CN205282449U - A lamination detection device for rinse board - Google Patents
A lamination detection device for rinse board Download PDFInfo
- Publication number
- CN205282449U CN205282449U CN201620033501.4U CN201620033501U CN205282449U CN 205282449 U CN205282449 U CN 205282449U CN 201620033501 U CN201620033501 U CN 201620033501U CN 205282449 U CN205282449 U CN 205282449U
- Authority
- CN
- China
- Prior art keywords
- lamination
- inductor block
- detection device
- cleaning machine
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model relates to a lamination detects technical field, especially relates to a lamination detection device for rinse board, including the inductor of locating the silicon chip flow path department between two cell bodies, the controller of connecting the inductor, the inductor is fixed in on the support, the support both sides are passed through the fastener and can be dismantled and connect on the cell body. The utility model discloses simple structure need not to change the present board structure of rinsing during the use, the dismouting is easy, convenient to use, and low in manufacturing cost, detection effect is good, and the fastness of installation is good with stability.
Description
Technical field
The utility model relates to lamination detection technique field, especially relates to a kind of lamination for cleaning machine detection device.
Background technology
Can there is lamination or stifled sheet phenomenon in solar silicon wafers, affect the cleaning performance of solar silicon wafers in cleaning machine in cleaning process, also easily damages silicon chip.
And the patent No. is 2011202614673, disclose a kind of solar silicon wafers transport unit, although this device can realize the detection to silicon chip lamination, but its complex structure, it may also be useful to whole silicon chip transport unit need to all be replaced by time, it may also be useful to cost height; And the installation of inductor block is insecure, dismounting difficulty, thus after inductor block damages, repairs inconvenience.
Practical novel content
The utility model is in order to overcome the deficiencies in the prior art, it is provided that a kind of structure is simple, installs firmly, low cost of manufacture, for the lamination detection device of cleaning machine.
In order to realize above-mentioned purpose, the utility model is by the following technical solutions: a kind of lamination for cleaning machine detection device, comprising the inductor block at the silicon chip flow passage place being located between two groove bodies, connect the controller of inductor block, described inductor block is fixed on support; Described support both sides are removably connected on groove body by fastening piece. Inductor block of the present utility model can detect the velocity of flow of silicon chip in flow passage and time, and the length of silicon chip, then information is transferred to controller, calculate when the length of silicon chip and time & speed are directly proportional by controller, thus learn whether silicon chip lamination phenomenon occurs; Whole apparatus structure is simple, and computing velocity is fast, efficiency height, and required parts are few, low cost of manufacture; And when mounted, only inductor block need to be arranged on support, and then support is fixed on groove body, it is not necessary to change the transport unit in existing flow passage, it may also be useful to cost is low; Add the fast assembling-disassembling that described fastening piece can realize support and inductor block simultaneously, it is convenient to the maintenance of inductor block and support, replacing and installation.
Further, described inductor block is corrosion-resistant optoelectronic induction device. Extend the work-ing life of inductor block.
Further, described support is also corrosion-resistant frame body, and described fastening piece is also corrosion-resistant secure component. Extend the work-ing life of support and fastening piece.
Further, described controller connects a warning horn. The prompting to staff can be realized.
Further, described fastening piece is screw, screw rod or bolt. Draw materials conveniently, it is easy to realize.
Further, forming the groove holding inductor block on described support, one end of inductor block is provided with the protuberance of accessible information, and the bottom of groove is provided with for the perforate that protuberance passes, the other end of inductor block is threadedly connected to groove top, and the top of groove connects a cap fall prevention. Inductor block is threaded with groove top, and has added described cap fall prevention, and then realizes support and be connected with the firm of inductor block, simultaneously easy accessibility, and speed is fast; Described protuberance and perforate can ensure the normal inductive operation of inductor block.
Further, described groove body being provided with projection with fastening piece junction, this projection is provided with the threaded hole for the insertion of fastening piece spiral. This projection and threaded hole increase the connection area of fastening piece, it may be achieved groove body is connected with the firm of fastening piece; Facilitate the dismounting of fastening piece simultaneously.
In sum, the utility model structure is simple, it may also be useful to time without the need to changing existing cleaning machine structure, easy disassembling, it may also be useful to convenient, low cost of manufacture, Detection results is good, the stability of installation, stable.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is part enlarged view in Fig. 1.
Embodiment
In order to make those skilled in the art better understand the utility model scheme, below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out clear, complete description.
As shown in Figure 1-2, a kind of lamination for cleaning machine detection device, comprise inductor block 1, support and controller, the silicon chip flow passage place that described inductor block 1 is located between two groove bodies, as shown in Figure 1, namely cleaning machine comprises groove body 1,2,3 ... 6,7, silicon chip flows through groove body 1,2,3 successively from material loading end ... 6,7, complete cleaning operation, and then move out from discharging end. Described inductor block is located between groove body 3 and groove body 4, is provided with some silicon chip flow passages between groove body 3 and groove body 4, is equipped with an inductor block 1 in each silicon chip flow passage. Described inductor block 1 is corrosion-resistant optoelectronic induction device. Controller connects inductor block 1 and a warning horn, and this warning horn is acousto-optic warning horn. And this controller is PLC, it may also be useful to time need to revise PLC program, the induction time of silicon chip is set; When the induction time is greater than setup times, PLC controls warning horn and sends acousto-optic alarm, reminds staff's lamination to occur, need to process in time, to reduce the loss. When there are lamination or stifled sheet in cleaning machine 100 inside, warning horn can give the alarm, and early finds to reach, the object that early process is abnormal, and then can reduce the loss. Described inductor block 1 is fixed on support, and described support both sides are removably connected on groove body by fastening piece. Described fastening piece is screw, screw rod or bolt. Described support is also corrosion-resistant frame body, and described fastening piece is also corrosion-resistant secure component; Namely described support, fastening piece are all designed to the corrosion-resistant material identical with cleaning machine.
