CN204440056U - A kind of bending press - Google Patents

Abstract

The utility model provides a bending device, comprising: a main body with an open structure, which includes a top plate, a bottom plate, a front plate and a rear plate connected as a whole; The shaft and the worm are connected in sequence and fixed on the support seat along the direction parallel to the top plate. The worm gear is arranged under the worm and forms a worm reduction transmission pair with the worm. The output shaft is fixed on the center of the worm wheel along the direction perpendicular to the worm. The middle part of the shaft is connected with the upper connecting block, the guide rail is set under the top plate, the slide table is set parallel to the top plate and snapped into the guide rail, and the lower connecting block is also set under the slide table; the rocker arm is symmetrically set between the front plate and the rear plate; The pull rod is fixed on the rocker arm along the horizontal direction, and the middle part of the pull rod is fixed through the lower connecting block; and the mirror is arranged parallel to the pull rod and the two ends of the mirror are respectively fixed on the rocker arm. The utility model can accurately control the bending deformation degree of the pull rod and the mirror through the output linear displacement.

Description

a bending device

technical field

The utility model relates to a bending device, in particular to a high-precision micro-variation bending device used in the field of synchrotron radiation beamlines.

Background technique

The collimating and focusing mirror is the main component of the synchrotron radiation beamline, and its main function is to realize the deflection, collimation and focusing of the beam. Synchrotron radiation has the characteristics of high energy, small divergence, and small spot. In order to ensure the quality and performance of the focused beam, the collimating lens must have very high surface accuracy and bending adjustment accuracy. According to the forming method, the focusing mirror can be divided into grinding mirror and bending mirror. Compared with ground mirrors, the radius of curvature of the curved mirror surface can be adjusted within a certain range, and the surface shape has high precision and is easy to manufacture. Therefore, synchrotron radiation beamlines generally use bending mirrors as optical components to achieve beam collimation and focusing.

The bending device is an important part of the collimating and focusing mirror system using the bending mirror, and is a specific mechanical structure to realize the bending function. The bending device is mainly used to clamp the mirror and apply a bending moment to make the mirror bend and deform to form the center of curvature and radius. By adjusting the magnitude of the applied bending moment, the radius of curvature of the collimator focusing mirror is controlled within a reasonable range to meet the requirements of the physical environment of the synchrotron radiation beamline. The bending deformation of the collimating focusing mirror after bending is very small, and the radius of curvature ranges from 2000 to 4000 meters; the accuracy of the surface shape error is high, usually less than 1 microrad; the bending adjustment accuracy is high, and the resolution range is 10 to 50 meters, the repeatability range is 50-100 meters, and the stability error range is ±30 meters, so it must be measured with professional optical instruments and equipment. In order to obtain the beam with the best performance, it is necessary to repeatedly bend and measure the collimating mirror. This requires that the bending device applied to the synchrotron radiation beamline must achieve high-resolution, high-repeatability, and high-stability bending adjustment under micro-deformation conditions.

At present, the structural forms of the existing bending devices are various, mainly including three-point bending, four-point roller bending, flexible hinge and rocker structure, etc. For three-point press bending and four-point roller press bending, because the press bending device and the mirror surface adopt point and line contact, wear is prone to occur, and long-term use will affect the bending accuracy and surface quality. Flexible hinge technology is widely used in precision machinery. Its processing technology is complicated and its manufacturing cost is high. It is only used for bending adjustment of small optical components. Collimating and focusing lenses are large and medium-sized optical components, so flexible hinge technology is not applicable. For the bending device with rocker structure, no reasonable bending structure or driving mechanism has been designed, and it is impossible to realize micro-variation and high-precision bending adjustment.

Wang Junjie et al. (Design and experiment of a bending mechanism used on a synchrotron radiation beamline, Mechanical Design and Research, Volume 20, No. 6, December 2004) introduced a bending mechanism used on a synchrotron radiation beamline bending mechanism. This bending mechanism utilizes the principle of lever reverse prying, adopts a double rocker arm structure, and rotates the pressing device through the deformation of the elastic rod, and finally realizes bending of the mirror. However, this document only briefly explained the working principle of the bending mechanism, did not design a specific mechanical structure, and did not describe the specific working method in a complete and detailed manner, including how to deform the elastic rod, clamp the mirror, and apply the bending moment wait. More importantly, it does not explain how to control the deformation of the elastic rod, and then precisely adjust the bending shape of the focusing mirror. In summary, it is difficult to guarantee the bending accuracy and surface quality of the focusing lens.

Utility model content

The purpose of this utility model is to provide a bending device, so as to solve the problem that the micro-deformation and high-precision bending adjustment of the collimating mirror cannot be realized in the prior art, and the bending shape after bending cannot meet the physical requirements of the synchrotron radiation beamline. environmental requirements.

