CN205888827U - Hanging wall temperature of twin polishing machine detects structure - Google Patents

Hanging wall temperature of twin polishing machine detects structure Download PDF

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Publication number
CN205888827U
CN205888827U CN201620757916.6U CN201620757916U CN205888827U CN 205888827 U CN205888827 U CN 205888827U CN 201620757916 U CN201620757916 U CN 201620757916U CN 205888827 U CN205888827 U CN 205888827U
Authority
CN
China
Prior art keywords
disk
slip ring
polishing machine
twp
temperature detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201620757916.6U
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Chinese (zh)
Inventor
乔卫民
李方俊
翟新
马艳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUZHOU HRT ELECTRONIC EQUIPMENT TECHNOLOGY Co Ltd
Original Assignee
SUZHOU HRT ELECTRONIC EQUIPMENT TECHNOLOGY Co Ltd
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Filing date
Publication date
Application filed by SUZHOU HRT ELECTRONIC EQUIPMENT TECHNOLOGY Co Ltd filed Critical SUZHOU HRT ELECTRONIC EQUIPMENT TECHNOLOGY Co Ltd
Priority to CN201620757916.6U priority Critical patent/CN205888827U/en
Application granted granted Critical
Publication of CN205888827U publication Critical patent/CN205888827U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model relates to a hanging wall temperature of twin polishing machine detects structure, dump on including, on be provided with the plate rail on the terminal surface rigid coupling water -cooling disc brake that dumps another terminal surface of dumping on, water -cooling disc brake dumps on with and goes up many places and be connected with the sensor bush jointly, be equipped with temperature sensor in the sensor bush, temperature sensor's the wire and the expansion end of a mercury sliding ring link to each other, the expansion end of mercury sliding ring passes through drive mechanism and is connected and the synchronous revolution with last plate rail. The utility model discloses simple structure can coil real -time direct detection to the polishing, utilizes the multiple spot temperature to detect, has improved the delicate temperature control of polishing dish realization, and processingquality and precision have been guaranteed in the deformation of close check polishing dish.

