CN204759018U - Directly write high -accuracy heavy load scanning platform in formula photoetching equipment - Google Patents
Directly write high -accuracy heavy load scanning platform in formula photoetching equipment Download PDFInfo
- Publication number
- CN204759018U CN204759018U CN201520476222.0U CN201520476222U CN204759018U CN 204759018 U CN204759018 U CN 204759018U CN 201520476222 U CN201520476222 U CN 201520476222U CN 204759018 U CN204759018 U CN 204759018U
- Authority
- CN
- China
- Prior art keywords
- table top
- sideslip
- scanning
- slide rail
- rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001259 photo etching Methods 0.000 title abstract 2
- 230000000694 effects Effects 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract 4
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Abstract
The utility model discloses a directly write high -accuracy heavy load scanning platform in formula photoetching equipment, including installation base and scanning mesa, scanning mesa both sides are provided with respectively indulges the slider, the vertical slide rail that is provided with on the installation base and indulges the slider one -to -one, the bottom surface of scanning mesa be the inclined plane, is provided with a plurality of oblique slide rails on the bottom surface of scanning mesa, is provided with a plurality of sideslip rails on the last plane of installation base, scans the mesa and install to be provided with a wedge slider between the base, be provided with on the up end of this wedge slider with each oblique slide rail matched with inclined sliding groove, the bottom surface of wedge slider be provided with with each sideslip rail matched with sideslip groove, still set up the drive arrangement who has a set to connect the wedge slider on the installation base, this drive arrangement drive wedge slider makes a round trip to slide along the sideslip rail, and the wedge slider drives the scanning mesa through the inclined sliding groove with oblique slide rail sliding fit and slides from top to bottom along indulging the slide rail, has realized the technological effect of scanning mesa liftable.
Description
Technical field
The utility model belongs to technical field of lithography, relates to the high-accuracy heavily loaded scan table in a kind of write-through lithographic equipment.
Background technology
In the write-through exposure sources of routine, scan table does not possess elevating function, when exposing the pcb board of different-thickness, needs the accurate backing plate making different-thickness, by backing plate pad on scanning table top, namely wastes cost of manufacture like this, also waste the running time to meet.
Utility model content
Technical problem to be solved in the utility model is: provide the high-accuracy heavily loaded scan table in a kind of write-through lithographic equipment, the scanning table top liftable of this scan table.
The technical matters that the utility model will solve further is: provide the high-accuracy heavily loaded scan table in a kind of write-through lithographic equipment, and this scan table, when former driving force is constant, improves the nominal load capacity of scanning table top.
The technical matters that the utility model further will solve is: provide the high-accuracy heavily loaded scan table in a kind of write-through lithographic equipment, and this scan table can improve the precision regulating adjustable height.
For solving the problems of the technologies described above, the technical solution adopted in the utility model is: the high-accuracy heavily loaded scan table in write-through lithographic equipment, comprise mounting seat and be arranged on the scanning table top in mounting seat, the both sides that described scanning table top is relative are vertically provided with at least one vertical slide block respectively, described mounting seat is vertically provided with and vertical slide block vertical slide rail one to one, described vertical slide block slides up and down and is connected on vertical slide rail, the bottom surface of described scanning table top is the plane tilted, the bottom surface of scanning table top is provided with some oblique slide rails along direction from high to low, the upper plane of described mounting seat is provided with the some sideslip rails parallel with oblique slide rail, the wedge block that a upper surface is parallel with the bottom surface of scanning table top is provided with between described scanning table top and mounting seat, the upper surface of this wedge block is provided with the oblique chute that slide rail oblique with each matches, the bottom surface of wedge block is provided with the sideslip groove matched with each sideslip rail, described mounting seat is also provided with a set of drive unit, this drive unit is connected with wedge block, wedge block is driven to slidably reciprocate along sideslip rail.
The angle of described oblique slide rail and surface level is between 20 degree to 45 degree.
Described drive unit comprises the leading screw being parallel to sideslip rail, and to be fixedly connected on wedge block and the ball nut spun mutually with leading screw, and to connect the servomotor of leading screw one end, described servomotor is fixedly mounted in mounting seat.