The bending device provided by the utility model includes: a main body with an open structure, the main body includes a top plate, a bottom plate, a front plate and a rear plate, wherein the top plate and the bottom plate are arranged in parallel in the vertical direction, two front plates and two The rear plate is arranged vertically between the four corresponding corners of the top plate and the bottom plate, and the front plate and the rear plate are fixedly connected with the top plate and the bottom plate; the driving mechanism includes a support seat, a stepping motor, a shaft coupling, Worm, worm gear, output shaft, guide rail, sliding table, upper connection block and lower connection block, wherein the support base is fixed on the top plate, and the stepper motor, coupling and worm are connected in sequence and fixed on the top plate along the direction parallel to the top plate On the support seat, the worm gear is arranged under the worm and forms a worm reduction transmission pair with the worm. The output shaft is fixed on the center of the worm wheel along the direction perpendicular to the worm. The direction parallel to the output shaft is set under the top plate, the slide table is set parallel to the top plate and snapped into the guide rail, and the lower connecting block is also set under the slide table; the rocker arm and the two rocker arms are respectively arranged symmetrically through the vertically set rotating shaft Between the front plate and the rear plate, the rotating shaft is fixed between the top plate and the bottom plate at the same time; the tie rod is arranged along the horizontal direction and its two ends are respectively fixed on the rocker arm, and the middle part of the tie rod passes through the lower connecting block and is fixed with the lower connecting block; And the mirror, the mirror is arranged parallel to the pull rod and the two ends of the mirror are fixed to the rocking arm respectively.

The side of the upper connection block is also provided with a probe, the extension direction of the probe is perpendicular to the extension direction of the output shaft, limit switches are arranged on both sides of the probe, and the limit switch is installed on the top plate of the main body.

The worm is a variable-section rod with a stepped structure, and sequentially forms the first-stage hosel, the second-stage hosel, the first transition hosel, the worm drive tooth surface, the second transition hosel, and the third-stage hosel, wherein , the first transition hosel and the second transition hosel are symmetrical about the tooth surface of the worm drive, the second-stage hosel and the third-stage hosel are symmetrical about the tooth surface of the worm drive; the first-stage hosel of the worm passes through the coupling The device is rigidly fixed to the output shaft of the stepping motor, and the second-stage and third-stage hosels of the worm respectively pass through a set of worm rolling bearings and are fixed to the support base.

The worm drive tooth surface of the worm matches the worm gear drive tooth surface provided on the worm wheel so as to continuously engage and drive.

The output shaft is a variable-section rod with a stepped structure, and sequentially forms the first-stage journal, the second-stage journal, the screw drive tooth surface and the third-stage journal, wherein the outer circumference of the first-stage journal is set There is an axially extending keyway, the second-stage journal and the third-stage journal respectively pass through a set of transmission shaft rolling bearings and are installed and fixed on the support seat, and the first-stage journal is inserted into the center of the worm wheel and fixed.

The output shaft and the upper connection block form a spiral transmission pair, and the spiral transmission tooth surface arranged in the middle of the output shaft matches the internal thread arranged in the upper connection block.

The rocker arm includes a rocker arm frame, a rotating shaft and a pressure block. The rocker arm frame adopts a frame structure, and the center is suspended in the air. The two ends of the mirror and the pressure block are fixed in the hollow part of the rocker arm frame. The rotating shaft extending to the direction is rigidly fixed between the rotating shaft and the rocker frame.

An adjusting bolt is also arranged on the back plate, and the adjusting bolt extends horizontally and passes through the top of the back plate to touch the pressure block, and the pressure block presses against the two ends of the mirror.

A rocker arm sliding bearing is arranged between the rocking arm and the pull rod, and the rocker arm sliding bearing cooperates with the pull rod in clearance and supports the pull rod to slide.

A pressure sensor is also installed at the connection between the lower connection block and the pull rod. The pressure sensor adopts a sleeve structure. The outer cover of the pressure sensor is fixed in the mounting hole of the lower connection block. The inner sleeve of the pressure sensor contacts the pull rod to form a clearance fit.

