CN205478912U - Air supporting electricity main shaft - Google Patents

Air supporting electricity main shaft Download PDF

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Publication number
CN205478912U
CN205478912U CN201620071825.7U CN201620071825U CN205478912U CN 205478912 U CN205478912 U CN 205478912U CN 201620071825 U CN201620071825 U CN 201620071825U CN 205478912 U CN205478912 U CN 205478912U
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China
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air
electric spindle
housing
stator
channel
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CN201620071825.7U
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张燕
王帅
赵利
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Beijing High Precision Technology Co ltd
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BEIJING HIGH-PRECISION TECHNOLOGY DEVELOPMENT Co Ltd
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Abstract

The utility model discloses an air supporting electricity main shaft, including shell (1), set up shell (1) inside stator (5), axis body (2), fix on axis body (2) and with stator (5) complex rotor (4), be equipped with on shell (1) inlet channel (11) with can be with the air outlet channel who enters into shell (1) inside gas outgoing, wrap up axis body (2) outside has graphite axle sleeve (3), inlet channel (11) are relative with graphite axle sleeve (3) position. The utility model provides an air supporting electricity main shaft is through setting up inlet channel on the shell to parcel anchor stone china ink axle sleeve on the axis body makes gas enter into shell inside back through inlet channel, can boost the suspension with the graphite axle sleeve, makes the axis body not rub with the emergence of peripheral equipment when rotating, thereby has improved the slew velocity of axis body effectively, reduces the consume of energy greatly, has improved the machining efficiency of digit control machine tool.

Description

一种气浮电主轴An air-floating electric spindle

技术领域technical field

本实用新型涉及数控机床领域,尤其涉及一种气浮电主轴。The utility model relates to the field of numerical control machine tools, in particular to an air-floating electric spindle.

背景技术Background technique

目前,超精密加工已成为现代化生产发展的趋势,也是我国高新技术领域的一个重要的组成部分。精密加工的高指标,形成了对精密加工设备的高要求,推动了它的进步,反过来精密机械的进步又是精密加工能够实现的必要条件。现有技术中,由于轴体与轴套之间摩擦接触,造成摩擦系数大,转动速度慢。另外,摩擦会产生较大的噪音,还会造成轴体过大幅度的振动,影响实际加工效果,使加工精度下降。At present, ultra-precision machining has become the trend of modern production development, and it is also an important part of my country's high-tech field. The high index of precision machining has formed high requirements for precision machining equipment and promoted its progress. In turn, the progress of precision machinery is a necessary condition for the realization of precision machining. In the prior art, due to the frictional contact between the shaft body and the shaft sleeve, the friction coefficient is large and the rotation speed is slow. In addition, friction will generate relatively large noise, and will also cause excessive vibration of the shaft body, which will affect the actual processing effect and reduce the processing accuracy.

实用新型内容Utility model content

本实用新型目的是提供一种气浮电主轴,用以改善上述弊端。The purpose of the utility model is to provide an air-floating electric spindle to improve the above disadvantages.

本实用新型解决技术问题采用如下技术方案:本实用新型提供一种气浮电主轴,包括外壳、设置在所述外壳内部的定子、轴体、固定在轴体上且与所述定子配合的转子,所述外壳上设有进气通道和能够将进入到所述外壳内部的气体排出的出气通道,所述轴体外部包裹有石墨轴套,所述进气通道与所述石墨轴套位置相对。The utility model adopts the following technical solutions to solve the technical problems: the utility model provides an air-floating electric spindle, including a casing, a stator arranged inside the casing, a shaft body, and a rotor fixed on the shaft body and cooperating with the stator , the housing is provided with an air intake channel and an air outlet channel capable of discharging the gas entering the housing, the shaft body is wrapped with a graphite sleeve, and the air intake channel is opposite to the graphite sleeve .

可选的,所述进气通道为多个,且沿所述外壳的轴向方向等间距均匀分布于所述外壳上。Optionally, there are multiple air intake passages, which are equally spaced and evenly distributed on the housing along the axial direction of the housing.

可选的,所述出气通道外部设有消音器。Optionally, a muffler is provided outside the air outlet channel.

