CN203797422U - Visual inspection lamp for semiconductor wafers - Google Patents
Visual inspection lamp for semiconductor wafers Download PDFInfo
- Publication number
- CN203797422U CN203797422U CN201420147719.3U CN201420147719U CN203797422U CN 203797422 U CN203797422 U CN 203797422U CN 201420147719 U CN201420147719 U CN 201420147719U CN 203797422 U CN203797422 U CN 203797422U
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- Prior art keywords
- visual inspection
- lamp
- lamp housing
- luminescent device
- reflector
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Abstract
The utility model discloses a visual inspection lamp for semiconductor wafers, belongs to the field of special illuminating devices and can be widely applied to the field of designs and manufacture for visual inspection lamps for wafers. The visual inspection lamp is characterized in that a plurality of LED devices are arranged on the lower end surface of a lamp housing of the visual inspection lamp; at least one LED device is arranged at the longitudinal central axial position of the lamp housing, and the other LED devices encircle the LED device in the center of the lamp housing; a reflection cup is correspondingly arranged on each LED device; light spots outputted by the reflection cups of the various encircling LED devices coincide with light spots outputted by the reflection cups of the LED devices in the center of the lamp housing on a visual inspection working plane for the semiconductor wafers, so that high-brightness light spots can be formed; an integrated spot lamp can be formed by the lamp housing, the various LED devices and the corresponding reflection cups. The visual inspection lamp has the advantages that LED light sources are used as irradiation light sources, the visual inspection lamp has a quick start characteristic, is high in response speed, long in service life and low in power consumption and is environmental friendly, energy can be saved, and the integral visual inspection work efficiency and quality can be improved; the visual inspection lamp is convenient to manufacture and assemble, and a good radiating effect can be realized.
Description
Technical field
The utility model belongs to special lighting device field, relates in particular to a kind of special lighting device for semiconductor crystal wafer visual inspection.
Background technology
Visual inspection is an important process in test semiconductor wafer, and whether it exists defect by visually observing wafer to be measured.
Visual inspection mainly comprises the following scope of examination: detect on wafer to be measured, whether there is flaw (mainly referring to micro dust particle, scratch, residue etc.), for being printed on the pattern wafer finished product of circuit pattern, the planarization, coplane degree, pin that mainly carries out outer pin apart from, whether lettering clear and whether colloid has the appearance test of the aspects such as damage.
At present, in visual inspection process, how with high strength mercury lamp, as light source, to irradiate crystal column surface.
Adopt high strength mercury lamp as radiation source, its shortcoming is life-span short (being less than 500 hours), and the price of light fixture is high, needs frequently to change lamp light source in visual inspection work, and the start-up time of this kind of light source is long, need just can reach the required light stable intensity of visual inspection about preheating half an hour; Power consumption and production cost that it has increased visual inspection operation on the one hand, reduced the effective time again on the other hand virtually, reduced the whole work efficiency of visual inspection work.
How can make visual inspection have Fast Starting with illuminating lamp, extend the service life of light fixture, reduce its power consumption, improve the whole work efficiency of visual inspection work, be problem anxious to be resolved in actual production process.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of semiconductor crystal wafer visual inspection lamp, it adopts LED light source to replace traditional high strength mercury lamp as radiation source, there is Fast Starting, fast response time, long service life, power consumption is low, energy-conserving and environment-protective, can improve whole work efficiency and the quality of visual inspection work, and its production and assembly are convenient, good heat dissipation effect.
The technical solution of the utility model is: a kind of semiconductor crystal wafer visual inspection lamp is provided, comprises for supporting the strut and the lamp housing that is arranged on strut end of lamp housing, it is characterized in that: described lamp housing is a cylinder or round table-like structure; In the lower surface of lamp housing, be provided with several LED luminescent devices; Wherein, at least one LED luminescent device is arranged in longitudinal center's axial location of lamp housing, forms central point LED luminescent device; Remaining LED luminescent device arranges around described central point LED luminescent device, forms a plurality of around formula LED luminescent device; On the position of each described LED luminescent device, correspondence arranges a reflector; On the semiconductor crystal wafer visual inspection working face of required illumination, described each hot spot around the output of formula LED luminescent device reflector, overlaps with the hot spot of described central point LED luminescent device reflector output; Described strut, lamp housing, central point LED luminescent device, a plurality of around formula LED luminescent device and a plurality of reflector, be integrally formed the spotlight lamp of formula.
Concrete, each LED luminescent device described in it is positioned at the center of each reflector upper open end of described correspondence.
Further, the reflector described in it is a frustum-like shape member, and the upper open end of its reflector is connected with the lower end of described lamp housing; The lower open end of described reflector arranges towards semiconductor crystal wafer visual inspection working face.
A plurality of longitudinal center's axis around formula LED luminescent device reflector described in it, with the setting that has angle of the bottom surface of described lamp housing, form respectively a light projector passage tilting to lamp housing central axis.
Be positioned at longitudinal center's axis of described each reflector on formula LED luminescent device, towards longitudinal center's axis inclination of described lamp housing; Described each longitudinal center's axis around each reflector on formula LED luminescent device, with the setting that has angle of longitudinal center's axis of described lamp housing.
Further, above-mentioned angular range is 0～20 degree.
Described in it, each,, around longitudinal center's axis of formula LED luminescent device reflector, on described semiconductor crystal wafer visual inspection working face, intersects with longitudinal center's axis of described lamp housing.
Further, between the upper open end and lamp housing of described reflector, correspondence is provided with screw-type syndeton or rotary bayonet formula syndeton.
Further, in the upper surface of described lamp housing, radiating module or radiating module group are set.
Compared with the prior art, the utility model has the advantages that:
1. adopt LED light source to replace traditional high strength mercury lamp as radiation source, there is Fast Starting, fast response time, long service life, power consumption is low, energy-conserving and environment-protective;
2. adopt integrated light shell structure, its lamp housing is reflector fixedly, again can be as thermal component;
3. can improve whole work efficiency and the quality of visual inspection work, and its production and assembly are convenient, good heat dissipation effect.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the structural representation of the utility model lower surface;
Fig. 3 is lamp housing internal structure schematic diagram;
Fig. 4 is the structural representation of reflector;
Fig. 5 is the structural representation between lamp housing and LED luminescent device;
Fig. 6 is the hot spot coincidence relation schematic diagram of each reflector output.
In figure, 1 is strut, and 2 is lamp housing, puts LED luminescent device reflector centered by 3, and 4 is around formula LED luminescent device reflector, and 5 is LED luminescent device, and 6-1,6-2 are conductor wiring hole, and 7 is screw-type syndeton, and 8 is hot spot.
The specific embodiment
Below in conjunction with accompanying drawing, the utility model is described further.
In Fig. 1 and Fig. 2, the technical solution of the utility model provides a kind of semiconductor crystal wafer visual inspection lamp, comprises for supporting the strut and the lamp housing that is arranged on strut end of lamp housing, it is characterized in that described lamp housing 1 is a cylinder or round table-like structure; In the lower surface of lamp housing, be provided with several LED luminescent devices; Wherein, at least one LED luminescent device is arranged in longitudinal center's axial location of lamp housing, forms central point LED luminescent device; Remaining LED luminescent device arranges around described central point LED luminescent device, forms a plurality of around formula LED luminescent device; On the position of each described LED luminescent device, correspondence arranges a reflector; On the semiconductor crystal wafer visual inspection working face of required illumination, described each hot spot around 4 outputs of formula LED luminescent device reflector, overlaps with the hot spot of described central point LED luminescent device reflector 3 outputs; Described strut, lamp housing, central point LED luminescent device, a plurality of around formula LED luminescent device and a plurality of reflector, be integrally formed the spotlight lamp of formula.
As seen from the figure, a plurality of around formula LED luminescent device reflector 4 centered by central point LED luminescent device reflector 3, be distributed on the circumference that Yi Geyici center is the center of circle.
What in above-mentioned two figure, provide is to adopt the signal that forms a high brightness hot spot in 9 low-angle light source projects to planes, and it sets the angle of each light source according to the brightness of required hot spot and size, forms the spotlight lamp of integral type.
In Fig. 3, a plurality of longitudinal center's axis around formula LED luminescent device reflector, with the setting that has angle of the bottom surface of lamp housing, form respectively one to the light projector passage of lamp housing central axis tilt alpha angle.
In other words, be positioned at around longitudinal center's axis of each reflector on formula LED luminescent device, towards longitudinal center's axis of described lamp housing, tilt.That is: each is around longitudinal center's axis of each reflector on formula LED luminescent device, with the setting that has angle of longitudinal center's axis of described lamp housing.
As concrete processing technology, during Practical manufacturing, lamp housing inside is provided with clinoplain, and this angle is the setting angle of reflector, that is the angle between longitudinal center's axis of each reflector and longitudinal center's axis of lamp housing.
Above-mentioned angular range is 0～20 degree, can need to regulate or convert according to the distance between the semiconductor crystal wafer visual inspection working face of on-the-spot light fixture and required illumination and illumination; In other words, can, according to the brightness of required hot spot and size, set each around the angle of each reflector on formula LED luminescent device.
As seen from the figure, the lamp housing back side (being aforesaid lamp housing upper surface) adopts smooth planar structure, and installation of heat radiator or radiating module group according to actual needs, to provide good Cooling Solution.In like manner, lamp housing adopts metal material structure, contributes to strengthen whole thermolysis, is also convenient to manufacture processing.
In Fig. 4, reflector is a frustum-like shape member, and the upper open end of its reflector is connected with the lower end of lamp housing; The lower open end of reflector arranges towards semiconductor crystal wafer visual inspection working face.
As seen from the figure, the reflector in the technical program, is exactly in fact a kind of low-angle reflector to those skilled in the art, because it is prior art, therefore its concrete reflective mechanism and light projector structure are not described in detail in this.
As seen from the figure, at the upper open end outer surface of reflector, be provided with screw-type syndeton or rotary bayonet formula syndeton (in figure, with screw-type syndeton 7, representing); Corresponding, lower surface at lamp housing, also be provided with corresponding screw-type syndeton or rotary bayonet formula syndeton, by screw thread rotation cooperation or buckle rotation cooperation between the two, be used for fixedly position and the angle of reflector, the upper open end of reflector be securely fixed on the lower surface of lamp housing.
In Fig. 5, LED luminescent device 5 is positioned at the center of corresponding reflector upper open end, reason based on manufacturing structure, periphery at LED luminescent device, be provided with conductor wiring hole 6-1,6-2, the power line of LED luminescent device passes from this hole, can adopt so the external version of driving power, is conducive to improve the utilization rate of electrical of power supply and adopts reasonably concentrate heat sink conception.
In Fig. 6, the technical program by multi beam low-angle fluorescent tube (comprise central point LED luminescent device and be looped around its around around formula LED luminescent device) light that sends, by central point LED luminescent device reflector 3 with around guiding and the constraint of formula LED luminescent device reflector 4, converge in a plane (being aforesaid semiconductor crystal wafer visual inspection working face), form high brightness hot spot 8, to meet the required illumination needs of semiconductor crystal wafer visual inspection.
Because adopting LED light source, the utility model replaces traditional high strength mercury lamp as the radiation source of semiconductor crystal wafer visual inspection, there is Fast Starting, fast response time, long service life, power consumption is low, energy-conserving and environment-protective, it adopts integrated light shell structure, and its lamp housing is reflector fixedly, again can be as thermal component, the technical program can improve whole work efficiency and the quality of visual inspection work, and its production and assembly are convenient, good heat dissipation effect.
The utility model can be widely used in the Design and manufacture field that lamp is used in semiconductor crystal wafer visual inspection.
Claims (9)
1. a semiconductor crystal wafer visual inspection lamp, comprises for supporting the strut and the lamp housing that is arranged on strut end of lamp housing, it is characterized in that:
Described lamp housing is a cylinder or round table-like structure;
In the lower surface of lamp housing, be provided with several LED luminescent devices;
Wherein, at least one LED luminescent device is arranged in longitudinal center's axial location of lamp housing, forms central point LED luminescent device; Remaining LED luminescent device arranges around described central point LED luminescent device, forms a plurality of around formula LED luminescent device;
On the position of each described LED luminescent device, correspondence arranges a reflector;
On the semiconductor crystal wafer visual inspection working face of required illumination, described each hot spot around the output of formula LED luminescent device reflector, overlaps with the hot spot of described central point LED luminescent device reflector output;
Described strut, lamp housing, central point LED luminescent device, a plurality of around formula LED luminescent device and a plurality of reflector, be integrally formed the spotlight lamp of formula.
2. according to semiconductor crystal wafer visual inspection lamp claimed in claim 1, it is characterized in that each described LED luminescent device is positioned at the center of each reflector upper open end of described correspondence.
3. according to semiconductor crystal wafer visual inspection lamp claimed in claim 1, it is characterized in that described reflector is a frustum-like shape member, the upper open end of its reflector is connected with the lower end of described lamp housing; The lower open end of described reflector arranges towards semiconductor crystal wafer visual inspection working face.
4. according to semiconductor crystal wafer visual inspection lamp claimed in claim 1, it is characterized in that described a plurality of longitudinal center's axis around formula LED luminescent device reflector, with the setting that has angle of the bottom surface of described lamp housing, form respectively a light projector passage tilting to lamp housing central axis.
5. according to semiconductor crystal wafer visual inspection lamp claimed in claim 1, it is characterized in that being positioned at longitudinal center's axis of described each reflector on formula LED luminescent device, towards longitudinal center's axis inclination of described lamp housing; Described each longitudinal center's axis around each reflector on formula LED luminescent device, with the setting that has angle of longitudinal center's axis of described lamp housing.
6. according to the semiconductor crystal wafer visual inspection lamp described in claim 4 or 5, it is characterized in that described angular range is 0～20 degree.
7. according to semiconductor crystal wafer visual inspection lamp claimed in claim 1, it is characterized in that described each longitudinal center's axis around formula LED luminescent device reflector, on described semiconductor crystal wafer visual inspection working face, intersect with longitudinal center's axis of described lamp housing.
8. according to semiconductor crystal wafer visual inspection lamp claimed in claim 1, it is characterized in that between the upper open end and lamp housing of described reflector, correspondence is provided with screw-type syndeton or rotary bayonet formula syndeton.
9. according to semiconductor crystal wafer visual inspection lamp claimed in claim 1, it is characterized in that the upper surface at described lamp housing, radiating module or radiating module group are set.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420147719.3U CN203797422U (en) | 2014-03-28 | 2014-03-28 | Visual inspection lamp for semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420147719.3U CN203797422U (en) | 2014-03-28 | 2014-03-28 | Visual inspection lamp for semiconductor wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203797422U true CN203797422U (en) | 2014-08-27 |
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ID=51379631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420147719.3U Expired - Fee Related CN203797422U (en) | 2014-03-28 | 2014-03-28 | Visual inspection lamp for semiconductor wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203797422U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104696733A (en) * | 2013-12-09 | 2015-06-10 | 欧普照明股份有限公司 | Illumination lamp and illumination module thereof |
| CN112334704A (en) * | 2018-04-09 | 2021-02-05 | 恩塔设计公司 | Lamp with movable pattern illumination |
-
2014
- 2014-03-28 CN CN201420147719.3U patent/CN203797422U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104696733A (en) * | 2013-12-09 | 2015-06-10 | 欧普照明股份有限公司 | Illumination lamp and illumination module thereof |
| CN112334704A (en) * | 2018-04-09 | 2021-02-05 | 恩塔设计公司 | Lamp with movable pattern illumination |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140827 Termination date: 20160328 |
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| CF01 | Termination of patent right due to non-payment of annual fee |