CN203881966U - Double-layer wire grating polarizer - Google Patents

Double-layer wire grating polarizer Download PDF

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Publication number
CN203881966U
CN203881966U CN201420259955.4U CN201420259955U CN203881966U CN 203881966 U CN203881966 U CN 203881966U CN 201420259955 U CN201420259955 U CN 201420259955U CN 203881966 U CN203881966 U CN 203881966U
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China
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wire
double
wire grating
wiregrating
substrate
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Expired - Fee Related
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CN201420259955.4U
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Chinese (zh)
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吴晓
刘建军
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China Jiliang University
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China Jiliang University
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Abstract

The utility model belongs to the technical field of electronic equipment, and particularly relates to a double-layer wire grating polarizer. The double-layer wire grating polarizer solves the problem of low extinction ratio of a wire grating polarizer in the prior art. The double-layer wire grating polarizer includes a substrate, the upper side and the lower side of the substrate are respectively provided with mutually parallel wire grating sets, each wire grating set includes a plurality of metal wires periodically arranged on the same plane, the metal wires are vertically distributed at equal intervals and are parallelly arranged, the wire grating sets at the upper side and the lower side of the substrate are transversely staggered, the staggering distance of the two wire grating sets is half of the width of the metal wires, and the spacing of two adjacent metal wires in the wire grating sets is equal to the width of the metal wires. The double-layer wire grating polarizer is advantageous in that the structure is simple, the parallel metal wires periodically arranged at the two sides of the substrate offset half of the wire width, so that the extinction ratio of the wire grating polarizer provided is improved, the loss is small, and the cost is low.