The driving mechanism of the utility model adopts high-precision, high-strength and high-efficiency worm drive and screw drive, cooperates with high-precision stepping motors, guide rails and sliding tables, so that the output linear displacement has high precision and high stability, and precise control The degree of bending deformation of the tie rod. The bending deformation of the tie rod is controlled within the elastic range, and the corresponding relationship between the output linear displacement of the driving mechanism and the curvature radius of the mirror is established. As long as the linear displacement is precisely adjusted, the curved form (curvature radius) of the mirror can be accurately changed. The elastic deformation range of the tie rod is small, the bending moment is limited, and the bending accuracy is high, which is completely suitable for the actual working conditions of the micro-variation bending of the synchrotron radiation collimating and focusing mirror. The mirror bending deformation process has high resolution, high repeatability and high stability. Moreover, the bending device uses precision sliding bearings and rolling bearings to reduce the impact of friction (moment) on the bending shape and surface quality of the mirror. In a word, the tie rod rocker type bending device provided by the utility model has the advantages of high stability, high-pressure bending precision, and small surface error. In particular, the worm drive is self-locking, and the radius of curvature of the mirror after bending will not change; the elastic deformation of the tie rod has a linear and reversible law, which can precisely adjust the bending shape (radius of curvature) of the mirror, and use professional optical instruments to measure in real time , until the requirements of the physical environment are met. Therefore, this bending device is completely suitable for the bending adjustment of collimating and focusing mirrors of synchrotron radiation beamlines.

Description of drawings

Fig. 1 is a structural schematic diagram of a bending device according to an embodiment of the present invention;

Fig. 2 is a rear view of a bending device according to an embodiment of the present invention;

Fig. 3 is a top view of a bending device according to an embodiment of the present invention;

Fig. 4 is a schematic structural view of a worm of a bending device according to an embodiment of the present invention;

Fig. 5 is a structural schematic diagram of an output shaft of a bending device according to an embodiment of the present invention;

Fig. 6 is the A-A sectional view of the bending device according to Fig. 3;

Fig. 7 is a side view of a bending device according to an embodiment of the present invention;

Fig. 8 is a structural schematic diagram of the assembly of the main body and the rocker arm of the bending device according to an embodiment of the present invention;

Fig. 9 is a schematic structural view of the end of the main body of the bending device according to an embodiment of the present invention;

Fig. 10 is a schematic structural view of the rocker arm of the bending device according to an embodiment of the present invention;

Fig. 11 is a schematic structural view of the drive mechanism of the bending device according to an embodiment of the present invention;

Fig. 12 is a schematic diagram of bending deformation of a bending device according to an embodiment of the present invention.

Detailed ways

Below in conjunction with specific embodiment, the utility model is described further. It should be understood that the following examples are only used to illustrate the utility model but not to limit the scope of the utility model.

Please refer to FIG. 1 to FIG. 3 , which show the symmetrical rod rocker bending device provided by the present invention, which is used to clamp and drive the mirror to bend and deform. The bending device includes a main body 1, a driving mechanism 2, a rocker arm 3, a pull rod 4 and a mirror 5, wherein the driving mechanism 2 is arranged above the main body 1, two rocker arms 3 are symmetrically arranged at both ends of the main body 1, and the two rocker arms 3 are respectively hinged with the main body 1 through a vertically arranged rotating shaft, and a pull rod 4 extending in the horizontal direction is arranged between the two rocker arms 3, and the two ends of the pull rod 4 are respectively fixed on the rocker arm 3 through bearings, and the mirror 5 is parallel to the pull rod 4 Both ends of the mirror 5 are set and fixed to the rocker arm 3 respectively, and the driving mechanism 2 passes through the main body 1 and connects with the pull rod 4 to drive the pull rod 4 .

Each component of the utility model is described in detail below in conjunction with accompanying drawing.

2, 6 and 9, the main body 1 includes a top plate 11, a bottom plate 12, a front plate 13, and a rear plate 14, wherein the top plate 11 and the bottom plate 12 are both rectangular plates and arranged in parallel in the vertical direction, two The front board 13 and the two rear boards 14 are respectively vertically arranged between the four corresponding corners of the top board 11 and the bottom board 12, and the front board 13 and the rear board 14 are fixedly connected with the top board 11 and the bottom board 12 so as to support the top board 11 and the bottom board 12. The front plate 13 and the rear plate 14 are smaller in area so that the main body 1 forms an open structure, and the space is fully open, and parts such as the mirror 5 can be easily installed and disassembled from the gap between the top plate 11 and the bottom plate 12.

