CN205811263U - A kind of thermostatic control system being applicable to excimer laser - Google Patents
A kind of thermostatic control system being applicable to excimer laser Download PDFInfo
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- CN205811263U CN205811263U CN201620650882.0U CN201620650882U CN205811263U CN 205811263 U CN205811263 U CN 205811263U CN 201620650882 U CN201620650882 U CN 201620650882U CN 205811263 U CN205811263 U CN 205811263U
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Abstract
The utility model discloses a kind of thermostatic control system being applicable to excimer laser, it includes the first proportioning valve, the second proportioning valve, second flow sensor, the 3rd flow transducer, temperature automatically controlled cavity and the first check valve, slave computer and the industrial computer with described slave computer communication that main line and branch road, described thermostatic control system also include the electromagnetic valve being arranged on described main line, first flow sensor, diverter and current collector, are arranged on described branch road.Described industrial computer instructs to control the repetition rate of excimer laser for sending, and gives described slave computer by described repetition rate information by RS485 protocol transmission；Described slave computer is for correspondingly controlling described first proportioning valve and the flow of described second proportioning valve according to described repetition rate information, and then is that the temperature that front feedback automatically controls described automatic temperature-controlled cavity maintains target temperature with described repetition rate.
Description
Technical field
This utility model belongs to excimer laser temperature control association area, is applicable to quasi-molecule more particularly, to one
The thermostatic control system of laser instrument.
Background technology
Excimer laser is as a kind of energy vernier focusing and the ultraviolet light beam of control, owing to its wavelength is short, pulse power is close
The advantages such as degree height, pulse width, weak coherence, it has also become the principal light source of current lithography device.In recent years, in order to make spectrum
Width is narrower and laser power is higher, and double cavity structure is introduced in the design of laser instrument, and is input to excimer laser
Energy major part is converted to heat, and these heats can affect the temperature of working gas, and the temperature of working gas is again to laser instrument
Go out optical property and the life-span has a great impact.
The related personnel of this area aspect that has been for how being shed in laser instrument by heat is made that some are studied, such as Shen
Please number be 201210442930.3 patent disclose a kind of temperature control system, it is provided with temperature sensor, and is anti-with temperature
Feedback constitutes single close loop control circuit.But, due to described temperature control system not for laser instrument repetition rate front feedback and
The repetition rate span of laser instrument is relatively big, and the repetition rate of laser instrument controls the umber of pulse in the unit interval, each pulsed discharge
Produce heat, cause repetition rate bigger to the influence of fluctuations of temperature, in some instances it may even be possible to temperature to be exceeded and requires, at laser instrument
During frequency change, temperature control effect is poor, and temperature fluctuation is relatively big, control lag.
Utility model content
For disadvantages described above or the Improvement requirement of prior art, this utility model provides one and is applicable to excimer laser
The thermostatic control system of device, its work characteristics based on excimer laser, for structure and the portion of described thermostatic control system
Part annexation is designed.Described thermostatic control system uses manual temperature control and temperature automatically controlled two ways simultaneously, automatically
Temperature control have employed the front feedback of the repetition rate of laser instrument so that temperature stability is strong, fluctuation range is little, and regulating time is short, anti-
Interference performance is strong, and control accuracy is high.Additionally, temperature stable be conducive to improving excimer laser go out optical property.
For achieving the above object, this utility model provides a kind of thermostatic control system being applicable to excimer laser,
It includes electromagnetic valve, the first flow sensing that main line and branch road, described thermostatic control system also include being arranged on described main line
Device, diverter and current collector, the first proportioning valve being arranged on described branch road, the second proportioning valve, second flow sensor, the 3rd
Flow transducer, temperature automatically controlled cavity and the first check valve, be used for gathering described first flow sensor, described second flow passes
The slave computer of the data on flows of sensor and described 3rd flow transducer and the industrial computer with described slave computer communication, its feature exists
In:
Described first flow sensor connects described diverter and described electromagnetic valve, and described first flow sensor is used for feeling
Surveying the flow information on described main line, described slave computer for controlling the aperture of described electromagnetic valve according to described flow information；Described
Diverter uses for described branch road for carrying out shunting by the cooling water on main line；
Described first proportioning valve connects described diverter and described second flow sensor, and described second proportioning valve connects institute
Stating diverter and described 3rd flow transducer, described second flow sensor is connected after converging with described 3rd flow transducer
In the water inlet of described temperature automatically controlled cavity, told the first check valve and connected described temperature automatically controlled cavity and described current collector, institute
State cooling water and enter described current collector to reflux after described temperature automatically controlled cavity flows out；
Described industrial computer instructs to control the repetition rate of excimer laser for sending, and described repetition rate is believed
Cease by RS485 protocol transmission to described slave computer；Described slave computer is for calculating described heavy according to described repetition rate information
The flow increment that complex frequency is corresponding, and correspondingly control described first proportioning valve and the flow of described second proportioning valve, and then with
Described repetition rate is that the temperature that front feedback automatically controls described automatic temperature-controlled cavity maintains target temperature.
