CN204874804U - 镀铜槽 - Google Patents
镀铜槽 Download PDFInfo
- Publication number
- CN204874804U CN204874804U CN201520365601.2U CN201520365601U CN204874804U CN 204874804 U CN204874804 U CN 204874804U CN 201520365601 U CN201520365601 U CN 201520365601U CN 204874804 U CN204874804 U CN 204874804U
- Authority
- CN
- China
- Prior art keywords
- anode
- overflow
- cell body
- body unit
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 20
- 239000010949 copper Substances 0.000 title claims abstract description 20
- 238000007747 plating Methods 0.000 claims abstract description 77
- 239000007921 spray Substances 0.000 claims abstract description 20
- 239000007788 liquid Substances 0.000 claims abstract description 14
- 238000007654 immersion Methods 0.000 claims abstract description 4
- 239000000178 monomer Substances 0.000 claims description 19
- 238000011084 recovery Methods 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 17
- 238000009713 electroplating Methods 0.000 abstract description 17
- CWFOCCVIPCEQCK-UHFFFAOYSA-N Chlorfenapyr Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300.0' height='300.0' x='0.0' y='0.0'> </rect>
<path class='bond-0 atom-0 atom-1' d='M 95.9,77.2 L 101.0,87.1' style='fill:none;fill-rule:evenodd;stroke:#7F4C19;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-0 atom-1' d='M 101.0,87.1 L 106.1,97.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1 atom-1 atom-2' d='M 106.1,97.1 L 89.8,129.6' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1 atom-1 atom-2' d='M 110.2,105.2 L 98.8,128.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-22 atom-20 atom-1' d='M 142.1,102.6 L 106.1,97.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2 atom-2 atom-3' d='M 89.8,129.6 L 53.9,135.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-6 atom-2 atom-7' d='M 89.8,129.6 L 97.5,137.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-6 atom-2 atom-7' d='M 97.5,137.2 L 105.2,144.8' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3 atom-3 atom-4' d='M 53.9,135.5 L 42.2,137.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3 atom-3 atom-4' d='M 42.2,137.4 L 30.5,139.3' style='fill:none;fill-rule:evenodd;stroke:#77D8ED;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-4 atom-3 atom-5' d='M 53.9,135.5 L 55.8,147.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-4 atom-3 atom-5' d='M 55.8,147.2 L 57.7,158.9' style='fill:none;fill-rule:evenodd;stroke:#77D8ED;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-5 atom-3 atom-6' d='M 53.9,135.5 L 52.2,125.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-5 atom-3 atom-6' d='M 52.2,125.2 L 50.5,114.9' style='fill:none;fill-rule:evenodd;stroke:#77D8ED;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-7 atom-7 atom-8' d='M 113.3,170.5 L 111.7,180.8' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-7 atom-7 atom-8' d='M 111.7,180.8 L 110.2,191.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11 atom-7 atom-12' d='M 127.4,149.1 L 137.7,143.8' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11 atom-7 atom-12' d='M 137.7,143.8 L 148.0,138.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-8 atom-8 atom-9' d='M 110.2,191.1 L 99.3,195.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-8 atom-8 atom-9' d='M 99.3,195.4 L 88.3,199.6' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9 atom-9 atom-10' d='M 73.9,219.7 L 72.4,230.0' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9 atom-9 atom-10' d='M 72.4,230.0 L 70.8,240.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-10 atom-10 atom-11' d='M 70.8,240.3 L 36.9,253.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-12 atom-12 atom-13' d='M 148.0,138.5 L 180.5,154.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-19 atom-12 atom-20' d='M 148.0,138.5 L 142.1,102.6' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-19 atom-12 atom-20' d='M 139.9,134.3 L 135.8,109.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-13 atom-13 atom-14' d='M 180.5,154.8 L 182.6,191.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-13 atom-13 atom-14' d='M 188.1,159.8 L 189.5,185.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-23 atom-13 atom-19' d='M 180.5,154.8 L 210.9,134.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-14 atom-14 atom-15' d='M 182.6,191.1 L 215.1,207.