CN203786466U - Liquid tank and photoresist stripping equipment - Google Patents
Liquid tank and photoresist stripping equipment Download PDFInfo
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- CN203786466U CN203786466U CN201420003851.7U CN201420003851U CN203786466U CN 203786466 U CN203786466 U CN 203786466U CN 201420003851 U CN201420003851 U CN 201420003851U CN 203786466 U CN203786466 U CN 203786466U
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- 239000007788 liquid Substances 0.000 title claims abstract description 131
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 46
- 238000001914 filtration Methods 0.000 claims abstract description 153
- 238000004064 recycling Methods 0.000 claims description 51
- 238000004458 analytical method Methods 0.000 claims description 21
- 238000011084 recovery Methods 0.000 claims description 15
- 239000000470 constituent Substances 0.000 claims description 9
- 239000012535 impurity Substances 0.000 abstract description 34
- 239000000758 substrate Substances 0.000 abstract description 21
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 description 12
- 239000000203 mixture Substances 0.000 description 12
- 239000012530 fluid Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 239000007921 spray Substances 0.000 description 6
- 239000000356 contaminant Substances 0.000 description 4
- 239000000284 extract Substances 0.000 description 4
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000010842 industrial wastewater Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
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Abstract
The utility model provides a liquid tank which comprises a main tank, wherein the liquid tank further comprises a filtering device which can filter liquid flowing in the main tank. The utility model further provides photoresist stripping equipment. The filtering device can filter the liquid flowing in the main tank. When the liquid tank is used as a stripping liquid tank of the photoresist stripping equipment, the stripping liquid flowing in the main tank can be filtered, so that the content of photoresist and other impurities in the stripping liquid can be reduced, the generation times of the plugging of a suction pump and the running stop of the system can be decreased, the photoresist residues on a substrate can be reduced, and further the quality of products can be improved.
Description
Technical field
The utility model relates to the processing of photoresist, particularly, relates to a kind of flow container and a kind of photoresist lift off equipment.
Background technology
TFT(Thin Film Transistor, Thin Film Transistor (TFT)) manufacture craft of array base palte comprises the steps such as cleaning, sputter, photoresist coating, exposure, development, etching and photoresist lift off.Photoresist lift off is to remove the photoresist on substrate with stripper.
As shown in Figure 1 be existing photoresist lift off equipment, stripper directly injects in flow container, after in flow container, 11 heating of process heating member and ebullator 13 stir, extract by suction pump 12, after filtrator 15 filters, substrate 2 is sprayed, to remove substrate 2 photoresist above, the stripper after spray directly flow back in flow container, cycle applications within the regular hour.
Before filtering through filter 15, in stripper, be mixed with the impurity such as photoresist.When the stripper in described flow container is extracted in suction pump 12, impurity can stop up suction pump 12, causes system out of service.
Therefore, how to reduce system out of service become this area technical matters urgently to be resolved hurrily.
Utility model content
The purpose of this utility model is to provide a kind of flow container and a kind of photoresist lift off equipment, makes the suction pump of described photoresist lift off equipment be difficult for blocked.
To achieve these goals, as an aspect of the present utility model, provide a kind of flow container, described flow container comprises main tank, and wherein, described flow container also comprises filtration unit, and described filtration unit can filter the liquid flowing in described main tank.
Preferably, described filtration unit comprises the first filtration members, and this first filtration members covers the cross section of the inner chamber of described main tank.
Preferably, described filtration unit also comprises the filtration roller of paired setting, in filtration roller every pair described, a filtration roller is rotatably installed in a side of described main tank, another filtration roller is rotatably installed in the opposite side of described main tank, one end of described the first filtration members is wrapped on a described filtration roller, and the other end is wrapped in described in another and filters on roller.
Preferably, described filtration unit also comprises the second filtration members that is arranged on described the first filtration members below, and this second filtration members covers the cross section of the inner chamber of described main tank.
Preferably, described flow container also comprises analytical equipment, indicating device and the controller that can carry out constituent analysis to the liquid filtering through described filtration unit, described analytical equipment and described indicating device are all electrically connected with described controller, and described indicating device comprises the first pilot lamp, the second pilot lamp and the 3rd pilot lamp.
Preferably, described flow container also comprises recycling can and is arranged on the discharge control valve on the tank skin of described main tank, and described discharge control valve is electrically connected with described controller, and described recycling can is optionally communicated with described main tank by described discharge control valve.