Further, institute's thermostatic control system also includes choke valve, manual temperature control cavity and the 3rd check valve, described throttling
Valve connects described diverter and described manual temperature control cavity, and described 3rd check valve connects described current collector and described manual temperature control
Cavity；Described slave computer is for controlling described choke valve according to the curve between flow and the temperature of described manual temperature control cavity
Aperture, and then make described manual temperature control cavity work at a set temperature.
Further, the range L of described first proportioning valve1Range L more than described second proportioning valve2, wherein L2=(0.2
～0.3) L1。
Further, described thermostatic control system also includes overflow valve, and described overflow valve connects described diverter and described
Current collector.
Further, described thermostatic control system also includes the second check valve, and described second check valve connection is described automatically
Temperature control cavity and described current collector.
In general, by the contemplated above technical scheme of this utility model compared with prior art, this practicality is used
The thermostatic control system being applicable to excimer laser of novel offer, it uses manual temperature control and temperature automatically controlled two kinds of sides simultaneously
Formula, the temperature automatically controlled repetition rate of laser instrument that have employed is as front feedback so that temperature stability is strong, fluctuation range is little, regulation
Time is short, and capacity of resisting disturbance is strong, and control accuracy is high.Additionally, temperature stably be conducive to excimer laser go out optical property.
Accompanying drawing explanation
Fig. 1 is the frame of the thermostatic control system being applicable to excimer laser that this utility model better embodiment provides
Structure schematic diagram.
Fig. 2 is the control structure block diagram in the temperature automatically controlled loop of the thermostatic control system in Fig. 1.
Fig. 3 is the transmission functional arrangement in the temperature automatically controlled loop in Fig. 2.
Fig. 4 is the algorithm flow chart that the thermostatic control system in Fig. 1 relates to.
Fig. 5 is the control flow chart of the submaster controller in Fig. 2.
Fig. 6 is the Flow-rate adjustment flow chart of the thermostatic control system in Fig. 1.
Fig. 7 is the control flow chart of the master controller in Fig. 2.
In all of the figs, identical reference is used for representing identical element or structure, wherein: 1-electromagnetic valve, 2-
First flow sensor, 3-the first temperature sensor, 4-the first pressure transducer, 5-diverter, 61-the first proportioning valve, 62-
Two proportioning valves, 63-choke valve, 71-second flow sensor, 72-the 3rd flow transducer, the temperature automatically controlled cavity of 8a-, 8b-hands
Dynamic temperature control cavity, 91-the first check valve, 92-the second check valve, 93-the 3rd check valve, 10-current collector, 11-overflow valve, 12-
Industrial computer, 13-slave computer.
Detailed description of the invention
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing and enforcement
Example, is further elaborated to this utility model.Should be appreciated that specific embodiment described herein is only in order to explain
This utility model, is not used to limit this utility model.Additionally, institute in each embodiment of this utility model disclosed below
Just can be mutually combined as long as the technical characteristic related to does not constitutes conflict each other.
Refer to Fig. 1 to Fig. 4, the constant temperature control being applicable to excimer laser that this utility model better embodiment provides
System processed, it uses temperature automatically controlled and manual temperature control two ways, and the most manual temperature control loop is manual according to temperature control curve
Regulation flow is to realize the rough control of temperature.Temperature automatically controlled loop is used feedforward-series connection control method to realize temperature by single-chip microcomputer
The high accuracy of degree controls so that temperature stability is strong, fluctuation range is little, and regulating time is short, and capacity of resisting disturbance is strong.