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-15 atom-15 atom-16' d='M 215.1,207.5 L 245.5,187.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-15 atom-15 atom-16' d='M 215.7,198.4 L 236.9,184.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-16 atom-16 atom-17' d='M 245.5,187.5 L 255.9,192.7' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-16 atom-16 atom-17' d='M 255.9,192.7 L 266.2,197.9' style='fill:none;fill-rule:evenodd;stroke:#5BB772;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-17 atom-16 atom-18' d='M 245.5,187.5 L 243.4,151.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-18 atom-18 atom-19' d='M 243.4,151.2 L 210.9,134.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-18 atom-18 atom-19' d='M 235.3,155.2 L 212.5,143.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-20 atom-20 atom-21' d='M 142.1,102.6 L 167.7,76.7' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 167.7,76.7 L 175.3,69.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 175.3,69.0 L 182.9,61.3' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 175.1,79.5 L 181.6,73.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 181.6,73.0 L 188.0,66.5' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 164.8,69.3 L 171.2,62.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 171.2,62.8 L 177.7,56.2' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<text x='77.2' y='72.0' class='atom-0' style='font-size:14px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#7F4C19' >B</text>
<text x='87.3' y='72.0' class='atom-0' style='font-size:14px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#7F4C19' >r</text>
<text x='13.6' y='148.6' class='atom-4' style='font-size:14px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#77D8ED' >F</text>
<text x='55.4' y='178.6' class='atom-5' style='font-size:14px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#77D8ED' >F</text>
<text x='43.6' y='106.8' class='atom-6' style='font-size:14px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#77D8ED' >F</text>
<text x='111.3' y='162.4' class='atom-7' style='font-size:14px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='71.9' y='211.6' class='atom-9' style='font-size:14px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='273.6' y='211.1' class='atom-17' style='font-size:14px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#5BB772' >C</text>
<text x='283.7' y='211.1' class='atom-17' style='font-size:14px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#5BB772' >l</text>
<text x='188.9' y='58.1' class='atom-22' style='font-size:14px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85.0' height='85.0' x='0.0' y='0.0'> </rect>
<path class='bond-0 atom-0 atom-1' d='M 26.1,20.7 L 27.8,24.1' style='fill:none;fill-rule:evenodd;stroke:#7F4C19;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-0 atom-1' d='M 27.8,24.1 L 29.6,27.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1 atom-1 atom-2' d='M 29.6,27.4 L 25.0,36.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1 atom-1 atom-2' d='M 30.7,29.7 L 27.5,36.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-22 atom-20 atom-1' d='M 39.6,29.0 L 29.6,27.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2 atom-2 atom-3' d='M 25.0,36.5 L 15.0,38.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-6 atom-2 atom-7' d='M 25.0,36.5 L 27.6,39.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-6 atom-2 atom-7' d='M 27.6,39.1 L 30.2,41.6' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3 atom-3 atom-4' d='M 15.0,38.2 L 11.0,38.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3 atom-3 atom-4' d='M 11.0,38.8 L 7.0,39.5' style='fill:none;fill-rule:evenodd;stroke:#77D8ED;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-4 atom-3 atom-5' d='M 15.0,38.2 L 15.7,42.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-4 atom-3 atom-5' d='M 15.7,42.1 L 16.3,46.1' style='fill:none;fill-rule:evenodd;stroke:#77D8ED;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-5 atom-3 atom-6' d='M 15.0,38.2 L 14.5,34.