Described wedge block is provided with the through hole that is parallel to sideslip rail, described leading screw is through through hole, and the ball nut be screwed on leading screw is fixedly connected on one end of through hole.
Described scanning table top is rectangle, and the both sides that scanning table top is relative are vertically provided with two vertical slide blocks respectively, and two the vertical slide blocks being positioned at the same side are fixedly mounted on the transverse ends of this side respectively.
Described vertical slide block is provided with the draw-in groove matched with vertical slide rail.
Described wedge block comprises the upper surface skewback parallel with the bottom surface of scanning table top, and the upper surface of skewback is fixedly connected with some and oblique slide rail angled-lift splits one to one, described oblique chute is arranged on the upper surface of angled-lift splits; The bottom surface of skewback is fixedly connected with some with sideslip rail cross slider one to one, and described sideslip groove is arranged on the bottom surface of cross slider.
The beneficial effects of the utility model are: drive wedge block 7 to slidably reciprocate along sideslip rail 6 by drive unit 10, wedge block 7 is driven by the oblique chute 8 be slidably matched with oblique slide rail 5 and scans table top and slide up and down along vertical slide rail 4, achieves the liftable technique effect of scanning table top 2;
By wedge block 7, the power transmitted of scanning table top 2 is resolved into a transverse force and a longitudinal force, thus reduce the power that drive unit 10 is subject to, otherwise, when former driving force is constant, improve the nominal load capacity scanning table top;
By being arranged to be less than 45 degree with the angle of surface level by oblique slide rail 5, according to Pythagorean theorem, wedge block 7 horizontal sliding distance is greater than the straight skidding distance of scanning table top 2, thus improves the precision of the adjustment adjustable height of scanning table top 2.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the A-A cut-open view in Fig. 1;
Fig. 3 is the B-B cut-open view in Fig. 1;
Fig. 4 is No. 7 part spatial structure schematic views in Fig. 1.
In Fig. 1 ~ Fig. 4: 1, mounting seat, 2, scanning table top, 3, vertical slide block, 4, vertical slide rail, 5, tiltedly slide rail, 6, sideslip rail, 7, wedge block, 8, tiltedly chute, 9, sideslip groove, 10, drive unit, 11, leading screw, 12, ball nut, 13, servomotor, 14, through hole, 15, draw-in groove, 16, skewback, 17, angled-lift splits, 18, cross slider.
Embodiment
Below in conjunction with accompanying drawing, describe specific embodiments of the present utility model in detail.
High-accuracy heavily loaded scan table in write-through lithographic equipment as shown in Figure 1, the scanning table top 2 comprising mounting seat 1 and be arranged in mounting seat 1, it is characterized in that, the both sides that described scanning table top 2 is relative are vertically provided with at least one vertical slide block 3 respectively, described mounting seat 1 is vertically provided with and vertical slide block 3 vertical slide rail 4 one to one, described vertical slide block 3 slides up and down and is connected on vertical slide rail 4, the bottom surface of described scanning table top 2 is the plane tilted, the bottom surface of scanning table top 2 is provided with some oblique slide rails 5 along direction from high to low, the upper plane of described mounting seat 1 is provided with the some sideslip rails 6 parallel with oblique slide rail 5, the wedge block 7 that a upper surface is parallel with the bottom surface of scanning table top 2 is provided with between described scanning table top 2 and mounting seat 1, the upper surface of this wedge block 7 is provided with the oblique chute 8 that slide rail 5 oblique with each matches, the bottom surface of wedge block 7 is provided with the sideslip groove 9 matched with each sideslip rail 6, described mounting seat 1 is also provided with a set of drive unit 10, this drive unit 10 is connected with wedge block 7, wedge block 7 is driven to slidably reciprocate along sideslip rail 6.
Drive unit 10 drives wedge block 7 to slidably reciprocate along sideslip rail 6, wedge block 7 is driven by the oblique chute 8 be slidably matched with oblique slide rail 5 and scans table top and slide up and down along vertical slide rail 4, achieve the liftable technique effect of scanning table top 2, simultaneously, the power transmitted of scanning table top 2 is resolved into a transverse force and a longitudinal force by wedge block 7, thus reduces the power that drive unit 10 is subject to, comparatively speaking, when former driving force is constant, improve the nominal load capacity of scanning table top.
