CN203403037U - Light cover conveying box - Google Patents
Light cover conveying box Download PDFInfo
- Publication number
- CN203403037U CN203403037U CN201320341944.6U CN201320341944U CN203403037U CN 203403037 U CN203403037 U CN 203403037U CN 201320341944 U CN201320341944 U CN 201320341944U CN 203403037 U CN203403037 U CN 203403037U
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- light shield
- base
- clamshell
- correcting
- support
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Abstract
The utility model discloses a light cover conveying box. The light cover conveying box comprises at least one base made of a plastic main body material and a shell cover made of the plastic main body material, wherein a storage space for containing a light cover is formed by relatively covering the shell cover and the base; the base is provided with a supporting set for supporting the light cover; the shell cover is internally provided with a pressure guiding set for limiting and guiding the light cover. The rigidity and the antistatic effect of the light cover conveying box can be greatly improved so that the wear resistance and the scraping resistance are improved greatly and the generation of dust or particles is reduced; furthermore, harmful gas containing sulfions, chloridions, sodions, ammonium ions, potassium ions and the like can be reduced so as to prevent a phenomenon of generating hazes on the surface of the light cover and avoid generation of defective products in the follow-up process.
Description
Technical field
The utility model belongs to a kind of transmission, stores the transmission box technical field of light shield, particularly refer to a kind ofly reduce the light shield that obnoxious flavour disengages and transmit box, so as to meeting light shield, transmit the demand of antistatic, protosulphide, abrasion performance and the high-cleanness of box when dust free chamber is used.
Background technology
Be subject to the impact that semiconductor technology is constantly brought forth new ideas and miniaturization develops, utilize the wafer that semiconductor technology is made to be widely used in various fields.Be subject to the impact cheaply of IC miniaturization and system, the size of wafer is increasing, but the wafer number of each wafer is more and more, wafer worth is constantly improved, so in technique, any problem on wafer all may cause great loss.And the gold-tinted technique in general IC technique is a kind of important process that is related to whole yield, and it has an opaque or translucent expectation figure in a light shield surface coated conventionally, for this expectation figure is projected on wafer photoresist layer.Therefore any defect that is attached to light shield surface is all likely projected onto on the photoresist layer of wafer, and causes the appropriate rate of integrated circuit elements finished product or even cannot use.Yet light shield is in semiconductor technology, or because of process materials or process gas or because of storage condition, again or because of the environment of dust free chamber, make to have the pollutents such as numerous particulates and gas ionization molecule in the environment adjacent of light shield, and these pollutents through gather or chemical transformation after, as easy as rolling off a log at light shield in storing and In transit produces the defects such as particulate (Particles) or haze (Haze).
And in semiconductor technology, use automatic material transport system (Automated Material Handling System, AMHS), with isolation input and output material SMIF (Standard Mechanical Interface, SMIF) equipment, carry out light shield in the maintenance between the usage period not with transport, not only can replace Traditional Man carrying, reduce building and maintenance cost of dust free chamber equipment, can also promote the cleanliness factor of light shield, reach superelevation and produce yield, therefore in recent years, to be listed in be the standard equipment standard of international semiconductor factory for AMHS and SMIF.
According to above-mentioned technological concept, except when exposure is used, light shield is between the process of transporting or preservation period, the light shield that all must be placed on a high-cleanness, high, good, the low gas effusion of resistance to air loss (Outgassing) and antistatic protection (ESD) transmits box (Reticle SMIF Pod, RSP) in, to prevent that wafer and light shield from being polluted, guarantee the high-cleanness, high and the high yield of producing of light shield.
And early stage light shield transmission box is mainly to adopt plastic cement material made, for what use, be exactly the most often wherein PP plastics, but yet the made light shield of PP material transmits box the most easily because obnoxious flavour ion disengages (Outgassing), and in light shield surface, occur even because rubbing or colliding, occurring the problems such as grit (particle) adheres to by haze (Haze).
In other words, how to provide that good, the low free son of antistatic effect disengages, the light shield of the demand such as abrasion performance and high-cleanness transmits box, is considerable problem.
Utility model content
In order to solve the problems of the technologies described above, the utility model provides a kind of plastics composite that is applied to wafer/light shield carrier, and it can solve existing wafer/light shield carrier cannot effectively reduce harmful free son disengages and wear resistance is good do not caused inconvenience and puzzlement.
Light shield of the present utility model transmits box, at least includes a base and clamshell, and clamshell can cover with base the parking space that forms an accommodating light shield relatively;
Wherein base is provided with a support group for support one light shield, and in clamshell, is provided with a pilot group, and pilot group limit correcting light shield relative to support group is in light shield transmits the parking space of box.
