CN204116290U - For the gas chromatograph of Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane - Google Patents
For the gas chromatograph of Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane Download PDFInfo
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- CN204116290U CN204116290U CN201420657464.5U CN201420657464U CN204116290U CN 204116290 U CN204116290 U CN 204116290U CN 201420657464 U CN201420657464 U CN 201420657464U CN 204116290 U CN204116290 U CN 204116290U
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Abstract
The utility model is a kind of gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane, its structure comprises sampling system, transfer valve, chromatographic column, emptying needle-valve and detecting device, is characterized in that: described sampling system comprises sample inlet, sample export, the first quantity tube, the second quantity tube, the 3rd quantity tube; Described transfer valve comprises the first transfer valve, the second transfer valve, the 3rd transfer valve, the 4th transfer valve, the 5th transfer valve; Described chromatographic column comprises the first chromatographic column, the second chromatographic column, the 3rd chromatographic column, the 4th chromatographic column, the 5th chromatographic column, the 6th chromatographic column; Described emptying needle-valve comprises the first needle-valve, the second needle-valve, the 3rd needle-valve), the 4th needle-valve, the 5th needle-valve, the 6th needle-valve; Described detecting device comprises helium ionized first detecting device PDD1 and the second detecting device PDD2.Namely the utility model single injected sampling completes the stratographic analysis of each inorganic impurity in electron level perfluoroethane, and highly sensitive, reproducible, meets standard.
Description
Technical field
The utility model relates to a kind of gas chromatograph, particularly disclose a kind of specially for the checkout equipment of Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane, utilize the impurity of ppb rank in the high-sensitivity detection perfluoroethane of PDD detecting device, specifically address the difficult point that Freon 13 in perfluoroethane (R13) is analyzed, achieve the total analysis of trace impurity in electron level perfluoroethane.
Background technology
Perfluoroethane also known as hexafluoroethane, be in ethane six hydrogen atoms be all replaced by fluorine atoms after product, it has another name called fluorine carbon 116(R116).Perfluoroethane is colourless odorless tasteless non-flammable non-toxic gas, substantially water insoluble, is slightly soluble in alcohol, and its physicochemical property are stablized.
Perfluoroethane is mainly used in cryogenic refrigeration and electronics cleans and etches industry, and small part is applied in medical surgery and other field newly developed in addition.Along with the development of semiconductor industry, the requirement of whole electronics industry to electronic gas source of the gas purity is also more and more higher, also more and more important for the impurity measurement analysis in electron level perfluoroethane.But China not yet formulates the relevant criterion about electron level perfluoroethane at present, due to the disappearance of related detecting method and standard, there is blind spot for the quality of perfluoroethane in domestic manufacturers and user, causes very large impact to production and application.
Summary of the invention
The purpose of this utility model solves prior art produced problem, design a kind of gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane, utilize heartcut method to solve the analytical challenge of R13 in perfluoroethane of knowing clearly, realize single injected sampling operation and can complete inorganic impurity (H in perfluoroethane
2, O
2+ Ar, N
2, CO
2, CO) and the analysis of stratographic analysis impurity of halogenated hydrocarbons impurity (R14, R13, R115, R23, R143a, R113 etc.), and utilize the high-sensitivity detection of helium ionization detector to limit to reach ppb rank.
The utility model is achieved in that the gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane, its structure comprises sampling system, transfer valve, chromatographic column, emptying needle-valve and detecting device, it is characterized in that: the first transfer valve 1 of described gas chromatograph is provided with the first quantity tube 8 and the second quantity tube 9, second transfer valve 2 is provided with the first needle-valve 24 and the second needle-valve 25, 3rd transfer valve 3 is provided with the 3rd needle-valve 26, 4th needle-valve 27 and the first detecting device PDD1 6, 4th transfer valve 4 is provided with the 4th chromatographic column 14 and the 3rd quantity tube 10, 5th transfer valve 5 is provided with the 5th needle-valve 28, 6th needle-valve 29 and the second detecting device PDD2 7, connected by the first set chromatographic column 11 between first transfer valve 1 and the second transfer valve 2, connected by the second set chromatographic column 12 between second transfer valve 2 and the 3rd transfer valve 3, connected by the 3rd set chromatographic column 13 between first transfer valve 1 and the 3rd transfer valve 3, be connected with the 6th chromatographic column 16 by the 5th set chromatographic column 15 between the 4th transfer valve 4 and the 5th transfer valve 5.