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-5 atom-3 atom-6' d='M 14.5,34.8 L 13.9,31.4' style='fill:none;fill-rule:evenodd;stroke:#77D8ED;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-7 atom-7 atom-8' d='M 31.7,46.9 L 31.2,50.3' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-7 atom-7 atom-8' d='M 31.2,50.3 L 30.7,53.7' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11 atom-7 atom-12' d='M 34.3,42.6 L 37.8,40.8' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11 atom-7 atom-12' d='M 37.8,40.8 L 41.2,39.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-8 atom-8 atom-9' d='M 30.7,53.7 L 27.0,55.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-8 atom-8 atom-9' d='M 27.0,55.1 L 23.3,56.6' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9 atom-9 atom-10' d='M 20.8,60.6 L 20.2,64.0' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9 atom-9 atom-10' d='M 20.2,64.0 L 19.7,67.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-10 atom-10 atom-11' d='M 19.7,67.4 L 10.3,71.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-12 atom-12 atom-13' d='M 41.2,39.0 L 50.3,43.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-19 atom-12 atom-20' d='M 41.2,39.0 L 39.6,29.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-19 atom-12 atom-20' d='M 39.0,37.8 L 37.9,30.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-13 atom-13 atom-14' d='M 50.3,43.5 L 50.9,53.7' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-13 atom-13 atom-14' d='M 52.4,44.9 L 52.8,52.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-23 atom-13 atom-19' d='M 50.3,43.5 L 58.8,38.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-14 atom-14 atom-15' d='M 50.9,53.7 L 60.0,58.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-15 atom-15 atom-16' d='M 60.0,58.2 L 68.4,52.7' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-15 atom-15 atom-16' d='M 60.1,55.7 L 66.1,51.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-16 atom-16 atom-17' d='M 68.4,52.7 L 72.0,54.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-16 atom-16 atom-17' d='M 72.0,54.4 L 75.5,56.2' style='fill:none;fill-rule:evenodd;stroke:#5BB772;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-17 atom-16 atom-18' d='M 68.4,52.7 L 67.9,42.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-18 atom-18 atom-19' d='M 67.9,42.5 L 58.8,38.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-18 atom-18 atom-19' d='M 65.6,43.7 L 59.2,40.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-20 atom-20 atom-21' d='M 39.6,29.0 L 46.7,21.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 46.7,21.8 L 49.3,19.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 49.3,19.2 L 51.8,16.6' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 48.9,22.4 L 51.1,20.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 51.1,20.2 L 53.3,18.1' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 46.1,19.6 L 48.2,17.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 48.2,17.4 L 50.4,15.2' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<text x='19.9' y='21.4' class='atom-0' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#7F4C19' >B</text>
<text x='24.0' y='21.4' class='atom-0' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#7F4C19' >r</text>
<text x='3.2' y='42.8' class='atom-4' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#77D8ED' >F</text>
<text x='14.8' y='51.2' class='atom-5' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#77D8ED' >F</text>
<text x='11.6' y='31.1' class='atom-6' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#77D8ED' >F</text>
<text x='30.4' y='46.6' class='atom-7' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='19.4' y='60.4' class='atom-9' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='75.7' y='60.2' class='atom-17' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#5BB772' >C</text>
<text x='79.9' y='60.2' class='atom-17' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#5BB772' >l</text>
<text x='52.1' y='17.5' class='atom-22' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
</svg>
 BrC1=C(C(F)(F)F)N(COCC)C(C=2C=CC(Cl)=CC=2)=C1C#N CWFOCCVIPCEQCK-UHFFFAOYSA-N 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 description 14
- 238000000576 coating method Methods 0.000 description 14
- 238000009826 distribution Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000000875 corresponding Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L Copper(II) sulfate Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300.0' height='300.0' x='0.0' y='0.0'> </rect>