As optimal technical scheme, wherein, on this base, be formed with the accommodating hole of a plurality of upper and lower connections, and on base, be covered with a metal negative, on this metal negative, be formed with the valve seat of a plurality of corresponding accommodating holes and periphery tool through hole, and base accommodating hole and metal negative valve base chamber are arranged with the air valve that inlet, outlet are used.
As optimal technical scheme, this support group includes two bracketing elements and a rest element, two bracketing component top surface are provided with two for the support piece that is supported in light shield bottom surface, and two support interblocks also have highly lower together supporting spring, two bracketing elements are formed with respectively a plurality of lateral plates that recline for light shield edge in different outside again, and lateral plate medial surface is also formed with the side arrived piece at corresponding light shield edge, and rest element have at least one upwards protrude out lean against sheet, this leans against sheet and reclines for light shield back of the body edge.
As optimal technical scheme, this clamshell end face is provided with leader, and clamshell periphery is provided with a plurality of snap close pieces of selecting buckle base, clamshell internal lock is provided with a metal inner cover again, moreover clamshell inside is in metal inner cover inner side and the synchrolock pilot group of having pulled, pilot group includes a plurality of symmetrically arranged element and correcting elements of pressing, the side that this presses element and correcting element and is located at the corresponding light shield of a pedestal, and press element and on pedestal, be formed with an open-work, and press element and in open-work, be hung with one for the part that compresses that presses light shield, correcting element is divided into the adjacent both sides of the edge, Yu Gai edge, edge that pedestal differs from support group dorsal part rest element again, and by pedestal, the arc bending shape correcting arc sheet to downward-extension is formed correcting element.
The utility model can reach following effect:
Light shield of the present utility model transmits box, so as to reducing obnoxious flavour ion, disengages, and to reduce the haze (Haze) on light shield surface, produces, and avoids light shield to be polluted.
Light shield of the present utility model transmits box, and it can improve the hardness that light shield transmits box, to promote its fastness to rubbing and shock-resistance, transmits the high-cleanness, high demand of box to meet light shield.
Light shield of the present utility model transmits box, so as to having, preferably eliminates electrostatic efficiency, avoids objectionable impurities to adhere to.
Whereby, by representing of aforementioned techniques means, making light shield of the present utility model transmit box plastic cement is partly to utilize the plastic cement material of main part of the polyether-ether-ketone (PEEK) that contains CNT (carbon nano-tube) made, make it can significantly improve its hardness, and promote its wear resistance, scratch resistance significantly improves, the dust or the particulate that reduce material peel off, to reduce the chance of destroying light shield surface, and can provide preferably antistatic effect, further can reduce sulfonium ion simultaneously, chlorion, sodium ion, disengaging of the obnoxious flavour such as ammonium ion and potassium ion ion, to prevent that light shield surface from producing the phenomenon of haze (Haze), avoid producing defective products in subsequent technique, can reduce the number of times of cleaning simultaneously, thereby reduction process costs.Meanwhile, further the supporting spring of the two support interblocks by bracketing element designs, and can avoid light shield directly to clash into base during slippage in moving process, and the unlikely light shield surface that injures, and significantly improves the economic benefit of product.
Accompanying drawing explanation
Fig. 1 is the schematic appearance that light shield of the present utility model transmits box, and it illustrates aspect and the relativeness thereof of each assembly.
Fig. 2 is the schematic appearance that light shield of the present utility model transmits box pilot group device.
Fig. 3 is that light shield of the present utility model transmits the diagrammatic cross-section of box before covering.
Fig. 4 is that light shield of the present utility model transmits the diagrammatic cross-section of box after covering.
Primary clustering nomenclature:
10, base; 11, accommodating hole;
15, metal negative; 16, valve seat;
18, air valve group; 20, support group;
21, bracketing assembly; 22, support piece;
220, supporting spring; 23, lateral plate;
24, side arrived piece; 25, against assembly;
26, lean against sheet; 30, clamshell;
31, handle; 32, snap close piece;
35, metal inner cover; 40, pilot group;
41, pedestal; 42, double-screw bolt;
43, press unit; 44, open-work;
45, compress part; 450, protruding pressure cone piece;
47, correcting unit; 48, correcting arc sheet;
480, arc voltage edge; 50, light shield.
Embodiment
The utility model is that a kind of light shield transmits box, in the illustrative the utility model specific embodiment of the figure that encloses and member thereof, all about front and rear, left and right, top and bottom surface, top and bottom and level and vertical reference, only for being conveniently described, and unrestricted the utility model, also non-its member is limited to any position or direction in space.Specified size in graphic and specification sheets, when can, in not leaving protection domain of the present utility model, changing according to the design of specific embodiment of the utility model and demand.