可选的,所述定子位于所述外壳内部轴向方向的一端。Optionally, the stator is located at one end in the axial direction inside the casing.

可选的,所述外壳内部设有环绕所述轴体端部且能够限制所述轴体振动的平衡环。Optionally, a balance ring surrounding the end of the shaft body and capable of limiting vibration of the shaft body is provided inside the housing.

可选的,所述石墨轴套的外部形成有能够辅助气体推动所述石墨轴套的气动槽。Optionally, a pneumatic groove capable of assisting gas to push the graphite sleeve is formed on the outside of the graphite sleeve.

可选的,所述进气通道的通道口处设有过滤网。Optionally, a filter is provided at the channel opening of the air intake channel.

可选的,所述外壳的内部形成有与所述外壳外部连通的水冷通道。Optionally, a water cooling channel communicating with the outside of the housing is formed inside the housing.

可选的,所述水冷通道位于所述定子外侧的所述外壳内。Optionally, the water-cooling channel is located in the casing outside the stator.

可选的,所述定子的外部包裹有电机冷却套。Optionally, the stator is wrapped with a motor cooling jacket.

本实用新型具有如下有益效果:The utility model has the following beneficial effects:

本实用新型提供的气浮电主轴,通过在外壳上设置进气通道,并在轴体上包裹固定石墨轴套,使气体通过进气通道进入到外壳内部后,能够将石墨轴套推起悬浮,使轴体在转动时不与周边设备发生摩擦,从而有效地提高了轴体的转动速度,大大减小能量的耗损,提高了数控机床的加工效率。另外,通过设置平衡环对轴体振动的限制,使得数控机床的加工精度进一步得到提高。The air-floating electric spindle provided by the utility model can push the graphite shaft sleeve up and suspend after the gas enters the inside of the housing through the air intake channel by setting the air intake passage on the housing and wrapping and fixing the graphite sleeve on the shaft body. , so that the shaft does not rub against peripheral equipment during rotation, thereby effectively increasing the rotation speed of the shaft, greatly reducing energy consumption, and improving the processing efficiency of the CNC machine tool. In addition, the machining accuracy of the CNC machine tool is further improved by setting the balance ring to limit the vibration of the shaft body.

附图说明Description of drawings

图1为本实用新型实施方式提供的气浮电主轴的内部结构示意图;Figure 1 is a schematic diagram of the internal structure of the air-floating electric spindle provided by the embodiment of the utility model;

图2为本实用新型实施方式提供的气浮电主轴的水冷通道的结构示意图。Fig. 2 is a schematic structural diagram of the water-cooling channel of the air-floating electric spindle provided by the embodiment of the utility model.

图中标记示意为:1-外壳;11-进气通道;12-水冷通道;2-轴体;3-石墨轴套;31-气动槽;4-转子;5-定子;6-平衡环;7-电机冷却套。The marks in the figure are: 1-housing; 11-intake channel; 12-water cooling channel; 2-shaft body; 3-graphite sleeve; 31-pneumatic slot; 4-rotor; 5-stator; 6-balance ring; 7- Motor cooling jacket.

具体实施方式detailed description

下面结合实施例及附图对本实用新型的技术方案作进一步阐述。Below in conjunction with embodiment and accompanying drawing, the technical solution of the utility model is further elaborated.

现有技术中,数控机床中使用的加工主轴通常是通过轴承与外壳连接,而轴承的工作原理是通过滚珠来实现摩擦力的降低。实体接触虽然可以降低摩擦力,但摩擦力仍然较大,对轴体的转动速度还是会造成一定的影响。In the prior art, the machining spindle used in the CNC machine tool is usually connected to the housing through a bearing, and the working principle of the bearing is to reduce the frictional force through balls. Although the physical contact can reduce the friction force, the friction force is still relatively large, which will still have a certain impact on the rotation speed of the shaft body.