Description

A kind of upper disk temperature detection structure of Twp-sided polishing machine
Technical field
The utility model is related to polishing machine technical field and in particular to a kind of upper disk temperature detection of Twp-sided polishing machine is tied Structure.
Background technology
Polishing disk special water-cooling structure and temperature control technology on the utility model, are mainly used in the special processing of electronics and set In standby Twp-sided polishing machine.Due to can produce substantial amounts of heat in polishing process, the change due to temperature inevitably results in polishing disk Deform upon, and then affect crudy it is therefore necessary to strictly control the temperature of polishing disk.Produce to increase ic chip in recent years Amount, reduces unit making cost, and the size of silicon chip tends to ever-larger diameterses, also increasingly tighter to the quality requirement of silicon chip, for To carry out the polissoir of silicon chip twin polishing processing it is necessary to strictly control the deformation dumped.
Similar polishing machine in the market, upshort disk has the little of water cooling function, and is that turnover coolant-temperature gage is entered mostly Row detection, to control the temperature of card.Can not be directly to card thermometric, thermometric is forbidden and be there is time delay, therefore can not effectively be controlled Card temperature processed is it is ensured that the crudy of workpiece.
Utility model content
The purpose of this utility model is the problem overcoming prior art to exist, and provides a kind of upper disk temperature of Twp-sided polishing machine Degree detection structure, improves and polishing disk is realized with accurate temperature control, and the strict deformation controlling polishing disk is it is ensured that crudy And precision.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the utility model is achieved through the following technical solutions:
A kind of upper disk temperature detection structure of Twp-sided polishing machine, including upshort disk, the end face affixed of described upshort disk Aqueous cold plate, the other end of upshort disk is provided with plate rail, and described aqueous cold plate is connected with sensing jointly with many places on upshort disk Device bushing, is provided with temperature sensor, the activity of the wire of described temperature sensor and a mercury slip ring in described sensor bush End is connected, and the movable end of described mercury slip ring is connected with upper plate rail and synchronous rotary by transmission mechanism.
Further, the top and bottom of described upper plate rail are respectively and fixedly connected with swivel joint support set and aqueous cold plate, described rotation Inside adapter support set, heart axle is rotatably provided with by bearing, described heart axle lower end is connected with candan universal joint hypozygal, institute State in the endoporus that mercury slip ring is fixed in candan universal joint hypozygal, below mercury slip ring, be provided with bearing seal cover, described temperature The wire of sensor is connected through bearing seal cover with the movable end of mercury slip ring, and described bearing seal cover is supported with swivel joint Set lower surface is engaged by clamping.
Further, the movable end of described mercury slip ring is connected with clamping plate, described clamping plate lower surface and a synchronizing bar Affixed, one end of described synchronizing bar is arranged at the in the hole of bearing seal cover, the movable end for mercury slip ring and bearing seal cover Synchronous rotary.
Further, the through wires hole that the wire in the fixing end of described mercury slip ring passes through in heart axle is drawn upwards.
Further, described heart axle upper end is connected with flange, described flange be provided with through wires hole and with heart axle in threading Match correspondence in hole, for penetrating the wire in the fixing end of mercury slip ring.
Further, described flange and a rotatory sealing set are fixed together, and described rotatory sealing set is propped up with swivel joint It is provided with multiple sealing rings, the annular gap between multiple sealing rings forms intake tunnel and exhalant canal between support set, for The cooling dumped.
Further, it is provided with cooling water circulation water channel in described aqueous cold plate.
The beneficial effects of the utility model are:
The utility model structure is simple, can to polishing disk real-time direct detection, using achieving multipoint temperature detection, improve to throwing CD realizes accurate temperature control, and the strict deformation controlling polishing disk is it is ensured that crudy and precision, and this practicality is newly The synchronous wire laying mode of the temperature sensor lead of type, can be prevented effectively from temperature sensor lead distortion or damage, greatly prolong Service life.
Brief description
Fig. 1 is integral installation distribution structure schematic diagram of the present utility model;
Fig. 2 is the temperature measurement structure partial enlarged drawing at q in Fig. 1.
In figure label declaration: 1, upshort disk, 2, upper plate rail, 3, aqueous cold plate, 4, bearing seal cover, 5, synchronizing bar, 6, clamping Plate, 7, mercury slip ring, 8, candan universal joint hypozygal, 9, swivel joint support set, 10, sealing ring, 11, rotatory sealing set, 12, Heart axle, 13, flange, 14, sensor bush, 15, temperature sensor.
Specific embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, to describe the utility model in detail.
Shown in seeing figures.1.and.2, a kind of upper disk temperature detection structure of Twp-sided polishing machine, including upshort disk 1, described on Dump 1 the affixed aqueous cold plate 3 of end face, the other end of upshort disk 1 is provided with plate rail 2, described aqueous cold plate 3 and upthrow On disk 1, many places are connected with sensor bush 14 jointly, are provided with two in the present embodiment, and sensor bush 14 is inserted simultaneously into water-cooled In disk 3 and upshort disk 1, and tightened together by threaded fastener, in described sensor bush 14, be provided with temperature sensor 15, A part for temperature sensor 15 passes through nut lock in sensor bush 14, the wire of described temperature sensor 15 and a mercury The movable end of slip ring 7 is connected, and the movable end of described mercury slip ring 7 is connected with upper plate rail 2 and synchronous rotary by transmission mechanism.
The top and bottom of described upper plate rail 2 are respectively and fixedly connected with swivel joint support set 9 and aqueous cold plate 3, described swivel joint Support set 9 inner side is rotatably provided with heart axle 12 by bearing, and described heart axle 12 lower end is connected with candan universal joint hypozygal 8, institute State in the endoporus that mercury slip ring 7 is fixed in candan universal joint hypozygal 8, below mercury slip ring 7, be provided with bearing seal cover 4, described The wire of temperature sensor 15 is connected through bearing seal cover 4 with the movable end of mercury slip ring 7, described bearing seal cover 4 and rotation Adapter support set 9 lower surface is engaged by clamping.
The movable end of described mercury slip ring 7 is connected with clamping plate 6, and described clamping plate 6 lower surface is affixed with a synchronizing bar 5, One end of described synchronizing bar 5 is arranged at the in the hole of bearing seal cover 4, and the movable end for mercury slip ring 7 is same with bearing seal cover 4 Step rotation, clamping plate 6, synchronizing bar 5, bearing seal cover 4 and swivel joint support set 9 constitute transmission mechanism so that mercury slip ring 7 Movable end and upper plate rail 2 synchronous rotary, it is to avoid temperature sensor lead distortion or damage.
The through wires hole that wire in the fixing end of described mercury slip ring 7 passes through in heart axle 12 is drawn upwards.
Described heart axle 12 upper end is connected with flange 13, described flange 13 be provided with through wires hole and with heart axle 12 in through wires hole Match correspondence, for penetrating the wire in the fixing end of mercury slip ring 7.
Described flange 13 and a rotatory sealing cover 11 and are fixed together, and described rotatory sealing covers 11 and swivel joint support set It is provided with four sealing rings 10, the annular gap between four sealing rings 10 forms intake tunnel and exhalant canal between 9, for Dump 1 cooling.
It is provided with cooling water circulation water channel in described aqueous cold plate 3.
Furthermore, it is necessary to explanation, unless stated otherwise or point out, otherwise the term in specification " first ", " the Two ", " 3rd " etc. describes each assembly being used only in differentiation specification, element, step etc., rather than is used for representing each Logical relation between assembly, element, step or ordinal relation etc..
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for this For the technical staff in field, the utility model can have various modifications and variations.All of the present utility model spirit and principle Within, any modification, equivalent substitution and improvement made etc., should be included within protection domain of the present utility model.

