CN204789636U - Elevating system is used in wafer test - Google Patents

Elevating system is used in wafer test Download PDF

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Publication number
CN204789636U
CN204789636U CN201520419607.3U CN201520419607U CN204789636U CN 204789636 U CN204789636 U CN 204789636U CN 201520419607 U CN201520419607 U CN 201520419607U CN 204789636 U CN204789636 U CN 204789636U
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China
Prior art keywords
supporting plate
base
elevating
seat
drive motor
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Active
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CN201520419607.3U
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Chinese (zh)
Inventor
方兆文
胡东辉
叶键波
姚建强
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Hangzhou Long River Science And Technology Co Ltd
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Hangzhou Long River Science And Technology Co Ltd
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Priority to CN201520419607.3U priority Critical patent/CN204789636U/en
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Abstract

The utility model discloses an elevating system is used in wafer test, it is less to aim at solving elevating system is used in wafer test jacking power, and jacking stability is relatively poor, and the precision is low, and the structure is complicated, and manufacturing cost is high not enough. The utility model discloses an including base, layer board, fixedly connected with a plurality of lift slide seat on the base, layer board liftable are connected on the lift slide seat, sliding connections supporting seat on the base, and the supporting seat setting is in the layer board below, and fixedly connected with screw -nut on the supporting seat installs driving motor on the base, and the lead screw is connected in the transmission of driving motor output shaft, and the lead screw is connected with the screw -nut cooperation, is equipped with the sloping block on the supporting seat, and the sloping block up end is the clinoplain, install the gyro wheel on the layer board, layer board grating chi for the displacement measurement is installed to the gyro wheel butt between layer board and the base on the sloping block up end, and the encoder is connected to the driving motor electricity, and the encoder is connected to grating chi electricity.