<path class='bond-0 atom-1 atom-2' d='M 52.7,173.4 L 62.5,167.7' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-1 atom-2' d='M 62.5,167.7 L 72.4,162.0' style='fill:none;fill-rule:evenodd;stroke:#FCC633;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1 atom-2 atom-3' d='M 141.4,122.2 L 144.7,120.3' style='fill:none;fill-rule:evenodd;stroke:#FCC633;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1 atom-2 atom-3' d='M 144.7,120.3 L 147.9,118.4' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2 atom-2 atom-4' d='M 119.1,181.1 L 123.2,188.1' style='fill:none;fill-rule:evenodd;stroke:#FCC633;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2 atom-2 atom-4' d='M 123.2,188.1 L 127.2,195.1' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3 atom-2 atom-5' d='M 83.2,118.9 L 79.3,112.0' style='fill:none;fill-rule:evenodd;stroke:#FCC633;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3 atom-2 atom-5' d='M 79.3,112.0 L 75.3,105.1' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<text x='221.7' y='163.9' class='atom-0' style='font-size:34px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >C</text>
<text x='245.7' y='163.9' class='atom-0' style='font-size:34px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >u</text>
<text x='264.1' y='150.0' class='atom-0' style='font-size:22px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >2</text>
<text x='275.2' y='150.0' class='atom-0' style='font-size:22px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >+</text>
<text x='13.6' y='207.3' class='atom-1' style='font-size:34px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='37.6' y='193.4' class='atom-1' style='font-size:22px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >-</text>
<text x='88.8' y='163.9' class='atom-2' style='font-size:34px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#FCC633' >S</text>
<text x='112.7' y='150.0' class='atom-2' style='font-size:22px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#FCC633' >2</text>
<text x='124.7' y='150.0' class='atom-2' style='font-size:22px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#FCC633' >+</text>
<text x='163.9' y='120.5' class='atom-3' style='font-size:34px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='187.9' y='106.6' class='atom-3' style='font-size:22px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >-</text>
<text x='132.2' y='239.0' class='atom-4' style='font-size:34px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='156.1' y='225.1' class='atom-4' style='font-size:22px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >-</text>
<text x='45.4' y='88.7' class='atom-5' style='font-size:34px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='69.3' y='74.9' class='atom-5' style='font-size:22px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >-</text>
<path d='M 281.4,146.5 L 281.4,146.4 L 281.4,146.2 L 281.3,146.1 L 281.3,145.9 L 281.2,145.8 L 281.2,145.7 L 281.1,145.5 L 281.0,145.4 L 280.9,145.3 L 280.8,145.2 L 280.7,145.1 L 280.6,145.0 L 280.4,145.0 L 280.3,144.9 L 280.1,144.9 L 280.0,144.8 L 279.8,144.8 L 279.7,144.8 L 279.6,144.8 L 279.4,144.8 L 279.3,144.8 L 279.1,144.9 L 279.0,144.9 L 278.8,145.0 L 278.7,145.1 L 278.6,145.2 L 278.5,145.3 L 278.4,145.4 L 278.3,145.5 L 278.2,145.6 L 278.1,145.7 L 278.1,145.9 L 278.0,146.0 L 278.0,146.2 L 277.9,146.3 L 277.9,146.5 L 277.9,146.6 L 277.9,146.8 L 278.0,146.9 L 278.0,147.0 L 278.1,147.2 L 278.1,147.3 L 278.2,147.5 L 278.3,147.6 L 278.4,147.7 L 278.5,147.8 L 278.6,147.9 L 278.7,148.0 L 278.8,148.1 L 279.0,148.1 L 279.1,148.2 L 279.3,148.2 L 279.4,148.2 L 279.6,148.3 L 279.7,148.3 L 279.8,148.3 L 280.0,148.2 L 280.1,148.2 L 280.3,148.1 L 280.4,148.1 L 280.6,148.0 L 280.7,147.9 L 280.8,147.8 L 280.9,147.7 L 281.0,147.6 L 281.1,147.5 L 281.2,147.4 L 281.2,147.3 L 281.3,147.1 L 281.3,147.0 L 281.4,146.8 L 281.4,146.7 L 281.4,146.5 L 279.7,146.5 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,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 [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- YJZATOSJMRIRIW-UHFFFAOYSA-N [Ir]=O Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,PD94bWwgdmVyc2lvbj0nMS4wJyBlbmNvZGluZz0naXNvLTg4NTktMSc/Pgo8c3ZnIHZlcnNpb249JzEuMScgYmFzZVByb2ZpbGU9J2Z1bGwnCiAgICAgICAgICAgICAgeG1sbnM9J2h0dHA6Ly93d3cudzMub3JnLzIwMDAvc3ZnJwogICAgICAgICAgICAgICAgICAgICAgeG1sbnM6cmRraXQ9J2h0dHA6Ly93d3cucmRraXQub3JnL3htbCcKICAgICAgICAgICAgICAgICAgICAgIHhtbG5zOnhsaW5rPSdodHRwOi8vd3d3LnczLm9yZy8xOTk5L3hsaW5rJwogICAgICAgICAgICAgICAgICB4bWw6c3BhY2U9J3ByZXNlcnZlJwp3aWR0aD0nODVweCcgaGVpZ2h0PSc4NXB4JyB2aWV3Qm94PScwIDAgODUgODUnPgo8IS0tIEVORCBPRiBIRUFERVIgLS0+CjxyZWN0IHN0eWxlPSdvcGFjaXR5OjEuMDtmaWxsOiNGRkZGRkY7c3Ryb2tlOm5vbmUnIHdpZHRoPSc4NS4wJyBoZWlnaHQ9Jzg1LjAnIHg9JzAuMCcgeT0nMC4wJz4gPC9yZWN0Pgo8cGF0aCBjbGFzcz0nYm9uZC0wIGF0b20tMCBhdG9tLTEnIGQ9J00gNTIuNSwzNy4xIEwgMzQuNCwzNy4xJyBzdHlsZT0nZmlsbDpub25lO2ZpbGwtcnVsZTpldmVub2RkO3N0cm9rZTojM0I0MTQzO3N0cm9rZS13aWR0aDoxLjBweDtzdHJva2UtbGluZWNhcDpidXR0O3N0cm9rZS1saW5lam9pbjptaXRlcjtzdHJva2Utb3BhY2l0eToxJyAvPgo8cGF0aCBjbGFzcz0nYm9uZC0wIGF0b20tMCBhdG9tLTEnIGQ9J00gMzQuNCwzNy4xIEwgMTYuMywzNy4xJyBzdHlsZT0nZmlsbDpub25lO2ZpbGwtcnVsZTpldmVub2RkO3N0cm9rZTojRTg0MjM1O3N0cm9rZS13aWR0aDoxLjBweDtzdHJva2UtbGluZWNhcDpidXR0O3N0cm9rZS1saW5lam9pbjptaXRlcjtzdHJva2Utb3BhY2l0eToxJyAvPgo8cGF0aCBjbGFzcz0nYm9uZC0wIGF0b20tMCBhdG9tLTEnIGQ9J00gNTIuNSw0Ni45IEwgMzQuNCw0Ni45JyBzdHlsZT0nZmlsbDpub25lO2ZpbGwtcnVsZTpldmVub2RkO3N0cm9rZTojM0I0MTQzO3N0cm9rZS13aWR0aDoxLjBweDtzdHJva2UtbGluZWNhcDpidXR0O3N0cm9rZS1saW5lam9pbjptaXRlcjtzdHJva2Utb3BhY2l0eToxJyAvPgo8cGF0aCBjbGFzcz0nYm9uZC0wIGF0b20tMCBhdG9tLTEnIGQ9J00gMzQuNCw0Ni45IEwgMTYuMyw0Ni45JyBzdHlsZT0nZmlsbDpub25lO2ZpbGwtcnVsZTpldmVub2RkO3N0cm9rZTojRTg0MjM1O3N0cm9rZS13aWR0aDoxLjBweDtzdHJva2UtbGluZWNhcDpidXR0O3N0cm9rZS1saW5lam9pbjptaXRlcjtzdHJva2Utb3BhY2l0eToxJyAvPgo8dGV4dCB4PSc1My43JyB5PSc1MS45JyBjbGFzcz0nYXRvbS0wJyBzdHlsZT0nZm9udC1zaXplOjE5cHg7Zm9udC1zdHlsZTpub3JtYWw7Zm9udC13ZWlnaHQ6bm9ybWFsO2ZpbGwtb3BhY2l0eToxO3N0cm9rZTpub25lO2ZvbnQtZmFtaWx5OnNhbnMtc2VyaWY7dGV4dC1hbmNob3I6c3RhcnQ7ZmlsbDojM0I0MTQzJyA+STwvdGV4dD4KPHRleHQgeD0nNjUuMScgeT0nNTEuOScgY2xhc3M9J2F0b20tMCcgc3R5bGU9J2ZvbnQtc2l6ZToxOXB4O2ZvbnQtc3R5bGU6bm9ybWFsO2ZvbnQtd2VpZ2h0Om5vcm1hbDtmaWxsLW9wYWNpdHk6MTtzdHJva2U6bm9uZTtmb250LWZhbWlseTpzYW5zLXNlcmlmO3RleHQtYW5jaG9yOnN0YXJ0O2ZpbGw6IzNCNDE0MycgPnI8L3RleHQ+Cjx0ZXh0IHg9JzMuNCcgeT0nNTEuOScgY2xhc3M9J2F0b20tMScgc3R5bGU9J2ZvbnQtc2l6ZToxOXB4O2ZvbnQtc3R5bGU6bm9ybWFsO2ZvbnQtd2VpZ2h0Om5vcm1hbDtmaWxsLW9wYWNpdHk6MTtzdHJva2U6bm9uZTtmb250LWZhbWlseTpzYW5zLXNlcmlmO3RleHQtYW5jaG9yOnN0YXJ0O2ZpbGw6I0U4NDIzNScgPk88L3RleHQ+CjxwYXRoIGQ9J00gODAuOSw0Mi4wIEwgODAuOSw0MS45IEwgODAuOSw0MS44IEwgODAuOSw0MS43IEwgODAuOCw0MS43IEwgODAuOCw0MS42IEwgODAuOCw0MS41IEwgODAuNyw0MS40IEwgODAuNyw0MS40IEwgODAuNiw0MS4zIEwgODAuNSw0MS4zIEwgODAuNSw0MS4yIEwgODAuNCw0MS4yIEwgODAuMyw0MS4xIEwgODAuMiw0MS4xIEwgODAuMiw0MS4xIEwgODAuMSw0MS4wIEwgODAuMCw0MS4wIEwgNzkuOSw0MS4wIEwgNzkuOCw0MS4wIEwgNzkuNyw0MS4wIEwgNzkuNyw0MS4wIEwgNzkuNiw0MS4xIEwgNzkuNSw0MS4xIEwgNzkuNCw0MS4xIEwgNzkuNCw0MS4yIEwgNzkuMyw0MS4yIEwgNzkuMiw0MS4zIEwgNzkuMiw0MS4zIEwgNzkuMSw0MS40IEwgNzkuMSw0MS41IEwgNzkuMCw0MS41IEwgNzkuMCw0MS42IEwgNzkuMCw0MS43IEwgNzguOSw0MS44IEwgNzguOSw0MS45IEwgNzguOSw0Mi4wIEwgNzguOSw0Mi4wIEwgNzguOSw0Mi4xIEwgNzguOSw0Mi4yIEwgNzkuMCw0Mi4zIEwgNzkuMCw0Mi40IEwgNzkuMCw0Mi41IEwgNzkuMSw0Mi41IEwgNzkuMSw0Mi42IEwgNzkuMiw0Mi43IEwgNzkuMiw0Mi43IEwgNzkuMyw0Mi44IEwgNzkuNCw0Mi44IEwgNzkuNCw0Mi45IEwgNzkuNSw0Mi45IEwgNzkuNiw0Mi45IEwgNzkuNyw0My4wIEwgNzkuNyw0My4wIEwgNzkuOCw0My4wIEwgNzkuOSw0My4wIEwgODAuMCw0My4wIEwgODAuMSw0My4wIEwgODAuMiw0Mi45IEwgODAuMiw0Mi45IEwgODAuMyw0Mi45IEwgODAuNCw0Mi44IEwgODAuNSw0Mi44IEwgODAuNSw0Mi43IEwgODAuNiw0Mi43IEwgODAuNyw0Mi42IEwgODAuNyw0Mi42IEwgODAuOCw0Mi41IEwgODAuOCw0Mi40IEwgODAuOCw0Mi4zIEwgODAuOSw0Mi4zIEwgODAuOSw0Mi4yIEwgODAuOSw0Mi4xIEwgODAuOSw0Mi4wIEwgNzkuOSw0Mi4wIFonIHN0eWxlPSdmaWxsOiMwMDAwMDA7ZmlsbC1ydWxlOmV2ZW5vZGQ7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOiMwMDAwMDA7c3Ryb2tlLXdpZHRoOjAuMHB4O3N0cm9rZS1saW5lY2FwOmJ1dHQ7c3Ryb2tlLWxpbmVqb2luOm1pdGVyO3N0cm9rZS1vcGFjaXR5OjE7JyAvPgo8L3N2Zz4K [Ir]=O YJZATOSJMRIRIW-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000005712 crystallization Effects 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N cu2+ Chemical compound