本实用新型提出了一种气浮电主轴,包括外壳1、设置在所述外壳1内部的定子5、轴体2、固定在轴体2上且与所述定子5配合的转子4,所述外壳1上设有进气通道11和能够将进入到所述外壳1内部的气体排出的出气通道,所述轴体2外部包裹有石墨轴套3,所述进气通道11与所述石墨轴套3位置相对。The utility model proposes an air-floating electric spindle, which includes a casing 1, a stator 5 arranged inside the casing 1, a shaft body 2, and a rotor 4 fixed on the shaft body 2 and cooperating with the stator 5. The housing 1 is provided with an air inlet passage 11 and an air outlet passage capable of discharging the gas entering the housing 1. The shaft body 2 is wrapped with a graphite sleeve 3, and the air inlet passage 11 is connected with the graphite shaft. Set 3 positions are relative.

在外壳1上设置进气通道11,直接对准轴体2外部包裹的石墨轴套3,由于石墨轴套3的径向大于轴体2,质地轻,当气体进入外壳1内部时,直接对着石墨轴套3的外壁。石墨轴套3会被进入的气体推起,带动石墨轴套3内部的轴体2一起悬浮。轴体2悬浮可以避免与周围其它部件的摩擦,在轴体2转动时,悬浮状态的轴体2以及石墨轴套3与周围的部件之间几乎不存在摩擦力,这样就能够使轴体2的转速大大提高,有效实现数控机床工作效率的提升。The air intake channel 11 is set on the casing 1, and it is directly aligned with the graphite bushing 3 wrapped outside the shaft body 2. Since the radial direction of the graphite bushing 3 is larger than that of the shaft body 2 and is light in texture, when the gas enters the interior of the casing 1, it directly The outer wall of the graphite shaft sleeve 3. The graphite bushing 3 will be pushed up by the incoming gas, driving the shaft body 2 inside the graphite bushing 3 to suspend together. The suspension of the shaft body 2 can avoid friction with other surrounding parts. When the shaft body 2 rotates, there is almost no friction between the suspended shaft body 2 and the graphite bushing 3 and the surrounding parts, so that the shaft body 2 The rotating speed is greatly improved, which effectively improves the working efficiency of CNC machine tools.

进一步,所述进气通道11为多个,且沿所述外壳1的轴向方向等间距均匀分布于所述外壳1上。Further, there are multiple air intake passages 11 , which are evenly distributed on the casing 1 at equal intervals along the axial direction of the casing 1 .

设置多个进气通道11可以从不同部位对石墨轴套3实现气体推动,使石墨轴套3会议及轴体2的悬浮效果更好。另外,由于进气通道11在外壳1上均匀分布,使得石墨轴套3在受力时能够更好地保持平衡,从而使轴体2在运转过程中更平稳,减小振动幅度,能够进一步提高轴体2的转速。Setting multiple air intake passages 11 can push the graphite shaft sleeve 3 with gas from different positions, so that the suspension effect of the meeting of the graphite shaft sleeve 3 and the shaft body 2 is better. In addition, because the air intake channels 11 are evenly distributed on the casing 1, the graphite bushing 3 can better maintain balance when it is stressed, so that the shaft body 2 is more stable during operation, the vibration amplitude is reduced, and the performance can be further improved. The speed of shaft 2.

本实用新型的一个实施方式中示出,所述出气通道外部设有消音器。As shown in an embodiment of the present utility model, a muffler is provided outside the air outlet channel.

在出气通达外部设置消音器,可以使充入外壳1内部的气体在排放时实现降噪,气体排出时流量较大,出口处必然会产生较大的噪音,安装消音器可以有效地在气体排放时改变气体的流速,从而降低流量产生的噪声,使数控机床在工作状态下更静音。Installing a muffler on the outside of the air outlet channel can reduce the noise of the gas filled into the shell 1 when it is discharged. When the gas is discharged, the flow rate is large, and there will inevitably be a lot of noise at the outlet. Installing a muffler can effectively prevent the gas from being discharged. The flow rate of the gas can be changed from time to time, thereby reducing the noise generated by the flow, and making the CNC machine tool quieter under working conditions.

本实用新型的一个实施方式中示出,所述定子5位于所述外壳1内部轴向方向的一端。As shown in an embodiment of the present utility model, the stator 5 is located at one end of the inner axial direction of the housing 1 .