Description

A kind of wafer sort elevating mechanism
Technical field
The utility model relates to a kind of integrated circuit test device, and more particularly, it relates to a kind of skewback elevating mechanism of wafer sort.
Background technology
Integrated circuit industry development rapidly, require day by day to increase to the yield of chip product, test before the multiple later process processing such as wafer sort can not carried out cutting at chip, go between, encapsulation, reduce the serious waste of defective products in following process, so be badly in need of that wafer sort equipment reaches at a high speed, the requirement of efficient, high stability.
Wafer sort equipment reaches at a high speed, requirement key that is efficient, high stability is elevating mechanism.The elevating mechanism top lift that wafer current test equipment adopts is less, and jacking less stable, precision is low, and some lifting body complex structure, and manufacturing cost is high.
Chinese patent notification number CN201196655Y, disclose one can longitudinally be elevated, the wafer adsorption horizontally rotated and lowering device, the wafer suction disc device that the tubular inner liner top that the longitudinal direction comprising frame is arranged is arranged, inner sleeve is connected with whirligig with jacking gear, wafer suction disc device is included in the well heater arranged between negative pressure sucker and thermal insulating disc, at the some negative pressure air drains of negative pressure sucker upper surface photography group, the negative pressure pore be communicated with negative pressure air drain is provided with in negative pressure sucker, negative pressure sucker is provided with negative pressure gas-tpe fitting, negative pressure gas-tpe fitting is communicated with negative pressure pore, negative pressure sucker is provided with and runs through negative pressure sucker, well heater, the dumping pit of thermal insulating disc, thimble and thimble apparatus for controlling of lifting is provided with in dumping pit.Although this vibrational power flow can shorten the test duration of wafer, realize longitudinally being elevated and horizontally rotating, complex structure, manufacturing cost is high, and elevating mechanism top lift is less, and jacking less stable, precision is low.
Utility model content
It is less that the utility model overcomes wafer sort elevating mechanism top lift, jacking less stable, precision is low, complex structure, the deficiency that manufacturing cost is high, provide a kind of wafer sort elevating mechanism, its top lift is large, jacking good stability, precision is high, and elevating mechanism structure is simple, low cost of manufacture, Installation and Debugging and easy to maintenance.Whole elevating mechanism structural strength is good, and bearing capacity is large.
In order to solve the problems of the technologies described above, the utility model is by the following technical solutions: a kind of wafer sort elevating mechanism, comprise base, supporting plate, base is fixedly connected with several lifting sliding rail seats, supporting plate liftable is connected on lifting sliding rail seat, slidably connecting support seat on base, supporting seat is arranged on below supporting plate, supporting seat is fixedly connected with feed screw nut, base is provided with drive motor, and drive motor output shaft is in transmission connection screw mandrel, and screw mandrel and feed screw nut are connected, supporting seat is provided with skewback, and skewback upper surface is clinoplane; Supporting plate is provided with roller, and roller is connected on skewback upper surface, is provided with supporting plate displacement measurement grating scale between supporting plate and base, drive motor electrical connection scrambler, grating scale electrical connection scrambler.
During elevating mechanism work, drive motor rotating band movable wire bar rotates, leading screw rotates and drives feed screw nut to move on leading screw in feed screw nut, and feed screw nut is fixedly connected with supporting seat, supporting seat is slidably connected on base, and therefore supporting seat slides under the drive of drive motor on base.Skewback on supporting seat its clinoplane in the process of sliding abuts supporting plate, and drives supporting plate elevating movement on lifting sliding rail seat.Scrambler controls drive motor rotating speed and rotates the number of turns, the lifting displacement signal that grating scale reads feeds back to scrambler and forms closed-loop control, the signal that scrambler feeds back according to grating scale is finely tuned drive motor, ensures that supporting plate lifting distance precision can reach 0.1um.The top lift of this wafer sort elevating mechanism is large, jacking good stability, and precision is high, and elevating mechanism structure is simple, low cost of manufacture, Installation and Debugging and easy to maintenance, and whole elevating mechanism structural strength is good, and bearing capacity is large.
As preferably, lifting sliding rail seat is equipped with line slideway, line slideway is slidably connected with slide block, slide block is all fixedly connected with supporting plate lower surface.Supporting plate is fixedly connected with slide block, and slide block slides on line slideway, ensure that the stationarity that supporting plate is elevated.
As preferably, the rectangular shape structure of supporting plate, four angle positions of supporting plate are all fixedly connected with the contiguous block of L shape, and lifting sliding rail seat and contiguous block correspondence are provided with four, and four contiguous blocks removably connect with four slide block medial surface one_to_one corresponding respectively.Supporting plate four angle positions slide respectively on line slideway, and lifting stationarity is good.
As preferably, supporting seat comprises web joint and two slides, web joint is fixedly connected between two slides, feed screw nut is fastenedly connected on web joint, skewback is provided with two and is located on two slides respectively, base is fixedly connected with two slide rails, two slides are slidably connected on two slide rails respectively, and roller and skewback correspondence are provided with two.Supporting seat is arranged two skewbacks, two skewbacks promote supporting plate simultaneously, make the stressed more steady of supporting plate, considerably increase the load-bearing capacity of supporting plate.
As preferably, drive motor is stepper motor, and base is provided with motor mount, and drive motor is arranged on motor mount, is connected with shaft coupling between drive motor output shaft and screw mandrel.Connected by shaft coupling between drive motor and screw mandrel, transmission is more steadily reliable.
As preferably, grating scale comprises grating scale body, read head, and grating scale body is arranged on supporting plate side, and read head is arranged on reading headstock, and reading headstock is fixedly connected on base.Grating scale easy accessibility, installs reliable.
As preferably, supporting plate lower surface installs scroll wheel positions and is provided with mounting groove, mounting groove internal fixtion is connected with bearing pin, and roller is rotatably connected on bearing pin.Roller is arranged on the bearing pin in mounting groove, easy accessibility, rolls reliable.