As shown in Fig. 1-Fig. 6 again, drive mechanism 2 comprises support seat 21, stepper motor 22, shaft coupling 23, worm screw 24, worm gear 25, output shaft 26, guide rail 27, slide table 28, upper connection block 29 and The lower connection block 210, wherein, as shown in Figure 2, the support base 21 is fixed on the top plate 11 by bolts, the stepper motor 22, the shaft coupling 23 and the worm 24 are sequentially connected and fixed on the support along the direction parallel to the top plate 11 Seat 21. As shown in FIG. 3 , the stepper motor 22 is installed on one end surface of the support base 21 through bolts. The output shaft of the stepping motor 22 is rigidly fixed to the worm 24 through a coupling 23 , so that the worm 24 can be driven to rotate around the center of rotation of the support base 21 . Support seat 21 both sides are provided with installation hole, shoulder, and worm rolling bearing 8 passes installation hole and is installed in support seat 21. The central axes of the two mounting holes are exactly the turning center of the worm screw 24 rotation. As shown in Figure 2, the worm gear 25 is arranged under the worm 24 and forms a worm reduction transmission pair with the worm 24. Its structural form and technical parameters are designed in accordance with the relevant standards of cylindrical worm transmission to achieve high-precision, high-strength, and high-efficiency reduction transmission. As shown in FIG. 3 , the output shaft 26 is fixed to the center of the worm wheel 25 along the direction perpendicular to the worm 24 , and the middle part of the output shaft 26 is connected with the upper connecting block 29 arranged in the vertical direction. As shown in Figure 2, the guide rail 27 is arranged below the top plate 11 along the direction parallel to the output shaft 26 (see Figure 2), the slide table 28 is arranged parallel to the top plate 11 and snapped into the guide rail 27, the slide table 28 can be along the guide rail 27 and make a movement perpendicular to the direction of the paper (as shown in Figure 2). The upper connecting block 29 vertically passes through the top plate 11 and is connected with the slide table 28, thereby driving the slide table 28 to move. A lower connection block 210 is also arranged below the slide table 28 , and the lower connection block 210 can move together with the slide table 28 . The upper connection block 29 , the lower connection block 210 , and the slide table 28 are fixed together by bolts, and together they move linearly along the extending direction of the guide rail 27 under the drive of the output shaft 26 . As shown in FIG. 8 , the tie rod 4 is fixed through the lower connection block 210 , and the tie rod 4 can be deformed under the drive of the lower connection block 210 .

Fig. 3 has shown the top view of the press bending device of the present utility model, also known in conjunction with Fig. 2, the side of upper connection block 29 is also provided with probe 213, and the extension direction of probe 213 is perpendicular to the extension direction of output shaft 26 and can follow The movement of upper connection block 29 moves back and forth. Limit switches 212 are arranged on both sides of the probe 213 , and the limit switches 212 are installed on the top plate 11 of the main body 1 . The probe 213 and the limit switch 212 are used to limit the linear motion range of the upper connecting block 29 . When the upper connection block 29 moves to the positive and negative limit positions, the probe 213 contacts the limit switch 212, and the limit switch 212 outputs an interrupt request signal immediately, forcing the stepper motor 22 to stop rotating. Since the tensile force on the tie rod 4 is proportional to the linear displacement of the upper connecting block 29 , the bending deformation range of the tie rod 4 is indirectly limited.

The worm 24 and the output shaft 26 adopted by the utility model are described below in conjunction with FIG. 4 and FIG. 5 .

As shown in Figure 4, the worm 24 adopts a stepped structure, and the worm 24 is a variable-section rod, and sequentially forms a first-stage pipe neck 241, a second-stage pipe neck 242, a first transition pipe neck 243, a worm drive tooth surface 244, The second transition hosel 245 and the third-stage hosel 246, wherein, the first transition hosel 243 and the second transition hosel 245 are symmetrical about the worm drive tooth surface 244, the second-stage hosel 242 and the third-stage hosel 246 It is also symmetrical about the worm drive flank 244 . As can be seen in conjunction with FIG. 2, the first-stage hose neck 241 of the worm screw 24 passes through the shaft coupling 23 and is rigidly fixed with the output shaft of the stepper motor 22. The second-stage hosel 242 and the third-stage hosel 246 of the worm 24 respectively pass through a set of worm rolling bearings 8 and are fixed. The worm rolling bearing 8 can bear the rotational load and support the high-precision rotation of the worm 24 . The outer contour of the worm wheel 25 is provided with a worm gear transmission tooth surface, and the worm gear transmission tooth surface matches the worm transmission tooth surface 244 of the worm screw 24, and the two are continuously meshed for transmission, so that the worm screw 24 can drive the worm wheel 25 to rotate, and the high speed of the worm screw 24 , The rotation of small torque is converted into the low speed of worm wheel 25, the rotation of high torque, realizes deceleration transmission. The central axes of the worm screw 24 and the worm wheel 25 form a 90° intersecting angle in space.