Preferably, described flow container also comprises the recovery pump being connected between described main tank and described recycling can, and this recovery pump is electrically connected with described controller.
Preferably, described flow container also comprises ebullator, and described circulation delivery side of pump and entrance are all communicated with described recycling can.
Preferably, described flow container also comprises suction pump and the 3rd filtration members, and described suction pump is communicated with described recycling can, so that the liquid in described recycling can is extracted, described the 3rd filtration members is arranged on the outside of described recycling can, to filter the liquid flowing out from described suction pump outlet.
As another aspect of the present utility model, a kind of photoresist lift off equipment is provided, this photoresist lift off equipment comprises flow container, wherein, described flow container is above-mentioned flow container provided by the utility model.
In the utility model, described filtration unit can filter the liquid flowing in described main tank.When described flow container as described photoresist lift off equipment peel off flow container time, can filter the stripper flowing in described main tank, thereby the photoresist in minimizing stripper and the content of other impurity, reduce suction pump obstruction and system generation out of service, reduce photoresist on substrate residual simultaneously, and then improve the quality of products.
Brief description of the drawings
Accompanying drawing is to be used to provide further understanding of the present utility model, and forms a part for instructions, is used from explanation the utility model, but does not form restriction of the present utility model with embodiment one below.In the accompanying drawings:
Fig. 1 is existing photoresist lift off device structure schematic diagram;
Fig. 2 is the photoresist lift off device structure schematic diagram in the utility model.
Description of reference numerals
1: spray equipment; 2: substrate; 4: main tank; 5: filtration unit; 501: the first filtration members; 502: filter roller; 503: the second filtration members; 6: analytical equipment; 7: indicating device; 701: the first pilot lamp; 702: the second pilot lamp; 703: the three pilot lamp; 8: recycling can; 9: recovery pump; 11: heating member; 12: suction pump; 13: ebullator; 14: the three filtration members; 15: filtrator.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is elaborated.Should be understood that, embodiment described herein only, for description and interpretation the utility model, is not limited to the utility model.
As an aspect of the present utility model, as shown in Figure 2, provide a kind of flow container, this flow container comprises main tank 4, and wherein, described flow container also comprises filtration unit 5, and the liquid that this filtration unit 5 can convection current be become owner of in tank 4 filters.
In the utility model, flow into stripper in main tank 4 after filtration unit 5 filters, the impurity containing in liquid reduces, and therefore can recycle liquid, improves the utilization factor of liquid.And in actual applications, the liquid that filtration unit 5 can convection current be become owner of in tank 4 filters, so in the time of recycling liquid, the liquid that suction pump is extracted has passed through the filtration of filtration unit 5, impurities is less, is therefore not easy to stop up suction pump.
Flow container described in the utility model can be for photoresist lift off device.That is, described liquid can be stripper, and the stripper that filtration unit 5 can convection current be become owner of tank 4 (filters, so in the time of recycling stripper, the stripper that suction pump is extracted has passed through the filtration of filtration unit 5, and impurities is less, is therefore not easy to stop up suction pump.
In the utility model, the concrete form of filtration unit 5 is not construed as limiting, filter as long as can convection current become owner of the liquid of tank 4.
As a kind of preferred implementation of the present utility model, as shown in Figure 2, filtration unit 5 comprises the first filtration members 501, the first filtration members 501 covers the cross section of the inner chamber of main tank 4, the liquid that makes to flow into main tank 4 first filtration members 501 of can all flowing through, with by impurity filtering larger volume in liquid.
The first filtration members 501 can be filter paper, also can have for screen pack or other structure etc. of filtration.
When the impurity that has served as on the first filter part 501 accumulation reaches some, can change the first filtration members 501.For the ease of the first filtration members 501 is changed, the first filtration members 501 can be removably disposed on main tank 4.In order to be further convenient to that filtration members 501 is changed, as shown in Figure 2, filtration unit 5 can also comprise the filtration roller 502 of paired setting, filter in roller at every pair, a filtration roller 502 is rotatably installed in a side of main tank 4, another filtration roller 502 is rotatably installed in the opposite side of main tank 4, and one end of the first filtration members 501 is wrapped in one and filters on roller 502, and the other end is wrapped in another and filters on roller 502.