气浮电主轴把动力部分放置在轴体2的后端位置,可以有效的节省空间。另外,外壳1还可以设置为分体结构,后端动力部分的外壳1与前端主轴部分的外壳1分为两部分,并且这两部分通过螺钉相连,这样不仅方便组装人员安装,而且也方便维修,体现了人性化的设计理念与需要。使主轴从外部来看,结构更加简单漂亮,后端动力部分的外壳1与前端主轴部分的外壳1可以通过四个快插头插接结合,结构十分鲜明。在实现功能和技术指标的前提下,做到了产品的美观化。The air-floating electric spindle places the power part at the rear end of the shaft body 2, which can effectively save space. In addition, the casing 1 can also be set as a split structure, the casing 1 of the rear power part and the casing 1 of the front spindle part are divided into two parts, and the two parts are connected by screws, which is not only convenient for assembly personnel to install, but also convenient for maintenance , reflecting the humanized design concept and needs. From the outside, the main shaft has a simpler and more beautiful structure. The housing 1 of the rear power part and the housing 1 of the front main shaft part can be connected by four quick plugs, and the structure is very distinct. On the premise of realizing the functions and technical indicators, the aesthetics of the products have been achieved.

本实用新型的一个实施方式中示出,所述外壳1内部设有环绕所述轴体2端部且能够限制所述轴体2振动的平衡环6。As shown in an embodiment of the present utility model, a balance ring 6 surrounding the end of the shaft body 2 and capable of limiting the vibration of the shaft body 2 is provided inside the housing 1 .

设置平衡环6的目的是稳定轴体2,即实现轴体2的动平衡。由于轴体2末端的动力部分轴端直径较小,在外壳1内部加装一个平衡环6,以便该轴体2能够在转动过程中实现动平衡。任何转子4在围绕其轴线旋转时,由于转子4相对于轴线的质量分布不均匀而产生离心力,这种不平衡离心力作用在轴体2上会引起振动,会产生噪声,并且会加速轴体2的轴端磨损,严重影响产品的性能和寿命。通过爱装平衡环6做动平衡处理后,可以很大程度上提高轴体2的性能。The purpose of setting the balance ring 6 is to stabilize the shaft body 2 , that is to realize the dynamic balance of the shaft body 2 . Since the diameter of the shaft end of the power part at the end of the shaft body 2 is small, a balance ring 6 is installed inside the housing 1 so that the shaft body 2 can realize dynamic balance during rotation. When any rotor 4 rotates around its axis, a centrifugal force is generated due to the uneven mass distribution of the rotor 4 relative to the axis. This unbalanced centrifugal force acts on the shaft body 2 to cause vibration, noise, and acceleration of the shaft body 2. The wear of the shaft end seriously affects the performance and life of the product. The performance of the shaft body 2 can be improved to a great extent after the dynamic balancing process is performed by the Aizhuang balancing ring 6 .

本实用新型的一个实施方式中示出,所述石墨轴套3的外部形成有能够辅助气体推动所述石墨轴套3的气动槽31。As shown in an embodiment of the present utility model, the exterior of the graphite bushing 3 is formed with an aerodynamic groove 31 capable of assisting gas to push the graphite bushing 3 .

在石墨轴套3上设置气动槽31,可以使气体在与石墨轴套3接触时增大对石墨轴套3的推动力,气动槽31可以实现汇聚气体的功能,使得石墨轴套3在受到较小流量的气体推动下就可以实现悬浮,减小了气泵输出气体的功率,有效降低了能源的损耗。A pneumatic groove 31 is set on the graphite bushing 3, which can increase the driving force of the gas on the graphite bushing 3 when it contacts the graphite bushing 3, and the pneumatic groove 31 can realize the function of converging gas, so that the graphite bushing 3 can Levitation can be achieved under the push of a small flow rate of gas, which reduces the power of the gas pump output and effectively reduces energy consumption.

进一步,所述进气通道11的通道口处设有过滤网,通过过滤网可以过滤掉气体中的部分杂质,从而延长外壳1内部与石墨轴套3之间空间的清洁时间,有效地降低了更换次数,提高了工作效率。Further, a filter screen is provided at the channel opening of the air intake channel 11, through which some impurities in the gas can be filtered out, thereby prolonging the cleaning time of the space between the interior of the shell 1 and the graphite sleeve 3, effectively reducing the The number of replacements improves work efficiency.