Similarly, as shown in Figure 5, the output shaft 26 is also a variable-section rod with a stepped structure, and sequentially forms a first-stage journal 261, a second-stage journal 262, a collar 263, a screw drive tooth surface 264, And the third-stage journal 265 , wherein, the outer circumference of the first-stage journal 261 is provided with an axially extending keyway 266 . It can be known from Fig. 13 that the second-stage journal 262 and the third-stage journal 265 of the output shaft 26 respectively pass through a set of transmission shaft rolling bearings 8' and are installed and fixed. The third stage journal 265 is installed in a transmission shaft rolling bearing 8'. The second stage journal 262 is installed in another transmission shaft rolling bearing 8'. The first stage journal 261 is inserted into the center of the worm wheel 25 and fixed. Both the hub of the worm wheel 25 and the first-stage journal 261 are provided with key grooves, installed with flat keys, and fixed rigidly in both radial and circumferential directions, and will not be described in detail here. The worm gear 25 transmits torque to the output shaft 26 so that they jointly rotate around the center of rotation of the support base 21 .

The output shaft 26 and the upper connecting block 29 form a screw transmission pair, and its structural form and technical parameters are designed according to the relevant standards of screw transmission, which can realize high-precision, high-strength, and high-efficiency linear feed motion. Specifically, a helical transmission tooth surface 264 is provided in the middle of the output shaft 26, and a matching internal thread is provided in the upper connecting block 29, and the two are continuously meshed for transmission. The output shaft 26 drives the upper connecting block 29 to move, and the rotation of the output shaft 26 Converted into the linear motion of the upper connecting block 29, the torque of the output shaft 26 is converted into a linear force, which can realize screw feed transmission. The linear movement direction of the upper connecting block 29 is parallel to the axial direction of the output shaft 26 .

FIG. 6 shows a sectional view of the A-A axis according to FIG. 1 . It can be seen from FIGS. 7-8 that two rocker arms 3 are symmetrically arranged on both sides of the main body 1 . The rocker arm 3 includes a rocker arm frame 31 , a rocker arm sliding bearing 33 , a pressure block 34 and an adjusting bolt 35 . The rocker frame 31 adopts a frame structure, the center is suspended, and the mirror 5 and the pressing block 34 are fixed on the hollow part of the rocker frame. Adjusting bolt 35 passes through hole 143 (seeing Fig. 9) on the back plate 14 and adjusting bolt through hole 313 (seeing Fig. 10) and presses pressing block 34 and mirror 5, thereby makes mirror 5 and rocking arm 3 rigidly fixed. The mirror 5 and the swing arm 3 can rotate together relative to the rotation center of the main body 1 . The rocker arm frame 31 is provided with a pull rod installation hole 314 (see FIG. 10 ) for installing the rocker arm sliding bearing 33 . The outer ring of the rocker arm slide bearing 33 cooperates with the mounting hole of the rocker arm frame 31 for radial positioning. Circlips are installed on both sides of the rocker arm sliding bearing 33 so as to be axially positioned with the rocker arm frame 31 . The inner ring of the rocker arm sliding bearing 33 is in clearance fit with the pull rod 4 so that it can slide relative to the pull rod 4 axially. The effect of rocker arm sliding bearing 33 is to transmit power, and supports pull rod 4 to slide. Specifically, the lower connecting block 210 forces the pull rod 4 to move linearly, and the moving direction is perpendicular to the axis of the pull rod 4 . The rocker arm sliding bearings 33 on both sides impose rigid constraints on the pull rod 4 in the radial direction, hindering the movement of the pull rod 4 , and the pull rod 4 bends and deforms under force, and forms thrust at the contact with the rocker arm sliding bearings 33 . The thrust direction is perpendicular to the axis of the rocker arm sliding bearing 33 , and there is an offset between its extension line and the center of rotation of the rocker arm 3 , forming a bending moment, which is applied to both ends of the mirror 5 . Driven by the bending moment, the rocker arm 3 clamps the mirror 5 to rotate, and the mirror 5 bends and deforms. The greater the amount of bending deformation of the tie rod 4, the greater the bending moment applied to both ends of the mirror 5, and the relationship between the two is approximately linear.

In addition, referring to FIG. 6 , it can also be known that a pressure sensor 6 is installed at the joint between the lower connecting block 210 and the pull rod 4 . The pressure sensor 6 adopts a sleeve structure, and the outer casing is fixed in the mounting hole of the connection block 210 . The inner sleeve is in contact with the pull rod 4 to form a clearance fit and can slide relatively along the axis of the pull rod 4 . The function of the pressure sensor 6 is to transmit the pressure to the tie rod 4 and monitor the change of the pressure in real time. Likewise, when the pressure reaches the maximum set value, the pressure sensor 6 outputs an interrupt request signal. The drive mechanism 2 outputs linear motion, and the lower connecting block 210 presses the pull rod 4 through the pressure sensor 6, and forms a pulling force, forcing the pull rod 4 to move together with the lower connecting block 210, and the moving direction is perpendicular to the axis of the pull rod 4 (parallel to the axis of the output shaft 26). axis). Under the constraints of the rocker arm sliding bearings 33 at both ends, the pull rod 4 is bent and deformed. The greater the output linear displacement of the driving mechanism 2 is, the greater the pulling force and the greater the bending deformation of the pull rod 4 are. A linear relationship is established between the amount of linear displacement and the amount of bending deformation of the tie rod 4 . The pressure sensor 6 monitors the force change of the tie rod 4 in real time to prevent the pull rod 4 from bending and deforming beyond the elastic range due to excessive force.