Should be understood that, filtration unit 5 can comprise a pair of filtration roller 502, also can comprise multipair filtration roller 502.
Particularly, filter in roller at every pair, in the time that one of them filtration roller 502 rotates, used part in the first filtration members 501 can be wrapped in to this filters on roller 502, the first filtration members 501 drives another filtration roller 502 to rotate simultaneously, be unfolded being wrapped in another first filtration members 501 of filtering on roller 502, make to cover without the part using in the first filtration members 501 cross section of the inner chamber of main tank 4.
For the ease of changing the first filtration members, preferably, filtration roller 502 can be arranged on to the outside of main tank 4.
Further, filtration unit 5 can also comprise the second filtration members 503 that is arranged on the first filtration members 501 belows, the second filtration members 503 covers the cross section of the inner chamber of main tank 4, the liquid filtering through the first filtration members 501 can filter through the second filtration members 503, further to reduce the content of impurities in liquid.Should be understood that, the contaminant size that the contaminant size that the second filtration members 503 can be filtered is filtered than the first filtration members 501 is little.Utilize the first filtration members 501 to carry out coarse filtration to liquid, utilize the second filtration members 503 to carry out essence to liquid and filter, thereby make to filter impurity contained in the liquid obtaining still less through filtration unit 5.
Particularly, the second filtration members 503 can be filter paper, also can have for screen pack or other filtration members of filtration.In the utility model, the installation form to the second filtration members 503 is also not specifically limited, and for example, can adopt the mode similar to the first filtration members 501 is installed that the second filtration members 503 is installed.
After the filtration of the first filtration members 501, the content of the impurity in liquid has been less than the content of impurity before the first filtration members 501 is filtered, and the second filtration members 503 can have simple installation form, preferably, as shown in Figure 2, the second filtration members 503 can be set directly in main tank 4.
In order to judge the composition (being mainly impurity content) of liquid, further, described flow container can also comprise analytical equipment 6, and this analytical equipment 6 can carry out constituent analysis to the liquid filtering through filtration unit 5.Can the liquid after can filtering according to the judgement of constituent analysis result reuse.For example, in the time that described liquid is stripper, can use the liquid that can be repeated to utilize to carry out photoresist lift off to substrate 2, and the liquid that can not be repeated to utilize is discharged main tank 4 and is processed.
Analytical equipment 6 can have entrance and exit, as a kind of embodiment of the present utility model, the entrance and exit of analytical equipment 6 is all communicated with main tank 4, and the fluid sample installing after filtration after 5 filtrations gathering in main tank 4 flows into this analytical equipment 6 by the entrance of analytical equipment 6; The fluid sample carrying out after constituent analysis flows back to main tank 4 by the outlet of analytical equipment 6.As another kind of embodiment of the present utility model, only the entrance of analytical equipment 6 is communicated with main tank 4, the fluid sample gathering in main tank 4 installs by analysis 6 entrance and flows into this analytical equipment, judge by analysis after the composition of the fluid sample after filtration, by the outlet of analytical equipment 6, fluid sample is discharged to analytical equipment 6.
In the utility model, the concrete form of analytical equipment 6 is not had to particular restriction, as long as can judge the composition that installs after filtration the liquid obtaining after 5 filtrations in main tank 4.For example, in analytical equipment 6, can be provided with plurality of reagents, after the liquid contact reaction of heterogeneity, described reagent can demonstrate different colors.
Judge the composition of the liquid after filtration for the ease of operator, further preferably, described flow container can also comprise indicating device 7 and controller, analytical equipment 6 and indicating device 7 are all electrically connected with described controller, described controller can be indicated accordingly according to the analysis result control indicating device 7 of analytical equipment 6, and according to analysis result, the liquid after filtering is processed accordingly.
Particularly, the indicator signal of indicating device 7 can be the signal that light signal, voice signal or other have indicative function, corresponding, and the structure of indicating device 7 can comprise that light emitting source, acoustical generator or other can produce the element of indicator signal.