Compared with prior art, the beneficial effects of the utility model are: the top lift of (1) wafer sort elevating mechanism is large, jacking good stability, and precision is high; (2) elevating mechanism structure is simple, low cost of manufacture, Installation and Debugging and easy to maintenance; (3) whole elevating mechanism structural strength is good, and bearing capacity is large.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of the present utility model;
Fig. 2 is the structural representation of removal supporting plate of the present utility model;
Fig. 3 is the structural representation of supporting plate of the present utility model;
In figure: 1, base, 2, supporting plate, 3, lifting sliding rail seat, 4, supporting seat, 5, feed screw nut, 6, drive motor, 7, screw mandrel, 8, skewback, 9, clinoplane, 10, roller, 11, grating scale, 12, scrambler, 13, initial point light barrier, 14, optoelectronic switch, 15, line slideway, 16, slide block, 17, contiguous block, 18, web joint, 19, slide, 20, slide rail, 21, cam guide, 22, motor mount, 23, shaft coupling, 24, grating scale body, 25, read head, 26, reading headstock, 27, limited block, 28, mounting groove, 29, bearing pin.
Embodiment
Below by specific embodiment, and by reference to the accompanying drawings, the technical solution of the utility model is further described specifically:
Embodiment: a kind of wafer sort elevating mechanism (see accompanying drawing 1, accompanying drawing 2, accompanying drawing 3), comprises base 1, supporting plate 2, and all rectangular shape structure of base and supporting plate, base is fixedly connected with four lifting sliding rail seats 3, lifting sliding rail seat vertical feet.Four lifting sliding rail seats are separately positioned on base four angle positions.Supporting plate liftable is connected on lifting sliding rail seat, lifting sliding rail seat is equipped with line slideway 15, and line slideway is slidably connected with slide block 16, and slide block is all fixedly connected with supporting plate lower surface.Four angle positions of supporting plate are all fixedly connected with the contiguous block 17 of L shape, lifting sliding rail seat and contiguous block correspondence are provided with four, four contiguous blocks removably connect with four slide block medial surface one_to_one corresponding respectively, and supporting plate is arranged in the region between four lifting sliding rail seats.
Slidably connecting support seat 4 on base, supporting seat is arranged on below supporting plate, and supporting seat is provided with skewback 8, and skewback upper surface is clinoplane 9, supporting seat is fixedly connected with feed screw nut 5.Supporting seat comprises web joint 18 and two slides 19, web joint is fixedly connected between two slides, two slides are symmetrical arranged, feed screw nut is fastenedly connected on web joint near centre position, skewback is provided with two, and two skewbacks are located on two slides respectively, and two skewbacks are symmetrical arranged, base is fixedly connected with two slide rail be arranged in parallel 20, two slides to be slidably connected to respectively on two slide rails.Base is provided with drive motor 6, drive motor output shaft is in transmission connection screw mandrel 7, and drive motor is stepper motor, base is provided with motor mount 22, drive motor is arranged on motor mount, is connected with shaft coupling 23 between drive motor output shaft and screw mandrel.Shaft coupling front end is provided with thrust ball bearing and deep groove ball bearing, and thrust ball bearing and deep groove ball bearing are installed on motor mount.Screw mandrel set nut is by screw mandrel and thrust ball bearing and tightly, screw mandrel is connected with motor mount by thrust ball bearing, deep groove ball bearing, screw mandrel set nut.Screw mandrel and feed screw nut are connected.Supporting plate is provided with roller 10, roller and skewback correspondence are provided with two, and roller is cylinder roller bearing.Supporting plate lower surface is installed scroll wheel positions and be provided with two mounting grooves 28, be all fixedly connected with bearing pin 29 in mounting groove, roller is rotatably connected on bearing pin.Roller is connected on skewback upper surface.Supporting plate lower surface is provided with cam guide 21, cam guide is arranged near one of them roller.
Supporting plate displacement measurement grating scale 11 is installed, drive motor electrical connection scrambler 12 between supporting plate and base, grating scale electrical connection scrambler.Grating scale output terminal is electrically connected with scrambler input end, encoder output electrical connection drive motor.Grating scale comprises grating scale body 24, read head 25, and grating scale body is arranged on supporting plate side, and read head is arranged on reading headstock 26, and reading headstock is fixedly connected on base, and reading headstock is vertical with base to be arranged.
Base is all fixedly connected with the limited block 27 for limited support seat near position, rear and front end, two limited blocks are arranged near the two ends of a slide rail respectively, in the process that supporting seat slides on base, limited block serves good position-limiting action, effectively prevents supporting seat from de-orbiting.Supporting seat is connected with initial point light barrier 13, base is provided with the optoelectronic switch 14 corresponding with initial point light barrier.Initial point light barrier inserts optoelectronic switch, obtains lifting origin position, is obtained, forms closed-loop feedback control system with scrambler, improve supporting plate displacement accuracy by the high-precision end movement positional information of grating scale.
During initial position, initial point light barrier inserts optoelectronic switch, shading light electric signal, obtain lifting origin position, during elevating mechanism work, drive motor rotating band movable wire bar rotates, leading screw rotates and drives feed screw nut to move on leading screw in feed screw nut, and feed screw nut is fixedly connected with supporting seat, supporting seat is slidably connected on base, and therefore supporting seat slides under the drive of drive motor on base.Skewback on supporting seat its clinoplane in the process of sliding abuts supporting plate, and drives supporting plate elevating movement on lifting sliding rail seat.Scrambler controls drive motor rotating speed and rotates the number of turns, the lifting displacement signal that grating scale reads feeds back to scrambler and forms closed-loop control, the signal that scrambler feeds back according to grating scale is finely tuned drive motor, ensures that supporting plate lifting distance precision can reach 0.1um.The top lift of this wafer sort elevating mechanism is large, jacking good stability, and precision is high, and elevating mechanism structure is simple, low cost of manufacture, Installation and Debugging and easy to maintenance, and whole elevating mechanism structural strength is good, and bearing capacity is large.
Above-described embodiment is one of the present utility model preferably scheme, not does any pro forma restriction to the utility model, also has other variant and remodeling under the prerequisite not exceeding the technical scheme described in claim.