As shown in FIGS. 9-10 , vertical rocker bracket mounting holes 113 / 123 are provided in the middle of both ends of the top plate 11 and the bottom plate 12 . Vertically extending rotating shafts 32 are arranged on the top and bottom surfaces of the rocker arm frame 31 respectively, and the rotating shafts 32 and the rocker arm frame 31 are rigidly fixed and inserted into the rocker arm frame mounting holes 113 / 123 respectively. As shown in Figure 10, the rotating shaft 32 adopts a stepped structure, and is provided with a rotating shaft positioning journal 321 and a rotating shaft shoulder 322. The rotating shaft 32 is inserted into the rotating shaft rolling bearing 8" (see Fig. 8) and is fixed together with the rocker arm frame mounting hole. 113/123. The central axis of the rocker arm frame mounting hole 113/123 is the rotation center of the rocker arm 3. The rotating shaft rolling bearing 8" is installed between the rocker arm frame mounting hole 113/123 of the main body 1 and the journal of the rotating shaft 32 , whose function is to support the high-precision rotation of the rocker arm 3 and transmit the bending moment. The rear plate 14 and the rocker arm frame 31 are provided with corresponding adjusting bolt through holes 313/143, and the adjusting bolt 35 is inserted into the adjusting bolt through holes 313/143 for fixing, as shown in FIG. 9 . Figure 11 combined with Figure 8 shows that the four corners of the top plate 11 and the bottom plate 12 are provided with positioning grooves 111/121; the mounting surfaces of the front plate 13 and the rear plate 14 are provided with positioning steps 131/141. The plates are installed and fixed by bolts, which is convenient for installation and disassembly. Top plate 11 is also provided with top plate through groove 115 (as shown in Figure 3 and Figure 11), reserves enough space, and upper connection block 29 passes through through groove 115 and moves linearly in through groove along with slide table 28, and motion direction is parallel in the axial direction of the output shaft 26 . The function of the main body 1 is to connect all parts of the bending device together and bear the load generated during the bending process.

The tie rod 4 adopts a circular cross-section structure, and the bending deformation of the tie rod 4 occurs within the elastic range. (The diameter of the pull rod is 10-20mm, the length of the pull rod is 500-600mm, and the stretch caused by bending is 0-1mm.) The middle part of the pull rod 4 is in contact with the pressure sensor 6, and the driving mechanism 2 transmits pressure to the pull rod 4 through the pressure sensor 6, so that It moves linearly along the direction perpendicular to the axis, and undergoes bending deformation. The two ends of the pull rod 4 cooperate with the rocker arm sliding bearing 33 on the rocker arm 3, and the bending moment is transmitted to the rocker arm 3 through the rocker arm sliding bearing 33, and applied to both ends of the mirror 5. The rocker arm 3 rotates under force, and the pull rod 4 and the rocker arm sliding bearing 33 slide relative to each other in the axial direction, which increases the effective length of the pull rod 4 in the bending deformation area, reduces the tensile force and stretching amount per unit length, and improves the compression force. bending stability. The end of the pull rod 4 is provided with a stopper to prevent the relative sliding from being too large and breaking away from the rocker arm sliding bearing 33.

In the bending process of the utility model, the above-mentioned driving mechanism 2 rotates the high-speed input of the stepping motor 22 through the worm pair deceleration drive to make the output shaft 26 rotate at a low speed, and then passes through the screw drive pair to output the linear feed of the slide table 28 sports. Under the pull of the slide table 28, the pull rod 4 moves linearly in a direction perpendicular to the axis of the pull rod 4 (parallel to the axis of the output shaft 26). The rigid constraints of the rocker arm sliding bearings 33 on both sides hinder the movement of the pull rod 4 , and the pull rod 4 is bent and deformed under force, and a thrust is formed at the contact point of the rocker arm sliding bearings 33 . The thrust direction is perpendicular to the axis of the rocker arm sliding bearing 33, and there is an offset between its extension line and the center of rotation of the rocker arm 3, forming a bending moment, which is applied to both ends of the mirror 5. Driven by the bending moment, the rocker arm 3 clamps the mirror 5 to rotate, and the mirror 5 bends and deforms, as shown in FIG. 12 .