Preferably, as shown in Figure 2, indicating device 7 can comprise the first pilot lamp 701 and the second pilot lamp 702, the composition of the liquid after described controller filters according to the analysis result judgement of analytical equipment 6 is in usable range time, described controller control the first pilot lamp 701 is luminous, the composition of the liquid after described controller filters according to the analysis result judgement of analytical equipment 6 is in unavailable scope time, and described controller control the second pilot lamp 702 is luminous.For the ease of operator's judgement, the first pilot lamp 701 and the second pilot lamp 702 can send the pilot light of different colours.For example, the first pilot lamp 701 can send green pilot light, and the second pilot lamp 702 can send red pilot light.
Be understandable that, the first pilot lamp 701 and the second pilot lamp 702 are controlled by described controller, and described controller can be PLC(programmable logic controller (PLC)).Can set in advance described usable range and described unavailable scope by described controller." usable range " refers to that impurity contained in the liquid after filtration is less, even if re-use, the impurity in liquid can not stop up suction pump yet, also can on substrate, not produce more residual." unavailable scope " refers to that impurity contained in the liquid after filtration is more, cannot re-use.
In the time that the content of the impurity in the liquid through filtering is less than critical range, can judge that the composition of the liquid through filtering is at described " in usable range "; In the time that the content of the impurity in the liquid through filtering is greater than predetermined critical scope, can judge that the composition of the liquid through filtering is in described " in unavailable scope ".
Introduce below " usable range " and described " unavailable scope " described in how to confirm.For example, get the liquid that can normally use of same weight and the liquid that can not normally use, and detect respectively the weight of impurities in two kinds of liquid, scope between the content of the impurities in liquid that can normally use and the content of the impurities in liquid that can not normally use is critical range, in order to divide usable range and unavailable scope.In other words, be respectively 5 grams and 10 grams if detect impurities in 100 grams of liquid that can normally use and 100 grams of liquid that can not normally use, so, critical range is: 5%～10%(is containing end points).
Should be understood that, described " liquid that can normally use " refers to can there is not the residual liquid of photoresist in some cycles, and relatively, described " liquid that can not normally use " refers in some cycles, and the residual liquid of photoresist can occur.
It is to be noted, described " cycle " refers to the liquid time of use or the number of times of liquid-circulating use continuously, preferably, liquid uses 2400 minutes continuously or liquid-circulating uses 5000 times (in the time that described liquid is stripper, liquid-circulating use refers to for 5000 times carries out photoresist lift off to 5000 substrates), in other words, described " the liquid liquid that can normally use " refers to continuous use 2400 minutes or recycles 5000 times and substantially can not occur in the residual liquid of photoresist on substrate, described " liquid that can not normally use " refers to continuous use 2400 minutes or recycles 5000 meetings and occur in the residual liquid of photoresist on substrate.And above-mentioned " substantially can not occur " refer to after photoresist lift off completes, there will be unavoidably the still residual a small amount of photoresist of substrate that scribbles large area lithography glue, only otherwise affect the use of substrate.
In practical application, detect the ratio of the impurities in liquid after filtration unit 5 filters by analytical equipment 6, and export this ratio to described controller, the above-mentioned also residing scope of ratio (comprising usable range and unavailable scope) of middle impurity of peeling off of described controller inter-process unit judges, and judge signal accordingly to indicating device 7 outputs, indicating device 7 provides corresponding instruction according to this signal, thereby and judges that can the liquid filtering through filtration unit 5 continue to use.
Further, indicating device 7 can also comprise the 3rd pilot lamp 703, the composition of the liquid after described controller filters according to the analysis result judgement of analytical equipment 6 between usable range and unavailable scope (, described critical range) time, described controller control the 3rd pilot lamp 703 is luminous.For the ease of observing, the 3rd pilot lamp 703 can send the light that color is different from the first pilot lamp 701 and the second pilot lamp 702.For example, the first pilot lamp 701 can send green glow, and the second pilot lamp 702 can send ruddiness, and the 3rd pilot lamp can send gold-tinted.
Can utilize the liquid between usable range and unavailable scope to process the more substrate of photoresist, to improve the utilization rate of liquid.
Further, described flow container can also comprise the discharge control valve on the tank skin that is arranged on main tank 4, described discharge control valve is electrically connected with described controller, liquid after described controller filters according to the analysis result judgement of analytical equipment 6 is in unavailable scope time, described in described controller control, discharge control valve is opened, so that the liquid in main tank 4 is discharged.For the ease of the discharge of liquid, preferably, described discharge control valve can be arranged on the diapire of main tank 4.Hold intelligiblely, discharge control valve is herein solenoid valve.
