CN205325366U - Silicon wafer stick chamfering apparatus - Google Patents

Silicon wafer stick chamfering apparatus Download PDF

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Publication number
CN205325366U
CN205325366U CN201620065273.9U CN201620065273U CN205325366U CN 205325366 U CN205325366 U CN 205325366U CN 201620065273 U CN201620065273 U CN 201620065273U CN 205325366 U CN205325366 U CN 205325366U
Authority
CN
China
Prior art keywords
cylinder
portable plate
crystal bar
silicon crystal
dovetail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201620065273.9U
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Chinese (zh)
Inventor
孙明祥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZHEJIANG HAOYA ENERGY SOURCES TECHNOLOGY Co Ltd
Original Assignee
ZHEJIANG HAOYA ENERGY SOURCES TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZHEJIANG HAOYA ENERGY SOURCES TECHNOLOGY Co Ltd filed Critical ZHEJIANG HAOYA ENERGY SOURCES TECHNOLOGY Co Ltd
Priority to CN201620065273.9U priority Critical patent/CN205325366U/en
Application granted granted Critical
Publication of CN205325366U publication Critical patent/CN205325366U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model provides a silicon wafer stick chamfering apparatus, it is rational in infrastructure, can avoid effectively that tilting mechanism is in the upset working process on it, the bending deformation takes place and includes the organism for the cylinder pole of second cylinder, is equipped with the V -arrangement groove that is used for placing the crystal bar on the organism, and the below in V -arrangement groove is equipped with the griding assembly who installs in the organism, and the top in V -arrangement groove is equipped with the tilting mechanism who is used for the upset of silicon wafer stick, tilting mechanism is including fixing the support on the organism, first fly leaf, first cylinder, second fly leaf, second cylinder, and the inboard relative position of two second fly leafs installs the clamp splice that is suitable for centre gripping silicon wafer stick, and each clamp splice can rotate around self axis, and one of them clamp splice is rotatory by the driving motor drive, be equipped with on the first fly leaf along the forked tail boss or / and the dovetail of the setting of second cylinder axial, the upper end of second fly leaf be equipped with be suitable for with forked tail boss or dovetail sliding fit's dovetail or forked tail boss.