Described thermostatic control system includes main line part and branched portion, wherein said temperature automatically controlled loop and described manually
Temperature control loop is arranged on described branched portion.Described thermostatic control system includes electromagnetic valve 1, first flow sensor the 2, first temperature
Degree sensor the 3, first pressure transducer 4, diverter the 5, first proportioning valve the 61, second proportioning valve 62, choke valve 63, second flow
Sensor the 71, the 3rd flow transducer 72, temperature automatically controlled cavity 8a, manual temperature control cavity 8b, the first check valve 91, second are unidirectional
Valve the 92, the 3rd check valve 93, current collector 10, overflow valve 11, industrial computer 12 and slave computer 13.
Described first flow sensor 2 is connected with described battery valve 1 and described diverter 5, described first temperature sensing
Device 3 and described first pressure transducer 4 are arranged on the pipeline between described first flow sensor 2 and described diverter 5.Institute
State electromagnetic valve 1 and controlled Push And Release by described slave computer 13, and then realize the Push And Release of the water supply of described thermostatic control system.Described
First flow sensor 2 is for measuring the main line flow of described thermostatic control system, when described slave computer 12 is by described first
When flow transducer 2 monitors the water inventory deficiency on described main line, alarm signal is assisted by described slave computer 12 by RS485 communication
View passes to described industrial computer 13, and described industrial computer 13 makes corresponding emergency processing after receiving described alarm signal.
In present embodiment, described first temperature sensor 3 is used for detecting the temperature of the cooling water on described main line, and by institute
Stating temperature information and be transferred to described slave computer 12, described slave computer 12 can control described electromagnetic valve 1 according to described temperature information
Aperture.Described first pressure transducer 4 is the pressure of the cooling water for detecting described main line, and is passed by described pressure information
Being defeated by described slave computer 12, described slave computer 12 can control the aperture of described electromagnetic valve 1 according to described pressure information.Cooling water
Passing sequentially through described electromagnetic valve 1 and described first flow sensor 2 arrives described diverter 5, described diverter 5 is for by described
The cooling moisture stream on main line uses for each branch road.Described diverter 5 and described first proportioning valve 61, described second proportioning valve
62, described choke valve 63 and described overflow valve 11 are connected.
Described first proportioning valve 61 and described second proportioning valve 62 respectively with described second flow sensor 71 and described
Three flow transducers 72 are connected, and meanwhile, described second flow sensor 62 and described 3rd flow transducer 72 connect after converging
Be connected to the water inlet of described temperature automatically controlled cavity 8a, described first check valve 91 and described second check valve 92 be all connected with described from
Dynamic temperature control cavity 8a and described current collector 10.Cooling water from described temperature automatically controlled cavity 8a the most respectively through described first unidirectional
Second check valve 92 described in valve 91 enters described current collector 10, and through described current collector 10 backwater.Described slave computer 12 gathers institute
State second flow sensor 71 and the flow information of described 3rd flow transducer 72 sensing, and according to the described flow collected
Information and the repetition rate information of the excimer laser from described industrial computer 13 that receives are to control described first ratio
Valve 61 and the aperture of described second proportioning valve 62, and then realize described temperature automatically controlled cavity 8a and be operated in predetermined target temperature
Under.In present embodiment, the range L of described first proportioning valve 611Range L more than described second proportioning valve 622, wherein L2=
(0.2～0.3) L1, the flow of described first proportioning valve 61 is less than its own traffic L110% time, it is in nonlinear area；Institute
State the first proportioning valve 61, described second proportioning valve 62, described second flow sensor 71, described 3rd flow transducer 72, institute
State temperature automatically controlled cavity 8a, described first check valve 91 and described second check valve 92 and form described temperature automatically controlled loop；Described
Temperature automatically controlled cavity 8a is a part for described excimer laser.
