CN204358139U - A kind of vacuum brake plate valve and mass spectrometer - Google Patents
A kind of vacuum brake plate valve and mass spectrometer Download PDFInfo
- Publication number
- CN204358139U CN204358139U CN201420713701.5U CN201420713701U CN204358139U CN 204358139 U CN204358139 U CN 204358139U CN 201420713701 U CN201420713701 U CN 201420713701U CN 204358139 U CN204358139 U CN 204358139U
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- CN
- China
- Prior art keywords
- valve
- plate
- hole
- spool
- slide
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sliding Valves (AREA)
Abstract
The utility model discloses a kind of vacuum brake plate valve for mass spectrometer, comprise valve seat and spool; A seal ring is provided with between described valve seat and spool; Described spool being provided with pressing mechanism, compressing described seal ring for making spool; Also disclose a kind of mass spectrometer, comprise ion source chamber and coupled logical analyzer room, the communicating passage of described ion source chamber and analyzer room is provided with foregoing vacuum brake plate valve.Device of the present utility model, changes in realization and can set up mass spectrometer fast after sample and detect required vacuum, and good sealing effect, and it is high to vary efficiency.
Description
Technical field
The utility model relates to mass spectrographic analysis field, particularly relates to a kind of vacuum brake plate valve and mass spectrometer.
Background technique
Mass spectrometer is generally made up of parts such as ion source, ion transmission system and quality analysis systems.During work, ion source, ion transmission system and quality analysis system require that degree of vacuum is higher, to ensure sample ionization efficiency, ion transmission efficiency and resolving power.When changing sample, ion source portion needs to be exposed in air, and whole system pressure is frequently changed between barometric pressure and high vacuum.Before varying, need to close mass spectrometer vacuum system, and slowly inflate to whole system; After varying, reopen mass spectrometer vacuum pump group.Generally need a few hours could set up the vacuum environment required by detecting, serious restriction spectrometer analysis efficiency.
Model utility content
In order to solve the defect existed in above-mentioned prior art, realize varying rear mass spectrometer and can set up the required vacuum of detection fast, the utility model provides a kind of vacuum brake plate valve for mass spectrometer and mass spectrometer.
To achieve these goals, a kind of vacuum brake plate valve of the present utility model, comprises valve seat and is installed on the spool of valve base cavity; Described valve seat is provided with through valve seat through-hole, and described spool is provided with valve core through hole, and spool can in valve base cavity straight reciprocating motion to realize being communicated with and closedown between valve core through hole with valve seat through-hole; Between described valve seat and spool, be provided with a seal ring, sealing ring is coaxially arranged on the radial outside of described valve seat through-hole; Described spool is provided with pressing mechanism, after closing between valve core through hole and valve seat through-hole, makes spool compress described seal ring.
Described spool comprises dynamic valve plate and stacks with dynamic valve plate and arranges and relatively-movable tabular slide; Described pressing mechanism is included in the round and smooth lug boss towards dynamic valve plate that described slide is arranged on the side end face of dynamic valve plate, and the depressed part corresponding with described lug boss that described dynamic valve plate is arranged on the side end face of slide; Described seal ring is near the side end face of described dynamic valve plate away from slide.
Described slide is provided with the roller of roller mounting hole and the cylindrical body be installed in roller mounting hole or spheroid, this roller protrudes from the side end face of described slide near dynamic valve plate, and its part protruded is described lug boss.
Described slide is mutually close with the roller rail level be positioned on the inwall of described valve base cavity away from the side end face of dynamic valve plate, and described roller protrudes from the side end face of described slide away from dynamic valve plate, and withstands on described roller rail level.
Described dynamic valve plate its top end when compressing described seal ring withstands on the inwall of the inner chamber of described valve seat, and this top end tilts along seal ring radially outward near the side of seal ring; The inwall of the inner chamber of described valve seat is provided with the plane of inclination of matching with this top end.
Described spool is provided with response agency, before being communicated with between valve core through hole with valve seat through-hole, making spool unclamp described seal ring.
Described response agency comprises the resilient member connecting dynamic valve plate and slide.
Described valve seat comprises the fixed plate mutually fastened and the guide holder with caveli body, and the buckling part of described fixed plate and described guide holder is provided with seal ring; Described valve seat through-hole is through described fixed plate and described guide holder.