As preferably, the first carrier gas 19 gas circuit of described gas chromatograph is connected with the 4. number interface of the first transfer valve 1, the gas circuit of the second carrier gas 20 is connected with a 9. number interface for the first transfer valve 1; Sample inlet 17 is connected with a 1. number interface for the first transfer valve 1, and the 2. number interface of the first transfer valve 1 is connected with a 1. number interface for the 4th transfer valve 4; 7. the 3. number interface that number interface of the first transfer valve 1 and the pipeline that 10. number interface is connected of the first transfer valve 1 are provided with the first quantity tube 8, first transfer valve 1 is provided with the second quantity tube 9 with the pipeline that 6. number interface is connected of the first transfer valve 1; 5. number interface of the first transfer valve 1 is provided with the first chromatographic column 11 with the pipeline that 5. number interface is connected of the second transfer valve 2; 8. number interface of the first transfer valve 1 is provided with the 3rd chromatographic column 13 with the pipeline that 4. number interface is connected of the 3rd transfer valve 3.
As preferably, the 3rd carrier gas 21 gas circuit of described gas chromatograph is connected with a 1. number interface for the second transfer valve 2; First needle-valve 24 is connected with a 4. number interface for the second transfer valve 2, and the second needle-valve 25 is connected with a 2. number interface for the second transfer valve 2; 6. number interface of the second transfer valve 2 is provided with the second chromatographic column 12 with the pipeline that 6. number interface is connected of the 3rd transfer valve 3.
As preferably, the 3rd described needle-valve 26 is connected with a 3. number interface for the 3rd transfer valve 3, and the 4th needle-valve 27 is connected with a 1. number interface for the 3rd transfer valve 3; First detecting device PDD1 6 is connected with a 5. number interface for the 3rd transfer valve 3.
As preferably, the 4th carrier gas 22 gas circuit of described gas chromatograph is connected with the 4. number interface of the 4th transfer valve 4, the 5th carrier gas (23) gas circuit is connected with a 7. number interface for the 4th transfer valve 4, and sample export 18 is connected with a 2. number interface for the 4th transfer valve 4; 3. number interface of the 4th transfer valve 4 is provided with the 3rd quantity tube 10 with the pipeline that 10. number interface is connected of the 4th transfer valve 4; 5. number interface of the 4th transfer valve 4 is provided with the 4th chromatographic column 14 with the pipeline that 9. number interface is connected of the 4th transfer valve 4; 6. the 8. number interface that number interface of the 4th transfer valve 4 and the pipeline that 6. number interface is connected of the 5th transfer valve 5 are provided with the 5th chromatographic column the 15, four transfer valve 4 is provided with the 6th chromatographic column 16 with the pipeline that 4. number interface is connected of the 5th transfer valve 5.
As preferably, the 5th described needle-valve 28 is connected with a 1. number interface for the 5th transfer valve 5, and the 6th needle-valve 29 is connected with a 3. number interface for the 5th transfer valve 5; Second detecting device PDD2 7 is connected with a 5. number interface for the 5th transfer valve 5.
As preferably, the first described transfer valve 1 and the 4th transfer valve 4 are ten logically purge pneumatic transfer valve, and the second transfer valve 2, the 3rd transfer valve 3, the 5th transfer valve 5 are six logically purge pneumatic transfer valve.
As preferably, the first described chromatographic column 11 and the second chromatographic column 12 are the Al of 30m
2o
3capillary column; 3rd chromatographic column 13 is the Al of 50m
2o
3capillary column; 4th chromatographic column 14 and the 6th chromatographic column 16 are the Porapak Q packed column of 2m; 5th chromatographic column 15 is the 5A molecular sieve packed column of 2m.The first described detecting device PDD1 6 and the second detecting device PDD2 7 adopts helium ionization detector.