Claims (7)

1. the upper disk temperature detection structure of a kind of Twp-sided polishing machine, including upshort disk (1) it is characterised in that described upshort disk (1) The affixed aqueous cold plate of end face (3), the other end of upshort disk (1) is provided with plate rail (2), described aqueous cold plate (3) with The upper many places of upshort disk (1) are connected with sensor bush (14) jointly, are provided with temperature sensor in described sensor bush (14) (15), the wire of described temperature sensor (15) is connected with the movable end of a mercury slip ring (7), the work of described mercury slip ring (7) Moved end is connected with upper plate rail (2) and synchronous rotary by transmission mechanism.
2. the upper disk temperature detection structure of Twp-sided polishing machine according to claim 1 is it is characterised in that described upper plate rail (2) top and bottom are respectively and fixedly connected with swivel joint support set (9) and aqueous cold plate (3), inside described swivel joint support set (9) Heart axle (12) is rotatably provided with by bearing, described heart axle (12) lower end is connected with candan universal joint hypozygal (8), described mercury Slip ring (7) is fixed in the endoporus of candan universal joint hypozygal (8), is provided with bearing seal cover (4), institute below mercury slip ring (7) The wire stating temperature sensor (15) is connected through bearing seal cover (4) with the movable end of mercury slip ring (7), described bearing seal Lid (4) is engaged by clamping with swivel joint support set (9) lower surface.
3. the upper disk temperature detection structure of Twp-sided polishing machine according to claim 2 is it is characterised in that described mercury slip ring (7) movable end is connected with clamping plate (6), and described clamping plate (6) lower surface is affixed with a synchronizing bar (5), described synchronizing bar (5) One end be arranged at the in the hole of bearing seal cover (4), movable end and bearing seal cover (4) for mercury slip ring (7) synchronously revolve Turn.
4. the upper disk temperature detection structure of the Twp-sided polishing machine according to Claims 2 or 3 is it is characterised in that described mercury The through wires hole that wire in the fixing end of slip ring (7) passes through in heart axle (12) is drawn upwards.
5. the upper disk temperature detection structure of Twp-sided polishing machine according to claim 4 is it is characterised in that described heart axle (12) Upper end is connected with flange (13), described flange (13) be provided with through wires hole and with the through wires hole in heart axle (12) match corresponding, For penetrating the wire in the fixing end of mercury slip ring (7).
6. the upper disk temperature detection structure of Twp-sided polishing machine according to claim 5 is it is characterised in that described flange (13) It is fixed together with a rotatory sealing set (11), be provided with many between described rotatory sealing set (11) and swivel joint support set (9) Individual sealing ring (10), the annular gap between multiple sealing rings (10) forms intake tunnel and exhalant canal, for upshort disk (1) Cooling.
7. the upper disk temperature detection structure of Twp-sided polishing machine according to claim 6 is it is characterised in that described aqueous cold plate (3) it is provided with cooling water circulation water channel in.
CN201620757916.6U 2016-07-19 2016-07-19 Hanging wall temperature of twin polishing machine detects structure Withdrawn - After Issue CN205888827U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620757916.6U CN205888827U (en) 2016-07-19 2016-07-19 Hanging wall temperature of twin polishing machine detects structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620757916.6U CN205888827U (en) 2016-07-19 2016-07-19 Hanging wall temperature of twin polishing machine detects structure

Publications (1)

Publication Number Publication Date
CN205888827U true CN205888827U (en) 2017-01-18

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Family Applications (1)

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CN201620757916.6U Withdrawn - After Issue CN205888827U (en) 2016-07-19 2016-07-19 Hanging wall temperature of twin polishing machine detects structure

Country Status (1)

Country Link
CN (1) CN205888827U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106041698A (en) * 2016-07-19 2016-10-26 苏州赫瑞特电子专用设备科技有限公司 Upper disc temperature detecting structure for double-side polishing machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106041698A (en) * 2016-07-19 2016-10-26 苏州赫瑞特电子专用设备科技有限公司 Upper disc temperature detecting structure for double-side polishing machine

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GR01 Patent grant
C14 Grant of patent or utility model
AV01 Patent right actively abandoned

Granted publication date: 20170118

Effective date of abandoning: 20180817

AV01 Patent right actively abandoned