The angle of described oblique slide rail 5 and surface level is between 20 degree to 45 degree.According to Pythagorean theorem, when oblique slide rail 5 is less than 45 degree with the angle of surface level, wedge block 7 horizontal sliding distance is greater than the straight skidding distance of scanning table top 2, thus improves the precision of the adjustment adjustable height of scanning table top 2.
Described drive unit 10 comprises the leading screw 11 being parallel to sideslip rail 6, and to be fixedly connected on wedge block 7 and the ball nut 12 spun mutually with leading screw 11, and to connect the servomotor 13 of leading screw 11 one end, described servomotor 13 is fixedly mounted in mounting seat 1.
The kind of drive precision of leading screw 11 and ball nut 12 is high, and noise is low, coordinates servomotor 13, is conducive to improving the precision regulating scanning table top 2 adjustable height equally.Except using the kind of drive of ball nut 12 and leading screw 11, hydraulic push rod can also be used to promote the slip of wedge block 7.
Described wedge block 7 is provided with the through hole 14 that is parallel to sideslip rail 6, described leading screw 11 is through through hole 14, and the ball nut 12 be screwed on leading screw 11 is fixedly connected on one end of through hole 14.
Described scanning table top 2 is rectangle, and the relative both sides of scanning table top 2 are vertically provided with two vertical slide blocks 3 respectively, and two that are positioned at the same side vertical slide blocks 3 are fixedly mounted on the transverse ends of this side respectively.
Be equivalent to scan table top 2 four angles on be respectively provided with a vertical slide block 3, make whole scan table structure more stable like this, the transverse force that single vertical slide block 3 is subject to is little, be conducive to scanning table top 2 be elevated reposefully.
Described vertical slide block 3 is provided with the draw-in groove 15 matched with vertical slide rail 4.
Described wedge block 7 comprises the upper surface skewback 16 parallel with the bottom surface of scanning table top 2, and the upper surface of skewback 16 is fixedly connected with some and oblique slide rail 5 angled-lift splits 17 one to one, described oblique chute 8 is arranged on the upper surface of angled-lift splits 17; The bottom surface of skewback 16 is fixedly connected with some with sideslip rail 6 cross slider 18 one to one, and described sideslip groove 9 is arranged on the bottom surface of cross slider 18.
Angled-lift splits 17 and cross slider 18 use through long-time, have wearing and tearing, wedge block 7 is designed to sectional type, during replacing, only need to change corresponding slide block, can fall the cost of production maintenance.
The course of work of the present utility model is: first will the pcb board of exposure be needed to be placed on scanning table top 2, then servomotor 13 is started, by relatively rotating of leading screw 11 and ball nut 12, promote wedge block 7 to move along sideslip rail 6, in the process of wedge block 7 movement, scanning table top 2 is elevated along vertical slide rail 4 in the relative sliding of oblique slide rail 5 and oblique chute 8, until after the satisfied exposure requirement of the height scanning the pcb board upper surface on table top 2, stop servomotor 13, scanning table top 2 is fixed, just can carry out exposure operation to the pcb board on scanning table top 2 afterwards, after the pcb board changing different-thickness, only need again start servomotor 13, regulate the height of scanning table top 2, the height of the new pcb board upper surface changed is made to meet exposure requirement, after adjustment completes, exposure operation is carried out to pcb board.
When not changing servomotor 13 power, improve with the angle of surface level the nominal load capacity scanning table top 2 by reducing oblique slide rail 5.Reduce oblique slide rail 5 and the angle of surface level also can improve to regulate simultaneously and scan table top 2 and be elevated high precision.