The beneficial effects of the utility model are: the utility model adopts the chromatographic process design of autonomous innovation, chromatographic column is selected and heartcut method, realizes being separated completely of perfluoroethane and other impurity.The utility model be a set of applicable China's national situation, accept by user, can single injected sampling operation can complete needed for analysis electron level perfluoroethane in the gas chromatograph of Analysis of Micro-amount Impurities In Liquid, and the impurity detecting ppb rank in perfluoroethane can be completed, achieve the total analysis of trace impurity in electron level perfluoroethane.
Accompanying drawing explanation
Fig. 1 is the syndeton schematic diagram of the utility model gas chromatograph.
Fig. 2 is the first transfer valve sampling of the present utility model and by the schematic flow sheet of the first needle-valve emptying perfluoroethane.
Fig. 3 is that the first transfer valve sampling of the present utility model terminates and by the schematic flow sheet of the first needle-valve emptying perfluoroethane.
Fig. 4 is that in the utility model analytic process, R13 enters the schematic flow sheet in the second chromatographic column.
Fig. 5 is that emptying perfluoroethane and other foreign gas and R13 enter the schematic flow sheet in the first detecting device PDD1 to the utility model again.
Fig. 6 is the schematic flow sheet of the utility model by foreign gas in the 3rd chromatogram column analysis perfluoroethane.
Fig. 7 is the sampling of the utility model the 4th transfer valve and by the schematic flow sheet of the 4th chromatographic column pre-separation perfluoroethane.
Fig. 8 is the utility model blowback the 4th chromatographic column, makes R14, CO2 and perfluoroethane etc. enter the 5th chromatographic column and by the 5th chromatogram column analysis H2, the schematic flow sheet of O2+Ar, N2, CO.
Fig. 9 is the schematic flow sheet of the utility model by the 6th chromatogram column analysis R14 and CO2.
Figure 10 is the schematic flow sheet of the utility model by the 6th needle-valve emptying perfluoroethane.
In figure: 1, the first transfer valve; 2, the second transfer valve; 3, the 3rd transfer valve; 4, the 4th transfer valve; 5, the 5th transfer valve; 6, the first detecting device PDD1; 7, the second detecting device PDD2; 8, the first quantity tube; 9, the second quantity tube; 10, the 3rd quantity tube; 11, the first chromatographic column; 12, the second chromatographic column; 13, the 3rd chromatographic column; 14, the 4th chromatographic column; 15, the 5th chromatographic column; 16, the 6th chromatographic column; 17, sample inlet; 18, sample export; 19, the first carrier gas; 20, the second carrier gas; 21, the 3rd carrier gas; 22, the 4th carrier gas; 23, the 5th carrier gas; 24, the first needle-valve; 25, the second needle-valve; 26, the 3rd needle-valve; 27, the 4th needle-valve; 28, the 5th needle-valve; 29, the 6th needle-valve.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
As shown in Figure 1, the utility model is used for the gas chromatograph of Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane, and its structure comprises sampling system, transfer valve, chromatographic column, emptying needle-valve and detecting device.First transfer valve 1 is provided with the first quantity tube 8 and the second quantity tube 9, second transfer valve 2 is provided with the first needle-valve 24 and the second needle-valve 25,3rd transfer valve 3 is provided with the 3rd needle-valve 26, the 4th needle-valve 27 and the first detecting device PDD1 6,4th transfer valve 4 is provided with the 4th chromatographic column 14 and the 3rd quantity tube the 10, five transfer valve 5 is provided with the 5th needle-valve 28, the 6th needle-valve 29 and the second detecting device PDD2 7; Connected by the first set chromatographic column 11 between first transfer valve 1 and the second transfer valve 2, connected by the second set chromatographic column 12 between second transfer valve 2 and the 3rd transfer valve 3, connected by the 3rd set chromatographic column 13 between first transfer valve 1 and the 3rd transfer valve 3, be connected with the 6th chromatographic column 16 by the 5th set chromatographic column 15 between the 4th transfer valve 4 and the 5th transfer valve 5.