本实用新型的一个实施方式中示出,所述外壳1的内部形成有与所述外壳1外部连通的水冷通道12。As shown in an embodiment of the present utility model, the inside of the casing 1 is formed with a water cooling passage 12 communicating with the outside of the casing 1 .

设置水冷通道12可以使气浮电主轴采用循环水冷的方式来实现内部设备的冷却。水溶液由外接的水冷机通过外壳1上的水冷通道12入口进入,通过外壳1内的水冷通道12靠近外壳1内部升温设备所在的相应的部位,实现对内置电机的冷却。然后水溶液通过水冷通道12的出口流回水冷机,实现循环制冷的效果。当然,水冷通道12可以只设置在靠近定子5的位置附近,只对电机部分进行降温。Setting the water-cooling channel 12 can make the air-floating electric spindle adopt the way of circulating water cooling to realize the cooling of the internal equipment. The aqueous solution enters from the external water cooler through the inlet of the water cooling passage 12 on the casing 1, and passes through the water cooling passage 12 in the casing 1 close to the corresponding part where the heating device inside the casing 1 is located to realize cooling of the built-in motor. Then the aqueous solution flows back to the water chiller through the outlet of the water cooling channel 12 to realize the effect of circulating refrigeration. Certainly, the water-cooling channel 12 can be arranged only near the position near the stator 5 to cool down only the motor part.

具体地,水冷通道12位于定子外侧的外壳1内。这样设置水冷通道12可以使设置在外壳1内部的定子在周向上全方位实现降温,加快了降温速度,避免了死角,不会出现局部温度过高而电机烧毁的现象。Specifically, the water cooling channel 12 is located in the casing 1 outside the stator. Setting the water-cooling channel 12 in this way can make the stator arranged inside the housing 1 realize cooling in all directions in the circumferential direction, speed up the cooling speed, avoid dead angles, and prevent the motor from being burned due to local overheating.

本实用新型的一个实施方式中示出,所述定子5的外部包裹有电机冷却套7。电机冷却套7是单独实现对定子5降温的冷却设备,电机冷却套7也可以采用具备水冷功能的电机冷却套7,这样使定子5有独立的降温设备,避免定子5在工作过程中温度过高而烧毁。As shown in an embodiment of the present invention, the stator 5 is wrapped with a motor cooling jacket 7 . The motor cooling jacket 7 is a cooling device that independently realizes the cooling of the stator 5, and the motor cooling jacket 7 can also adopt a motor cooling jacket 7 with a water cooling function, so that the stator 5 has an independent cooling device to avoid excessive temperature of the stator 5 during work. High and burnt.

本实用新型的气浮电主轴,不仅能够有效提高产品的加工精度,同时也减少了污染和噪声。有着体积小,转速高,稳定性高的技术优势,能够广泛应用机械行业的各个领域。该主轴可以用于高精密数控机床上,不仅可以提高产品的品质,而且还能延长刀具的寿命,保障机床稳定高效率的工作。The air-floating electric spindle of the utility model can not only effectively improve the machining accuracy of products, but also reduce pollution and noise. With the technical advantages of small size, high speed and high stability, it can be widely used in various fields of the machinery industry. The spindle can be used on high-precision CNC machine tools, which can not only improve the quality of products, but also prolong the life of the tool and ensure the stable and high-efficiency work of the machine tool.

以上实施例的先后顺序仅为便于描述,不代表实施例的优劣。The sequence of the above embodiments is only for convenience of description, and does not represent the advantages or disadvantages of the embodiments.

最后应说明的是:以上实施例仅用以说明本实用新型的技术方案,而非对其限制;尽管参照前述实施例对本实用新型进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本实用新型各实施例技术方案的精神和范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present utility model, and are not intended to limit it; although the utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: It is still possible to modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit of the technical solutions of the various embodiments of the present invention. and range.

