CN204666315U - A kind of helium mass spectrum leak detecting device of low pressure workpiece - Google Patents

A kind of helium mass spectrum leak detecting device of low pressure workpiece Download PDF

Info

Publication number
CN204666315U
CN204666315U CN201520316622.5U CN201520316622U CN204666315U CN 204666315 U CN204666315 U CN 204666315U CN 201520316622 U CN201520316622 U CN 201520316622U CN 204666315 U CN204666315 U CN 204666315U
Authority
CN
China
Prior art keywords
workpiece
way
helium mass
low pressure
suction gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201520316622.5U
Other languages
Chinese (zh)
Inventor
宋怀双
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui Wanyi Science and Technology Co Ltd
Original Assignee
Anhui Wanyi Science and Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anhui Wanyi Science and Technology Co Ltd filed Critical Anhui Wanyi Science and Technology Co Ltd
Priority to CN201520316622.5U priority Critical patent/CN204666315U/en
Application granted granted Critical
Publication of CN204666315U publication Critical patent/CN204666315U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The utility model discloses a kind of helium mass spectrum leak detecting device of low pressure workpiece, include the vacuum pipe that the inner sealing that detects workpiece with low pressure is connected, the other end of vacuum pipe connects backing vacuum pump, vacuum pipe is provided with successively threeway, four-way, manual gear plate valve, pressure maintaining valve of finding time, described threeway, four-way are communicated with the inside of vacuum pipe, the other end of threeway is provided with vacuum meter, the another two ends of four-way are respectively equipped with Manual air-release valves, suction gun, the suction gun port of suction gun is embedded in the middle part of four-way, and suction gun is connected with helium mass spectrometer leak detector.The utility model achieves the helium mass spectrum Leak Detection of low pressure workpiece, and workable, accuracy of detection is higher, and it is lower that system realizes cost.

Description

A kind of helium mass spectrum leak detecting device of low pressure workpiece
technical field:
The utility model relates generally to vacuum helium mass spectrum leak detection field, specifically a kind of helium mass spectrum leakage detection method of low pressure workpiece.
background technology:
As you know in leak detection industry, particularly helium mass spectrum leak detection, has requirement to the vacuum tightness that examined workpiece reaches when it detects.During the vacuum leak hunting of helium mass spectrum, the vacuum tightness of workpiece at least should reach below 1500pa, otherwise is difficult to carry out valve opening detection.So first helium Mass Spectrometer Method is just start after the vacuum tightness in workpiece is evacuated to below 1500pa to detect under normal circumstances.But some workpiece can not reach higher vacuum tightness due to the restriction of the factor such as material, toughness, but needs again to detect its sealing.Helium Mass Spectrometer Method for this kind of workpiece just acquires a certain degree of difficulty, and method provided herein is exactly achieve helium mass spectrum leak detection in the pressure allowed band that can ensure workpiece.
utility model content:
The purpose of this utility model just provides a kind of helium mass spectrum leakage detection method of low pressure workpiece, realizes inside workpiece maintenance helium mass spectrum Leak Detection under a certain pressure.
The utility model is achieved through the following technical solutions:
A kind of helium mass spectrum leak detecting device of low pressure workpiece, it is characterized in that: include the vacuum pipe that the inner sealing that detects workpiece with low pressure is connected, the other end of vacuum pipe connects backing vacuum pump, vacuum pipe is provided with successively threeway, four-way, manual gear plate valve, pressure maintaining valve of finding time, described threeway, four-way are communicated with the inside of vacuum pipe, the other end of threeway is provided with vacuum meter, the another two ends of four-way are respectively equipped with Manual air-release valves, suction gun, the suction gun port of suction gun is embedded in the middle part of four-way, and suction gun is connected with helium mass spectrometer leak detector.
Principle of work of the present utility model is:
Backing vacuum pump is found time to workpiece, and vacuum meter detects the pressure of inside workpiece, and Manual air-release valves, pressure maintaining valve of finding time regulate inside workpiece pressure, make it in allowed limits; Suction gun port is fixed in vacuum pipe, and the suction gun other end is connected with helium mass spectrometer leak detector.At workpiece periphery spray helium, if there is leakage, then helium can be sucked in helium mass spectrometer leak detector by suction gun and be detected.In a word, examined workpiece can be met and allow within the scope of certain pressure, helium mass spectrum Leak Detection can be achieved again.
Advantage of the present utility model:
The utility model achieves the helium mass spectrum Leak Detection of low pressure workpiece, and workable, accuracy of detection is higher, and it is lower that system realizes cost.
accompanying drawing illustrates:
Fig. 1 is the structural representation of patent of the present invention.
embodiment:
As shown in Figure 1, a kind of helium mass spectrum leak detecting device of low pressure workpiece, include the vacuum pipe 8 that the inner sealing that detects workpiece 1 with low pressure is connected, the other end of vacuum pipe 8 connects backing vacuum pump 9, vacuum pipe 8 is provided with threeway 10 successively, four-way 11, manual gear plate valve 6, to find time pressure maintaining valve 7, described threeway 10, four-way 10 is communicated with the inside of vacuum pipe 8, the other end of threeway 10 is provided with vacuum meter 2, the another two ends of four-way 11 are respectively equipped with Manual air-release valves 3, suction gun 4, the suction gun port of suction gun 4 is embedded in the middle part of four-way 11, suction gun 4 is connected with helium mass spectrometer leak detector 5.
Manual gear plate valve 6 is used for opening, cutting out auxiliary gas circuit use of finding time.Pressure maintaining valve 7 of finding time is mainly used to regulate auxiliary flow of finding time, and regulates low pressure to detect workpiece 1 internal pressure.Auxiliary return pump 9 mainly finds time to use to workpiece, coordinates helium mass spectrometer leak detector 5 to work and uses.
During work, by finding time, pressure maintaining valve 7 regulates low pressure to detect the internal pressure of workpiece 1 with Manual air-release valves 3, it is made to keep constant under a certain pressure, pressure size can be carried out measurement by vacuum meter 2 and be obtained, workpiece 1 outside spray helium is detected like this in low pressure, if there is leakage, helium can be sucked by suction gun 4 and enter in helium mass spectrometer leak detector 5, realizes the helium Mass Spectrometer Method in workpiece pressure allowed band.