Description

A kind of silicon crystal bar chamfering device
Technical field
This utility model belongs to silicon wafer fabrication techniques field, is specifically related to a kind of silicon crystal bar chamfering device。
Background technology
In the process that silicon wafer production manufactures, need to cut into slices silicon crystal bar, but before section in order to after ensureing section the quality of silicon wafer need silicon crystal bar chamfering, silicon wafer edge surface after the silicon crystal bar section of non-chamfering can have corner angle burr and collapse limit and even have the defects such as crack, edge surface is relatively rough, in order to increase silicon wafer edge surface mechanical strength, reduce particle contamination, it is therefore desirable to be arc-shaped or trapezoidal by the edge grind of silicon crystal bar。Chamfering process mostly carries out on silicon crystal bar chamfering device, when chamfering, needs to turn over silicon crystal bar to turn 90 degrees, then another corner angle are polished after silicon crystal bar one corner angle have been polished。Existing a kind of silicon crystal bar chamfering device includes body, body is provided with the V-shaped groove for placing silicon crystal bar, the sanding component being connected with being installed in body of V-shaped groove, V-shaped groove be arranged over the switching mechanism for being overturn by silicon crystal bar, described switching mechanism includes the support being fixed on body, horizontally disposed first portable plate, drive the first cylinder that the first portable plate moves up and down, two the second portable plates being oppositely arranged, be fixed on described first portable plate for drive two second portable plates in opposite directions or from motion the second cylinder, described second cylinder is the twin shaft cylinder that two ends are equipped with cylinder rod, inside two second portable plates, relative position is equiped with the fixture block being suitable to clamping silicon crystal bar, each fixture block can around own axis, wherein a fixture block is driven by drive motor and rotates。This equipment is operationally, silicon crystal bar is put into V-shaped groove, by sanding component, the lower corner angle of silicon crystal bar are polished, turn over to turn 90 degrees by silicon crystal bar by switching mechanism after having polished and again next corner angle is polished, specifically when upset, first being driven the second portable plate to move down by the first cylinder makes fixture block be in the position relative with center, silicon crystal bar two ends, then the second cylinder drives two second portable plates to move towards and is clamped silicon crystal bar by two fixture blocks, after driving, again through the first cylinder, the certain altitude that moves up, driven by drive motor and after driving silicon crystal bar to rotate 90 degree, silicon crystal bar is put into V-shaped groove by sanding component continuation polishing, this upset polishing step cycle three times can by complete for the four of silicon crystal bar corner angle polishings。Above-mentioned silicon crystal bar chamfering device there is problems of, second portable plate is in unsettled all the time, only connected by cylinder rod and the second cylinder, so, when overturning silicon crystal bar, silicon crystal bar weight is that the cylinder rod by the second cylinder is bearing, and life-time service exhaust hood bar can occur bending and deformation unavoidably, and then cannot normally stretch, have impact on equipment normal operation。
Utility model content
Technical problem to be solved in the utility model is, overcomes the defect of prior art, it is provided that a kind of silicon crystal bar chamfering device rational in infrastructure such that it is able to being prevented effectively from it switching mechanism in upset work process, the cylinder rod of the second cylinder occurs bending and deformation。
For solving above-mentioned technical problem, the utility model proposes a kind of silicon crystal bar chamfering device, including body, body is provided with the V-shaped groove for placing crystal bar, the sanding component being connected with being installed in body of V-shaped groove, V-shaped groove be arranged over the switching mechanism for being overturn by silicon crystal bar, described switching mechanism includes the support being fixed on body, horizontally disposed first portable plate, drive the first cylinder that the first portable plate moves up and down, two the second portable plates being oppositely arranged, be fixed on described first portable plate for drive two second portable plates in opposite directions or from motion the second cylinder, described second cylinder is the twin shaft cylinder that two ends are equipped with cylinder rod, inside two second portable plates, relative position is equiped with the fixture block being suitable to clamping silicon crystal bar, each fixture block can around own axis, wherein a fixture block is driven by drive motor and rotates;First portable plate is provided with along the axially arranged dovetail boss of the second cylinder or/and dovetail groove, and the upper end of described second portable plate is provided with and is suitable to described dovetail boss or/and the dovetail groove that is slidably matched of dovetail groove is or/and dovetail boss。
After adopting said structure, compared with prior art, this utility model has the advantage that described first portable plate is provided with along the axially arranged dovetail boss of the second cylinder or/and dovetail groove, the upper end of described second portable plate is provided with and is suitable to described dovetail boss or/and the dovetail groove that is slidably matched of dovetail groove is or/and dovetail boss, so pass through the cooperation with dovetail groove of the dovetail boss thus the first portable plate and the second portable plate being flexibly connected, described second portable plate is in the process being ordered about movement by the second cylinder, relative movement is there is therewith in dovetail boss with corresponding dovetail groove position, when overturning silicon crystal bar, the weight of silicon crystal bar is by the cylinder rod shared of the first portable plate and the second cylinder, it is thus possible to avoid being susceptible to when only being born silicon crystal bar weight by the cylinder rod of the second cylinder diastrophic problem;In practical operation, in order to reduce the frictional force between dovetail boss and dovetail groove, roller can be set between。