Claims (7)
1. the high-accuracy heavily loaded scan table in write-through lithographic equipment, comprise mounting seat (1) and be arranged on the scanning table top (2) in mounting seat (1), it is characterized in that, the relative both sides of described scanning table top (2) are vertically provided with at least one vertical slide block (3) respectively, described mounting seat (1) is vertically provided with and vertical slide block (3) vertical slide rail (4) one to one, described vertical slide block (3) slides up and down and is connected on vertical slide rail (4), the bottom surface of described scanning table top (2) is the plane tilted, the bottom surface of scanning table top (2) is provided with some oblique slide rails (5) along direction from high to low, the upper plane of described mounting seat (1) is provided with the some sideslip rails (6) parallel with oblique slide rail (5), the wedge block (7) that a upper surface is parallel with the bottom surface of scanning table top (2) is provided with between described scanning table top (2) and mounting seat (1), the upper surface of this wedge block (7) is provided with the oblique chute (8) that slide rail (5) oblique with each is matched, the bottom surface of wedge block (7) is provided with the sideslip groove (9) matched with each sideslip rail (6), described mounting seat (1) is also provided with a set of drive unit (10), this drive unit (10) is connected with wedge block (7), wedge block (7) is driven to slidably reciprocate along sideslip rail (6).
2. the high-accuracy heavily loaded scan table in write-through lithographic equipment according to claim 1, is characterized in that, the angle of described oblique slide rail (5) and surface level is between 20 degree to 45 degree.
3. the high-accuracy heavily loaded scan table in write-through lithographic equipment according to claim 2, it is characterized in that, described drive unit (10) comprises the leading screw (11) being parallel to sideslip rail (6), be fixedly connected on the upper and ball nut (12) spun mutually with leading screw (11) of wedge block (7), and connecting the servomotor (13) of leading screw (11) one end, described servomotor (13) is fixedly mounted in mounting seat (1).
4. the high-accuracy heavily loaded scan table in write-through lithographic equipment according to claim 3, it is characterized in that, described wedge block (7) is provided with the through hole (14) that is parallel to sideslip rail (6), described leading screw (11) is through through hole (14), and the ball nut (12) be screwed on leading screw (11) is fixedly connected on one end of through hole (14).
5. the high-accuracy heavily loaded scan table in write-through lithographic equipment according to claim 4, it is characterized in that, described scanning table top (2) is rectangle, the both sides scanning table top (2) relative are vertically provided with two vertical slide blocks (3) respectively, and two the vertical slide blocks (3) being positioned at the same side are fixedly mounted on the transverse ends of this side respectively.
6. the high-accuracy heavily loaded scan table in write-through lithographic equipment according to claim 5, is characterized in that, described vertical slide block (3) is provided with the draw-in groove (15) matched with vertical slide rail (4).
7. the high-accuracy heavily loaded scan table in write-through lithographic equipment according to claim 5, it is characterized in that, described wedge block (7) comprises the upper surface skewback (16) parallel with the bottom surface of scanning table top (2), the upper surface of skewback (16) is fixedly connected with some and oblique slide rail (5) angled-lift splits (17) one to one, described oblique chute (8) is arranged on the upper surface of angled-lift splits (17); The bottom surface of skewback (16) is fixedly connected with some with sideslip rail (6) cross slider (18) one to one, and described sideslip groove (9) is arranged on the bottom surface of cross slider (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520476222.0U CN204759018U (en) | 2015-07-03 | 2015-07-03 | Directly write high -accuracy heavy load scanning platform in formula photoetching equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520476222.0U CN204759018U (en) | 2015-07-03 | 2015-07-03 | Directly write high -accuracy heavy load scanning platform in formula photoetching equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204759018U true CN204759018U (en) | 2015-11-11 |
Family