Further, as shown in Figure 2, described flow container can also comprise recycling can 8, and when the liquid when described controller judges filtration according to the analysis result of analytical equipment 6 after is available, the liquid after described filtration can flow into recycling can 8 to reuse.
Should be understood that, can inlet porting and outlet on recycling can 8.In the time there is no operable liquid in recycling can 8, can by described entrance from the external world to the interior injection of recycling can 8 without use liquid; In the time that flow container is out of service or recycling can 8 is cleaned, can the liquid in recycling can 8 (stripper or other cleaning liquids) be discharged to recycling can 8 by described outlet.
In the utility model, the mode that the liquid in usable range in main tank 4 is entered to recycling can 8 does not have special restriction.For example, can utilize conduit that main tank and recycling can are communicated with, and switch valve is set in conduit, in the time that controller judges that according to the analysis result of analytical equipment liquid is in usable range, gauge tap valve is opened, and makes the liquid in usable range flow to recycling can from main tank.
As a kind of preferred implementation of the present utility model, described flow container can also comprise the recovery pump 9 being connected between main tank 4 and recycling can 8, particularly, in order to carry out more easily the extraction of liquid, as shown in Figure 2, the entrance of recovery pump 9 can be arranged on the position near the diapire of main tank 4, recovery pump 9 is electrically connected with described controller, liquid after described controller filters according to the analysis result judgement of analytical equipment 6 is in usable range time, described controller control recovery pump 9 is opened, liquid after main tank 4 inner filtrations is extracted to recycling can 8 to reuse by recovery pump 9.
Further, but described liquid is while being stripper, and described flow container can also comprise heating member 11, and particularly, as shown in Figure 2, heating member 11 is arranged in recycling can 8, so that the liquid of recycling can 8 is heated.Can set heating-up temperature according to concrete stripping technology.
In the utility model, concrete structure and quantity to heating member 11 are not construed as limiting, and in order to accelerate firing rate, as shown in Figure 2, multiple heating members 11 can be set.
Further, described flow container can also comprise ebullator 13, preferably, as shown in Figure 2, the outlet of ebullator 13 and entrance all can be communicated with recycling can 8, and the entrance of ebullator 13 is near heating member 11, the outlet of ebullator 13 is away from heating member 11, make the higher part of temperature of the liquid in recycling can 8 after ebullator 13 extracts, get back to the top of recycling can 8, mix with the part that temperature in liquid is lower, thereby make the temperature of liquid more even.
Further, described flow container can also comprise suction pump 12, and particularly, as shown in Figure 2, suction pump 12 is communicated with recycling can 8, so that the liquid in recycling can 8 is extracted.Suction pump 12 is sent in spray equipment 1 after the liquid in recycling can 8 is extracted out, so that substrate 2 is sprayed.Because the composition of the liquid in recycling can 8 is all in usable range, therefore suction pump 12 is not easy blocked.
The liquid that suction pump 12 is extracted out can directly use, and also can after filtration or other processing, re-use, preferably, as shown in Figure 2, described flow container can also comprise that the 3rd filtration members 14, the three filtration members 14 arrange the outside of recycling can 8, to filter the liquid flowing out from the outlet of suction pump 12.Should be understood that, the liquid that suction pump 12 is extracted out is liquid after twice filtration or without the liquid using, impurities is less than impurities in the liquid before filtering for the first time before and filtering for the second time, therefore the contaminant size that the contaminant size that, the 3rd filtration members 14 can be filtered is filtered than the second filtration members 503 is little.
The workflow of a kind of preferred implementation in the utility model is described below in conjunction with Fig. 2.Shown in Fig. 2 is a kind of photoresist lift off device, and described liquid is stripper.
As shown in Figure 2, while thering is no operable liquid in recycling can 8, liquid without using is injected in recycling can 8, be arranged at heating member 11 in recycling can 8 to the heating liquid in recycling can 8, after ebullator 13 extracts the liquid in recycling can 8, discharge in Huis closed cans 8 simultaneously, make the temperature of liquid more even, simultaneously, suction pump 12 is extracted the liquid in recycling can 8 filter with filtering partial impurities through the 3rd filtration members 14 out, and the liquid after filtration starts substrate 2 to carry out photoresist lift off.