First carrier gas 19 gas circuit of gas chromatograph is connected with the 4. number interface of the first transfer valve 1, the gas circuit of the second carrier gas 20 is connected with a 9. number interface for the first transfer valve 1; Sample inlet 17 is connected with a 1. number interface for the first transfer valve 1, and the 2. number interface of the first transfer valve 1 is connected with a 1. number interface for the 4th transfer valve 4; 7. the 3. number interface that number interface of the first transfer valve 1 and the pipeline that 10. number interface is connected of the first transfer valve 1 are provided with the first quantity tube 8, first transfer valve 1 is provided with the second quantity tube 9 with the pipeline that 6. number interface is connected of the first transfer valve 1; 5. number interface of the first transfer valve 1 is provided with the first chromatographic column 11 with the pipeline that 5. number interface is connected of the second transfer valve 2; 8. number interface of the first transfer valve 1 is provided with the 3rd chromatographic column 13 with the pipeline that 4. number interface is connected of the 3rd transfer valve 3.
3rd carrier gas 21 gas circuit of gas chromatograph is connected with a 1. number interface for the second transfer valve 2; First needle-valve 24 is connected with a 4. number interface for the second transfer valve 2, and the second needle-valve 25 is connected with a 2. number interface for the second transfer valve 2; 6. number interface of the second transfer valve 2 is provided with the second chromatographic column 12 with the pipeline that 6. number interface is connected of the 3rd transfer valve 3.
3rd needle-valve 26 is connected with a 3. number interface for the 3rd transfer valve 3, and the 4th needle-valve 27 is connected with a 1. number interface for the 3rd transfer valve 3; First detecting device PDD1 6 is connected with a 5. number interface for the 3rd transfer valve 3.
4th carrier gas 22 gas circuit of gas chromatograph is connected with the 4. number interface of the 4th transfer valve 4, the 5th carrier gas (23) gas circuit is connected with a 7. number interface for the 4th transfer valve 4, and sample export 18 is connected with a 2. number interface for the 4th transfer valve 4; 3. number interface of the 4th transfer valve 4 is provided with the 3rd quantity tube 10 with the pipeline that 10. number interface is connected of the 4th transfer valve 4; 5. number interface of the 4th transfer valve 4 is provided with the 4th chromatographic column 14 with the pipeline that 9. number interface is connected of the 4th transfer valve 4; 6. the 8. number interface that number interface of the 4th transfer valve 4 and the pipeline that 6. number interface is connected of the 5th transfer valve 5 are provided with the 5th chromatographic column the 15, four transfer valve 4 is provided with the 6th chromatographic column 16 with the pipeline that 4. number interface is connected of the 5th transfer valve 5.
5th needle-valve 28 is connected with a 1. number interface for the 5th transfer valve 5, and the 6th needle-valve 29 is connected with a 3. number interface for the 5th transfer valve 5; Second detecting device PDD2 7 is connected with a 5. number interface for the 5th transfer valve 5.
First transfer valve 1 and the 4th transfer valve 4 are the pneumatic transfer valve of ten logical purgings, and the second transfer valve 2, the 3rd transfer valve 3, the 5th transfer valve 5 are the pneumatic transfer valve of six logical purgings.
First chromatographic column 11 and the second chromatographic column 12 are the Al of 30m
2o
3capillary column; 3rd chromatographic column 13 is the Al of 50m
2o
3capillary column; 4th chromatographic column 14 and the 6th chromatographic column 16 are the Porapak Q packed column of 2m; 5th chromatographic column 15 is the 5A molecular sieve packed column of 2m.The first described detecting device PDD1 6 and the second detecting device PDD2 7 adopts helium ionization detector.
The utility model adopts heartcut, blowback and emptying perfluoroethane realize perfluoroethane and other impurity is separated completely.Concrete operation step is as follows:
A, the first transfer valve 1 adopt two input mode, and the perfluoroethane through the first quantity tube 8 utilizes the 3rd chromatographic column 13 to be separated, and the perfluoroethane through the second quantity tube 8 utilizes the first chromatographic column 11 to be separated with the second chromatographic column 12.As shown in Figure 2.
