CN204533648U - A kind of multichannel gate valve - Google Patents
A kind of multichannel gate valve Download PDFInfo
- Publication number
- CN204533648U CN204533648U CN201520110779.2U CN201520110779U CN204533648U CN 204533648 U CN204533648 U CN 204533648U CN 201520110779 U CN201520110779 U CN 201520110779U CN 204533648 U CN204533648 U CN 204533648U
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- slide plate
- plate
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- hole
- isolating
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Abstract
The utility model relates to the gate valve used in high vacuum or ultra-high vacuum environment, specifically a kind of multichannel gate valve, comprise compressing tablet, isolating plate, one dimensional driving device and slide plate, isolating plate is positioned on vacuum cavity, compressing tablet is arranged on isolating plate, slide plate is placed between compressing tablet and isolating plate, and slide plate is evenly equipped with multiple through hole along movement direction, and isolating plate is evenly equipped with multiple attachment hole for contacting other vacuum cavities along the movement direction of slide plate; Slide plate is connected with the one dimensional driving device be arranged on vacuum cavity, is moved back and forth by the driving of one dimensional driving device, by the movement of slide plate, while on slide plate, arbitrary through hole is connected with identical attachment hole that isolating plate sorts, on isolating plate, other attachment holes are blocked by slide plate, realize the connection between the different vacuum chamber in isolating plate both sides.The utility model structure is simple, practical, has multichannel, can individually use, also can all close by passage.
Description
Technical field
The utility model relates to the gate valve used in high vacuum or ultra-high vacuum environment, specifically a kind of multichannel gate valve.
Background technique
Usually gate valve is used, for controlling the contact of high vacuum part and coarse vacuum part in high vacuum or ultra-high vacuum environment.Especially in the joint of two vacuum cavities, if one of them vacuum cavity often will contact air in order to change the part of some rapid wears, and another one vacuum cavity wishes to maintain ultrahigh vacuum always, and at this time gate valve just seems essential.At present, various different types of gate valve is had to sell on the market, but most expensive, bulky, usually just very difficult for design in the instrument top of some compact types.
Model utility content
In order to solve the problems referred to above that existing gate valve exists, the purpose of this utility model is to provide a kind of multichannel gate valve.
The purpose of this utility model is achieved through the following technical solutions:
The utility model comprises compressing tablet, isolating plate, one dimensional driving device and slide plate, wherein isolating plate is positioned on vacuum cavity, described compressing tablet is arranged on this isolating plate, described slide plate is placed between compressing tablet and isolating plate, this slide plate is evenly equipped with multiple through hole along movement direction, described isolating plate is evenly equipped with multiple attachment hole for contacting other vacuum cavities along the movement direction of slide plate; Described slide plate is connected with the one dimensional driving device be arranged on described vacuum cavity, is moved back and forth by the driving of this one dimensional driving device, by the movement of described slide plate, while on this slide plate, arbitrary through hole is connected with identical described attachment hole that described isolating plate sorts, on this isolating plate, other attachment holes are blocked by described slide plate, realize the connection between the different vacuum chamber in described isolating plate both sides.
Wherein: described isolating plate is provided with groove A, described compressing tablet is provided with groove B, and has the bar hole be connected with described groove B at the upper surface of this compressing tablet; The bottom of described slide plate is placed in groove A, and top is placed in described groove B, and each through hole on described slide plate is all positioned at this bar hole; Described groove A and groove B all offers along the movement direction of slide plate, and the length direction namely along described isolating plate, compressing tablet is offered, and, the centerline collineation of described groove A and groove B length direction; On described slide plate, the number of through hole is equal with the number of attachment hole on described isolating plate; On described isolating plate, each attachment hole periphery all has seal groove, is all equipped with seal ring in each described seal groove; Described slide plate is provided with connecting base near one end of one dimensional driving device, and this connecting base is connected with the connecting rod of described one dimensional driving device.
Advantage of the present utility model and good effect are:
1. the utility model structure is simple, practical, has multichannel, can individually use, also can all close by passage.
2. the utility model size is relatively more flexible, can be easy to change, and small and exquisite especially, and occupation of land side is very little, good especially in the local effect stricter to spatial requirement.
3. be contained in below slide plate of the present utility model in the groove A that isolating plate is offered, groove A plays the effect of a constraint, ensures that slide plate is fixed in such space, and can not poke one's nose everywhere, and ensures the stability of sliding.
Accompanying drawing explanation
Fig. 1 is perspective view of the present utility model;
Fig. 2 is explosive view of the present utility model;
Fig. 3 is structural front view of the present utility model;
Fig. 4 is the A-A sectional drawing in Fig. 3;
Fig. 5 is the C-C sectional drawing in Fig. 3;
Wherein: 1 is compressing tablet, 2 is connecting rod, and 3 is isolating plate, and 4 is seal ring, and 5 is one dimensional driving device, 6 is slide plate, and 7 is groove A, and 8 is attachment hole A, and 9 is attachment hole B, and 10 is through hole A, 11 is through hole B, and 12 is groove B, and 13 is bar hole, and 14 is edge of a knife flange, and 15 is connecting base.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail.