During use, amendment PLC program, detects the length of silicon chip by inductor block 1, each silicon chip is through time of inductor block 1 and speed, and information is transferred to PLC, PLC calculates when being directly proportional according to silicon chip length and time & speed, thus learns whether silicon chip has lamination phenomenon. For the silicon chip of 156*156mm, inductor block has detected that by the time of inductor block be 3 seconds, is wherein spaced apart 10mm, it is possible to when learning that current inductor block exceedes computing time, PLC program control acousto-optic warning horn sends acousto-optic alarm, reminds staff check in time and process. This device can find cleaning machine internal laminations phenomenon in advance, early finds to reach, and early the object of process, reduces the loss.
Preferably, described support forming the groove holding inductor block 1, one end of inductor block 1 is provided with the protuberance of accessible information, and the bottom of groove is provided with perforate, and protuberance passes perforate, and then can be detected by silicon chip. The other end of inductor block is threadedly connected to groove top, and the top of groove connects a cap fall prevention, and this mode of connection can be and is threaded, blocks and connect. In addition, in order to strengthen the stability that groove body is connected with fastening piece, so being provided with projection with fastening piece junction on described groove body, this projection is provided with threaded hole, and fastening piece spiral inserts and realizes in described threaded hole connecting.
Obviously, described embodiment is only part embodiment of the present utility model, instead of whole embodiments. Based on the embodiment in the utility model, those of ordinary skill in the art are not making other embodiments all obtained under creative work prerequisite, all should belong to the scope of the utility model protection.
Claims (7)
1. the detection device of the lamination for cleaning machine, it is characterised in that: comprising the inductor block (1) at the silicon chip flow passage place being located between two groove bodies, connect the controller of inductor block (1), described inductor block (1) is fixed on support; Described support both sides are removably connected on groove body by fastening piece.
2. the lamination for cleaning machine according to claim 1 detection device, it is characterised in that: described inductor block is corrosion-resistant optoelectronic induction device.
3. the lamination for cleaning machine according to claim 1 detection device, it is characterised in that: described support is also corrosion-resistant frame body, and described fastening piece is also corrosion-resistant secure component.
4. the lamination for cleaning machine according to claim 1 detection device, it is characterised in that: described controller connects a warning horn.
5. the lamination for cleaning machine according to claim 1 detection device, it is characterised in that: described fastening piece is screw, screw rod or bolt.
6. the lamination for cleaning machine according to claim 5 detection device, it is characterised in that: being provided with projection with fastening piece junction on described groove body, this projection is provided with the threaded hole for the insertion of fastening piece spiral.
7. the lamination for cleaning machine according to claim 1 detection device, it is characterized in that: described support is formed the groove holding inductor block (1), one end of inductor block (1) is provided with the protuberance of accessible information, the bottom of groove is provided with for the perforate that protuberance passes, the other end of inductor block is threadedly connected to groove top, and the top of groove connects a cap fall prevention.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620033501.4U CN205282449U (en) | 2016-01-14 | 2016-01-14 | A lamination detection device for rinse board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620033501.4U CN205282449U (en) | 2016-01-14 | 2016-01-14 | A lamination detection device for rinse board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205282449U true CN205282449U (en) | 2016-06-01 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620033501.4U Expired - Fee Related CN205282449U (en) | 2016-01-14 | 2016-01-14 | A lamination detection device for rinse board |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205282449U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813238A (en) * | 2019-01-28 | 2019-05-28 | 广东拓斯达科技股份有限公司 | The control method and device of thickness of glass detection |
| CN110223944A (en) * | 2019-06-13 | 2019-09-10 | 长江存储科技有限责任公司 | Wafer cleaning bench and its method for cleaning wafer |
-
2016
- 2016-01-14 CN CN201620033501.4U patent/CN205282449U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813238A (en) * | 2019-01-28 | 2019-05-28 | 广东拓斯达科技股份有限公司 | The control method and device of thickness of glass detection |
| CN110223944A (en) * | 2019-06-13 | 2019-09-10 | 长江存储科技有限责任公司 | Wafer cleaning bench and its method for cleaning wafer |
| CN110223944B (en) * | 2019-06-13 | 2021-08-31 | 长江存储科技有限责任公司 | Wafer cleaning machine and wafer cleaning method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170628 Address after: 433000 No. 28 middle of Peach Blossom Road, Hubei, Xiantao Patentee after: HUBEI TIANHE OPTICAL ENERGY CO., LTD. Address before: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Co-patentee before: HUBEI TIANHE OPTICAL ENERGY CO., LTD. Patentee before: Changzhou Trina Solar Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160601 Termination date: 20210114 |