289536A (en) * | 2016-10-26 | 2017-01-04 | 中国科学院云南天文台 | A kind of infrared temperature measurement apparatus for optical mirror plane |
| CN108572031A (en) * | 2018-04-27 | 2018-09-25 | 南通航运职业技术学院 | A kind of heat radiation type temperature transducer |
-
2016
- 2016-10-26 CN CN201621171430.0U patent/CN206114119U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106289536A (en) * | 2016-10-26 | 2017-01-04 | 中国科学院云南天文台 | A kind of infrared temperature measurement apparatus for optical mirror plane |
| CN108572031A (en) * | 2018-04-27 | 2018-09-25 | 南通航运职业技术学院 | A kind of heat radiation type temperature transducer |
| CN108572031B (en) * | 2018-04-27 | 2019-11-12 | 南通航运职业技术学院 | A kind of heat radiation type temperature transducer |
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