CN204304943U - The automatic annealing device of a kind of small-sized quartz-crystal resonator - Google Patents
The automatic annealing device of a kind of small-sized quartz-crystal resonator Download PDFInfo
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- CN204304943U CN204304943U CN201520009944.5U CN201520009944U CN204304943U CN 204304943 U CN204304943 U CN 204304943U CN 201520009944 U CN201520009944 U CN 201520009944U CN 204304943 U CN204304943 U CN 204304943U
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Abstract
The utility model belongs to quartz crystal unit manufacturing equipment field, the specifically automatic annealing device of a kind of small-sized quartz-crystal resonator, comprise carrying platform, upload waiting room, preheating chamber, heating clamber, cooling chamber, download room, it is characterized in that: upload between waiting room and preheating chamber, between preheating chamber and heating clamber, between heating clamber and cooling chamber, between cooling chamber and download room, Vacuum door is set respectively, multilayer annealing platform is provided with in heating clamber, annealing platform connects lifting motor by lifting shaft, chill station and coldplate is provided with in cooling chamber, download indoor and be provided with download platform.The utility model every layer annealing platform is provided with separately annealing heating pipe.The utility model adopt the heating of individual layer independent thermal source to make annealing platform temperature evenly, it is short that fine setting finished goods leaves standstill the stand-by period, and the setting of multilayer annealing platform operations follow procedure is independent of each other, and improves stability and the operating efficiency of quartz-crystal resonator electrical characteristic.
Description
Technical field
The utility model belongs to quartz crystal unit manufacturing equipment field, specifically the automatic annealing device of a kind of small-sized quartz-crystal resonator.
Background technology
Quartz-crystal resonator inevitably produces the stress varied in size in the fabrication process at material internal through different operations, this directly has influence on the stability of the electrical characteristic of quartz-crystal resonator.Therefore, after fine setting completes, product need carry out high-temperature vacuum stress relieving by annealing, stability characteristic (quality).But, current manual annealing device structure is simpler, multilayer annealing platform shares a heating source, Temperature Distribution is even not, in addition, during fine setting, batch comprises polydisc product needs all to have finely tuned and just can put into annealing device together and anneal afterwards, but, a batch fine setting deadline was at 2 ~ 3 hours, the standing stand-by period is longer, skew can occur the annealing rear electric parameter such as frequency, impedance and scattered error is large, produces many products that can not meet customer need, and have portioned product to there is hidden danger of quality by the impact of stress.
Summary of the invention
The purpose of this utility model is for the deficiencies in the prior art, there is provided a kind of small-sized quartz-crystal resonator automatic annealing device, make multilayer anneal platform heating-up temperature evenly, it is short that the rear product of fine setting leaves standstill the stand-by period, the setting of multilayer annealing platform follow procedure is independent of each other, thus reach release stress fully, the effects such as quartz-crystal resonator electrical characteristic is stablized, and efficiency is high.
The utility model realizes by the following technical solutions:
The automatic annealing device of a kind of small-sized quartz-crystal resonator, comprise carrying platform, upload waiting room, preheating chamber, heating clamber, cooling chamber, download room, it is characterized in that: upload between waiting room and preheating chamber, between preheating chamber and heating clamber, between heating clamber and cooling chamber, between cooling chamber and download room and Vacuum door is set respectively, multilayer annealing platform is provided with in heating clamber, annealing platform connects lifting motor by lifting shaft, be provided with chill station and coldplate in cooling chamber, download indoor and be provided with download platform.
The utility model every layer annealing platform is provided with separately annealing heating pipe.
Have sealing ring between the utility model lifting shaft and heating clamber, heating clamber and lifting motor are tightly isolated the sealing ensureing heating clamber by sealing ring on lifting shaft.
The utility model is uploaded in waiting room and is provided with wait platform; Preheat platform and economizer bank is provided with in preheating chamber.
The utility model cooling chamber adopts circulated helium cooling to cool with coldplate heat transfer and combines.
During the utility model operation, the soldering and sealing dish being loaded with fine setting finished goods is positioned on upper carrying platform, automatically sends into and upload waiting room wait, then send into preheating chamber and carry out high vacuum state preheating.After terminating preheating time, soldering and sealing dish is sent into high heated at constant temperature room high annealing.Now preheating chamber can continue to receive the soldering and sealing dish uploaded in waiting room and carry out preheating.After heating clamber annealing time terminates, soldering and sealing dish is sent into the cooling chamber of high vacuum state, cooling chamber starts to be filled with refrigerating gas and carries out first gas circulating cooling subsequently, and then coldplate rising contact soldering and sealing tray bottom carries out heat transfer cooling, and the heat of coldplate is absorbed by recirculated water to be sent.Cool complete, coldplate declines, and starts vacuum breaker and soldering and sealing dish is sent into download platform, and next soldering and sealing dish that then cooling chamber recovers in high vacuum state wait heating clamber enters.Soldering and sealing dish in download platform can carry out soldering and sealing operation after sending into welder receiving platform.Heating clamber can drive lifting shaft to arrive the annealing platform of specifying by lifting motor according to programming.Heating clamber keeps constant temperature in whole operation process, high vacuum state.