The utility model also provides a kind of mass spectrometer, comprises ion source chamber and coupled logical analyzer room, and the communicating passage of described ion source chamber and analyzer room is provided with foregoing vacuum brake plate valve.
Adopt technique scheme, the middle method setting up high vacuum environment is varied in vacuum brake plate valve of the present utility model, mass spectrometer and mass spectrographic analysis, has following beneficial effect:
1, vacuum brake plate valve makes spool apply pressure compaction seal ring by pressing mechanism, thus reaches fabulous sealing effect, and structure is simple, is easy to operation;
2, mass spectrometer of the present utility model, vacuum brake plate valve can be utilized ion source chamber and analyzer room is cut off when changing sample, analyzer room is made to keep high vacuum environment in the process of varying, complete vary rear to the quick forvacuum of ion source chamber, gate valve is opened after reaching forvacuum degree, utilize the molecular pump of analyzer part or other equipment to continue to vacuumize, be stabilized to after analysis requires can carry out mass spectrographic analysis until vacuum, thus set up the environment of high vacuum.This structure and method obviously reduces the cavity volume being exposed to air when varying, and significantly during reduction replacing sample, mass spectrometer re-establishes the time of vacuum, thus improves testing efficiency.
Accompanying drawing explanation
Fig. 1 is the decomposition texture schematic diagram of vacuum brake plate valve in the utility model;
Fig. 2 is the structural representation of dynamic valve plate in the utility model;
Fig. 3 is the structural representation of slide in the utility model;
Fig. 4 is the structural representation of the utility model medi-spring pin;
Fig. 5 is the structural representation of pull bar in the utility model;
Fig. 6 is the structural representation of guide holder in the utility model;
Fig. 7 is the structural representation of fixed plate in the utility model;
Fig. 8 is the mounting structure stereogram of dynamic valve plate and slide in the utility model;
Fig. 9 is the sectional view of dynamic valve plate and slide installment state one in the utility model;
Figure 10 is the sectional view of dynamic valve plate and slide installment state two in the utility model;
Figure 11 is the sectional view of vacuum brake plate valve state one in the utility model;
Figure 12 is the sectional view of vacuum brake plate valve state two in the utility model;
Figure 13 is the sectional view of vacuum brake plate valve state three in the utility model;
Figure 14 is the connectivity structure schematic diagram of chamber, the utility model intermediate ion source and analyzer room.
In figure: 1, fixed plate; 2, seal ring; 3, dynamic valve plate; 4, guide holder; 5, cylindrical roller; 6, slide; 7, spring pin; 8, pull bar; 9, extension spring; 10, vacuum brake plate valve; 1-1, fixed plate through hole; 1-2, closure gasket groove; 1-3, seal groove; 1-4, mounting hole; 3-1, top end; 3-2, dynamic valve plate through hole; 3-3, extension spring slot to make way; 3-4, tapped hole; 3-5, roller slot to make way; 3-6, pull bar slot to make way; 4-1, installation tapped hole; 4-2, guide holder through hole; 4-3, guiding groove; 4-4, roller rail level; 4-5, slot to make way; 4-6, positioning hole; 4-7, mounting hole; 4-8, tie rod hole; 6-1, slide through hole; 6-2, roller bore; 6-3, cotter way; 6-4, spring via hole; 6-5, T-slot; 7-1, spring locating slot; 8-1, overmoving surface; 8-2, drawhead; 8-3, pull rod shaft; 10-1, ion source chamber; 10-2, analyzer room; 10-3, communicating passage.
Embodiment
The utility model needs the defect again complete equipment being vacuumized to poor efficiency consuming time, by channel setting vacuum brake plate valve between the ion source chamber of mass spectrometer and analyzer room after changing sample for existing mass spectrometer.Vary after the compartment analysis interior space, only that ion source chamber is open, thus keep vacuum environment in analyzer room constant.Vary and to vacuumize ion source chamber afterwards, compared with vacuumizing with original entirety, the used time reduces greatly, and efficiency is effectively promoted.
Below by way of the drawings and specific embodiments, the utility model is described in further detail.
A kind of vacuum brake plate valve of the present utility model, as a shown in Figure 6, comprise mutually fastened with the guide holder 4 with caveli body by fixed plate 1 valve seat, arranged and the spool that forms of relatively-movable tabular slide 6 by dynamic valve plate 3 and stacking with dynamic valve plate 3.The caveli body of described guide holder 4 comprises guiding groove 4-3, and spool is arranged in described guiding groove 4-3.