After photoresist lift off completes, impurity on substrate 2 flows in main tank 4 with the liquid after using, after the filtration for the first time of the first filtration members 501, partial impurities is by filtering, the second filtration members 503 is filtered for the second time to the liquid after the first filtration members 501 is filtered, thereby crosses filtering ratio more impurity for the first time.After filtration completes, a small amount of fluid sample flows into analytical equipment 6 to carry out constituent analysis by the entrance of analytical equipment 6, and is flowed out not re-use by the outlet of analytical equipment 6 after constituent analysis finishes.Described controller judges the analysis result of analytical equipment 6 according to the usable range and the unavailable scope that set in advance, in the time judging that described fluid sample is in usable range, described controller control the first pilot lamp 701 sends green glow, control recovery pump 9 simultaneously and open, recovery pump 9 by filter after Liquid extracting to recycling can 8; In the time judging that described fluid sample is in unavailable scope, described controller control the second pilot lamp 702 sends ruddiness, controls described discharge control valve simultaneously and opens, to make liquid flow out main tank 4; In the time judging that described fluid sample is between usable range and unavailable scope, described controller control the 3rd pilot lamp 703 sends gold-tinted, control recovery pump 9 simultaneously and open, recovery pump 9 by filter after Liquid extracting to recycling can 8.By recovery pump 9 be pumped to liquid in recycling can 8 processing procedure in recycling can 8 with without using the processing procedure of the liquid of directly putting into recycling can 8 identical, repeat no more here.Liquid through heating extracts through suction pump 12, and after the 3rd filtration members 14 is filtered, enters spray equipment 1 substrate 2 is sprayed.Said process is the once circulation of liquid in described flow container.
In above-mentioned embodiment, liquid after use flows in main tank 4, filter out partial impurities through the first filtration members 501 and the second filtration members 503, liquid after filtration carries out constituent analysis by analytical equipment 6, and described controller uses accordingly according to described constituent analysis output control liquid, reduces the content of impurities in liquid, thereby reduce the generation that suction pump 12 is stopped up, improve the utilization factor of liquid, the photoresist on minimizing substrate 2 is residual, and then improves the quality of products simultaneously.
Although above described the course of work and the principle of flow container provided by the utility model as an example of processing stripper example, one skilled in the art will appreciate that flow container provided by the utility model also can be for the treatment of other liquid.For example, described flow container can be for the treatment of industrial waste water etc.
As on the other hand of the present utility model, a kind of photoresist lift off equipment is provided, this photoresist lift off equipment comprises flow container, wherein, described flow container is flow container provided by the utility model, liquid in described flow container is stripper, and this stripper sprays substrate by the spray equipment of described photoresist lift off equipment, thereby realizes peeling off of photoresist.
In described photoresist lift off equipment, described flow container can filter stripper, reduce the content of impurity in stripper, thereby minimizing system generation out of service, and can use accordingly stripper according to the composition of stripper, extend the life cycle of stripper, reduce photoresist on substrate residual simultaneously, thereby improve the quality of products.
Be understandable that, above embodiment is only used to principle of the present utility model is described and the illustrative embodiments that adopts, but the utility model is not limited to this.For those skilled in the art, in the situation that not departing from spirit of the present utility model and essence, can make various modification and improvement, these modification and improvement are also considered as protection domain of the present utility model.
Claims (10)
1. a flow container, described flow container comprises main tank, it is characterized in that, and described flow container also comprises filtration unit, and described filtration unit can filter the liquid flowing in described main tank.
2. flow container according to claim 1, is characterized in that, described filtration unit comprises the first filtration members, and this first filtration members covers the cross section of the inner chamber of described main tank.
3. flow container according to claim 2, it is characterized in that, described filtration unit also comprises the filtration roller of paired setting, in filtration roller every pair described, a filtration roller is rotatably installed in a side of described main tank, another filters roller and is rotatably installed in the opposite side of described main tank, and one end of described the first filtration members is wrapped on a described filtration roller, and the other end is wrapped in described in another and filters on roller.
4. flow container according to claim 2, is characterized in that, described filtration unit also comprises the second filtration members that is arranged on described the first filtration members below, and this second filtration members covers the cross section of the inner chamber of described main tank.