Light shield of the present utility model transmits the detailed formation of box, please refer to Fig. 1, 2 is shown, it includes a base 10 and a clamshell 30 forms, and clamshell 30 can cover with base 10 parking space that forms an accommodating light shield 50 relatively, base 10 is provided with a support group 20 for support one light shield 50 again, and in clamshell 30, be provided with a pilot group 40, pilot group 40 can limit correcting light shield 50 in light shield transmits the parking space of box relatively with support group 20, and wherein base 10, support group 20, the plastic cement material of clamshell 30 and pilot group 40 is made by a plastic cement material of main part, this plastic cement material of main part is consisted of the polyether-ether-ketone (PEEK) containing CNT (carbon nano-tube) (Carbon nanotubes), and the CNT (carbon nano-tube) of this plastic cement material of main part (Carbon nanotubes) content be 1%～15%(CNT (carbon nano-tube) account for this plastic body material weight 1% ~ 15%), and the CNT (carbon nano-tube) of the utility model preferred embodiment (Carbon nanotubes) content is 2 ﹪～5 ﹪ (CNT (carbon nano-tube) account for this plastic body material weight 2% ~ 5%), and these CNT (carbon nano-tube) can be selected from multi-layer nano carbon pipe or single-walled carbon nanotubes one or its combination wherein, so that base 10, clamshell 30, support group 20 and pilot group 40 have good have superior antistatic, high rigidity, protosulphide, the effect such as abrasion performance and high-cleanness,
Wherein by being formed with the accommodating hole 11 of a plurality of upper and lower connections on the made base 10 of plastic cement material of main part, and on base 10, be covered with a metal negative 15, on this metal negative 15, be formed with the valve seat 16 of a plurality of corresponding accommodating holes 11 and periphery tool through hole, and base 10 accommodating holes 11 and 16 of metal negative 15 valve seats are arranged with the air valve 18 that inlet, outlet are used, wherein the plastic cement material of air valve 18 part also can be selected from plastic cement material of main part;
The support group 20 of being made by this plastic cement material of main part again includes two bracketing elements 21 and a rest element 25, two bracketing element 21 end faces are provided with two for the support piece 22 that is supported in light shield 50 bottom surfaces, support piece 22 can be and reduces the pyramidal of light shield 50 contacts area, and two 22 of support pieces also have highly lower together supporting spring 220, to avoid the direct landing of light shield 50, two bracketing elements 21 are formed with respectively a plurality of lateral plates 23 that recline for light shield 50 edges in different outside again, and lateral plate 23 medial surfaces are also formed with the side arrived piece 24 at corresponding light shield 50 edges, side arrived piece 24 spacing of both sides bracketing element 21 approach light shield 50 width, to reduce the spacing front slippage of light shield 50, moreover aforementioned support piece 22 can be integrative-structure or separate type with bracketing element 21 with side arrived piece 24, for reducing costs, support piece 22 and the side arrived piece 24 of separate type further can be selected from aforementioned wear resistance, the plastic cement material of main part containing CNT (carbon nano-tube) of high rigidity, to reduce peeling off of particulate.Moreover rest element 25 have at least one upwards protrude out lean against sheet 26, this leans against sheet 26 and can recline for light shield 50 back of the body edge, and bracketing element 21 can be selected from identical plastic material or different plastic materials from rest element 25, and bracketing element 21 can be selected from this plastic cement material of main part with the plastic material of rest element 25;
Clamshell 30 end faces that plastic cement material of main part is made are provided with leader 31, and clamshell 30 clamshell 30 peripheries are provided with a plurality of snap close pieces 32 of selecting buckle base 10, clamshell 30 and base 10 alternatives are covered, clamshell 30 internal locks are provided with a metal inner cover 35 again, the periphery bottom of this metal inner cover 35 can contact with base 10 metal negatives 15, and form the accommodation space of a tool electroconductibility, for eliminating static, moreover clamshell 30 inside are in metal inner cover inner side and the synchrolock pilot group 40 of having pulled, aforementionedly by the made pilot group 40 of plastic cement material of main part, include haply a plurality of symmetrically arranged element 43 and correcting elements 47 of pressing, the side that this presses element 43 and correcting element 47 and is located at the corresponding light shield 50 of a pedestal 41, and pedestal 41 end faces are buried the double-screw bolt 42 being formed with for locking part screw lock underground, the aforementioned element 43 that presses can correspondingly be pressed the surface periphery of limitting light shield 50, and press element 43 and on pedestal 41, be formed with an open-work 44, and press element 43 and in open-work 44, be hung with one and compress part 45 for what press light shield 50, this compresses part 45 and has a protruding pressure that is inverted cone shape bores piece 450, contact area with minimizing with light shield 50.Aforementioned correcting element 47 is divided into pedestal 41 and differs from the adjacent both sides of the edge, Yu Gai edge, edge that 20 dorsal part rest element 26 are organized in support again, the sheet 26 that leans against that the correcting element 47 that so can utilize corresponding support to organize 20 openings is pushed light shield 50 to rest element 25 playbacks, the correcting element 47 of both sides can directly press from both sides light shield 50 both sides of pulling, prevent that light shield 50 from transmitting slippage arbitrarily in box transportation in light shield, as for 47 of aforesaid correcting elements, by pedestal 41, the arc bending shape correcting arc sheet 48 to downward-extension is formed, and the side of correcting arc sheet 48 corresponding light shields 50 is also formed with an arc voltage edge 480, for progressively promoting to adjust light shield 50 playback, and the aforementioned protruding pressure cone piece 450 that compresses part 45 can be integrative-structure or separate type, and protruding pressure cone piece 450 further can be selected from aforementioned wear resistance, the plastic cement material of main part that contains CNT (carbon nano-tube) of high rigidity is made, to reduce peeling off of particulate, and can reduce the deflection of finished product, and handle 31 can be selected from identical plastic material or different plastic materials from snap close piece 32, and handle 31 can be selected from this plastic cement material of main part with the plastic material of snap close piece 32.