Furthermore, the worm drive and screw drive selected for the driving mechanism have high transmission precision, high strength and high efficiency, and the structural form and technical parameters are designed in accordance with the relevant standards of the national machinery industry. The selected stepping motors, guide rails and sliding tables are all standard products, with high motion precision and small stroke error. The above guarantees the output linear motion accuracy and stability. Among them, the step size of the stepping motor is small, the reduction ratio of the worm transmission is large, and the pitch of the screw transmission is small, which ensures the high resolution of the output linear motion; High repetition accuracy; worm drive and screw drive have high strength and stable transmission to ensure the stability of output linear motion. In particular, the worm drive has self-locking properties. After the motor stops driving, the driving mechanism will not move under the influence of external force, and the linear displacement is constant.

The tie rod is the carrier of force and movement of the bending device. Compared with tie rods and mirrors, other structures are very rigid and will not deform, and can control the bending deformation of the tie rods within the elastic range (the stretching amount of the tie rods is 0-1mm), and establish a drive mechanism to output linear displacement and mirror Correspondence to the radius of curvature.

Specifically, the elastic deformation of the tie rod has linear and reversible laws, and the output linear displacement of the driving mechanism is proportional to the bending deformation of the tie rod. The greater the linear displacement, the greater the bending deformation of the tie rod, the greater the bending moment, the greater the bending deformation of the mirror, and the smaller the radius of curvature. Therefore, the output linear displacement of the drive mechanism has an approximately linear relationship with the radius of curvature of the mirror. The motion accuracy of the linear displacement determines the bending accuracy of the mirror. As long as the linear displacement is precisely adjusted, the bending shape of the mirror can be accurately changed. The higher the resolution, repeatability, and stability of the linear displacement, the higher the resolution, repeatability, and stability of the mirror curvature radius, and the smaller the surface error. During the actual bending process, real-time measurements are made using professional optical instruments and equipment until the curvature radius and surface error meet the performance requirements.

The linear movement range of the upper connecting block of the utility model is ±5mm, the resolution of the linear displacement is 2μm, the repeatability is 10μm, and the pulling force generated on the tie rod is 0-500N; the stretching amount caused by the elastic deformation of the tie rod is 0-1mm; The bending moment is 0-20Nm; the radius of curvature of the mirror ranges from 1000-4000m, the resolution of the radius of curvature of the mirror is 10-50m, the repeatability is 50-100m, the stability is ±30m, and the surface error is less than 1μrad.

It can be seen from this that the elastic deformation range of the tie rod is small, the bending moment is limited, and the bending accuracy is high, which is completely suitable for the actual working conditions of the micro-variation bending of the synchrotron radiation collimating and focusing mirror. The limit switch and the pressure sensor protect and monitor the elastic deformation of the tie rod, preventing the pull rod 4 from being overstressed, causing the bending deformation to exceed the elastic range, causing the bending device to fail, and even damaging the mirror 5 .

On the other hand, after the elastic deformation of the tie rod, it has the ability to resist and restore the deformation, push the driving mechanism to run in reverse, the output linear displacement is reduced, the bending moment of the mirror is released, and the radius of curvature changes. However, the driving mechanism designed by the utility model includes a worm drive, which is self-locking, and the output linear displacement will not be affected, and the bending shape of the mirror remains good, which ensures the bending accuracy and stability.

During the unloading process, the drive mechanism rotates in reverse, the linear displacement decreases, the rocker arm reversely rotates and the bending moment is released, and the bending degree of the mirror and the tie rod gradually recovers. Due to the linear and reversible laws of elastic deformation, the trend of loading and unloading of mirror and tie rod bending is in good agreement, and the whole bending process has high repeatability. When the mirror 5 returns to the normal state, the drive mechanism continues to run in reverse, the linear displacement increases in reverse, and the mirror 5 undergoes reverse bending deformation, which diverges the synchrotron radiation beam. Therefore, the bending device designed by the utility model can realize bidirectional micro-deformation bending of the mirror 5, has high bending precision and good stability, and better meets the performance requirements of the synchrotron radiation beamline.

In order to meet the high-precision and high-stability bending requirements of the synchrotron radiation focusing mirror, the bending device provided by the utility model reasonably utilizes the advantages of worm drive and screw drive. The structural forms and technical parameters of the worm drive and the screw drive are all designed according to relevant standards, which are beyond the scope of the utility model and will not be elaborated.

The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the scope of the present utility model, and various changes can also be made to the above-mentioned embodiments of the present utility model. That is to say, all simple and equivalent changes and modifications made according to the claims of the utility model application and the contents of the description all fall within the protection scope of the claims of the utility model patent. What the utility model does not describe in detail is conventional technical contents.

