CN205851175U - A kind of novel multiple substrates spray equipment - Google Patents
A kind of novel multiple substrates spray equipment Download PDFInfo
- Publication number
- CN205851175U CN205851175U CN201620584804.5U CN201620584804U CN205851175U CN 205851175 U CN205851175 U CN 205851175U CN 201620584804 U CN201620584804 U CN 201620584804U CN 205851175 U CN205851175 U CN 205851175U
- Authority
- CN
- China
- Prior art keywords
- multiple substrates
- spray equipment
- vacuum bothrium
- slide glass
- heating plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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Abstract
This utility model relates to nanometer technique field, particularly relates to a kind of novel multiple substrates spray equipment.This novel multiple substrates spray equipment, including working panel, cushion block base, adiabatic base plate, silica gel heating device, heating plate and slide glass fixture.One novel multiple substrates spray equipment involved by this utility model can be placed at multiple substrates simultaneously place substrate in square piece, completes the spraying of multiple substrates simultaneously, and slide glass clamp-replacing is convenient.Additionally, this novel multiple substrates spray equipment reasonable in design, the spraying efficient quick to substrate, it is suitable for promoting the use of.
Description
Technical field
This utility model relates to nanometer technique field, particularly relates to a kind of novel multiple substrates spray equipment.
Background technology
In nanometer technique field, the use of substrate is the most common.One-piece substrate is inefficiency in spraying production process,
The demand that multiple substrates sprays simultaneously cannot be met.
In order to solve above-mentioned technical problem, this utility model devises a kind of novel multiple substrates spray equipment, and this is novel
Multiple substrates spray equipment can be placed at multiple substrates simultaneously place substrate in square piece, completes the spray of multiple substrates simultaneously
It is coated with, and slide glass clamp-replacing is convenient.Additionally, this novel multiple substrates spray equipment reasonable in design, the spraying to substrate
Efficient quick, is suitable for promoting the use of.
Utility model content
In order to overcome defect present in background technology, this utility model solves the technical scheme that its technical problem is used
It is: a kind of novel multiple substrates spray equipment, including working panel, cushion block base, adiabatic base plate, silica gel heating device, heating plate
With slide glass fixture, the bottom of described adiabatic base plate is fixed on working panel by cushion block base, and described adiabatic base plate is provided with
Silica gel heating device, described silica gel heating device is provided with heating plate, and described heating plate is provided with a plurality of walks crosswise vacuum bothrium and one
Longitudinal vacuum bothrium, described in walk crosswise vacuum bothrium and linked together by longitudinal direction vacuum bothrium, the side of described heating plate is provided with
Vacuum gas-tpe fitting, described vacuum gas-tpe fitting and the one end walking crosswise vacuum bothrium are connected by main connection sucker, described
Heating plate is provided with two fixture right angle limited blocks and two fixture triangle limited blocks, and described slide glass fixture is placed on heating plate
On, described slide glass fixture is provided with multiple containing vacuum bothrium, described containing vacuum bothrium with walk crosswise vacuum bothrium and the trueest
Connecting sucker by multiple times between suction groove to connect, on described slide glass fixture, corresponding each containing vacuum bothrium is provided with two L
Shape block, be provided with in described L shape block substrate place square piece, described slide glass fixture be respectively provided on two sides with handle.
One novel multiple substrates spray equipment involved by this utility model, this novel multiple substrates spray equipment can
Place at multiple substrates simultaneously and in square piece, place substrate, complete the spraying of multiple substrates, and slide glass clamp-replacing side simultaneously
Just.Additionally, this novel multiple substrates spray equipment reasonable in design, the spraying efficient quick to substrate, it is suitable for promoting the use of.
Accompanying drawing explanation
With embodiment, this utility model is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is the structural representation of a kind of novel multiple substrates spray equipment of this utility model；
Fig. 2 is the front view of a kind of novel multiple substrates spray equipment of this utility model；
Fig. 3 is the internal structure schematic diagram one of a kind of novel multiple substrates spray equipment of this utility model；
Fig. 4 is the partial enlarged drawing in Fig. 3 at A；
Fig. 5 is the internal structure schematic diagram two of a kind of novel multiple substrates spray equipment of this utility model；
Fig. 6 is the front view of Fig. 5；
Fig. 7 is the partial enlarged drawing in Fig. 6 at B；
Wherein: 1, working panel；2, cushion block base；3, adiabatic base plate；4, silica gel heating device；5, heating plate；6, slide glass folder
Tool；7, fixture right angle limited block；8, fixture triangle limited block；9, substrate places square piece；10, L shape block；11, handle；12、
Vacuum gas-tpe fitting；13, containing vacuum bothrium；14, secondary connection sucker；15, vacuum bothrium is walked crosswise；16, longitudinal vacuum bothrium；
17, main connection sucker.
Detailed description of the invention
Presently in connection with accompanying drawing, this utility model is described in further detail.Accompanying drawing is the schematic diagram simplified, only to show
Meaning mode illustrates basic structure of the present utility model, and therefore it only shows the composition relevant with this utility model.