Description

Double-deck wire-grid polarizer
Technical field
The utility model belongs to technical field of electronic equipment, especially relates to a kind of double-deck wire-grid polarizer.
Background technology
Polarizer is important optical element in the systems such as optical information processing, optical measurement, optical communication, has therefore been widely used in the fields such as optical fiber communication, liquid crystal display, optical projection, Photoelectric Detection.Wherein extinction ratio is to weigh the major parameter of polarizer performance, is defined as 10 × log 10(T tM/ T tE), extinction ratio is higher, and polarizer performance is more excellent, wherein T tMand T tErepresent respectively wire-grid polarizer TM and TE polarized wave transmissivity.In terahertz wave band field, modal polarizer is liquid crystal polarized device and wire-grid polarizer.Most widely used liquid crystal polarized utensil has good polarization property, but operating frequency range is narrower, complex structure, and cost is high, and its application is restricted.Traditional terahertz wave band polarizer is without support metal wire-grid polarizer, owing to there is no base material, loss is very low, is widely used in terahertz wave band, but it is very large that the cycle is unified, the uniform bending metals line structure of spacing is processed difficulty, and fragile structure, extinction ratio are lower.2009, it is the aluminum metal wire-grid polarizer of 3 μ m that the people such as Yamada utilize the micro-processing method cycle of having processed in silicon base, within the scope of 0.5~3.0THz, extinction ratio is better than 23dB, but the Fresnel reflection that the silicon base material of high-k causes makes its loss higher.The same year, the people such as Yong Ma utilized photoetching process on high-density polyethylene material, to process Terahertz wire-grid polarizer, realize lower loss, but improve extinction ratio, will the less wire grid construction of manufacturing cycle, this just need to adopt cost is higher, difficulty is larger nano print and processing technology, and this technique exists the shortcoming that is difficult to prepare terahertz wave band large scale wire-grid polarizer.2010, the people such as Lin Sun proposed the polarizer structure design that utilizes double-deck wiregrating to realize High Extinction Ratio in theory.2012, the people such as Deng processed double-deck golden wire-grid polarizer in silicon base, compared conventional monolayers wire-grid polarizer, and extinction ratio has obtained increasing substantially.But above several wire-grid polarizers still exist, structure is too complicated, extinction ratio problem not fully up to expectations.
The problem existing in order to solve prior art, people have carried out long-term exploration, have proposed solution miscellaneous.For example, Chinese patent literature discloses a kind of tunable double-level-metal grating polarizer [application number: 201320357068.6], comprise: the control temperature unit of just right two metal grating layers, the sheet metal of fixing two metal grating interlamellar spacings and connection metal sheet up and down with same structure parameter, two metal grating layers and sheet metal form an annular seal space, under constant-pressure conditions, control temperature unit regulates the refractive index of air by controlling the temperature of the air in annular seal space.
Such scheme has been alleviated the low problem of grating polarizer extinction ratio to a certain extent, but this scheme still exists: complex structure, and difficulty of processing is large, and cost is high, and loss is large, uses the large problem of limitation.
Summary of the invention
The purpose of this utility model is for the problems referred to above, provides a kind of simple in structure, the double-deck wire-grid polarizer that extinction ratio is high.
For achieving the above object, the utility model has adopted following technical proposal: this double-deck wire-grid polarizer, comprise substrate, the upper and lower both sides of described substrate are respectively equipped with the wiregrating group being arranged in parallel, each wiregrating group includes some metal wires in same plane periodic arrangement, described metal wire longitudinally equidistantly distributes and is arranged in parallel, it is characterized in that, the half of the live width size that the size of the wiregrating group transversion malposition setting of the described upper and lower both sides of substrate and the dislocation distance of two wiregrating groups is metal wire, the live width equal and opposite in direction of the spacing of adjacent two metal wires size and described metal wire in described wiregrating group.In this structure by the wiregrating group of the upper and lower both sides of substrate is shifted to install, the center of each metal line of realizing substrate one side with respect to the center lateral excursion of each corresponding metal line of substrate opposite side the live width of half metal wire, thereby improved the extinction ratio of wire-grid polarizer.
In above-mentioned double-deck wire-grid polarizer, the live width size of described metal wire is 10 μ m; The dislocation distance of two wiregrating groups is 5 μ m; In described wiregrating group, the spacing size of adjacent two metal wires is 10 μ m.The cycle size that can draw thus this wiregrating group is 20 μ m.
In above-mentioned double-deck wire-grid polarizer, the thickness size of described substrate is 50 μ m.
In above-mentioned double-deck wire-grid polarizer, described substrate is made up of Kapton.There is the advantages such as pliability is good, loss is lower.
In above-mentioned double-deck wire-grid polarizer, described metal wire adopts copper product to make.Have the feature of good conductivity, preferably the metal wire here adopts induced with laser and electroless copper mode to be arranged in substrate.
Compared with prior art, the advantage of this double-deck wire-grid polarizer is: simple in structure, and the parallel metal lines of substrate both sides periodic arrangement is offset to live width half, thereby has improved the extinction ratio of this wire-grid polarizer, loss is little, and cost is low.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the comparison diagram of extinction ratio in the utility model.
In figure, substrate 1, wiregrating group 2, metal wire 21, dislocation are apart from S, live width W, spacing H, cycle P.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in more detail.
As shown in Figure 1-2, this double-deck wire-grid polarizer, comprise substrate 1, substrate is respectively equipped with the wiregrating group 2 being arranged in parallel in both sides Shang Xia 1, each wiregrating group 2 includes some metal wires 21 in same plane periodic arrangement, metal wire 21 longitudinally equidistantly distributes and is arranged in parallel, the wiregrating group 2 transversion malposition settings of substrate both sides Shang Xia 1 and the dislocation of two wiregrating groups 2 are the half of the live width W size of metal wire 21 apart from the size of S, the live width W equal and opposite in direction of the spacing H of adjacent two metal wires 21 size and metal wire 21 in wiregrating group 2, the center of each metal line 21 of realizing substrate 1 one sides with respect to the center lateral excursion of each corresponding metal line 21 of substrate 1 opposite side the live width W of half metal wire 21, thereby improve the extinction ratio of wire-grid polarizer.
In the present embodiment, particularly, the live width W size of the metal wire 21 is here 10 μ m; The dislocation of two wiregrating groups 2 is 5 μ m apart from S; In wiregrating group 2, the spacing H size of adjacent two metal wires 21 is 10 μ m, and the cycle T size that can draw thus this wiregrating group 2 is 20 μ m.Preferably, the thickness size of substrate 1 is 50 μ m.Further, the substrate 1 is here made up of polyimide material, makes like this substrate 1 have the advantages such as pliability is good, loss is lower.The metal wire 21 here adopts copper product to make, and has like this feature of good conductivity.
The principle of this enforcement is, substrate 1 is selected pliable and tough, lower and the thickness of terahertz wave band specific inductive capacity and loss is the Kapton of 50 μ m, then utilize induced with laser and the electroless copper mode wiregrating group 2 at one side manufacturing cycle P=20 μ m live width W=10 μ m, each wiregrating group 2 includes some metal wires 21 in same plane periodic arrangement, metal wire 21 longitudinally equidistantly distributes and is arranged in parallel, then profit uses the same method and makes same wiregrating group 2 at Kapton opposite side, require the live width S of half metal wire of wiregrating group 2 lateral excursion 21 of upper and lower both sides, the center of each metal line 21 of realizing substrate 1 one sides with respect to the center lateral excursion of each corresponding metal line 21 of substrate 1 opposite side the live width S of half metal wire 21.
The extinction ratio of this polarizer is defined as dB=10 × log 10(T tM/ T tE), wherein T tMand T tErepresent respectively wire-grid polarizer TM and TE polarized wave transmissivity, calculate the extinction ratio of double-deck wire-grid polarizer.The extinction ratio that wherein metal wire has been offset the polarizer that the polarizer extinction ratio of 5 μ m is not offset with respect to metal wire has exceeded 7.7dB, is mainly due to the transmitance that has reduced TE polarized wave after wiregrating is staggered, and is defined as dB=10 × log according to extinction ratio 10(T tM/ T tE) the rear extinction ratio raising of known TE transmitance reduction.
Specific embodiment described herein is only to the explanation for example of the utility model spirit.The utility model person of ordinary skill in the field can make various amendments or supplements or adopt similar mode to substitute described specific embodiment, but can't depart from spirit of the present utility model or surmount the defined scope of appended claims.
Although more used substrate 1, wiregrating group 2, metal wire 21, dislocation apart from terms such as S, live width W, spacing H, cycle P herein, do not got rid of the possibility that uses other term.Use these terms to be only used to describe more easily and explain essence of the present utility model; They are construed to any additional restriction is all contrary with the utility model spirit.