ID=54473708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520476222.0U Expired - Fee Related CN204759018U (en) | 2015-07-03 | 2015-07-03 | Directly write high -accuracy heavy load scanning platform in formula photoetching equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204759018U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108241263A (en) * | 2018-03-19 | 2018-07-03 | 合肥芯碁微电子装备有限公司 | A kind of Z axis device of automatic lifting for laser direct-writing exposure machine |
| CN109029947A (en) * | 2018-07-05 | 2018-12-18 | 武汉海王机电工程技术有限公司 | Small-sized heavy duty multiple degrees of freedom regulating device |
| CN111902039A (en) * | 2020-06-23 | 2020-11-06 | 朱凡 | Liftable formula platform of plugging into |
| CN112540434A (en) * | 2019-09-19 | 2021-03-23 | 中国空气动力研究与发展中心超高速空气动力研究所 | Optical pitching adjusting device |
| CN114019768A (en) * | 2021-12-10 | 2022-02-08 | 广东科视光学技术股份有限公司 | Double-gantry photoetching machine and processing method thereof |
| CN114047675A (en) * | 2021-12-10 | 2022-02-15 | 广东科视光学技术股份有限公司 | A lift-type lithography machine and its processing method |
-
2015
- 2015-07-03 CN CN201520476222.0U patent/CN204759018U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108241263A (en) * | 2018-03-19 | 2018-07-03 | 合肥芯碁微电子装备有限公司 | A kind of Z axis device of automatic lifting for laser direct-writing exposure machine |
| CN109029947A (en) * | 2018-07-05 | 2018-12-18 | 武汉海王机电工程技术有限公司 | Small-sized heavy duty multiple degrees of freedom regulating device |
| CN109029947B (en) * | 2018-07-05 | 2020-10-16 | 武汉海王机电工程技术有限公司 | Small-sized heavy-load multi-degree-of-freedom adjusting device |
| CN112540434A (en) * | 2019-09-19 | 2021-03-23 | 中国空气动力研究与发展中心超高速空气动力研究所 | Optical pitching adjusting device |
| CN111902039A (en) * | 2020-06-23 | 2020-11-06 | 朱凡 | Liftable formula platform of plugging into |
| CN114019768A (en) * | 2021-12-10 | 2022-02-08 | 广东科视光学技术股份有限公司 | Double-gantry photoetching machine and processing method thereof |
| CN114047675A (en) * | 2021-12-10 | 2022-02-15 | 广东科视光学技术股份有限公司 | A lift-type lithography machine and its processing method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204759018U (en) | Directly write high -accuracy heavy load scanning platform in formula photoetching equipment | |
| CN201520928U (en) | Adjustable track seat of large-stroke precise track | |
| CN209465934U (en) | A kind of turbine-generator units component level adjustment special tooling | |
| CN202861790U (en) | Device for quickly mounting roller bearing on guide rail | |
| CN107253347A (en) | A kind of guiding device for slide block of great tonnage hydraulic machine | |
| CN201287477Y (en) | Press with composite guide | |
| CN201300515Y (en) | Injection machine mobile template tracing shoe device | |
| CN205600310U (en) | Bed of a column movable horizontal machining center | |
| CN204800819U (en) | Stair mold's mark time subassembly and stair mold | |
| CN203792305U (en) | Device for leveling T-shaped groove ground rail quickly | |
| CN105641912A (en) | Leveling device for table top of billiard table | |
| CN207942712U (en) | a press machine | |
| CN209110101U (en) | Level divides core shooting core box limiting device | |
| CN203185689U (en) | Sliding guide mechanism for sliding block | |
| CN211373673U (en) | An automatic test module | |
| CN210161373U (en) | Cloud control building materials mould | |
| CN209146631U (en) | A kind of autoloader elevating table device | |
| CN207310610U (en) | A kind of guiding device for slide block of great tonnage hydraulic machine | |
| CN109175233A (en) | Level divides core shooting core box limiting device | |
| CN202106211U (en) | Movable workpiece installing seat | |
| CN201942962U (en) | Three-degree-of-freedom gravity compensation accurate-adjustment claw of ballastless track plate | |
| CN207013498U (en) | A beam lifting device | |
| CN207888880U (en) | Azulejo fabric charge car and its work housing | |
| CN2827685Y (en) | Secondary distributing device of brick making machine | |
| CN206718055U (en) | The feed mechanism of carpenter's processing unit (plant) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215636 Zhangjiagang City, Jiangsu Province, the new town of the sea dam road, Suzhou, micro shadow Photoelectric Technology Co., Ltd. Patentee after: SUZHOU WEIYING LASER TECHNOLOGY CO.,LTD. Address before: 215636 Zhangjiagang City, Jiangsu Province, the new town of the sea dam road, Suzhou, micro shadow Photoelectric Technology Co., Ltd. Patentee before: ADVANCED MICROLITHO INSTRUMENT, Inc. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151111 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |