CN203835986U - Hexagonal shaft structure - Google Patents
Hexagonal shaft structure Download PDFInfo
- Publication number
- CN203835986U CN203835986U CN201420104875.1U CN201420104875U CN203835986U CN 203835986 U CN203835986 U CN 203835986U CN 201420104875 U CN201420104875 U CN 201420104875U CN 203835986 U CN203835986 U CN 203835986U
- Authority
- CN
- China
- Prior art keywords
- bearing
- rotatingshaft
- core
- structures
- main shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007789 sealing Methods 0.000 claims description 10
- 238000012856 packing Methods 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 abstract description 12
- 239000010959 steel Substances 0.000 abstract description 12
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 7
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 210000001138 tear Anatomy 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Rolling Contact Bearings (AREA)
- Physical Vapour Deposition (AREA)
- Mounting Of Bearings Or Others (AREA)
Abstract
The utility model discloses a hexagonal shaft structure, and relates to the field of machinery. The hexagonal shaft structure comprises a first bearing, a second bearing, a barrel-shaped spindle core and a rotating shaft, wherein the rotating shaft is rotatably sleeved inside the spindle core; the first bearing is arranged between the head of the rotating shaft and the inner wall of the spindle core; the second bearing is arranged between the tail of the rotating shaft and the inner wall of the spindle core. The hexagonal shaft structure disclosed by the utility model adopts the rotating shaft to replace the spindle head, opposite eccentric rotation of a magnetic steel support seat and a target barrel is effectively avoided by virtue of two bearings, the rotating shaft and the spindle core, and the overall rotary sputtering system is more stable.
Description
Technical field
The utility model relates to a kind of mechanical structure, relates in particular to a kind of six square axle structures.
Background technique
The rotary support structure (six square axle structures) of existing magnetron sputtering rotary target inside adopts self oiling bearing, this self oiling bearing easily weares and teares, cause magnet steel bearing to produce eccentric rotary with respect to target cylinder, scratch target cylinder, affect to a certain extent the uniformity in magnetic field, thereby had the unsettled problem of whole rotatable sputtering system that makes.
Model utility content
The utility model easily weares and teares for solving existing self oiling bearing, cause magnet steel bearing to produce eccentric rotary with respect to target cylinder, scratch target cylinder, affect to a certain extent the uniformity in magnetic field, thereby exist make the unsettled problem of whole rotatable sputtering system, thereby the technological scheme of six square axle structures is provided.
Six square axle structures described in model utility, comprising: clutch shaft bearing, the second bearing, barrel-shaped main shaft core and rotatingshaft,
Described rotatingshaft is rotating is sheathed on described main shaft in-core;
Described clutch shaft bearing is set between the inwall of the head of described rotatingshaft and described main shaft core;
Described the second bearing is set between the inwall of the afterbody of described rotatingshaft and described main shaft core.
Preferably, described clutch shaft bearing is drawn cup needle roller bearing.
Preferably, described the second bearing is deep groove ball bearing.
Preferably, also comprise: oil sealing, described oil sealing is arranged at a side of the second bearing, is positioned at the afterbody of rotatingshaft.
Preferably, also comprise: packing ring, described packing ring is arranged between described oil sealing and described the second bearing.
Preferably, the afterbody of described rotatingshaft is provided with a groove.
Preferably, described main shaft core comprises: axle core be connected end,
Described axle core is integral type structure with the described end that is connected, and described axle core is tubular-shaped structures, and the end face outer ring of described tubular-shaped structures is shaped as regular hexagon;
The width of the end face of described connection end is greater than described orthohexagonal external diameter of a circle, and described connection end is stretched out in one end of described rotatingshaft.
The beneficial effects of the utility model:
Six square axle structures described in the utility model are that magnetron sputtering rotary target drives the parts of inside, termination with the rotation of moving-target cylinder, mainly contain effect: rotate by driven by motor target cylinder; Support magnet steel bearing by coordinating with hydroelectric end, magnet steel bearing and target cylinder are produced relative rotation; Make to insulate between drive end and target cylinder.
Six square axle structures described in the utility model adopt rotatingshaft to replace spindle nose, are coordinated and have effectively been avoided the relative eccentric rotary of magnet steel bearing with target cylinder by 2 bearings, rotatingshaft and main shaft core, have reached and have made the more stable object of whole rotatable sputtering system.
Brief description of the drawings
Fig. 1 is the structural representation of six square axle structures described in the utility model;
Fig. 2 is six square axle structures and the linkage structure schematic diagram that drives termination, magnet steel support and target cylinder.
In accompanying drawing: 1. clutch shaft bearing; 2. main shaft core; 21. axle cores; 22. connect end; 3. rotatingshaft; 4. the second bearing; 5. packing ring; 6. oil sealing; 7. drive termination; 8. six square axle structures; 9 magnet steel bearings; 10. target cylinder; 11 hydroelectric ends; 12. drive motor.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail, but not as restriction of the present utility model.
As shown in Figure 1, six square axle structures of the present utility model, comprising: clutch shaft bearing 1, the second bearing 4, barrel-shaped main shaft core 2 and rotatingshaft 3,
Described rotatingshaft 3 is rotating to be sheathed in described main shaft core 2;
Described clutch shaft bearing 1 is set between the inwall of the head of described rotatingshaft 3 and described main shaft core 2;
Described the second bearing 4 is set between the inwall of the afterbody of described rotatingshaft 3 and described main shaft core 2.
Clutch shaft bearing 1, the second bearing 4 make rotatingshaft 3 retainer shaft central position fixing in rotating.
As shown in Figure 2, one end of the main shaft core 2 of six square axle structures 8 is fixed on the driving termination 7 of drive motor 12, and the other end of main shaft core 2 is connected with target cylinder 10, is with moving-target cylinder 10 to rotate by drive motor 12; Rotatingshaft 3 is connected with magnet steel bearing 9, rotatingshaft 3 with one end of one end magnet steel bearing 9 be connected, the other end of this magnet steel bearing 9 is fixed on hydroelectric end 11.Clutch shaft bearing 1, the second bearing 4 make rotatingshaft 3 retainer shaft central position fixing in rotating.Main shaft core 2 is tubular, and the cross section of the outer ring of this pipe one end is regular hexagon.
In technique scheme, clutch shaft bearing 1 is drawn cup needle roller bearing.
In technique scheme, the second bearing 4 is deep groove ball bearing.
In technique scheme, also comprise: oil sealing 6, oil sealing 6 is arranged at a side of the second bearing 4, is positioned at the afterbody of rotatingshaft 3.
In technique scheme, also comprise: packing ring 5, packing ring 5 is arranged between oil sealing 6 and the second bearing 4.
In technique scheme, the afterbody of rotatingshaft 3 is provided with a groove, in order to fixing magnet steel bearing 9.
In technique scheme, main shaft core 2 comprises: axle core 21 be connected end 22,
Axle core 21 is integral type structure with being connected end 22, and axle core 21 is tubular-shaped structures, and the end face outer ring of tubular-shaped structures is shaped as regular hexagon;
The width that connects the end face of end 22 is greater than orthohexagonal external diameter of a circle, and one end of rotatingshaft 3 is stretched out and connected end 22.
Connecting end 22 is connected with target cylinder 10.
The foregoing is only the utility model preferred embodiment; not thereby limit mode of execution of the present utility model and protection domain; to those skilled in the art; the scheme that being equal to of should recognizing that all utilization the utility model specifications and diagramatic content done replaces and apparent variation obtains, all should be included in protection domain of the present utility model.
Claims (7)
1. six square axle structures, is characterized in that, comprising: clutch shaft bearing, the second bearing, barrel-shaped main shaft core and rotatingshaft,
Described rotatingshaft is rotating is sheathed on described main shaft in-core;
Described clutch shaft bearing is set between the inwall of the head of described rotatingshaft and described main shaft core;
Described the second bearing is set between the inwall of the afterbody of described rotatingshaft and described main shaft core.
2. six square axle structures as claimed in claim 1, is characterized in that, described clutch shaft bearing is drawn cup needle roller bearing.
3. six square axle structures as claimed in claim 1, is characterized in that, described the second bearing is deep groove ball bearing.
4. six square axle structures as claimed in claim 1, is characterized in that, also comprise: oil sealing, described oil sealing is arranged at a side of the second bearing, is positioned at the afterbody of rotatingshaft.
5. six square axle structures as claimed in claim 4, is characterized in that, also comprise: packing ring, described packing ring is arranged between described oil sealing and described the second bearing.
6. six square axle structures as claimed in claim 1, is characterized in that, the afterbody of described rotatingshaft is provided with a groove.
7. six square axle structures as claimed in claim 1, is characterized in that, described main shaft core comprises: axle core be connected end,
Described axle core is integral type structure with the described end that is connected, and described axle core is tubular-shaped structures, and the end face outer ring of described tubular-shaped structures is shaped as regular hexagon;
The width of the end face of described connection end is greater than described orthohexagonal external diameter of a circle, and described connection end is stretched out in one end of described rotatingshaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420104875.1U CN203835986U (en) | 2014-03-07 | 2014-03-07 | Hexagonal shaft structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420104875.1U CN203835986U (en) | 2014-03-07 | 2014-03-07 | Hexagonal shaft structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203835986U true CN203835986U (en) | 2014-09-17 |
Family
ID=51513833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420104875.1U Expired - Fee Related CN203835986U (en) | 2014-03-07 | 2014-03-07 | Hexagonal shaft structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203835986U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105821390A (en) * | 2016-05-25 | 2016-08-03 | 东莞南玻工程玻璃有限公司 | Rotating target hexagonal shaft mechanism |
| CN105821388A (en) * | 2016-05-25 | 2016-08-03 | 东莞南玻工程玻璃有限公司 | Magnetron sputtering coating equipment |
| CN105821389A (en) * | 2016-05-25 | 2016-08-03 | 东莞南玻工程玻璃有限公司 | Rotary Target Drive |
-
2014
- 2014-03-07 CN CN201420104875.1U patent/CN203835986U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105821390A (en) * | 2016-05-25 | 2016-08-03 | 东莞南玻工程玻璃有限公司 | Rotating target hexagonal shaft mechanism |
| CN105821388A (en) * | 2016-05-25 | 2016-08-03 | 东莞南玻工程玻璃有限公司 | Magnetron sputtering coating equipment |
| CN105821389A (en) * | 2016-05-25 | 2016-08-03 | 东莞南玻工程玻璃有限公司 | Rotary Target Drive |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140917 Termination date: 20160307 |