As shown in Fig. 1 ~ 5, the utility model comprises compressing tablet 1, isolating plate 3, one dimensional driving device 5 and slide plate 6, wherein isolating plate 3 is fixed on vacuum cavity, and isolating plate 3 has groove A7 along its length, is evenly equipped with multiple attachment hole along its length in this groove A7.Compressing tablet 1 is fixed on isolating plate 3 by screw, and the lower surface of this compressing tablet 1 has groove B12, and upper surface has along the length direction of compressing tablet 1 bar hole 13 be connected with groove B12.
Slide plate 6 is placed between compressing tablet 1 and isolating plate 3.Slide plate 6 end face is isosceles trapezoid, trapezoidal upper base and go to the bottom all rectangular.Correspondingly, the groove A7 on isolating plate 3 is rectangle groove, and the both sides of the groove B12 on compressing tablet 1 are the inclined-plane corresponding with trapezoidal slide plate 6 two waists.The bottom of slide plate 6 is placed in groove A7, and intermediate portion is placed in groove B12, and top is then placed in bar hole 13, and the upper surface of slide plate 6 is positioned at the below of compressing tablet 1 upper surface.
One dimensional driving device 5 of the present utility model is commercial products, purchases in Ke Telai Cisco (Shanghai) commerce and trade Co., Ltd.This one dimensional driving device 5 is fixed on vacuum cavity by edge of a knife flange 14, and output terminal is provided with connecting rod 2.Slide plate 6 is provided with connecting base 15 near one end of one dimensional driving device 5, and this connecting base 15 plugs with connecting rod 2, and is fixed by screw.Slide plate 6 is moved back and forth in the space that groove A7, groove B12 and bar hole 13 are formed by the driving of one dimensional driving device 5, and movement direction is the length direction of compressing tablet 1, isolating plate 3; Further, the centerline collineation of groove A7, groove B12 and bar hole 13 length direction.
Movement direction along slide plate 6 in groove A7 on isolating plate 3 is evenly equipped with multiple attachment hole for contacting other vacuum cavities, slide plate 6 is evenly equipped with multiple through hole along movement direction, on slide plate 6, the number of through hole is equal with the number of attachment hole on isolating plate 3, but pitch-row is different.On slide plate 6, the setting of through hole will ensure, when first through hole on slide plate 6 is connected (namely first through hole is coaxial with first attachment hole) with first attachment hole isolating plate 3 sorting identical, on slide plate 6, on other through hole and isolating plate 3, other attachment hole is all closed conditions, namely on slide plate 6, other through hole is isolated plate 3 and blocks, and on isolating plate 3, other attachment hole is blocked by slide plate 6; By that analogy, when second through hole is connected with the second attachment hole, other through hole and connection hole, in closed condition, make the contact on isolating plate 3 both sides set up (namely realizing the connection between the different vacuum chamber in isolating plate 3 both sides).
On isolating plate 3, each attachment hole periphery all has seal groove, is all equipped with seal ring 4 in each seal groove, and slide plate 6 is pressed in above each seal ring 4, slide plate 6 can be stablized and smooth and easyly to slide in groove A7.
Working principle of the present utility model is:
For Twin channel gate valve, the present embodiment is on isolating plate 3, offered attachment hole A8 and attachment hole B9 respectively, and the center of circle of attachment hole A8 and attachment hole B9 is all positioned on the center line of isolating plate 3 length direction; Slide plate 6 has been offered respectively through hole A10 and through hole B11, the center of circle of through hole A10 and through hole B11 is all positioned on the center line of slide plate 6 length direction.On slide plate 6, on the pitch-row of through hole A10 and through hole B11 and isolating plate 3, the pitch-row of attachment hole A8 and attachment hole B9 is different.Under the driving of one dimensional driving device 5, when slide plate 6 slides into the position that A-A in Fig. 3 cuts open when coaxial with attachment hole A8 (slide plate 6 slide into through hole A10), the contact on isolating plate 3 both sides has been set up, and through hole B11 and attachment hole B9 is in closed condition; Because the distance of two through holes is different with the distance of two attachment holes on isolating plate 3 on slide plate 6, time once wherein pair of holes is alignd, another pair of holes is then closed.When slide plate 6 slide into A-A portion and C-C in Fig. 3 cut open in the middle of position time, two through holes on slide plate 6 and two attachment holes on isolating plate 3 all will be closed.Slide plate 6 continues to glide, and when slide plate 6 slides into the position that C-C in Fig. 3 cuts open when coaxial with attachment hole B9 (slide plate 6 slide into through hole B11), through hole A10 and attachment hole A8 is then closed.By such mode, achieve the function of a Twin channel gate valve, two positions independently can be opened and can close completely, achieve the break-make contact of two different vacuum chambers.