Described temperature automatically controlled loop uses feedforward-tandem version to control the temperature of described temperature automatically controlled cavity 8a, with
Ensure that described excimer laser is operated under predetermined target temperature.In present embodiment, before described slave computer 13 includes
Feedback controller, submaster controller and master controller.The internal ring in described temperature automatically controlled loop is with described second flow sensor 71 and institute
Stating the flow that second flow sensor 72 detects is the flow that value of feedback controls to cool down water；Outer shroud be arranged on described automatically
The temperature data that temperature sensor on temperature control cavity 8a senses is that temperature is controlled by value of feedback.Owing to quasi-molecule swashs
The energy of each pulses generation of light device is substantially constant, and the repetition rate of described excimer laser controlled in the unit interval
Umber of pulse, and the repetition rate of described excimer laser to be the instruction sent by described industrial computer 13 control, therefore described
Slave computer 12 can carry out communication to obtain the weight of described excimer laser in real time by RS485 agreement and described industrial computer 13
Complex frequency, so described slave computer 12 by calculate can obtain the described repetition rate temperature to described temperature automatically controlled cavity 8a
The impact that change produces is to obtain the increment of necessary flow, and described slave computer 12 controls described the in advance according to described result of calculation
The aperture of one proportioning valve 61 and described second proportioning valve 62, to carry out Flow-rate adjustment, reduces time lag and overshoot.
The transmission function in described temperature automatically controlled loop is:
Y1S () is the actual temperature of target cavity；R1S () is the design temperature of target cavity (temperature automatically controlled cavity 8a)；Hm
S () is the transmission function of temperature sensor；GmS () is the transmission function of master controller, GxS () is subloop (described sub-control
Device, described first proportioning valve 61, described second proportioning valve 62, described second flow sensor 71 and described second flow sensor
72 composition loops) transmission function, GcS () is the transmission function of temperature automatically controlled cavity, TdIt it is the repetition frequency of excimer laser
Rate, GdS () is the transmission function that the temperature of temperature automatically controlled cavity is affected by repetition rate, GfS () is the transmission letter of the feedforward
Number.
The transmission function of temperature control loop is typically considered as being two stepped formulas:
The impact of target cavity temperature is transmitted function by the repetition rate of excimer laser:
Wherein:
Through abbreviation, the transmission function in described temperature automatically controlled loop is:
In present embodiment, described temperature automatically controlled loop is with the repetition rate of described excimer laser for feedforward, permissible
Make repetition rate T of described excimer laserdImpact on system temperature is minimized, and plays the effect of disturbance suppression.
Referring to Fig. 5, Fig. 6 and Fig. 7, during work, the temperature control method in described temperature automatically controlled loop comprises the following steps:
S1, described slave computer 12 obtains described temperature automatically controlled cavity by RS485 communications protocol from described industrial computer 13
The target temperature value (temperature of setting) of 8a.
S2, initializes described master controller and described submaster controller, will be input to described master controller by target temperature value,
Initial flow is input to described submaster controller.
S3, described master controller is started working.
S301, described slave computer 12 obtains output valve y of major loop.Concrete, described slave computer 12 passes through temperature sensing
Device gathers the temperature of described temperature automatically controlled cavity 8a.
S302, calculates the deviation value between the cavity temperature of target temperature set in advance and described temperature automatically controlled cavity 8a
E=Tset-y, wherein, E is the deviation value of cavity temperature, TsetFor the target temperature value set, y is that temperature sensor detects
The temperature of temperature automatically controlled cavity 8a.
S303, described master controller calculates input value u of described submaster controller according to pid algorithm.Wherein, u is the output valve of described master controller, is the input value of described submaster controller, Kp
For proportionality coefficient, TiFor integration time constant, KdFor derivative time constant value.
S4, described submaster controller is started working, and regulates described first proportioning valve 61 and the flow of described second proportioning valve 62
Sum is the input value of described submaster controller.
S401, obtains the flow setting value of fast loop (subloop).Specifically, obtain from the output of described master controller
The flow input value u of described fast loop.
S402, measures the output valve of described fast loop.Specifically, described slave computer 12 reads described second flow sensing
Device 71 and the flow value of described 3rd flow transducer 72 are also sued for peace, and are output valve y of described fast loopk。
S403, calculates deviation value E between the input of described fast loop and outputk, i.e. input and described first ratio
The deviation value of the flow sum of valve 61 and described second proportioning valve 62 output.Specifically, Ek=u-yk, wherein, EkFor input with than
The flow deviation value of example valve output, u is the output valve of described master controller, is the input value of described submaster controller, ykFor institute
State second flow sensor 71 and the flow sum of described 3rd flow transducer 72 detection.