Specific embodiment, refers to Fig. 1-7, and a kind of novel multiple substrates spray equipment, including at the bottom of working panel 1, cushion block
Seat 2, adiabatic base plate 3, silica gel heating device 4, heating plate 5 and slide glass fixture 6, the bottom of described adiabatic base plate 3 is by cushion block base 2
Being fixed on working panel 1, described adiabatic base plate 3 is provided with silica gel heating device 4, and described silica gel heating device 4 is provided with heating plate
5, described heating plate 5 is provided with a plurality of walks crosswise vacuum bothrium 15 and a longitudinal vacuum bothrium 16, described in walk crosswise vacuum bothrium 15
Being linked together by longitudinal vacuum bothrium 16, the side of described heating plate 5 is provided with vacuum gas-tpe fitting 12, described vacuum trachea
Joint 12 is walked crosswise one end of vacuum bothrium 15 and is connected by the main sucker 17 that is connected with one, and described heating plate 5 is provided with two folders
Tool right angle limited block 7 and two fixture triangle limited blocks 8, described slide glass fixture 6 is placed in heating plate 5, described slide glass fixture 6
Be provided with multiple containing vacuum bothrium 13, described containing vacuum bothrium 13 with walk crosswise vacuum bothrium 15 and longitudinal vacuum bothrium 16
Between connected by multiple time suckers 14 that connect, on described slide glass fixture 6, corresponding each containing vacuum bothrium 13 is provided with two L-shaped
Shape block 10, be provided with in described L shape block 10 substrate place square piece 9, described slide glass fixture 6 be respectively provided on two sides with handle
11。
One novel multiple substrates spray equipment involved by this utility model, this novel multiple substrates spray equipment can
Place at multiple substrates simultaneously and in square piece, place substrate, complete the spraying of multiple substrates, and slide glass clamp-replacing side simultaneously
Just.Additionally, this novel multiple substrates spray equipment reasonable in design, the spraying efficient quick to substrate, it is suitable for promoting the use of.
Obviously, above-described embodiment is only for clearly demonstrating example, and not restriction to embodiment.Right
For those of ordinary skill in the field, can also make on the basis of the above description other multi-form change or
Variation.Here without also cannot all of embodiment be given exhaustive.And the obvious change thus extended out or
Change among still in the protection domain of the invention.
Claims (2)
1. a novel multiple substrates spray equipment, adds including working panel (1), cushion block base (2), adiabatic base plate (3), silica gel
Hot device (4), heating plate (5) and slide glass fixture (6), it is characterised in that: the bottom of described adiabatic base plate (3) is by cushion block base
(2) being fixed on working panel (1), described adiabatic base plate (3) is provided with silica gel heating device (4), on described silica gel heating device (4)
Being provided with heating plate (5), described heating plate (5) is provided with a plurality of walks crosswise vacuum bothrium (15) and a longitudinal vacuum bothrium (16),
Described vacuum bothrium (15) of walking crosswise is linked together by longitudinal vacuum bothrium (16), and the side of described heating plate (5) is provided with very
Air hose joint (12), described vacuum gas-tpe fitting (12) is walked crosswise one end of vacuum bothrium (15) and is connected sucker by main with one
(17) connection, described heating plate (5) is provided with two fixture right angles limited block (7) and two fixtures triangle limited block (8), described
Slide glass fixture (6) is placed in heating plate (5), and described slide glass fixture (6) is provided with multiple containing vacuum bothrium (13), described
Containing vacuum bothrium (13) is connected sucker by multiple times with walking crosswise between vacuum bothrium (15) and longitudinal vacuum bothrium (16)
(14) connection, the upper corresponding each containing vacuum bothrium (13) of described slide glass fixture (6) is provided with two L shape blocks (10), described L
It is provided with substrate in shape block (10) and places square piece (9).
One the most according to claim 1 novel multiple substrates spray equipment, it is characterised in that described slide glass fixture (6)
Be respectively provided on two sides with handle (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620584804.5U CN205851175U (en) | 2016-06-16 | 2016-06-16 | A kind of novel multiple substrates spray equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620584804.5U CN205851175U (en) | 2016-06-16 | 2016-06-16 | A kind of novel multiple substrates spray equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205851175U true CN205851175U (en) | 2017-01-04 |
Family
ID=57638249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620584804.5U Withdrawn - After Issue CN205851175U (en) | 2016-06-16 | 2016-06-16 | A kind of novel multiple substrates spray equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205851175U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105903607A (en) * | 2016-06-16 | 2016-08-31 | 苏州美图半导体技术有限公司 | Novel spraying device for multiple substrates |
-
2016
- 2016-06-16 CN CN201620584804.5U patent/CN205851175U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105903607A (en) * | 2016-06-16 | 2016-08-31 | 苏州美图半导体技术有限公司 | Novel spraying device for multiple substrates |
| CN105903607B (en) * | 2016-06-16 | 2018-08-10 | 苏州美图半导体技术有限公司 | A kind of novel multiple substrates spray equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170104 Effective date of abandoning: 20180810 |
|
| AV01 | Patent right actively abandoned |