data:image/svg+xml;base64,PD94bWwgdmVyc2lvbj0nMS4wJyBlbmNvZGluZz0naXNvLTg4NTktMSc/Pgo8c3ZnIHZlcnNpb249JzEuMScgYmFzZVByb2ZpbGU9J2Z1bGwnCiAgICAgICAgICAgICAgeG1sbnM9J2h0dHA6Ly93d3cudzMub3JnLzIwMDAvc3ZnJwogICAgICAgICAgICAgICAgICAgICAgeG1sbnM6cmRraXQ9J2h0dHA6Ly93d3cucmRraXQub3JnL3htbCcKICAgICAgICAgICAgICAgICAgICAgIHhtbG5zOnhsaW5rPSdodHRwOi8vd3d3LnczLm9yZy8xOTk5L3hsaW5rJwogICAgICAgICAgICAgICAgICB4bWw6c3BhY2U9J3ByZXNlcnZlJwp3aWR0aD0nMzAwcHgnIGhlaWdodD0nMzAwcHgnIHZpZXdCb3g9JzAgMCAzMDAgMzAwJz4KPCEtLSBFTkQgT0YgSEVBREVSIC0tPgo8cmVjdCBzdHlsZT0nb3BhY2l0eToxLjA7ZmlsbDojRkZGRkZGO3N0cm9rZTpub25lJyB3aWR0aD0nMzAwLjAnIGhlaWdodD0nMzAwLjAnIHg9JzAuMCcgeT0nMC4wJz4gPC9yZWN0Pgo8dGV4dCB4PScxMzguMCcgeT0nMTcwLjAnIGNsYXNzPSdhdG9tLTAnIHN0eWxlPSdmb250LXNpemU6NDBweDtmb250LXN0eWxlOm5vcm1hbDtmb250LXdlaWdodDpub3JtYWw7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOm5vbmU7Zm9udC1mYW1pbHk6c2Fucy1zZXJpZjt0ZXh0LWFuY2hvcjpzdGFydDtmaWxsOiMzQjQxNDMnID5DPC90ZXh0Pgo8dGV4dCB4PScxNjUuNicgeT0nMTcwLjAnIGNsYXNzPSdhdG9tLTAnIHN0eWxlPSdmb250LXNpemU6NDBweDtmb250LXN0eWxlOm5vcm1hbDtmb250LXdlaWdodDpub3JtYWw7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOm5vbmU7Zm9udC1mYW1pbHk6c2Fucy1zZXJpZjt0ZXh0LWFuY2hvcjpzdGFydDtmaWxsOiMzQjQxNDMnID51PC90ZXh0Pgo8dGV4dCB4PScxODYuOScgeT0nMTU0LjAnIGNsYXNzPSdhdG9tLTAnIHN0eWxlPSdmb250LXNpemU6MjZweDtmb250LXN0eWxlOm5vcm1hbDtmb250LXdlaWdodDpub3JtYWw7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOm5vbmU7Zm9udC1mYW1pbHk6c2Fucy1zZXJpZjt0ZXh0LWFuY2hvcjpzdGFydDtmaWxsOiMzQjQxNDMnID4yPC90ZXh0Pgo8dGV4dCB4PScxOTkuNycgeT0nMTU0LjAnIGNsYXNzPSdhdG9tLTAnIHN0eWxlPSdmb250LXNpemU6MjZweDtmb250LXN0eWxlOm5vcm1hbDtmb250LXdlaWdodDpub3JtYWw7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOm5vbmU7Zm9udC1mYW1pbHk6c2Fucy1zZXJpZjt0ZXh0LWFuY2hvcjpzdGFydDtmaWxsOiMzQjQxNDMnID4rPC90ZXh0Pgo8cGF0aCBkPSdNIDIxNC4yLDE1MC4wIEwgMjE0LjIsMTQ5LjggTCAyMTQuMiwxNDkuNyBMIDIxNC4yLDE0OS41IEwgMjE0LjEsMTQ5LjMgTCAyMTQuMSwxNDkuMiBMIDIxNC4wLDE0OS4wIEwgMjEzLjksMTQ4LjkgTCAyMTMuOCwxNDguNyBMIDIxMy43LDE0OC42IEwgMjEzLjYsMTQ4LjUgTCAyMTMuNCwxNDguNCBMIDIxMy4zLDE0OC4zIEwgMjEzLjEsMTQ4LjIgTCAyMTMuMCwxNDguMSBMIDIxMi44LDE0OC4xIEwgMjEyLjYsMTQ4LjAgTCAyMTIuNSwxNDguMCBMIDIxMi4zLDE0OC4wIEwgMjEyLjEsMTQ4LjAgTCAyMTEuOSwxNDguMCBMIDIxMS44LDE0OC4xIEwgMjExLjYsMTQ4LjEgTCAyMTEuNSwxNDguMiBMIDIxMS4zLDE0OC4yIEwgMjExLjIsMTQ4LjMgTCAyMTEuMCwxNDguNCBMIDIxMC45LDE0OC41IEwgMjEwLjgsMTQ4LjcgTCAyMTAuNywxNDguOCBMIDIxMC42LDE0OC45IEwgMjEwLjUsMTQ5LjEgTCAyMTAuNCwxNDkuMiBMIDIxMC4zLDE0OS40IEwgMjEwLjMsMTQ5LjYgTCAyMTAuMywxNDkuNyBMIDIxMC4zLDE0OS45IEwgMjEwLjMsMTUwLjEgTCAyMTAuMywxNTAuMyBMIDIxMC4zLDE1MC40IEwgMjEwLjMsMTUwLjYgTCAyMTAuNCwxNTAuOCBMIDIxMC41LDE1MC45IEwgMjEwLjYsMTUxLjEgTCAyMTAuNywxNTEuMiBMIDIxMC44LDE1MS4zIEwgMjEwLjksMTUxLjUgTCAyMTEuMCwxNTEuNiBMIDIxMS4yLDE1MS43IEwgMjExLjMsMTUxLjggTCAyMTEuNSwxNTEuOCBMIDIxMS42LDE1MS45IEwgMjExLjgsMTUxLjkgTCAyMTEuOSwxNTIuMCBMIDIxMi4xLDE1Mi4wIEwgMjEyLjMsMTUyLjAgTCAyMTIuNSwxNTIuMCBMIDIxMi42LDE1Mi4wIEwgMjEyLjgsMTUxLjkgTCAyMTMuMCwxNTEuOSBMIDIxMy4xLDE1MS44IEwgMjEzLjMsMTUxLjcgTCAyMTMuNCwxNTEuNiBMIDIxMy42LDE1MS41IEwgMjEzLjcsMTUxLjQgTCAyMTMuOCwxNTEuMyBMIDIxMy45LDE1MS4xIEwgMjE0LjAsMTUxLjAgTCAyMTQuMSwxNTAuOCBMIDIxNC4xLDE1MC43IEwgMjE0LjIsMTUwLjUgTCAyMTQuMiwxNTAuMyBMIDIxNC4yLDE1MC4yIEwgMjE0LjIsMTUwLjAgTCAyMTIuMiwxNTAuMCBaJyBzdHlsZT0nZmlsbDojMDAwMDAwO2ZpbGwtcnVsZTpldmVub2RkO2ZpbGwtb3BhY2l0eToxO3N0cm9rZTojMDAwMDAwO3N0cm9rZS13aWR0aDowLjBweDtzdHJva2UtbGluZWNhcDpidXR0O3N0cm9rZS1saW5lam9pbjptaXRlcjtzdHJva2Utb3BhY2l0eToxOycgLz4KPC9zdmc+Cg== data:image/svg+xml;base64,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 [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 235000015220 hamburgers Nutrition 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910000457 iridium oxide Inorganic materials 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/08—Electroplating with moving electrolyte e.g. jet electroplating
Abstract
镀铜槽，包括槽体、设于槽体内的喷管阵列、阳极挂架、阳极阵列，其中：槽体，用于容纳电镀液，由一个U型槽体单元构成，或由多个U型槽体单元顺序连接构成；喷管阵列，具有多个并排的喷管，喷管的正面沿其高度方向上设有多个喷出镀液的喷嘴，喷管两侧边沿具有屏蔽槽；阳极挂架，用于提供阳极电流，具有沿U型槽体单元长度方向设置的导电扁；阳极阵列，具有多个阳极单体，其下部具有浸入电镀液的阳极片，阳极片的左右两侧边缘插入相邻两个喷管之间的屏蔽槽内。本实用新型能有效改善镀液中的电力线分布以消除边缘效应，又能有效地提供不超过电流密度上限的电流，提高了铜层的均匀性，提高了电镀效率，适用于背板、基板、柔性板等各种印刷电路板。
Description
技术领域
[0001] 本实用新型涉及一种镀铜槽，尤其适用于印刷电路板镀铜的连续电镀生产线。
背景技术
[0002] 印刷电路板的表面镀层厚度的均匀性直接影响印制电路板的后续加工工艺好坏的重要指标，比如:对于普通的印刷电路板，具有均匀性良好的电镀层厚度有利于均匀蚀亥IJ，以制作精细线路；对于封装载板，具有均匀性的良好电镀层厚度才能够得到可靠的焊接性能，以提尚成品率。
[0003] 而印刷电路板的表面镀层厚度的均匀性受电镀电流的限制，也受边缘效应(尖端效应)的影响。
[0004] 任何镀液都有一个获得良好镀层的电流密度范围，获得良好镀层的最小电流密度为电流密度下限，获得良好镀层的最大电流密度为电流密度上限。一般来说，当阴极电流密度过低时，阴极极化作用小，镀层的结晶晶粒较粗，在生产中很少使用过低的阴极电流密度。随着阴极电流密度的增大，阴极的极化作用也随之增大(极化数值的增加量取决于各种不同的电镀溶液)，镀层结晶也随之变得细致紧密。
[0005] 边缘效应主要因为电镀液中电流分布不均匀，电场在溶液中的分布如磁铁的磁场分布，工件(电镀阴极)的边缘和尖端电流密度最大，该处的阴极极化明显，相应的镀液中的金属离子消耗更快。因此阴极上的电流密度不能过大，不能超过允许的上限值(不同的电镀溶液在不同工艺条件下有着不同的阴极电流密度的上限值)，超过允许的上限值以后，由于阴极附近严重缺乏金属离子的缘故，在阴极的尖端和凸出处会产生形状如树枝的金属镀层、或者在整个阴极的表面上产生形状如海绵的疏松镀层。在生产中经常遇到的是在零件的尖角和边缘处容易发生“烧焦”现象，严重时会形成树枝状结晶或者是海绵状镀层。