Claims (10)

1.一种气浮电主轴,包括外壳(1)、设置在所述外壳(1)内部的定子(5)、轴体(2)、固定在轴体(2)上且与所述定子(5)配合的转子(4),其特征在于,所述外壳(1)上设有进气通道(11)和能够将进入到所述外壳(1)内部的气体排出的出气通道,所述轴体(2)外部包裹有石墨轴套(3),所述进气通道(11)与所述石墨轴套(3)位置相对。1. An air-floating electric spindle, comprising a casing (1), a stator (5) arranged inside the casing (1), a shaft body (2), fixed on the shaft body (2) and connected to the stator ( 5) A matched rotor (4), characterized in that the housing (1) is provided with an air inlet channel (11) and an air outlet channel capable of discharging the gas entering the housing (1), and the shaft The body (2) is wrapped with a graphite bushing (3), and the air inlet channel (11) is opposite to the graphite bushing (3). 2.根据权利要求1所述的气浮电主轴,其特征在于,所述进气通道(11)为多个,且沿所述外壳(1)的轴向方向等间距均匀分布于所述外壳(1)上。2. The air-floating electric spindle according to claim 1, characterized in that there are a plurality of said air intake passages (11), and they are evenly distributed in the housing (1) at equal intervals along the axial direction of the housing (1) (1) on. 3.根据权利要求2所述的气浮电主轴,其特征在于,所述出气通道外部设有消音器。3. The air-floating electric spindle according to claim 2, wherein a muffler is provided outside the air outlet passage. 4.根据权利要求3所述的气浮电主轴,其特征在于,所述定子(5)位于所述外壳(1)内部轴向方向的一端。4. The air-floating electric spindle according to claim 3, characterized in that, the stator (5) is located at one end in the inner axial direction of the casing (1). 5.根据权利要求4所述的气浮电主轴,其特征在于,所述外壳(1)内部设有环绕所述轴体(2)端部且能够限制所述轴体(2)振动的平衡环(6)。5. The air-floating electric spindle according to claim 4, characterized in that, inside the casing (1) there is a balance that surrounds the end of the shaft (2) and can limit the vibration of the shaft (2) Ring (6). 6.根据权利要求5所述的气浮电主轴,其特征在于,所述石墨轴套(3)的外部形成有能够辅助气体推动所述石墨轴套(3)的气动槽(31)。6 . The air-floating electric spindle according to claim 5 , characterized in that, a pneumatic groove ( 31 ) that can assist gas to push the graphite bushing ( 3 ) is formed on the outside of the graphite bushing ( 3 ). 7 . 7.根据权利要求6所述的气浮电主轴,其特征在于,所述进气通道(11)的通道口处设有过滤网。7. The air-floating electric spindle according to claim 6, characterized in that a filter is provided at the channel opening of the air intake channel (11). 8.根据权利要求7所述的气浮电主轴,其特征在于,所述外壳(1)的内部形成有与所述外壳(1)外部连通的水冷通道(12)。8. The air-floating electric spindle according to claim 7, characterized in that, a water cooling channel (12) communicating with the outside of the housing (1) is formed inside the housing (1). 9.根据权利要求8所述的气浮电主轴,其特征在于,所述水冷通道(12)位于所述定子外侧的所述外壳(1)内。9. The air-floating electric spindle according to claim 8, characterized in that, the water-cooling channel (12) is located in the housing (1) outside the stator. 10.根据权利要求9所述的气浮电主轴,其特征在于,所述定子(5)的外部包裹有电机冷却套(7)。10. The air bearing electric spindle according to claim 9, characterized in that, the stator (5) is wrapped with a motor cooling jacket (7).
CN201620071825.7U 2016-01-25 2016-01-25 Air supporting electricity main shaft Expired - Lifetime CN205478912U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108488233A (en) * 2018-03-27 2018-09-04 燕山大学 A kind of magnetism dual suspension cod with porous media
CN115435016A (en) * 2022-10-20 2022-12-06 西安交通大学 A dynamic pressure air bearing with axial air intake
CN116857282A (en) * 2023-06-14 2023-10-10 北京海普瑞森超精密技术有限公司 Ultra-precise aerostatic bearing turntable

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108488233A (en) * 2018-03-27 2018-09-04 燕山大学 A kind of magnetism dual suspension cod with porous media
CN115435016A (en) * 2022-10-20 2022-12-06 西安交通大学 A dynamic pressure air bearing with axial air intake
CN116857282A (en) * 2023-06-14 2023-10-10 北京海普瑞森超精密技术有限公司 Ultra-precise aerostatic bearing turntable

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