Claims (1)

1. the helium mass spectrum leak detecting device of a low pressure workpiece, it is characterized in that: include the vacuum pipe that the inner sealing that detects workpiece with low pressure is connected, the other end of vacuum pipe connects backing vacuum pump, vacuum pipe is provided with successively threeway, four-way, manual gear plate valve, pressure maintaining valve of finding time, described threeway, four-way are communicated with the inside of vacuum pipe, the other end of threeway is provided with vacuum meter, the another two ends of four-way are respectively equipped with Manual air-release valves, suction gun, the suction gun port of suction gun is embedded in the middle part of four-way, and suction gun is connected with helium mass spectrometer leak detector.
CN201520316622.5U 2015-05-15 2015-05-15 A kind of helium mass spectrum leak detecting device of low pressure workpiece Active CN204666315U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520316622.5U CN204666315U (en) 2015-05-15 2015-05-15 A kind of helium mass spectrum leak detecting device of low pressure workpiece

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520316622.5U CN204666315U (en) 2015-05-15 2015-05-15 A kind of helium mass spectrum leak detecting device of low pressure workpiece

Publications (1)

Publication Number Publication Date
CN204666315U true CN204666315U (en) 2015-09-23

Family

ID=54136689

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520316622.5U Active CN204666315U (en) 2015-05-15 2015-05-15 A kind of helium mass spectrum leak detecting device of low pressure workpiece

Country Status (1)

Country Link
CN (1) CN204666315U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107179163A (en) * 2017-06-05 2017-09-19 深圳市樊溪电子有限公司 The high speed suction gun leak detecting device and detection method of high-power transformer potted component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107179163A (en) * 2017-06-05 2017-09-19 深圳市樊溪电子有限公司 The high speed suction gun leak detecting device and detection method of high-power transformer potted component

Similar Documents

Publication Publication Date Title
CN202793702U (en) Evacuating and pressurizing device for helium mass spectrometer leak detection
CN204924590U (en) A pressurization - evacuation experimental apparatus for leak hunting of helium mass spectrum
CN104444484A (en) Plate carrying device
CN103084340B (en) A kind of air tightness test sorting plant automatically
CN204177537U (en) A kind of container helium mass spectrum leak detection device
CN204694421U (en) Valve leak detection proving installation
CN204666315U (en) A kind of helium mass spectrum leak detecting device of low pressure workpiece
CN204301945U (en) A kind of water pump air-tightness detection device
CN106768685A (en) A kind of helium mass spectrometer leak detector that can aid in evacuating
CN203745160U (en) Vacuum tooling air tightness test device
CN105571792A (en) Helium mass spectrometer leak detector capable of realizing high pressure leak detection
CN204008046U (en) Lithium battery fluid injection air-tightness detection device
CN104833464A (en) Multifunctional airtight detector and detection method thereof
CN204694429U (en) Valve leak detection test board
CN203037429U (en) Device for testing gas tightness of workpiece
CN104155064A (en) On-line leak detection device for drainage system pipeline
CN109458564B (en) Nitrogen gas pipeline leakage detecting and temporary plugging device
CN203981343U (en) A kind of for the online combination valve detecting of tensimeter
CN208743096U (en) A kind of bottle cap detection device
CN205449415U (en) Simple and easy pressure measurement device
CN204141245U (en) A kind of hand-held pressure gauge
CN203981357U (en) A kind of online leakage detection apparatus of drainage system pipe
CN211147947U (en) Improved generation connecting piece leakproofness test fixture
CN203216675U (en) Sealing device for cylinder port made of composite material
CN204964156U (en) Leak detection device in atmospheric valve

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CP02 Change in the address of a patent holder

Address after: High tech Zone Wenqu 230088 Hefei Road, Anhui province No. 8

Patentee after: ANHUI WANYI SCIENCE & TECHNOLOGY Co.,Ltd.

Address before: Tianda high tech Zone 230088 Hefei Road, Anhui province No. 71 Huayi Science Park building B building Anhui instrument

Patentee before: ANHUI WANYI SCIENCE & TECHNOLOGY Co.,Ltd.

CP02 Change in the address of a patent holder