CN204203626U - A kind of contact photoetching machine sucker - Google Patents
A kind of contact photoetching machine sucker Download PDFInfo
- Publication number
- CN204203626U CN204203626U CN201420365978.3U CN201420365978U CN204203626U CN 204203626 U CN204203626 U CN 204203626U CN 201420365978 U CN201420365978 U CN 201420365978U CN 204203626 U CN204203626 U CN 204203626U
- Authority
- CN
- China
- Prior art keywords
- photoetching machine
- sucker
- contact photoetching
- vacuum suction
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001259 photo etching Methods 0.000 title claims abstract description 22
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 239000000741 silica gel Substances 0.000 claims description 5
- 229910002027 silica gel Inorganic materials 0.000 claims description 5
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 239000003292 glue Substances 0.000 abstract description 5
- 230000004304 visual acuity Effects 0.000 abstract description 2
- 239000000047 product Substances 0.000 description 11
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
Abstract
The utility model discloses a kind of contact photoetching machine sucker, it comprises metal sucker body, described metal sucker body offers some roads vacuum suction groove, it is characterized in that, the periphery in outermost vacuum suction groove on described metal sucker body is provided with seal member.Above-mentioned contact photoetching machine sucker arranges one deck seal member at the periphery of metal sucker.When suction air drain of taking seriously is used for inhaling product sheet, also the air between photomask board and product sheet is siphoned away simultaneously, between photomask board and product sheet, form one deck vacuum layer, when light all can not be affected through the intensity in vacuum layer time and directivity, maintain the high resolving power of UV light to glue.
Description
Technical field
The utility model relates to a kind of contact photoetching machine, particularly relates to a kind of contact photoetching machine sucker.
Background technology
Traditional contact photoetching machine, is directly be put on sucker by product sheet, and lives by vacuum suction, be then directly pressed on product sheet by lithography mask version.This Exposure mode is applicable to the larger technique of critical size, and the bar as more than 2 μm is wide.No problem for the device technologies of more than 2 μm.But when the critical size of device drops to 1.0-1.3 μm, the defect of this mode will be clearly.Mainly because when exposing, although there is pressure both to be sticked together between photomask board and product sheet, air seam is necessary being, and cannot ensure everywhere evenly.When UV light vertical irradiation gets off, through being the light intensity of free air cleft place light and directivity to be affected, and this directly affects the resolution of UV light to glue.
Utility model content
The purpose of this utility model is to provide a kind of contact photoetching machine sucker, and when it can ensure to expose, UV light is to the high resolving power of glue, to solve the problems referred to above that in prior art, contact photoetching machine sucker exists.
For reaching this object, the utility model by the following technical solutions:
A kind of contact photoetching machine sucker, it comprises metal sucker body, described metal sucker body offers some roads vacuum suction groove, and wherein, the periphery in outermost vacuum suction groove on described metal sucker body is provided with seal member.
Especially, described seal member adopts silica gel sealing bar.
Especially, described vacuum suction groove is any one of V-type or U-shaped groove.
Especially, the spacing described in adjacent twice between vacuum suction groove is 2 ㎜.
Especially, described vacuum suction groove is V-groove, and groove depth is 1 ~ 2 ㎜, and top groove width is 1 ㎜.
Especially, described metal sucker body is made up of aluminium alloy.
The beneficial effects of the utility model are, compared with prior art described contact photoetching machine sucker arranges one deck seal member at the periphery of metal sucker.When suction air drain of taking seriously is used for inhaling product sheet, also the air between photomask board and product sheet is siphoned away simultaneously, between photomask board and product sheet, form one deck vacuum layer, when light all can not be affected through the intensity in vacuum layer time and directivity, maintain the high resolution of UV light to glue.
Accompanying drawing explanation
Fig. 1 is the sectional view of the contact photoetching machine sucker that the utility model embodiment 1 provides;
Fig. 2 is the side view of the contact photoetching machine sucker that the utility model embodiment 1 provides.
In figure:
1, metal sucker body; 2, vacuum suction groove; 3, silica gel sealing bar.
Embodiment
The technical solution of the utility model is further illustrated by embodiment below in conjunction with accompanying drawing.
Refer to shown in Fig. 1 and Fig. 2, Fig. 1 is the sectional view of the contact photoetching machine sucker that the utility model embodiment 1 provides; Fig. 2 is the side view of the contact photoetching machine sucker that the utility model embodiment 1 provides.
In the present embodiment, a kind of contact photoetching machine sucker comprises metal sucker body 1, described metal sucker body 1 is made up of aluminium alloy, and described metal sucker body 1 offers some roads vacuum suction groove 2, and the spacing described in adjacent twice between vacuum suction groove 2 is 2 ㎜.Described vacuum suction groove 2 is V-groove, and groove depth is 1 ~ 2 ㎜, and top groove width is 1 ㎜.Periphery in outermost vacuum suction groove 2 on described metal sucker body 1 is provided with silica gel sealing bar 3.
During work, product sheet is directly put on metal sucker body 1, then photomask board is directly pressed on product sheet, when suction air drain 2 of taking seriously is used for inhaling product sheet, due to the existence of silica gel sealing bar 3 between product sheet and photomask board, the air between photomask board and product sheet is siphoned away, between photomask board and product sheet, form one deck vacuum layer, when UV light all can not be affected through the intensity in vacuum layer time and directivity, maintain the high resolution of UV light to glue.
Above embodiment has just set forth ultimate principle of the present utility model and characteristic; the utility model does not limit by above-mentioned example; under the prerequisite not departing from the utility model spirit and scope; the utility model also has various change and change, and these changes and change all fall within the scope of claimed the utility model.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (6)
1. a contact photoetching machine sucker, it comprises metal sucker body, described metal sucker body offers some roads vacuum suction groove, it is characterized in that, the periphery in outermost vacuum suction groove on described metal sucker body is provided with seal member.
2. contact photoetching machine sucker according to claim 1, is characterized in that, described seal member adopts silica gel sealing bar.
3. contact photoetching machine sucker according to claim 1 and 2, is characterized in that, described vacuum suction groove is any one of V-type or U-shaped groove.
4. contact photoetching machine sucker according to claim 1, is characterized in that, the spacing described in adjacent twice between vacuum suction groove is 2 ㎜.
5. contact photoetching machine sucker according to claim 3, is characterized in that, described vacuum suction groove is V-groove, and groove depth is 1 ~ 2 ㎜, and top groove width is 1 ㎜.
6. contact photoetching machine sucker according to claim 1, is characterized in that, described metal sucker body is made up of aluminium alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420365978.3U CN204203626U (en) | 2014-07-03 | 2014-07-03 | A kind of contact photoetching machine sucker |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420365978.3U CN204203626U (en) | 2014-07-03 | 2014-07-03 | A kind of contact photoetching machine sucker |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204203626U true CN204203626U (en) | 2015-03-11 |
Family
ID=52661567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420365978.3U Expired - Lifetime CN204203626U (en) | 2014-07-03 | 2014-07-03 | A kind of contact photoetching machine sucker |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204203626U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104076619A (en) * | 2014-07-03 | 2014-10-01 | 无锡宏纳科技有限公司 | Contact type photoetching machine sucking disc |
-
2014
- 2014-07-03 CN CN201420365978.3U patent/CN204203626U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104076619A (en) * | 2014-07-03 | 2014-10-01 | 无锡宏纳科技有限公司 | Contact type photoetching machine sucking disc |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20150311 |