B, the second transfer valve 2 are the atmospheric valve of perfluoroethane and are realized the pre-separation of R13 and perfluoroethane by the first chromatographic column 11.Being separated of R13 and perfluoroethane is being realized completely by 2 emptying perfluoroethanes and the second chromatographic column 12.As shown in accompanying drawing 3,4 and 5.
C, the 3rd transfer valve 3 are that the component in the second chromatographic column 12 and the 3rd chromatographic column 13 goes out peak transfer valve, utilize the 3rd needle-valve 26 to control the appearance time of component in the 3rd chromatographic column 13, switch the 3rd transfer valve 3 exactly, make each component go out peak complete.As shown in Figure 6.
D, the 4th transfer valve 4 adopt forward sample introduction and send out the mode of perfluoroethane of blowing, and utilize and are connected to the 4th transfer valve 4(ten-way valve) on the 4th chromatographic column 14 realize the pre-separation of sample, make H
2, O
2+ Ar, N
2, CO is introduced into the 5th chromatographic column 15.Then the 4th transfer valve 4 blowback CF
4, CO
2, perfluoroethane and other impurity enter the 6th chromatographic column 16 and analyze.As shown in accompanying drawing 7 and accompanying drawing 8.
E, the 5th transfer valve 5 are that the component in the 5th chromatographic column 15 and the 6th chromatographic column 16 goes out peak transfer valve, the 6th needle-valve 29 is utilized to control the appearance time of component in the 6th chromatographic column 16, switch the 5th transfer valve 5 exactly, make each component go out peak complete, as shown in Figure 9.
F, the 5th transfer valve 5 also play emptying perfluoroethane and other impurity effects, by the unwanted material of the 6th needle-valve 29 emptying.As shown in Figure 10.
The concrete sampling step of the utility model is as follows:
1, switch the first transfer valve 1 and the second transfer valve 2, first carrier gas 19 enters the first chromatographic column 11 with sample in the second quantity tube 9, the material wherein before R13 is all by the first needle-valve 24 emptying (main emptying R116); Second carrier gas 20 enters the 3rd chromatographic column 13 with sample in the first quantity tube 8, and sample introduction terminates, and the first transfer valve 1 switches back original state, as shown in accompanying drawing 1,2 and 3.
2, the second transfer valve 2 is switched when the first carrier gas 19 will be flowed out from the first chromatographic column 11 with R13, R13 is made to enter the second chromatographic column 12, after R13 enters the second chromatographic column 12 completely, again switch the second transfer valve 2, by the first needle-valve 24 emptying (main emptying R116).As shown in figures 4 and 5.
3, the second carrier gas 20 recycles the 3rd needle-valve 26 emptying perfluoroethane with sample by the 3rd chromatographic column 13, leave out the impurity that peak is more late, switch the 3rd transfer valve 3 when R13 flows out after the second chromatographic column 12 goes out peak by the first detecting device PDD1 6, make the impurity composition in the 3rd chromatographic column 13 go out peak through the first detecting device PDD1 6.As shown in Figure 6.
The analysis of the halogenated hydrocarbons impurity of perfluoroethane is achieved by above-mentioned steps 1,2,3.
4, change the 4th transfer valve the 4, four carrier gas 22 and enter the 4th chromatographic column 14 with sample in the 3rd quantity tube 10, as CF in the 4th chromatographic column 14
4(R14) material before switches the 4th transfer valve 4, blowback CF after all entering the 5th chromatographic column 15
4material enter the 6th chromatographic column 16.As shown in accompanying drawing 7 and accompanying drawing 8.
5, the 6th needle-valve 29 is utilized to control the 6th chromatographic column 16 appearance time, as the material (H in the 5th chromatographic column 15
2, O
2+ Ar, N
2, CO) all by after the second detecting device PDD2 7 goes out peak, switch the 5th transfer valve 5, make the material (CF that the 6th chromatographic column 16 is separated
4and CO
2) on the second detecting device PDD2 7, go out peak.As shown in Figure 9.