Described valve seat is provided with through valve seat through-hole, and see Fig. 6,7, described valve seat through-hole comprises the fixed plate through hole 1-1 through described the fixed plate 1 and guide holder through hole 4-2 through described guide holder 4; Described spool is provided with valve core through hole, and described valve core through hole comprises the dynamic valve plate through hole 3-2 through dynamic the valve plate 3 and slide through hole 6-1 through slide 6.
Described spool lower end is provided with pull bar 8, and by pulling of pull bar 8, spool can in valve base cavity straight reciprocating motion.When pull bar 8 pulls down movable valve plug, spool moves downward until valve core through hole is connected with valve seat through-hole, and now the space, both sides of vacuum brake plate valve is connected; When upwardly pull bar 8, make valve core through hole upwards away from valve seat through-hole until the two staggers to close mutually, then now the space, both sides of vacuum brake plate valve is isolated.
A seal ring 2 is provided with between described valve seat and spool, the inner side surface of described fixed plate 1 is provided with seal ring mounting groove 1-2, sealing ring mounting groove 1-2 is coaxially opened in the radial outside of described fixed plate through hole 1-1, described seal ring 2 is arranged in described seal ring mounting groove 1-2, along with described dynamic valve plate 3 is near the inner side surface of described fixed plate 1, dynamic valve plate 3 can compress sealing ring 2, thus realizes sealing.
Described spool is provided with pressing mechanism, after closing between valve core through hole and valve seat through-hole, makes spool compress described seal ring.This hold-down mechanism is included in the round and smooth lug boss towards dynamic valve plate 3 that described slide 6 is arranged on the side end face of dynamic valve plate 3, and the depressed part corresponding with described lug boss that described dynamic valve plate 3 is arranged on the side end face of slide 6.Described seal ring 2 is near the side end face of described dynamic valve plate 3 away from slide 6.
Certainly, as the another kind of embodiment of pressing mechanism, also can be included in the round and smooth lug boss towards slide 6 that described dynamic valve plate 3 arranges on the side end face of slide 6, and the depressed part corresponding with described lug boss that described slide 6 is arranged on the side end face of dynamic valve plate 3.In addition, described lug boss, except being round and smooth structure, also can be smooth sphenoid surface structure.
As shown in figs. 8-10 described slide 6 be provided with roller mounting hole 6-2 and be installed on the cylindrical roller 5 in roller mounting hole 6-2.This roller 5 protrudes from the side end face of described slide 6 near dynamic valve plate 3, and its part protruded is described lug boss.Meanwhile, as shown in Figure 2, described depressed part is roller slot to make way 3-5.
Certainly, described roller 5 also can be spherical.In the present embodiment, in roller mounting hole 6-2, parallel side-by-side is provided with two rollers 5, certainly needs as the case may be, also can select the roller 5 arranging more than 1 or 3.
Due to can relative sliding be there is between dynamic valve plate 3 and slide 6, when being in a certain relative position therebetween, when making described lug boss be absorbed in described depressed part, promote described slide 6 to move up relative to dynamic valve plate 3, then round and smooth lug boss skids off or rolls out in depressed part, thus make lug boss withstand on the side end face of described dynamic valve plate 3, namely give dynamic valve plate 3 one towards the power away from slide 6 direction in the horizontal.Because seal ring 2 is near the side end face of described dynamic valve plate 3 away from slide 6, then just make valve plate 3 press seal ring 2 by this power.
Described slide 6 is close to the roller rail level on the inwall being positioned at described valve base cavity away from the side end face of dynamic valve plate 3, the i.e. roller rail level 4-4 of guiding groove 4-3 groove bottom, described roller mounting hole 6-2 is through hole, roller 5 protrudes from the side end face of described slide 6 away from dynamic valve plate 3, and withstand on described roller rail level 4-4, see Figure 11 ~ 13.When slide 6 moves up and down in guiding groove 4-3, the right-hand member of roller 5 withstands on described roller rail level 4-4, and roll on roller rail level 4-4 along with the movement of slide 6, the left end of roller 5 withstands side end face or the depressed part of dynamic valve plate 3 simultaneously, thus dynamic valve plate 3 is applied to the roller rail level 4-4 for roller 5 and support rollers 5 of lateral pressure, and slide 6 plays an effect controlling roller and move up and down.