S404, described submaster controller calculates its output valve according to pid algorithm,
Wherein, WcFor the output valve of described submaster controller, KpFor proportionality coefficient, TiFor integration time constant, KdFor derivative time constant, Ek
Flow deviation value for proportioning valve output.
S405, described slave computer 12 obtains described excimer laser by RS485 communications protocol from described industrial computer 12
Repetition rate Td。
S406, calculating repetition frequency TdThe increment W of corresponding flowd=TdGf。
S407, calculates and exports final flow sum, W=Wd+Wc。
S4071, it is judged that W-W20＞ W0Whether set up, wherein W0(W0=0.1L1) it is that the ideal of described first proportioning valve 61 is defeated
Outflow, described W20(W20=0.5L2) it is the preferable output flow of described second proportioning valve 62.
S40711, if W-W20＞ W0Setting up, it is W that the most described slave computer 12 controls the flow of described first proportioning valve 611
=W-W20。
S40712, (reality of the most described first proportioning valve 61 is defeated to detect the sensing value W ' of described second flow sensor 71
Outflow).
S40713, it is W that described slave computer 12 controls the output flow of described second proportioning valve 622=W-W '.
S40714, if W-W20＞ W0Being false, the most described slave computer 12 controls the output stream of described first proportioning valve 61
Amount is W1=0.
S40715, it is W that described slave computer 12 controls the output flow of described second proportioning valve 622=W.
S5, the output of described submaster controller is the most stable.Described submaster controller repeats S401, S402, S403 step
Suddenly, deviation value E between input and the output of described fast loopkContrast with set-point ε, if meet Ek≤ε。
S501, is unsatisfactory for Ek≤ ε, then continue executing with S404～S408, until meeting Ek≤ε。
S502, meets Ek≤ ε, has detected whether to cease and desist order, if it has, then stop.The most then repeat S3.
S6, if terminate program, described slave computer 12 detects whether to receive the END instruction that described industrial computer 13 sends.
S601, if there being END instruction, then stops all programs.
S602, without END instruction, then repeats S3～S6.
Described manual temperature control loop includes choke valve 63, manual temperature control cavity 8b and the 3rd check valve 93, described choke valve
63 connect described diverter 5 and described manual temperature control cavity 8b, and described 3rd check valve 93 connects described manual temperature control cavity 8b
And described current collector 10.Described slave computer 13 controls described according to the curve between flow and the temperature of described manual cavity 8b
The aperture of choke valve 63, and then make described manual temperature control cavity 8b work at a set temperature.
Described overflow valve 11 connects described diverter 5 and described current collector 10, and it is used for preventing a certain bypass flow from changing
Time affect the temperature controlled stability in each road, make the pressure remained constant in controlled loop, it is achieved the effect of voltage stabilizing.
Using the thermostatic control system being applicable to excimer laser that this utility model provides, it uses manually control simultaneously
Warm and temperature automatically controlled two ways, the temperature automatically controlled repetition rate of laser instrument that have employed is as front feedback so that temperature stability
By force, fluctuation range little, regulating time is short, and capacity of resisting disturbance is strong, and control accuracy is high.Additionally, stablizing of temperature is conducive to improving standard
Molecular laser go out optical property.
As it will be easily appreciated by one skilled in the art that and the foregoing is only preferred embodiment of the present utility model, not
In order to limit this utility model, all any amendment, equivalents made within spirit of the present utility model and principle and changing
Enter, within should be included in protection domain of the present utility model.