Claims (10)

1. A bending device, characterized in that, the bending device comprises: The main body of the open structure, the main body includes a top board, a bottom board, a front board and a rear board, wherein, the top board and the bottom board are arranged in parallel in the vertical direction, and the two front boards and the two rear boards The boards are arranged vertically between four corresponding corners of the top board and the bottom board, the front board and the rear board are fixedly connected to the top board and the bottom board; A driving mechanism, the driving mechanism includes a support base, a stepping motor, a coupling, a worm, a worm wheel, an output shaft, a guide rail, a slide table, an upper connection block and a lower connection block, wherein the support base is fixed on the top plate Above, the stepper motor, the coupling and the worm are sequentially connected and fixed on the support seat along the direction parallel to the top plate, the worm wheel is arranged below the worm and is connected to the The worm constitutes a worm reduction transmission pair, the output shaft is fixed to the center of the worm wheel along the direction perpendicular to the worm, the middle part of the output shaft is connected with the upper connecting block arranged in the vertical direction, and the guide rail It is arranged under the top plate along a direction parallel to the output shaft, the slide table is set parallel to the top plate and snapped into the guide rail, and the lower connecting block is also set under the slide table; Rocker arms, the two rocker arms are symmetrically arranged between the front plate and the rear plate through vertically arranged rotating shafts, and the rotating shafts are simultaneously fixed between the top plate and the bottom plate; a pull rod, the pull rod is arranged along the horizontal direction and its two ends are respectively fixed on the rocker arm, the middle part of the pull rod passes through the lower connecting block and is fixed with the lower connecting block; and A mirror, the mirror is arranged parallel to the pull rod and the two ends of the mirror are respectively fixed to the rocker arm. 2. The press bending device according to claim 1, wherein a probe is also provided on the side of the upper connection block, the extension direction of the probe is perpendicular to the extension direction of the output shaft, and the two sides of the probe A limit switch is arranged on the side, and the limit switch is installed on the top plate of the main body. 3. The press bending device according to claim 1, wherein the worm is a variable-section rod with a stepped structure, and sequentially forms a first-stage hosel, a second-stage hosel, and a first transition hosel , a worm transmission tooth surface, a second transition hosel, and a third-stage hosel, wherein the first transition hosel and the second transition hosel are symmetrical with respect to the worm transmission tooth surface, and the second-stage The hosel and the third-stage hosel are symmetrical about the tooth plane of the worm drive; the first-stage hosel of the worm passes through the coupling and is rigidly fixed to the output shaft of the stepper motor , the second-stage hosel and the third-stage hosel of the worm respectively pass through a set of worm rolling bearings and are fixed to the support seat. 4 . The press bending device according to claim 3 , wherein the worm drive tooth surface of the worm is matched with the worm gear drive tooth surface provided on the worm wheel so as to continuously engage and drive. 5. The press bending device according to claim 1, characterized in that, the output shaft is a variable-section rod adopting a stepped structure, and sequentially forms a first-stage journal, a second-stage journal, and a screw transmission tooth surface And the third-stage journal, wherein, the outer circumference of the first-stage journal is provided with an axially extending keyway, and the second-stage journal and the third-stage journal respectively pass through a set of transmission shafts The rolling bearing is installed and fixed on the support seat, and the first-stage journal is inserted into the center of the worm wheel and fixed. 6. The press bending device according to claim 5, characterized in that, the output shaft and the upper connecting block form a spiral transmission pair, and the spiral transmission tooth surface arranged in the middle of the output shaft is connected to the upper connecting block. Set the internal thread to match. 7. The bending device according to claim 1, wherein the rocker arm includes a rocker arm frame, a rotating shaft and a pressing block, the rocker arm frame adopts a frame structure, the center is suspended, and the two ends of the mirror And the pressing block is fixed to the hollow part of the rocker frame, the top surface and the bottom surface of the rocker frame are respectively provided with the rotating shaft extending vertically, and the rotating shaft is rigidly fixed to the rocker frame. 8. The bending device according to claim 7, characterized in that, the rear plate is further provided with an adjustment bolt, the adjustment bolt extends horizontally and passes through the rear plate to touch the pressure block, the The pressing blocks tighten the two ends of the mirror. 9. The bending device according to claim 1, characterized in that, a rocker sliding bearing is arranged between the rocker arm and the pull rod, and the rocker arm sliding bearing is in clearance fit with the pull rod and supports the The lever slides. 10. The press bending device according to claim 1, characterized in that, a pressure sensor is installed at the joint between the lower connecting block and the pull rod, the pressure sensor adopts a sleeve-type structure, and the pressure sensor The outer sleeve is fixed in the mounting hole of the lower connecting block, and the inner sleeve of the pressure sensor is in contact with the pull rod to form a clearance fit.