6, CO is worked as
2after having gone out peak, initial position got back to by the 5th transfer valve 5, by unwanted components such as the 6th needle-valve 29 emptying perfluoroethanes.As shown in Figure 10.
The analysis of inorganic impurity in perfluoroethane is achieved by above-mentioned steps 4,5,6.
Comprehensive above-mentioned steps, the utility model achieves the total analysis of electron level perfluoroethane.
The above is preferred embodiment of the present utility model, and all equalizations done according to the scope of the claims of the utility model application change and modify, and all should belong to the protection domain of the utility model patent.
Claims (9)
1. for the gas chromatograph of Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane, its structure comprises sampling system, transfer valve, chromatographic column, emptying needle-valve and detecting device, it is characterized in that: first transfer valve (1) of described gas chromatograph is provided with the first quantity tube (8) and the second quantity tube (9), second transfer valve (2) is provided with the first needle-valve (24) and the second needle-valve (25), 3rd transfer valve (3) is provided with the 3rd needle-valve (26), 4th needle-valve (27) and the first detecting device PDD1(6), 4th transfer valve (4) is provided with the 4th chromatographic column (14) and the 3rd quantity tube (10), 5th transfer valve (5) is provided with the 5th needle-valve (28), 6th needle-valve (29) and the second detecting device PDD2(7), connected by set the first chromatographic column (11) between first transfer valve (1) and the second transfer valve (2), connected by set the second chromatographic column (12) between second transfer valve (2) and the 3rd transfer valve (3), connected by the 3rd set chromatographic column (13) between first transfer valve (1) and the 3rd transfer valve (3), be connected with the 6th chromatographic column (16) by the 5th set chromatographic column (15) between the 4th transfer valve (4) and the 5th transfer valve (5).
2. according to the gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane described in claim 1, it is characterized in that: the first carrier gas (19) gas circuit of described gas chromatograph is connected with the 4. number interface of the first transfer valve (1), the second carrier gas (20) gas circuit is connected with a 9. number interface for the first transfer valve (1); Sample inlet is connected with a 1. number interface for the first transfer valve (1), and the 2. number interface of the first transfer valve (1) is connected with a 1. number interface for the 4th transfer valve (4); 7. number interface of the first transfer valve (1) is provided with the first quantity tube (8) with the pipeline that 10. number interface is connected of the first transfer valve (1), and the 3. number interface of the first transfer valve (1) is provided with the second quantity tube (9) with the pipeline that 6. number interface is connected of the first transfer valve (1); 5. number interface of the first transfer valve (1) is provided with the first chromatographic column (11) with the pipeline that 5. number interface is connected of the second transfer valve (2); 8. number interface of the first transfer valve (1) is provided with the 3rd chromatographic column (13) with the pipeline that 4. number interface is connected of the 3rd transfer valve (3).
3. according to the gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane described in claim 1, it is characterized in that: the 3rd carrier gas (21) gas circuit of described gas chromatograph is connected with a 1. number interface for the second transfer valve (2); First needle-valve (24) is connected with a 4. number interface for the second transfer valve (2), and the second needle-valve (25) is connected with a 2. number interface for the second transfer valve (2); 6. number interface of the second transfer valve (2) is provided with the second chromatographic column (12) with the pipeline that 6. number interface is connected of the 3rd transfer valve (3).
4. according to the gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane described in claim 1, it is characterized in that: the 3rd described needle-valve (26) is connected with a 3. number interface for the 3rd transfer valve (3), and the 4th needle-valve (27) is connected with a 1. number interface for the 3rd transfer valve (3); First detecting device PDD1(6) be connected with a 5. number interface for the 3rd transfer valve (3).