Claims (5)
1. being applicable to a thermostatic control system for excimer laser, it includes main line and branch road, described thermostatic control system
Also include the electromagnetic valve being arranged on described main line, first flow sensor, diverter and current collector, be arranged on described branch road
The first proportioning valve, the second proportioning valve, second flow sensor, the 3rd flow transducer, temperature automatically controlled cavity and first unidirectional
Valve, for gathering described first flow sensor, described second flow sensor and the flow number of described 3rd flow transducer
According to slave computer and with the industrial computer of described slave computer communication, it is characterised in that:
Described first flow sensor connects described diverter and described electromagnetic valve, and described first flow sensor is used for sensing institute
Stating the flow information on main line, described slave computer for controlling the aperture of described electromagnetic valve according to described flow information；Described shunting
Device uses for described branch road for carrying out shunting by the cooling water on main line；
Described first proportioning valve connects described diverter and described second flow sensor, and described second proportioning valve connects described point
Stream device and described 3rd flow transducer, described second flow sensor and described 3rd flow transducer are connected to institute after converging
State the water inlet of temperature automatically controlled cavity, told the first check valve and connect described temperature automatically controlled cavity and described current collector, described cold
But water enters described current collector to reflux after described temperature automatically controlled cavity flows out；
Described industrial computer instructs to control the repetition rate of excimer laser for sending, and described repetition rate information is led to
Cross RS485 protocol transmission to described slave computer；Described slave computer is for calculating described repetition frequently according to described repetition rate information
The flow increment that rate is corresponding, and correspondingly control described first proportioning valve and the flow of described second proportioning valve, and then with described
Repetition rate is that the temperature that front feedback automatically controls described automatic temperature-controlled cavity maintains target temperature.
It is applicable to the thermostatic control system of excimer laser the most as claimed in claim 1, it is characterised in that: institute's thermostatic control
System also includes choke valve, manual temperature control cavity and the 3rd check valve, described choke valve connect described diverter and described manually
Temperature control cavity, described 3rd check valve connects described current collector and described manual temperature control cavity；Described slave computer is for according to institute
State the curve between flow and the temperature of manual temperature control cavity to control the aperture of described choke valve, and then make described manual temperature control
Cavity works at a set temperature.
It is applicable to the thermostatic control system of excimer laser the most as claimed in claim 1, it is characterised in that: described first ratio
The range L of example valve1Range L more than described second proportioning valve2, wherein L2=(0.2～0.3) L1。
It is applicable to the thermostatic control system of excimer laser the most as claimed in claim 1, it is characterised in that: described constant temperature control
System processed also includes overflow valve, and described overflow valve connects described diverter and described current collector.
It is applicable to the thermostatic control system of excimer laser the most as claimed in claim 1, it is characterised in that: described constant temperature control
System processed also includes that the second check valve, described second check valve connect described temperature automatically controlled cavity and described current collector.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620650882.0U CN205811263U (en) | 2016-06-27 | 2016-06-27 | A kind of thermostatic control system being applicable to excimer laser |
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| CN201620650882.0U CN205811263U (en) | 2016-06-27 | 2016-06-27 | A kind of thermostatic control system being applicable to excimer laser |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105977768A (en) * | 2016-06-27 | 2016-09-28 | 华中科技大学 | Thermostatic control system suitable for excimer laser device |
| CN107918419A (en) * | 2017-10-31 | 2018-04-17 | 哈尔滨工业大学 | Fluid temperature swings restraining device based on dynamic tracking thermal capacitance filtering |
| CN107992127A (en) * | 2017-10-31 | 2018-05-04 | 哈尔滨工业大学 | High Accuracy Constant Temperature recirculated cooling water device based on Dynamic Thermal capacitor filter |
-
2016
- 2016-06-27 CN CN201620650882.0U patent/CN205811263U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105977768A (en) * | 2016-06-27 | 2016-09-28 | 华中科技大学 | Thermostatic control system suitable for excimer laser device |
| CN105977768B (en) * | 2016-06-27 | 2022-01-11 | 华中科技大学 | Constant temperature control system suitable for excimer laser |
| CN107918419A (en) * | 2017-10-31 | 2018-04-17 | 哈尔滨工业大学 | Fluid temperature swings restraining device based on dynamic tracking thermal capacitance filtering |
| CN107992127A (en) * | 2017-10-31 | 2018-05-04 | 哈尔滨工业大学 | High Accuracy Constant Temperature recirculated cooling water device based on Dynamic Thermal capacitor filter |
| CN107992127B (en) * | 2017-10-31 | 2020-04-21 | 哈尔滨工业大学 | High-precision constant-temperature circulating cooling water device based on dynamic heat capacity filtering |
| CN107918419B (en) * | 2017-10-31 | 2020-04-21 | 哈尔滨工业大学 | Fluid temperature fluctuation suppression device based on dynamic tracking heat capacity filtering |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161214 Termination date: 20170627 |