[0006] 现有技术中，应对电镀电流限制以及边缘效应的方式通常是:
[0007] (I)采用小电流电镀减缓阴极极化作用，以此实现电镀均匀性的提高，但是电镀时间较长，镀层容易发黑导致外观不良，而且生产效率不高。
[0008] (2)在工件(电镀阴极)与阳极之间设置挡板遮挡一部分的电力线用以达到电力线的均匀分布，以此提高电镀层的均匀性。但是挡板的设置却在一定程度上加剧了工件(电镀阴极)的边缘效应。
[0009] (3)采用集中式阳极，即较大面积的一整片阳极，在正对阳极的面积内一定程度上也能实现电力线的均匀分布，但是阳极的边缘依然存在密集的电力线，因此同样存在边缘效应将导致电路板两端镀层厚度不一。
实用新型内容
[0010] 本实用新型的目的在于针对上述现有技术中存在的缺陷，提供一种适用于背板、基板、柔性板等各种印刷电路板的连续电镀生产线的镀铜槽，可以有效改善镀液中的电力线分布以消除边缘效应，又能有效地提供不超过电流密度上限的电流。[0011 ] 为了实现上述目的，本实用新型采用了如下的技术方案。
[0012] 镀铜槽，包括槽体、设于槽体内的喷管阵列、阳极挂架、阳极阵列，其中:
[0013] 槽体，用于容纳电镀液，由一个U型槽体单元构成，或由多个U型槽体单元顺序连接构成；U型槽体单元的侧壁具有至少一个镀液入口管，还具有至少一个镀液溢流回收装置；镀液入口管、镀液溢流回收装置与槽体外部的镀液循环系统连通；
[0014] 喷管阵列，具有多个并排的喷管，喷管的顶部密封，喷管的底部与镀液入口管连通，喷管的正面沿其高度方向上设有多个喷出镀液的喷嘴，喷管两侧边沿具有屏蔽槽；
[0015] 阳极挂架，用于提供阳极电流，具有至少一个置于U型槽体单元侧壁上沿的悬臂，悬臂的末端具有沿U型槽体单元长度方向设置的导电扁，导电扁位于U型槽体单元上方；
[0016]阳极阵列，具有多个阳极单体，阳极单体的顶部悬挂在导电扁上实现电连接，其下部具有浸入电镀液的阳极片，阳极片的左右两侧边缘插入相邻两个喷管之间的屏蔽槽内，以屏蔽阳极片的左右两侧边缘的电流。
[0017] 较佳的，喷管阵列、阳极挂架、阳极阵列，均按镜像对称的形式成对设置，在镜像对称的阳极阵列之间形成容纳阴极工件移动的通道。
[0018] 作为上述技术方案的改进，设有沿槽体长度方向横贯U型槽体单元底部的喷盒，用于调节喷管喷出镀液的速度和液压，喷盒与镀液入口管连通，喷管的底部可拆的连接在喷盒上。
[0019] 作为上述技术方案的改进，阳极单体的顶部具有挂钩，挂钩的末端具有夹持导电扁的插夹机构。
[0020] 较佳的，插夹机构具有朝下设置的夹持口。
[0021] 作为上述技术方案的改进，阳极单体的阳极片包括平行设置的两片，两片阳极片分别固定在阳极单体的前后两侧。
[0022] 作为上述技术方案的改进，镀液溢流回收装置包括设于U型槽体单元侧壁上的溢流收集仓，溢流收集仓顶部具有设于U型槽体单元内壁的溢流口，溢流收集仓底部具有与槽体外部的镀液循环系统连通的回流管。
[0023] 较佳的，溢流口上设有溢流调节板，溢流调节板具有与溢流口部分配合的溢流闸口 ；溢流调节板可以沿U型槽体单元内壁上下移动调节定位，以使溢流闸口限定溢流口的液位线。
[0024] 作为上述技术方案的改进，槽体内还设有阳极遮蔽孔板，阳极遮蔽孔板与阳极阵列平行排列并对阳极阵列中的阳极片形成遮蔽，阳极遮蔽孔板上具有多个通孔，喷管阵列中的喷嘴与阳极遮蔽孔板上的通孔一一对应，喷管通过喷嘴喷出的镀液穿过通孔喷向阴极工件。
[0025] 较佳的，阳极遮蔽孔板上连续的两列或多列通孔，其通孔在水平方向上交错布置。
[0026] 和现有技术相比，本实用新型的镀铜槽具有如下的有益效果:
[0027] 有效改善镀液中的电力线分布以消除边缘效应，又能有效地提供不超过电流密度上限的电流，提高了铜层的均匀性，提高了电镀效率，适用于背板、基板、柔性板等各种印刷电路板的连续电镀生产线。
[0028] 下面结合说明书附图和具体实施方式对本实用新型做进一步的说明。
附图说明
[0029] 图1是本实用新型的结构示意图。
[0030]图2是本实用新型的喷管阵列的结构示意图。
[0031]图3是本实用新型的喷管阵列的安装结构示意图。
[0032] 图4是本实用新型的阳极挂架的结构示意图。
[0033] 图5是本实用新型的阳极单体的安装结构示意图。
[0034] 图6是本实用新型的阳极片的结构示意图。
[0035] 图7是本实用新型的阳极阵列的结构示意图。
[0036] 图8是本实用新型的镀液溢流回收装置的结构示意图。
[0037] 图9是本实用新型的溢流板的结构示意图。
[0038] 图10是本实用新型的阳极遮蔽孔板的安装结构示意图。
[0039] 图11是本实用新型的阳极遮蔽孔板的结构示意图。
具体实施方式
[0040] 如图1所示，本实用新型的镀铜槽，包括槽体1、设于槽体I内的喷管阵列、阳极挂架3、阳极阵列，其中:
[0041] 槽体1，用于容纳电镀液，由一个U型槽体单元11构成；U型槽体单元11的侧壁具有至少一个镀液入口管12，还具有至少一个镀液溢流回收装置13 ;镀液入口管12、镀液溢流回收装置13与槽体I外部的镀液循环系统(图中未示)连通；图中仅以单个U型槽体单元11构成槽体为例，根据生产线的需要，也可以由多个U型槽体单元11顺序连接构成更长的槽体；
[0042] 喷管阵列，如图2所示，具有多个并排的喷管21，喷管21的顶部密封，喷管21的底部与镀液入口管12连通，喷管21的正面沿其高度方向上设有多个喷出镀液的喷嘴211，喷管21两侧边沿具有屏蔽槽212 ;如图3所示，为了更稳固的布置喷管21，还在U型槽体单元11的顶部开口内设有卡板15，喷管21的顶部可拆的连接在卡板15上，比如图中所示的可拆连接为插接，也可以采用诸如卡接或挂接等可拆结构；
[0043] 阳极挂架3，用于与整流器(图中未示)电连接以提供阳极电流，具有至少一个置于U型槽体单元11侧壁上沿的悬臂31，悬臂31的末端具有沿U型槽体单元11长度方向设置的导电扁32，导电扁32位于U型槽体单元11上方；如图4所示，为了更稳固的布置阳极挂架3，在U型槽体单元11的内壁上设有托架33，导电扁32置于托架33上；
[0044] 阳极阵列，具有多个阳极单体41，阳极单体41的顶部悬挂在导电扁32上实现电连接，其下部具有浸入电镀液的阳极片411 ;如图5所示，阳极片411的左右两侧边缘插入相邻两个喷管21之间的屏蔽槽212内，以屏蔽阳极片411的左右两侧边缘的电流，阳极片411亦能借此得到稳固的安置效果和简易的组装方式。
[0045] 电镀时，阴极工件布置在阳极阵列外侧，阳极阵列整体具有多个并排的阳极单体41，其集合等效于集中式阳极，保证阳极的总电量不削减；但阳极阵列又不同于传统的集中式阳极，其利用多个阳极片411同步提供阳极电流，S卩小量多餐的方式提供阳极电流，每个阳极片411的边缘效应被这种平均分配的方式削弱抵消，使得作用于阴极工件的电力线分布比采用传统的集中式阳极更加平均，因此阴极工件镀层更加均匀，受边缘效应影响更小。
[0046] 再则，由于阳极片411的左右两侧边缘被屏蔽槽212屏蔽没有电力线流出，因而可以进一步的显著抑制边缘效应。
[0047] 如图1所示的实施方式中，喷管阵列、阳极挂架3、阳极阵列，均按镜像对称的形式成对设置，在镜像对称的阳极阵列之间形成容纳阴极工件(图中未示)移动的通道，因此阴极工件的正反两面可以同时进行电镀。
[0048] 如图1、图2和图3所示，本实用新型设有沿槽体I长度方向横贯U型槽体单元11底部的喷盒14，用于调节喷管21喷出镀液的速度和液压，以此促进改善电镀效率；喷盒14与镀液入口管12连通，喷管21的底部可拆的连接在喷盒14上。从喷管21喷出的镀液是经过槽体I外部的镀液循环系统处理和提供的，其中的铜离子浓度基本保持在最佳值，这对阴极工件的电镀效率和电镀质量都有积极作用。
[0049] 如图5、图6和图7所示，阳极单体41的顶部具有挂钩412，挂钩412的末端具有夹持导电扁32的插夹机构413。阳极单体41通过插夹机构413可拆的连接在导电扁32上，导电好，易拆换。
[0050] 其中较佳的一种方式如图5所示，插夹机构413具有朝下设置的夹持口 414，利用夹持口 414的夹持力和阳极单体41自身的重力使导电连接更加可靠，更易拆换。
[0051] 如图7所示，阳极单体41的阳极片411包括平行设置的两片，两片阳极片411分别固定在阳极单体41的前后两侧。这种汉堡式的夹层阳极片411，实际上增大了阳极的放电面积，对于提高电镀效率作用十分明显。较佳的，阳极片411采用氧化铱网片制成，能显著提高阳极寿命。
[0052] 如图1和图8所示，镀液溢流回收装置13包括设于U型槽体单元11侧壁上的溢流收集仓131，溢流收集仓131顶部具有设于U型槽体单元11内壁的溢流口 132，溢流收集仓131底部具有与槽体I外部的镀液循环系统(图中未示)连通的回流管133。
[0053] 如图9所示，溢流口 132上设有溢流调节板134，溢流调节板134具有与溢流口 132部分配合的溢流闸口 135 ;溢流调节板134可以沿U型槽体单元11内壁上下移动调节定位，以使溢流闸口 135限定溢流口 132的液位线。该结构的重要意义在于，可以根据生产线的实时状态调节镀液的液位，控制阳极片始终能整体潜入镀液中工作，避免阳极片在液面交界处产生硫酸铜结晶。
[0054] 较佳实施方式如图9所示，溢流板134上设有竖直方向的滑槽136，滑槽136内设有连接在U型槽体单元11内壁上的定位螺栓137。松开定位螺栓137，即可沿滑槽136的方向上下移动溢流板134至所需位置，随后锁紧定位螺栓137即实现了溢流口 132的液位线调节。