As improvement, second cylinder is fixed on the first portable plate by bolt assembly, on described first portable plate, the corresponding position installing the second cylinder is provided with positioning boss, described second cylinder is provided with the locating slot coordinated with described positioning boss, so, after positioning boss being coordinated with locating slot, it is possible to the second cylinder is quickly positioned, consequently facilitating the screw on the second cylinder aligns with the screw on the first portable plate, bolt assembly is facilitated to fix。
As improvement, bolt assembly includes fastening bolt and matched elastomeric pad and torque nut, so just can be fixed on the first portable plate by firm for the second cylinder。
Accompanying drawing explanation
Fig. 1 is the structural representation of silicon crystal bar chamfering device in this utility model。
Fig. 2 is in silicon crystal bar chamfering device of the present utility model, positive direction view when described first portable plate and the second portable plate connect。
Shown in figure, 1, body, 2, V-shaped groove, 3, support, the 5, first portable plate, the 6, first cylinder, the 7, second portable plate, the 8, second cylinder, 9, fixture block, 10, guide post, 11, dovetail groove, 12, dovetail boss, 13, bolt assembly, 14, motor。
Detailed description of the invention
Below in conjunction with Figure of description, the concrete structure of silicon crystal bar chamfering device in this utility model is described further:
As depicted in figs. 1 and 2, in the present embodiment, silicon crystal bar chamfering device includes body 1, body 1 is provided with the V-shaped groove 2 for placing crystal bar, the sanding component being connected with being installed in body 1 of V-shaped groove 2, V-shaped groove 2 be arranged over the switching mechanism for being overturn by silicon crystal bar, described switching mechanism includes the support 4 being fixed on body 1, horizontally disposed first portable plate 5, drive the first cylinder 6 that the first portable plate 5 moves up and down, two the second portable plates 7 being oppositely arranged, be fixed on described first portable plate 5 for drive two second portable plates 7 in opposite directions or from motion the second cylinder 8, described first cylinder 6 is fixed on described support 4, described first portable plate 5 is fixed on the cylinder rod of described first cylinder 6, described second cylinder 8 is equipped with the twin shaft cylinder of cylinder rod for two ends, inside two second portable plates 7, relative position is equiped with the fixture block 9 being suitable to clamping silicon crystal bar, each fixture block 9 can around own axis, wherein a fixture block 9 is driven rotation by drive motor 14, during upset, the fixture block 9 driven by described drive motor 14 is actively, another fixture block 9 is driven;First portable plate 5 is provided with along the axially arranged dovetail boss 12 of the second cylinder 8 or/and dovetail groove 11, and the upper end of described second portable plate 7 is provided with and is suitable to described dovetail boss 12 or/and the dovetail groove 11 that is slidably matched of dovetail groove 11 is or/and dovetail boss 12。In this utility model, first portable plate 5 is provided with along the axially arranged dovetail boss 12 of the second cylinder 8 or/and dovetail groove 11, the upper end of described second portable plate 7 is provided with and is suitable to described dovetail boss 12 or/and the dovetail groove 11 that is slidably matched of dovetail groove 11 is or/and dovetail boss 12, so pass through the dovetail boss 12 cooperation with dovetail groove 11 thus being flexibly connected with the second portable plate 7 by the first portable plate 5, described second portable plate 7 is in the process being ordered about movement by the second cylinder 8, relative movement is there is therewith in dovetail boss 12 with corresponding dovetail groove 11 position, when overturning silicon crystal bar, the weight of silicon crystal bar is by the cylinder rod shared of the first portable plate 5 and the second cylinder 8, it is thus possible to avoid being susceptible to diastrophic problem when only being born silicon crystal bar weight by the cylinder rod of the second cylinder 8;In practical operation, in order to reduce the frictional force between dovetail boss 12 and dovetail groove 11, roller can be set between。As deformation, described dovetail groove 11 can make convex shape groove into, correspondence, makes described dovetail boss 12 into convex shape boss。
In the present embodiment, second cylinder 8 is fixed on the first portable plate 5 by bolt assembly 13, on described first portable plate 5, the corresponding position installing the second cylinder 8 is provided with positioning boss, described second cylinder 8 is provided with the locating slot coordinated with described positioning boss, after positioning boss is coordinated with locating slot, second cylinder 8 quickly can be positioned, consequently facilitating the screw on the second cylinder 8 aligns with the screw on the first portable plate 5, facilitate bolt assembly 13 to fix。
In the present embodiment, bolt assembly 13 includes fastening bolt and matched elastomeric pad and torque nut, so just can be fixed on the first portable plate 5 by firm for the second cylinder 8。
In this utility model, for avoiding described first portable plate 5 to deflect in the process moved up and down by the first air cylinder driven, can on support 4 fixed guide pole 10, and the pilot hole that mates with described guide post 10 is set on described first portable plate 5。
The above is only better embodiment of the present utility model, therefore all equivalences done according to the structure described in present patent application scope, feature and principle change or modify, and are all included in this utility model patent claim。