The material of the utility model slide plate 6 is brass, and the material of miscellaneous part is stainless steel.Reason is because slip surface and the trapezoidal two waist surface of contact between groove B12 and slide plate 6 need enough degree of finish to ensure that slide plate 6 can slide swimmingly in the groove A7 of isolating plate 3.If be commaterial, likely can stick together.Groove A7 on isolating plate 3 plays the effect of a constraint, ensures that slide plate 6 is fixed in such space, and can not poke one's nose everywhere, ensure the stability of sliding.
Claims (6)
1. a multichannel gate valve, it is characterized in that: comprise compressing tablet (1), isolating plate (3), one dimensional driving device (5) and slide plate (6), wherein isolating plate (3) is positioned on vacuum cavity, described compressing tablet (1) is arranged on this isolating plate (3), described slide plate (6) is placed between compressing tablet (1) and isolating plate (3), this slide plate (6) is evenly equipped with multiple through hole along movement direction, described isolating plate (3) is evenly equipped with multiple attachment hole for contacting other vacuum cavities along the movement direction of slide plate (6); Described slide plate (6) is connected with the one dimensional driving device (5) be arranged on described vacuum cavity, is moved back and forth by the driving of this one dimensional driving device (5), by the movement of described slide plate (6), while the upper arbitrary through hole of this slide plate (6) is connected with the upper identical described attachment hole that sorts of described isolating plate (3), this isolating plate (3) other attachment holes upper are blocked by described slide plate (6), realize the connection between the different vacuum chamber in described isolating plate (3) both sides.
2. by multichannel gate valve according to claim 1, it is characterized in that: described isolating plate (3) is provided with groove A (7), described compressing tablet (1) is provided with groove B (12), and has the bar hole (13) be connected with described groove B (12) at the upper surface of this compressing tablet (1); The bottom of described slide plate (6) is placed in groove A (7), and top is placed in described groove B (12), and each through hole on described slide plate (6) is all positioned at this bar hole (13).
3. by multichannel gate valve according to claim 2, it is characterized in that: described groove A (7) and groove B (12) all offer along the movement direction of slide plate (6), namely the length direction along described isolating plate (3), compressing tablet (1) is offered, further, the centerline collineation of described groove A (7) and groove B (12) length direction.
4. by multichannel gate valve according to claim 1, it is characterized in that: the number of the upper through hole of described slide plate (6) is equal with the number of the upper attachment hole of described isolating plate (3).
5. by the multichannel gate valve described in the arbitrary claim of Claims 1-4, it is characterized in that: the upper each attachment hole periphery of described isolating plate (3) all has seal groove, is all equipped with seal ring (4) in each described seal groove.
6. by the multichannel gate valve described in the arbitrary claim of Claims 1-4, it is characterized in that: described slide plate (6) is provided with connecting base (15) near one end of one dimensional driving device (5), and this connecting base (15) is connected with the connecting rod (2) of described one dimensional driving device (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520110779.2U CN204533648U (en) | 2015-02-15 | 2015-02-15 | A kind of multichannel gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520110779.2U CN204533648U (en) | 2015-02-15 | 2015-02-15 | A kind of multichannel gate valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204533648U true CN204533648U (en) | 2015-08-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520110779.2U Expired - Fee Related CN204533648U (en) | 2015-02-15 | 2015-02-15 | A kind of multichannel gate valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204533648U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105114662A (en) * | 2015-09-17 | 2015-12-02 | 青岛欣鑫数控精密机械有限公司 | Negative-pressure adsorption vacuum reversing valve |
| CN105150741A (en) * | 2015-09-17 | 2015-12-16 | 青岛欣鑫数控精密机械有限公司 | Double-station engraving machine with negative-pressure adsorption vacuum reversing valve |
| CN105570480A (en) * | 2015-12-31 | 2016-05-11 | 宁波市鄞州华坚阀门有限公司 | Pedal type control valve |
| CN106965265A (en) * | 2017-03-17 | 2017-07-21 | 上海汉虹精密机械有限公司 | A kind of movable gantry numerical control timber processing machine tool |
-
2015
- 2015-02-15 CN CN201520110779.2U patent/CN204533648U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105114662A (en) * | 2015-09-17 | 2015-12-02 | 青岛欣鑫数控精密机械有限公司 | Negative-pressure adsorption vacuum reversing valve |
| CN105150741A (en) * | 2015-09-17 | 2015-12-16 | 青岛欣鑫数控精密机械有限公司 | Double-station engraving machine with negative-pressure adsorption vacuum reversing valve |
| CN105150741B (en) * | 2015-09-17 | 2017-12-05 | 青岛欣鑫数控精密机械有限公司 | Double engraving machine with negative-pressure adsorption vacuum reversal valve |
| CN105570480A (en) * | 2015-12-31 | 2016-05-11 | 宁波市鄞州华坚阀门有限公司 | Pedal type control valve |
| CN105570480B (en) * | 2015-12-31 | 2018-06-12 | 江苏苏盐阀门机械有限公司 | A kind of pedal control valve |
| CN106965265A (en) * | 2017-03-17 | 2017-07-21 | 上海汉虹精密机械有限公司 | A kind of movable gantry numerical control timber processing machine tool |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150805 Termination date: 20200215 |
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| CF01 | Termination of patent right due to non-payment of annual fee |