The utility model adopts technique scheme, individual layer independent thermal source heating make annealing platform temperature evenly, it is short that fine setting finished goods leaves standstill the stand-by period, the setting of multilayer annealing platform operations follow procedure is independent of each other, constant temperature high vacuum heating anneal, circulated helium cooling cools with coldplate heat transfer and combines, cooling effect more fully and effectively prevent chip electrode to be oxidized, quartz-crystal resonator internal stress is fully discharged, improve quartz-crystal resonator electrical characteristic (as: frequency, distribution of impedance is more concentrated, level of drive dependence is better) stability and operating efficiency.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Detailed description of the invention
With reference to the accompanying drawings, detailed description of the invention of the present utility model is described further.
In FIG, the automatic annealing device of a kind of small-sized quartz-crystal resonator, by upper carrying platform 1, upload waiting room 2, preheating chamber 3, heating clamber 4, cooling chamber 5, download room 6 form, it is characterized in that, described in upload in waiting room 2 be provided with wait for platform 8; Preheat platform 9 and economizer bank 10 is provided with in preheating chamber 3; Multilayer annealing platform 11 is provided with in heating clamber 4, annealing platform 11 is connected with lifting motor 15 by lifting shaft 13, every layer of annealing platform is provided with separately annealing heating pipe 12, has sealing ring 14 between lifting shaft 13 and heating clamber 4, tightly isolates the sealing to ensure heating clamber 4 with lifting motor 15; Chill station 17 and coldplate 18 is provided with in cooling chamber 5; Download in room 6 and be provided with download platform 19; Upload between waiting room 2 and preheating chamber 3, between preheating chamber 3 and heating clamber 4, between heating clamber 4 and cooling chamber 5, between cooling chamber 5 and download room 6, be provided with Vacuum door 16.
During the utility model operation, the soldering and sealing dish being loaded with fine setting finished goods is positioned on upper carrying platform 1, in unlatching, soldering and sealing dish is sent into and is uploaded waiting room 2 and wait for by load switch, and effectively, economizer bank 10 stops heating in inductor induction, start in preheating chamber 3 to be filled with nitrogen vacuum breaker, the Vacuum door 16 uploaded between waiting room 2 and preheating chamber 3 is opened, and soldering and sealing dish is sent into preheating chamber 3, and then Vacuum door 16 is closed, carry out pumping high vacuum, condition of high vacuum degree reaches rear economizer bank 10 and starts heating.After terminating preheating time, the Vacuum door 16 between preheating chamber 3 and heating clamber 4 is opened, and is closed by Vacuum door 16 and carry out high annealing after soldering and sealing dish is sent into high heated at constant temperature room 4.Now preheating chamber can continue to receive the soldering and sealing dish uploading waiting room 2 and carry out preheating.After heating clamber annealing time terminates, Vacuum door 16 between heating clamber 4 and cooling chamber 5 is opened, soldering and sealing dish is sent into cooling chamber 5 final vacuum door 16 to close, cooling chamber 5 starts to be filled with refrigerating gas and carries out first gas circulating cooling subsequently, then coldplate 18 rising contact soldering and sealing tray bottom carries out heat transfer cooling, and the heat of coldplate 18 is absorbed by recirculated water to be sent.Cool complete, coldplate 18 declines, and is filled with nitrogen vacuum breaker in cooling chamber 5, and cooling chamber 5 and the Vacuum door 16 downloaded between room 6 are opened.Now soldering and sealing dish is sent into download platform 19, Vacuum door is closed, and cooling chamber starts pumping high vacuum, waits for that next the soldering and sealing dish in heating clamber 4 enters.Soldering and sealing dish in download platform 19 can carry out soldering and sealing operation after sending into the receiving platform 20 in welder receiving chamber 7.
The utility model can drive lifting shaft 13 to arrive the annealing platform 11 of specifying by lifting motor 15 according to programming; Heating clamber 4 keeps constant temperature in whole operation process, high vacuum state.
Coldplate described in the utility model is copper coin, is cooled by heat transfer, and the heat of coldplate is absorbed by recirculated water to be sent.
Refrigerating gas described in the utility model is helium, can carry out ultralow temperature cooling and active low, effectively prevents chip electrode to be oxidized.
Sealing ring described in the utility model is high temperature resistant lubrication and seal circle.
Claims (8)
1. the automatic annealing device of small-sized quartz-crystal resonator, comprise carrying platform, upload waiting room, preheating chamber, heating clamber, cooling chamber, download room, it is characterized in that: upload between waiting room and preheating chamber, between preheating chamber and heating clamber, between heating clamber and cooling chamber, between cooling chamber and download room and Vacuum door is set respectively, multilayer annealing platform is provided with in heating clamber, annealing platform connects lifting motor by lifting shaft, be provided with chill station and coldplate in cooling chamber, download indoor and be provided with download platform.
2. the automatic annealing device of the small-sized quartz-crystal resonator of one according to claim 1, is characterized in that: every layer of annealing platform is provided with separately annealing heating pipe.
3. the automatic annealing device of the small-sized quartz-crystal resonator of one according to claim 1 and 2, is characterized in that: have sealing ring between lifting shaft and heating clamber.
4. the automatic annealing device of the small-sized quartz-crystal resonator of one according to claim 1, is characterized in that: upload in waiting room and be provided with wait platform; Preheat platform and economizer bank is provided with in preheating chamber.
5. the automatic annealing device of the small-sized quartz-crystal resonator of one according to claim 1, is characterized in that: cooling chamber adopts circulated helium cooling to cool with coldplate heat transfer and combines.
6. the automatic annealing device of the small-sized quartz-crystal resonator of one according to claim 5, is characterized in that: described coldplate is copper coin.
7. the automatic annealing device of the small-sized quartz-crystal resonator of one according to claim 5, is characterized in that: described refrigerating gas is helium.
8. the automatic annealing device of the small-sized quartz-crystal resonator of one according to claim 3, is characterized in that: described sealing ring is high temperature resistant lubrication and seal circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520009944.5U CN204304943U (en) | 2015-01-07 | 2015-01-07 | The automatic annealing device of a kind of small-sized quartz-crystal resonator |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520009944.5U CN204304943U (en) | 2015-01-07 | 2015-01-07 | The automatic annealing device of a kind of small-sized quartz-crystal resonator |
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| CN204304943U true CN204304943U (en) | 2015-04-29 |
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| CN201520009944.5U Active CN204304943U (en) | 2015-01-07 | 2015-01-07 | The automatic annealing device of a kind of small-sized quartz-crystal resonator |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105463582A (en) * | 2015-07-05 | 2016-04-06 | 汇隆电子（金华）有限公司 | High-temperature and high-vacuum annealing device for low-stress low oxidation treatment |
| CN109936340A (en) * | 2017-12-19 | 2019-06-25 | 成都晶宝时频技术股份有限公司 | A kind of quartz resonator continuous fine adjustment system and method |
| CN110047783A (en) * | 2019-04-19 | 2019-07-23 | 湖南新锐微电子科技有限公司 | A kind of silicon carbide plate flash annealing device |
| CN111822834A (en) * | 2020-08-24 | 2020-10-27 | 天津伍嘉联创科技发展股份有限公司 | High-speed full-automatic vacuum annealing sealing and welding machine |
| CN112648989A (en) * | 2020-11-30 | 2021-04-13 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Device and method capable of being simultaneously used for harmonic oscillator annealing and vacuum butt joint |
-
2015
- 2015-01-07 CN CN201520009944.5U patent/CN204304943U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105463582A (en) * | 2015-07-05 | 2016-04-06 | 汇隆电子（金华）有限公司 | High-temperature and high-vacuum annealing device for low-stress low oxidation treatment |
| CN105463582B (en) * | 2015-07-05 | 2019-06-11 | 汇隆电子（金华）有限公司 | A kind of high temperature high vacuum annealing device for the processing of low stress suboxides |
| CN109936340A (en) * | 2017-12-19 | 2019-06-25 | 成都晶宝时频技术股份有限公司 | A kind of quartz resonator continuous fine adjustment system and method |
| CN110047783A (en) * | 2019-04-19 | 2019-07-23 | 湖南新锐微电子科技有限公司 | A kind of silicon carbide plate flash annealing device |
| CN110047783B (en) * | 2019-04-19 | 2024-05-07 | 湖南新锐微电子科技有限公司 | Quick heating annealing device for silicon carbide chip |
| CN111822834A (en) * | 2020-08-24 | 2020-10-27 | 天津伍嘉联创科技发展股份有限公司 | High-speed full-automatic vacuum annealing sealing and welding machine |
| CN112648989A (en) * | 2020-11-30 | 2021-04-13 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Device and method capable of being simultaneously used for harmonic oscillator annealing and vacuum butt joint |
| CN112648989B (en) * | 2020-11-30 | 2022-09-23 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Device and method capable of being simultaneously used for harmonic oscillator annealing and vacuum butt joint |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170920 Address after: 321016 Zhejiang, Jinhua, Hong Hong West Road, No. 555 Patentee after: East crystal electronic Jinhua Co., Ltd. Address before: 321025 Zhejiang, Jinhua, Hong Hong West Road, No. 555 Patentee before: Dongjing Electronic Co., Ltd., Zhejiang |