As shown in Fig. 2, Fig. 3, Fig. 5 and Fig. 8, described pull bar 8 comprises a column pull rod shaft 8-3 and is positioned at the drawhead 8-2 of pull rod shaft 8-3 end, offer T-slot 6-5 bottom described slide 6, pull bar 8 is installed on bottom slide 6, and drawhead 8-2 is stuck in described T-slot 6-5.Offer pull bar slot to make way 3-6 bottom described dynamic valve plate 3, drawhead 8-2 can enter described pull bar slot to make way 3-6 being plugged into after in T-slot 6-5.
Described dynamic valve plate 3 its top end 3-1 when compressing described seal ring 2 withstands on the inwall (madial wall of guiding groove 4-3 set by guide holder 4) of the inner chamber of described valve seat, and this top end 3-1 tilts along seal ring 2 radially outward near the side of seal ring 2; The inwall of the inner chamber of described valve seat is provided with the plane of inclination of matching with this top end 3-1, see Figure 11 ~ 13.
Figure 11 is the sectional view that valve seat through-hole and valve core through hole are in breakthrough status.As shown in figure 11, now roller 5 is positioned at the roller slot to make way 3-5 of dynamic valve plate 3, dynamic gap between valve plate 3 and fixed plate 1 is larger, thus dynamic have less interaction force between valve plate 3 and seal ring 2 or be separated from each other the active force do not existed each other, space, vacuum brake plate valve both sides is in connected state, without the need to sealing.
As shown in figure 12, pushing drawing rod 8 moves up spool, makes the top end of valve plate 3 move to the upper end of guiding groove 4-3.Now roller 5 is still positioned at the roller slot to make way 3-5 of dynamic valve plate 3, and dynamic gap length between valve plate 3 and fixed plate 1 does not change, and dynamic still have less interaction force or be separated from each other the active force do not existed each other between valve plate 3 and seal ring 2.
Now continue upwardly pull bar 8, roller 5 outwards skids off or rolls out the roller slot to make way 3-5 of dynamic valve plate 3, thus gives dynamic valve plate 3 one power left in the horizontal, is moved to the left after dynamic valve plate 3 is subject to this power, thus press seal ring 2, see Figure 13.Because valve plate 3 dynamic in this process will be moved to the left, and its top end 3-1 and guiding groove 4-3 interior contact, therefore for avoiding the movement producing the dynamic valve plate 3 of excessive friction impact therebetween, this top end 3-1 is set to skewed, and this top end 3-1 tilts along seal ring 2 radially outward near the side of seal ring 2, simultaneously described guiding groove 4-3 inside is provided with the plane of inclination of matching with this top end 3-1, thus does not produce frictional force in the movement left of dynamic valve plate 3.
Described spool is also provided with response agency, before being communicated with between valve core through hole with valve seat through-hole, making spool unclamp described seal ring.
Described response agency comprises the resilient member connecting dynamic valve plate 3 and slide 6.This resilient member comprises two extension springs 9, side end face away from dynamic valve plate 3 offers cotter way 6-3 to described slide 6, the spring pin 7 of one column is arranged in described cotter way 6-3, the two ends of spring pin 7 are provided with spring locating slot 7-1, two extension spring 9 difference one end correspondences hook on spring holder 7-1, the corresponding tapped hole 3-4 be connected to by screw on dynamic valve plate 3 of the other end, this tapped hole 3-4 are positioned at inside extension spring slot to make way 3-3 that dynamic valve plate 3 is offered.
On described slide, also offer two spring via hole 6-4 passed for spring.
When vacuum gate valve be in as shown in figure 13 state time, pull pull bar 8 downwards, because roller 5 is in the state of the dynamic valve plate 3 of extruding always, therefore dynamic valve plate 3 now receives the larger friction of seal ring 2, when making to pull pull bar 8, slide 6 moves down, but dynamic valve plate 3 is motionless.When continuing to pull pull bar 8, until when roller 5 moves to the roller slot to make way 3-5 position of dynamic valve plate 3, roller 5 no longer extrudes dynamic valve plate 3, and dynamic valve plate 3 is subject to the pulling force effect of extension spring 9 and the thrust of seal ring 2 thus near slide 6, thus reaches state as shown in figure 12.Now dynamic do not have between valve plate 3 and seal ring 2 active force or interaction force less, when continuing to pull pull bar 8, dynamic valve plate 3 moves downward with slide 6 simultaneously, until move to state as shown in figure 11, space, vacuum brake plate valve both sides is communicated with.