5. according to the gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane described in claim 1, it is characterized in that: the 4th carrier gas (22) gas circuit of described gas chromatograph is connected with the 4. number interface of the 4th transfer valve (4), the 5th carrier gas (23) gas circuit is connected with a 7. number interface for the 4th transfer valve (4), and sample export is connected with a 2. number interface for the 4th transfer valve (4); 3. number interface of the 4th transfer valve (4) is provided with the 3rd quantity tube (10) with the pipeline that 10. number interface is connected of the 4th transfer valve (4); 5. number interface of the 4th transfer valve (4) is provided with the 4th chromatographic column (14) with the pipeline that 9. number interface is connected of the 4th transfer valve (4); 6. number interface of the 4th transfer valve (4) is provided with the 5th chromatographic column (15) with the pipeline that 6. number interface is connected of the 5th transfer valve (5), and the 8. number interface of the 4th transfer valve (4) is provided with the 6th chromatographic column (16) with the pipeline that 4. number interface is connected of the 5th transfer valve (5).
6. according to the gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane described in claim 1, it is characterized in that: the 5th described needle-valve (28) is connected with a 1. number interface for the 5th transfer valve (5), and the 6th needle-valve (29) is connected with a 3. number interface for the 5th transfer valve (5); Second detecting device PDD2(7) be connected with a 5. number interface for the 5th transfer valve (5).
7. according to the gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane described in claim 1, it is characterized in that: described the first transfer valve (1) and the 4th transfer valve (4) are the pneumatic transfer valve of ten logical purgings, the second transfer valve (2), the 3rd transfer valve (3), the 5th transfer valve (5) are the pneumatic transfer valve of six logical purgings.
8. according to the gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane described in claim 1, it is characterized in that: the Al that described the first chromatographic column (11) and the second chromatographic column (12) are 30m
2o
3capillary column; The Al that 3rd chromatographic column (13) is 50m
2o
3capillary column; The Porapak Q packed column that 4th chromatographic column (14) and the 6th chromatographic column (16) are 2m; The 5A molecular sieve packed column that 5th chromatographic column (15) is 2m.
9. according to the gas chromatograph for Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane described in claim 1, it is characterized in that: the first described detecting device PDD1(6) and the second detecting device PDD2(7) adopt helium ionization detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420657464.5U CN204116290U (en) | 2014-11-06 | 2014-11-06 | For the gas chromatograph of Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420657464.5U CN204116290U (en) | 2014-11-06 | 2014-11-06 | For the gas chromatograph of Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane |
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| Publication Number | Publication Date |
|---|---|
| CN204116290U true CN204116290U (en) | 2015-01-21 |
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ID=52333587
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104297382A (en) * | 2014-11-06 | 2015-01-21 | 上海华爱色谱分析技术有限公司 | Gas chromatograph for analyzing trace impurities in electronic grade hexafluoroethane |
| CN105510492A (en) * | 2015-12-31 | 2016-04-20 | 上海正帆科技股份有限公司 | Analysis device and method of electronic-grade hydrogen chloride |
| CN109633056A (en) * | 2019-01-14 | 2019-04-16 | 朗析仪器（上海）有限公司 | A kind of on-line analysis system for liquid chlorine Analysis of Micro-amount Impurities In Liquid |
| CN110470508A (en) * | 2019-09-17 | 2019-11-19 | 付丽华 | A kind of medical inspection urine sampling equipment |
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2014
- 2014-11-06 CN CN201420657464.5U patent/CN204116290U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104297382A (en) * | 2014-11-06 | 2015-01-21 | 上海华爱色谱分析技术有限公司 | Gas chromatograph for analyzing trace impurities in electronic grade hexafluoroethane |
| CN104297382B (en) * | 2014-11-06 | 2015-12-02 | 上海华爱色谱分析技术有限公司 | For the gas chromatograph of Analysis of Micro-amount Impurities In Liquid in electron level perfluoroethane |
| CN105510492A (en) * | 2015-12-31 | 2016-04-20 | 上海正帆科技股份有限公司 | Analysis device and method of electronic-grade hydrogen chloride |
| CN109633056A (en) * | 2019-01-14 | 2019-04-16 | 朗析仪器（上海）有限公司 | A kind of on-line analysis system for liquid chlorine Analysis of Micro-amount Impurities In Liquid |
| CN109633056B (en) * | 2019-01-14 | 2023-12-22 | 朗析仪器（上海）有限公司 | On-line analysis system for analyzing trace impurities of liquid chlorine |
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