5. according to the flow container described in any one in claim 1 to 4, it is characterized in that, described flow container also comprises analytical equipment, indicating device and the controller that can carry out constituent analysis to the liquid filtering through described filtration unit, described analytical equipment and described indicating device are all electrically connected with described controller, and described indicating device comprises the first pilot lamp, the second pilot lamp and the 3rd pilot lamp.
6. flow container according to claim 5, it is characterized in that, described flow container also comprises recycling can and is arranged on the discharge control valve on the tank skin of described main tank, and described discharge control valve is electrically connected with described controller, and described recycling can is optionally communicated with described main tank by described discharge control valve.
7. flow container according to claim 6, is characterized in that, described flow container also comprises the recovery pump being connected between described main tank and described recycling can, and this recovery pump is electrically connected with described controller.
8. flow container according to claim 6, is characterized in that, described flow container also comprises ebullator, and described circulation delivery side of pump and entrance are all communicated with described recycling can.
9. flow container according to claim 6, it is characterized in that, described flow container also comprises suction pump and the 3rd filtration members, described suction pump is communicated with described recycling can, so that the liquid in described recycling can is extracted, described the 3rd filtration members is arranged on the outside of described recycling can, to filter the liquid flowing out from described suction pump outlet.
10. a photoresist lift off equipment, this photoresist lift off equipment comprises flow container, it is characterized in that, described flow container is the flow container described in any one in claim 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420003851.7U CN203786466U (en) | 2014-01-03 | 2014-01-03 | Liquid tank and photoresist stripping equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420003851.7U CN203786466U (en) | 2014-01-03 | 2014-01-03 | Liquid tank and photoresist stripping equipment |
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| CN203786466U true CN203786466U (en) | 2014-08-20 |
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| CN201420003851.7U Expired - Fee Related CN203786466U (en) | 2014-01-03 | 2014-01-03 | Liquid tank and photoresist stripping equipment |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108054119A (en) * | 2017-12-06 | 2018-05-18 | 深圳市华星光电半导体显示技术有限公司 | For the stripper board and its method of work of stripping technology |
| CN109692843A (en) * | 2019-02-18 | 2019-04-30 | 合肥京东方显示技术有限公司 | A kind of base plate cleaning device and substrate production equipment |
| CN110639274A (en) * | 2019-09-25 | 2020-01-03 | 京东方科技集团股份有限公司 | Stripping liquid storage tank, photoresist stripping equipment and method |
| CN111045301A (en) * | 2019-11-19 | 2020-04-21 | Tcl华星光电技术有限公司 | Stripping liquid machine table and working method thereof |
| CN111616379A (en) * | 2019-02-27 | 2020-09-04 | 合肥华凌股份有限公司 | Pesticide residue removing device, electrolytic stock solution and household appliance |
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- 2014-01-03 CN CN201420003851.7U patent/CN203786466U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108054119A (en) * | 2017-12-06 | 2018-05-18 | 深圳市华星光电半导体显示技术有限公司 | For the stripper board and its method of work of stripping technology |
| WO2019109460A1 (en) * | 2017-12-06 | 2019-06-13 | 深圳市华星光电半导体显示技术有限公司 | Stripper machine for stripping process, and working method thereof |
| CN108054119B (en) * | 2017-12-06 | 2021-03-23 | 深圳市华星光电半导体显示技术有限公司 | Stripping liquid machine table for stripping process and working method thereof |
| CN109692843A (en) * | 2019-02-18 | 2019-04-30 | 合肥京东方显示技术有限公司 | A kind of base plate cleaning device and substrate production equipment |
| CN109692843B (en) * | 2019-02-18 | 2020-12-01 | 合肥京东方显示技术有限公司 | Substrate cleaning device and substrate production equipment |
| CN111616379A (en) * | 2019-02-27 | 2020-09-04 | 合肥华凌股份有限公司 | Pesticide residue removing device, electrolytic stock solution and household appliance |
| CN110639274A (en) * | 2019-09-25 | 2020-01-03 | 京东方科技集团股份有限公司 | Stripping liquid storage tank, photoresist stripping equipment and method |
| CN111045301A (en) * | 2019-11-19 | 2020-04-21 | Tcl华星光电技术有限公司 | Stripping liquid machine table and working method thereof |
| US11747734B2 (en) | 2019-11-19 | 2023-09-05 | Tcl China Star Optoelectronics Technology Co., Ltd. | Stripping-solution machine and working method thereof |
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