In order to the sealing effect enabling valve seat reach good, at described fixed plate 1, the buckling part of described guide holder 4 is provided with seal ring (not shown), sealing circle is arranged in the seal groove 1-3 of setting on described fixed plate 1.
At the guiding groove 4-3 bottom land of described guide holder 4, be also provided with slot to make way 4-5, this slot to make way 4-5 is used for for the overmoving surface 8-1 of drawhead 8-2 steps down, and avoids forming drawhead 8-2 stopping.Meanwhile, bottom described guide holder 4, also offer tie rod hole 4-8, for installing described pull bar 8 when assembling.
Fixed by bolt (not shown) between described fixed plate 1 and described guide holder 4.
The utility model also provides a kind of mass spectrometer, as shown in figure 14, comprise ion source chamber 10-1 and coupled logical analyzer room 10-2, the communicating passage 10-3 of described ion source chamber 10-1 and analyzer room 10-2 is provided with foregoing vacuum brake plate valve 10.
Vary the middle method setting up high vacuum environment based on the mass spectrographic analysis of above-mentioned mass spectrometer simultaneously, comprise the following steps:
(1) communicating passage of ion source chamber and analyzer room is closed by vacuum brake plate valve;
(2) open ion source chamber to vary;
(3) vary after end ion source chamber forvacuum;
(4) open vacuum brake plate valve and be communicated with ion source chamber and analyzer room, vacuumize until degree of vacuum meets analysis requirement.
By device of the present utility model, vacuum brake plate valve can be utilized ion source chamber and analyzer room is cut off when changing sample, analyzer room is made to keep high vacuum environment in the process of varying, complete vary rear to the quick forvacuum in specimen chamber, gate valve is opened after reaching forvacuum degree, utilize the molecular pump of analyzer part or other equipment to continue to vacuumize, be stabilized to after analysis requires can carry out mass spectrographic analysis until vacuum, thus set up the environment of high vacuum.This structure and method obviously reduces the cavity volume being exposed to air when varying, and significantly during reduction replacing sample, mass spectrometer re-establishes the time of vacuum, thus improves testing efficiency.
Claims (9)
1. a vacuum brake plate valve, is characterized in that: comprise valve seat and be installed on the spool of valve base cavity; Described valve seat is provided with through valve seat through-hole, and described spool is provided with valve core through hole, and spool can in valve base cavity straight reciprocating motion to realize being communicated with and closedown between valve core through hole with valve seat through-hole; Between described valve seat and spool, be provided with a seal ring, sealing ring is coaxially arranged on the radial outside of described valve seat through-hole; Described spool is provided with pressing mechanism, after closing between valve core through hole and valve seat through-hole, makes spool compress described seal ring.
2. vacuum brake plate valve as claimed in claim 1, is characterized in that: described spool comprises dynamic valve plate and stacks with dynamic valve plate and arranges and relatively-movable tabular slide; Described pressing mechanism is included in the round and smooth lug boss towards dynamic valve plate that described slide is arranged on the side end face of dynamic valve plate, and the depressed part corresponding with described lug boss that described dynamic valve plate is arranged on the side end face of slide; Described seal ring is near the side end face of described dynamic valve plate away from slide.
3. vacuum brake plate valve as claimed in claim 2, it is characterized in that: the roller described slide being provided with roller mounting hole and the cylindrical body be installed in roller mounting hole or spheroid, this roller protrudes from the side end face of described slide near dynamic valve plate, and its part protruded is described lug boss.
4. vacuum brake plate valve as claimed in claim 3, it is characterized in that: described slide is mutually close with the roller rail level be positioned on the inwall of described valve base cavity away from the side end face of dynamic valve plate, described roller protrudes from the side end face of described slide away from dynamic valve plate, and withstands on described roller rail level.
5. vacuum brake plate valve as claimed in claim 2, is characterized in that: described dynamic valve plate its top end when compressing described seal ring withstands on the inwall of the inner chamber of described valve seat, and this top end tilts along seal ring radially outward near the side of seal ring; The inwall of the inner chamber of described valve seat is provided with the plane of inclination of matching with this top end.