Claims (3)

1. a silicon crystal bar chamfering device, including body (1), body (1) is provided with the V-shaped groove (2) for placing silicon crystal bar, the sanding component being connected with being installed in body (1) of V-shaped groove (2), V-shaped groove (2) be arranged over the switching mechanism for being overturn by silicon crystal bar, described switching mechanism includes the support (4) being fixed on body (1), horizontally disposed first portable plate (5), drive the first cylinder (6) that the first portable plate (5) moves up and down, the second portable plate (7) that two are oppositely arranged, be fixed on being used on described first portable plate (5) drive two second portable plates (7) in opposite directions or from motion the second cylinder (8), described second cylinder (8) is equipped with the twin shaft cylinder of cylinder rod for two ends, two second portable plate (7) inner side relative positions are equiped with the fixture block (9) being suitable to clamping silicon crystal bar, each fixture block (9) can around own axis, wherein a fixture block (9) is driven by drive motor (14) and rotates;It is characterized in that: described first portable plate (5) is provided with along the axially arranged dovetail boss (12) of the second cylinder (8) or/and dovetail groove (11), the upper end of described second portable plate (7) is provided with and is suitable to described dovetail boss (12) or/and the dovetail groove (11) that is slidably matched of dovetail groove (11) is or/and dovetail boss (12)。
2. silicon crystal bar chamfering device according to claim 1, it is characterized in that, described second cylinder (8) is fixed on the first portable plate (5) by bolt assembly (13), the position that the upper correspondence of described first portable plate (5) installs the second cylinder (8) is provided with positioning boss, and described second cylinder (8) is provided with the locating slot coordinated with described positioning boss。
3. silicon crystal bar chamfering device according to claim 2, it is characterised in that described bolt assembly (13) includes fastening bolt and matched elastomeric pad and torque nut。
CN201620065273.9U 2016-01-22 2016-01-22 Silicon wafer stick chamfering apparatus Expired - Fee Related CN205325366U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620065273.9U CN205325366U (en) 2016-01-22 2016-01-22 Silicon wafer stick chamfering apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620065273.9U CN205325366U (en) 2016-01-22 2016-01-22 Silicon wafer stick chamfering apparatus

Publications (1)

Publication Number Publication Date
CN205325366U true CN205325366U (en) 2016-06-22

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620065273.9U Expired - Fee Related CN205325366U (en) 2016-01-22 2016-01-22 Silicon wafer stick chamfering apparatus

Country Status (1)

Country Link
CN (1) CN205325366U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106449893A (en) * 2016-12-05 2017-02-22 安徽省天利能源有限公司 Photovoltaic panel manufacturing cell slice production equipment
CN111975532A (en) * 2020-08-25 2020-11-24 赣州市业润自动化设备有限公司 Monocrystalline silicon wafer chamfering equipment with aligning device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106449893A (en) * 2016-12-05 2017-02-22 安徽省天利能源有限公司 Photovoltaic panel manufacturing cell slice production equipment
CN111975532A (en) * 2020-08-25 2020-11-24 赣州市业润自动化设备有限公司 Monocrystalline silicon wafer chamfering equipment with aligning device
CN111975532B (en) * 2020-08-25 2021-08-31 叶怡晴 Monocrystalline silicon wafer chamfering equipment with aligning device

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160622

Termination date: 20170122