[0055] 根据特定电路板的电镀需求，需要抑制电镀电流的强度，本实用新型还可以如图10所示，在槽体I内设有阳极遮蔽孔板5，阳极遮蔽孔板5与阳极阵列平行排列并对阳极阵列中的阳极片41形成遮蔽，阳极遮蔽孔板5上具有多个通孔51，喷管阵列中的喷嘴211与阳极遮蔽孔板5上的通孔51 —一对应，喷管21通过喷嘴211喷出的镀液穿过通孔51喷向阴极工件(图中未示)。阳极遮蔽孔板5的目的在于，通过其对阳极片41形成遮蔽，电力线仅在通孔51处通过，相当于进一步减小了阳极的面积，可以显著降低电镀电流密度，即可满足特殊的电镀需求。
[0056] 如图10所示，为了更稳固的布置阳极遮蔽孔板5，在U型槽体单元11的内壁上设有成对的侧板52，阳极遮蔽孔板5的两端可拆的连接在侧板52上，还在喷盒14上设有卡码53，阳极遮蔽孔板5的底部可拆的连接在卡码53上；比如图中所示的可拆连接为插接，也可以采用诸如卡接或挂接等可拆结构。
[0057] 如图11所示，阳极遮蔽孔板5上连续的两列或多列通孔51，其通孔51在水平方向上交错布置。采用此结构，可以进一步改善作用于阴极工件的电力线分布，使之更加均匀，因此阴极工件镀层更加均匀。
[0058] 对于本领域的技术人员来说，可根据本实用新型所揭示的结构和原理获得其它各种相应的改变以及变形，而所有的这些改变以及变形都属于本实用新型的保护范畴。
Claims (10)
1.镀铜槽，包括槽体、设于槽体内的喷管阵列、阳极挂架、阳极阵列，其特征在于: 槽体，用于容纳电镀液，由一个U型槽体单元构成，或由多个U型槽体单元顺序连接构成；u型槽体单元的侧壁具有至少一个镀液入口管，还具有至少一个镀液溢流回收装置；镀液入口管、镀液溢流回收装置与槽体外部的镀液循环系统连通； 喷管阵列，具有多个并排的喷管，喷管的顶部密封，喷管的底部与镀液入口管连通，喷管的正面沿其高度方向上设有多个喷出镀液的喷嘴，喷管两侧边沿具有屏蔽槽； 阳极挂架，用于提供阳极电流，具有至少一个置于U型槽体单元侧壁上沿的悬臂，悬臂的末端具有沿U型槽体单元长度方向设置的导电扁，导电扁位于U型槽体单元上方； 阳极阵列，具有多个阳极单体，阳极单体的顶部悬挂在导电扁上实现电连接，其下部具有浸入电镀液的阳极片，阳极片的左右两侧边缘插入相邻两个喷管之间的屏蔽槽内，以屏蔽阳极片的左右两侧边缘的电流。
2.根据权利要求1所述的镀铜槽，其特征在于:喷管阵列、阳极挂架、阳极阵列，均按镜像对称的形式成对设置，在镜像对称的阳极阵列之间形成容纳阴极工件移动的通道。
3.根据权利要求1或2所述的镀铜槽，其特征在于:设有沿槽体长度方向横贯U型槽体单元底部的喷盒，用于调节喷管喷出镀液的速度和液压，喷盒与镀液入口管连通，喷管的底部可拆的连接在喷盒上。
4.根据权利要求1或2所述的镀铜槽，其特征在于:阳极单体的顶部具有挂钩，挂钩的末端具有夹持导电扁的插夹机构。
5.根据权利要求4所述的镀铜槽，其特征在于:插夹机构具有朝下设置的夹持口。
6.根据权利要求1或2所述的镀铜槽，其特征在于:阳极单体的阳极片包括平行设置的两片，两片阳极片分别固定在阳极单体的前后两侧。
7.根据权利要求1或2所述的镀铜槽，其特征在于:镀液溢流回收装置包括设于U型槽体单元侧壁上的溢流收集仓，溢流收集仓顶部具有设于U型槽体单元内壁的溢流口，溢流收集仓底部具有与槽体外部的镀液循环系统连通的回流管。
8.根据权利要求7所述的镀铜槽，其特征在于:溢流口上设有溢流调节板，溢流调节板具有与溢流口部分配合的溢流闸口 ；溢流调节板可以沿U型槽体单元内壁上下移动调节定位，以使溢流闸口限定溢流口的液位线。
9.根据权利要求1或2所述的镀铜槽，其特征在于:槽体内还设有阳极遮蔽孔板，阳极遮蔽孔板与阳极阵列平行排列并对阳极阵列中的阳极片形成遮蔽，阳极遮蔽孔板上具有多个与喷管阵列中的喷嘴一一对应的多列通孔，喷管通过喷嘴喷出的镀液穿过通孔喷向阴极工件。
10.根据权利要求9所述的镀铜槽，其特征在于:阳极遮蔽孔板上连续的两列或多列通孔，其通孔在水平方向上交错布置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520365601.2U CN204874804U (zh) | 2015-05-29 | 2015-05-29 | 镀铜槽 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520365601.2U CN204874804U (zh) | 2015-05-29 | 2015-05-29 | 镀铜槽 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204874804U true CN204874804U (zh) | 2015-12-16 |
Family
ID=54819200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520365601.2U Withdrawn - After Issue CN204874804U (zh) | 2015-05-29 | 2015-05-29 | 镀铜槽 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204874804U (zh) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104862767A (zh) * | 2015-05-29 | 2015-08-26 | 东莞市开美电路板设备有限公司 | 镀铜槽 |
| CN109576768A (zh) * | 2019-02-15 | 2019-04-05 | 黄安琪 | 提升pcb板高厚径比灌孔能力及镀铜均匀性的电镀设备 |
| JP2019525000A (ja) * | 2016-07-20 | 2019-09-05 | テクニク, インク.Technic, Inc. | 半導体ウェハ上の均一な厚さの金属層の電着 |
| CN110373692A (zh) * | 2019-07-24 | 2019-10-25 | 枣庄睿诺光电信息有限公司 | 电镀孔铜装置 |
-
2015
- 2015-05-29 CN CN201520365601.2U patent/CN204874804U/zh not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104862767A (zh) * | 2015-05-29 | 2015-08-26 | 东莞市开美电路板设备有限公司 | 镀铜槽 |
| JP2019525000A (ja) * | 2016-07-20 | 2019-09-05 | テクニク, インク.Technic, Inc. | 半導体ウェハ上の均一な厚さの金属層の電着 |
| JP7073332B2 (ja) | 2016-07-20 | 2022-05-23 | テクニク，インク． | 半導体ウェハ上の均一な厚さの金属層の電着 |
| CN109576768A (zh) * | 2019-02-15 | 2019-04-05 | 黄安琪 | 提升pcb板高厚径比灌孔能力及镀铜均匀性的电镀设备 |
| CN109576768B (zh) * | 2019-02-15 | 2021-04-09 | 黄安琪 | 提升pcb板高厚径比灌孔能力及镀铜均匀性的电镀设备 |
| CN110373692A (zh) * | 2019-07-24 | 2019-10-25 | 枣庄睿诺光电信息有限公司 | 电镀孔铜装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104862767A (zh) | 镀铜槽 | |
| CN204874804U (zh) | 镀铜槽 | |
| CN101054701B (zh) | 提高电镀均匀性的方法 | |
| CN102453939B (zh) | 用于卷对卷输送选择性电镀软性电路板的机台及其制程 | |
| CN204608185U (zh) | 一种电解铜箔生箔机 | |
| CN105063709A (zh) | 印刷电路板用电镀装置 | |
| CN106167913B (zh) | 电镀槽装置 | |
| CN105088323B (zh) | 板式电镀挂具 | |
| CN102605397A (zh) | 电镀系统及电镀方法 | |
| CN108624943A (zh) | 一种水平连续电镀装置及其制备方法 | |
| CN201309975Y (zh) | 电镀镀铜槽阳极挡板 | |
| CN102534733B (zh) | 电镀装置以及电镀方法 | |
| CN203625508U (zh) | 一种改进型电镀设备 | |
| CN201924097U (zh) | 电镀装置 | |
| CN202881424U (zh) | 电镀用阳极挡板 | |
| CN108914178A (zh) | 一种解决电镀法制备吸液芯厚度不均的方法 | |
| CN201857434U (zh) | 卷对卷连续垂直式高电流电镀机台 | |
| CN200999265Y (zh) | 用于电镀的挡板 | |
| CN201785534U (zh) | 表面设有包胶的电镀夹头 | |
| CN201713591U (zh) | 硅太阳能电池片电极电镀设备 | |
| CN206654963U (zh) | 一种连杆电镀挡板 | |
| CN202643877U (zh) | 印制电路板电镀挂板结构 | |
| CN101781770A (zh) | 一种溶液平行双向旋转流动的电解或电积方法及装置 | |
| CN206109581U (zh) | 一种滚镀槽锡锌合金电镀装置 | |
| CN203728947U (zh) | 一种pcb电镀铜缸 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20151216 Effective date of abandoning: 20170510 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20151216 Effective date of abandoning: 20170510 |