6. vacuum brake plate valve as claimed in claim 2, is characterized in that: described spool is provided with response agency, before being communicated with between valve core through hole with valve seat through-hole, making spool unclamp described seal ring.
7. vacuum brake plate valve as claimed in claim 6, is characterized in that: described response agency comprises the resilient member connecting dynamic valve plate and slide.
8. the vacuum brake plate valve as described in any one of claim 1 ~ 7, is characterized in that: described valve seat comprises the fixed plate mutually fastened and the guide holder with caveli body, and the buckling part of described fixed plate and described guide holder is provided with seal ring; Described valve seat through-hole is through described fixed plate and described guide holder.
9. a mass spectrometer, comprises ion source chamber and coupled logical analyzer room, it is characterized in that: in the communicating passage of described ion source chamber and analyzer room, be provided with the vacuum brake plate valve as described in any one of claim 1 ~ 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420713701.5U CN204358139U (en) | 2013-11-26 | 2014-11-24 | A kind of vacuum brake plate valve and mass spectrometer |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310611000 | 2013-11-26 | ||
| CN2013106110000 | 2013-11-26 | ||
| CN201420713701.5U CN204358139U (en) | 2013-11-26 | 2014-11-24 | A kind of vacuum brake plate valve and mass spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204358139U true CN204358139U (en) | 2015-05-27 |
Family
ID=52902029
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420713701.5U Expired - Fee Related CN204358139U (en) | 2013-11-26 | 2014-11-24 | A kind of vacuum brake plate valve and mass spectrometer |
| CN201410682421.7A Expired - Fee Related CN104455506B (en) | 2013-11-26 | 2014-11-24 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410682421.7A Expired - Fee Related CN104455506B (en) | 2013-11-26 | 2014-11-24 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
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| Country | Link |
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| CN (2) | CN204358139U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104455506A (en) * | 2013-11-26 | 2015-03-25 | 核工业北京地质研究院 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
| US10354854B2 (en) * | 2015-07-13 | 2019-07-16 | Shimadzu Corporation | Shutter |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6783297B2 (en) | 2015-08-28 | 2020-11-11 | バット ホールディング アーゲー | Vacuum valve |
| CN105047521B (en) * | 2015-09-21 | 2017-05-17 | 北京凯尔科技发展有限公司 | Mass spectrometer for replacing ion source by maintaining vacuum condition in mass spectrum |
| CN114999892A (en) * | 2022-06-09 | 2022-09-02 | 广州禾信仪器股份有限公司 | Differential vacuum system control device and differential vacuum system |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6612546B2 (en) * | 2001-08-01 | 2003-09-02 | Varian, Inc. | Gate valve with delayed retraction of counter plate |
| CN2761923Y (en) * | 2004-12-31 | 2006-03-01 | 中国科学院沈阳科学仪器研制中心有限公司 | Ultra-high vacuum flash board valve |
| CN100470106C (en) * | 2006-03-30 | 2009-03-18 | 北儒精密股份有限公司 | Gate valve unit for vacuum equipment |
| DE102007059039A1 (en) * | 2007-12-06 | 2009-06-18 | Vat Holding Ag | vacuum valve |
| CN201196290Y (en) * | 2008-03-05 | 2009-02-18 | 尚弘科技股份有限公司 | Isolation valve structure |
| CN101604609B (en) * | 2009-06-30 | 2011-03-23 | 北京中科科仪技术发展有限责任公司 | Vacuum isolating valve |
| CN202484328U (en) * | 2012-01-06 | 2012-10-10 | 肇庆市振华真空机械有限公司 | Vacuum gate valve |
| CN204358139U (en) * | 2013-11-26 | 2015-05-27 | 核工业北京地质研究院 | A kind of vacuum brake plate valve and mass spectrometer |
-
2014
- 2014-11-24 CN CN201420713701.5U patent/CN204358139U/en not_active Expired - Fee Related
- 2014-11-24 CN CN201410682421.7A patent/CN104455506B/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104455506A (en) * | 2013-11-26 | 2015-03-25 | 核工业北京地质研究院 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
| CN104455506B (en) * | 2013-11-26 | 2017-03-22 | 核工业北京地质研究院 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
| US10354854B2 (en) * | 2015-07-13 | 2019-07-16 | Shimadzu Corporation | Shutter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104455506A (en) | 2015-03-25 |
| CN104455506B (en) | 2017-03-22 |
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