Claims (5)

1. a double-deck wire-grid polarizer, comprise substrate (1), the upper and lower both sides of described substrate (1) are respectively equipped with the wiregrating group (2) being arranged in parallel, each wiregrating group (2) includes some metal wires in same plane periodic arrangement (21), described metal wire (21) longitudinally equidistantly distributes and is arranged in parallel, it is characterized in that, the size of upper and lower wiregrating group (2) the transversion malposition setting of both sides of described substrate (1) and the dislocation of two wiregrating groups (2) distance (S) is the half of live width (W) size of metal wire (21), live width (W) equal and opposite in direction of the spacing (H) of adjacent two metal wires (21) size and described metal wire (21) in described wiregrating group (2).
2. double-deck wire-grid polarizer according to claim 1, is characterized in that, live width (W) size of described metal wire (21) is 10 μ m; The dislocation distance (S) of two wiregrating groups (2) is 5 μ m; In described wiregrating group (2), spacing (H) size of adjacent two metal wires (21) is 10 μ m.
3. double-deck wire-grid polarizer according to claim 1 and 2, is characterized in that, the thickness size of described substrate (1) is 50 μ m.
4. double-deck wire-grid polarizer according to claim 3, is characterized in that, described substrate (1) is made up of polyimide material.
5. double-deck wire-grid polarizer according to claim 1, is characterized in that, described metal wire (21) adopts copper product to make.
CN201420259955.4U 2014-05-19 2014-05-19 Double-layer wire grating polarizer Expired - Fee Related CN203881966U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104793277A (en) * 2015-04-29 2015-07-22 东南大学 Transmission type filter based on surface plasmon polaritons
CN105158836A (en) * 2015-10-08 2015-12-16 中国科学院重庆绿色智能技术研究院 Terahertz polarizing plate based on dual-layer metal wire gating structure
CN107290815A (en) * 2016-03-31 2017-10-24 中国科学院苏州纳米技术与纳米仿生研究所 Wire grid construction and its manufacture device
CN107783220A (en) * 2017-11-28 2018-03-09 浙江科技学院 Multiple layer metal wire grid construction film broadband terahertz polarization device and its manufacture method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104793277A (en) * 2015-04-29 2015-07-22 东南大学 Transmission type filter based on surface plasmon polaritons
CN104793277B (en) * 2015-04-29 2017-10-31 东南大学 Transmission-type wave filter based on surface plasma excimer
CN105158836A (en) * 2015-10-08 2015-12-16 中国科学院重庆绿色智能技术研究院 Terahertz polarizing plate based on dual-layer metal wire gating structure
CN107290815A (en) * 2016-03-31 2017-10-24 中国科学院苏州纳米技术与纳米仿生研究所 Wire grid construction and its manufacture device
CN107783220A (en) * 2017-11-28 2018-03-09 浙江科技学院 Multiple layer metal wire grid construction film broadband terahertz polarization device and its manufacture method

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