Claims (7)

1. a wafer sort elevating mechanism, comprises base, supporting plate, it is characterized in that, base is fixedly connected with several lifting sliding rail seats, supporting plate liftable is connected on lifting sliding rail seat, slidably connecting support seat on base, and supporting seat is arranged on below supporting plate, supporting seat is fixedly connected with feed screw nut, base is provided with drive motor, and drive motor output shaft is in transmission connection screw mandrel, and screw mandrel and feed screw nut are connected, supporting seat is provided with skewback, and skewback upper surface is clinoplane; Supporting plate is provided with roller, and roller is connected on skewback upper surface, is provided with supporting plate displacement measurement grating scale between supporting plate and base, drive motor electrical connection scrambler, grating scale electrical connection scrambler.
2. a kind of wafer sort elevating mechanism according to claim 1, is characterized in that, lifting sliding rail seat is equipped with line slideway, line slideway is slidably connected with slide block, slide block is all fixedly connected with supporting plate lower surface.
3. a kind of wafer sort elevating mechanism according to claim 2, it is characterized in that, the rectangular shape structure of supporting plate, four angle positions of supporting plate are all fixedly connected with the contiguous block of L shape, lifting sliding rail seat and contiguous block correspondence are provided with four, and four contiguous blocks removably connect with four slide block medial surface one_to_one corresponding respectively.
4. a kind of wafer sort elevating mechanism according to claim 1, it is characterized in that, supporting seat comprises web joint and two slides, web joint is fixedly connected between two slides, feed screw nut is fastenedly connected on web joint, and skewback is provided with two and is located on two slides respectively, base is fixedly connected with two slide rails, two slides are slidably connected on two slide rails respectively, and roller and skewback correspondence are provided with two.
5. a kind of wafer sort elevating mechanism according to claim 1 or 2 or 3 or 4, it is characterized in that, drive motor is stepper motor, and base is provided with motor mount, drive motor is arranged on motor mount, is connected with shaft coupling between drive motor output shaft and screw mandrel.
6. a kind of wafer sort elevating mechanism according to claim 1 or 2 or 3 or 4, it is characterized in that, grating scale comprises grating scale body, read head, and grating scale body is arranged on supporting plate side, read head is arranged on reading headstock, and reading headstock is fixedly connected on base.
7. a kind of wafer sort elevating mechanism according to claim 1 or 2 or 3 or 4, it is characterized in that, supporting plate lower surface installs scroll wheel positions and is provided with mounting groove, mounting groove internal fixtion is connected with bearing pin, and roller is rotatably connected on bearing pin.
CN201520419607.3U 2015-06-17 2015-06-17 Elevating system is used in wafer test Active CN204789636U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520419607.3U CN204789636U (en) 2015-06-17 2015-06-17 Elevating system is used in wafer test

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Application Number Priority Date Filing Date Title
CN201520419607.3U CN204789636U (en) 2015-06-17 2015-06-17 Elevating system is used in wafer test

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105047575A (en) * 2015-06-17 2015-11-11 杭州长川科技股份有限公司 Oblique block elevating mechanism for wafer test
CN106217026A (en) * 2016-09-23 2016-12-14 江西洪都航空工业集团有限责任公司 A kind of arrangement for adjusting height for product docking
CN106814222A (en) * 2016-06-28 2017-06-09 昆山欧博精密机械电子有限公司 Circuit board plants needle therapeutical apparatus base
CN107991595A (en) * 2017-11-06 2018-05-04 汕头大学 A kind of high speed and super precision rotation and lifting linkage mechanism

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105047575A (en) * 2015-06-17 2015-11-11 杭州长川科技股份有限公司 Oblique block elevating mechanism for wafer test
CN106814222A (en) * 2016-06-28 2017-06-09 昆山欧博精密机械电子有限公司 Circuit board plants needle therapeutical apparatus base
CN106814222B (en) * 2016-06-28 2019-05-07 昆山欧博精密机械电子有限公司 Circuit board plants needle therapeutical apparatus pedestal
CN106217026A (en) * 2016-09-23 2016-12-14 江西洪都航空工业集团有限责任公司 A kind of arrangement for adjusting height for product docking
CN107991595A (en) * 2017-11-06 2018-05-04 汕头大学 A kind of high speed and super precision rotation and lifting linkage mechanism
CN107991595B (en) * 2017-11-06 2020-12-04 广州高谱技术有限公司 High-speed high-precision rotating lifting linkage mechanism

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