By aforesaid design, group forms one and has that low obnoxious flavour disengages and the light shield of high rigidity transmits box.
The utility model is when practical application, as Fig. 1, 3, shown in 4, disclose, when light shield 50 is placed in the support group 20 of base 10, support group 20 utilizes the support piece 22 of both sides bracketing element 21 by lower support light shield 50, and light shield 50 is also limited between the side arrived piece 24 of both sides bracketing element 21 (as shown in Figure 3), moreover when clamshell 30 is covered on base 10, on clamshell 30, in pilot group 40, differing from support organizes the correcting arc sheet 48 of 20 rest element 25 and light shield 50 can be passed, make light shield 50 back of the body edge stick to lean against (as shown in Figure 4) on sheet 26 in rest element 25, and provide this light shield 50 suitable return position adjusting function.The correcting arc sheet 48 that is simultaneously positioned at light shield 50 both sides also can synchronously press from both sides the both sides of the edge of the light shield 50 of pulling.Moreover when clamshell 30 utilizes snap close piece 32 to be snapped in base 10 completely, the interior pilot group 40 of clamshell 30 compresses that the protruding pressure of part 45 cone piece 450 is suitable can press light shield 50 surfaces, and the elastic part 45 that compresses can absorb this deflection (as shown in Figure 4), therefore can avoid the problem that the power that presses is excessive or not enough, effectively limit the movement of light shield 50, make light shield 50 be positioned light shield completely and transmit box inside, really can reach and prevent that this light shield 50 from damaging because of collision, simultaneously, further supporting spring 220 designs of 22 of two support pieces by bracketing element 21, can avoid light shield 50 in moving process, directly to clash into base 10 during slippage, and the unlikely light shield surface that injures.
Moreover at least one of them is made by plastic cement material of main part in the base 10, clamshell 30, support group 20 that transmits box due to this light shield and pilot group 40, and this plastic cement material of main part is the polyether-ether-ketone that contains CNT (carbon nano-tube), according to the experimental result of table one;
Table one:
| Test event | The utility model plastic cement composition | The plastic cement composition of pure polyether-ether-ketone |
| Chlorion | N.D. | 0.0044 |
| Sodium ion | 0.0020 | 0.0097 |
| Ammonium ion | N.D. | 0.0010 |
| Potassium ion | N.D. | 0.0089 |
| Sulfate ion | N.D. | N.D. |
| Nitrate ion | N.D. | N.D. |
| Nitrite ion | N.D. | N.D. |
1, testing method is that sample is put 20 minutes with the deionization water logging of 100mL, with ion chromatograph, detects;
2, detection limits is 0.0010;
3, the measured value lower than method detecting limit represents with " N.D. ".
The carrier plastic cement part composition of the utility model wafer/light shield at emissions such as chlorion, sodium ion, ammonium ion and potassium ions far below simple polyether-ether-ketone (PEEK) plastic material, can prevent that these obnoxious flavoures are synthetic in storage process, to avoid the surface of wafer/light shield to produce haze (Haze) phenomenon.Simultaneously, the utility model can significantly improve its hardness and antistatic effect, wear resistance, the scratch resistance of carrier plastic cement part are significantly improved, the dust or the particulate that reduce material peel off, to reduce the chance of destroying wafer or light shield surface, avoid producing defective products in subsequent technique, can reduce the number of times of cleaning simultaneously, thereby reduce process costs.
The above embodiment is only the preferred embodiment for absolutely proving that the utility model is lifted, and protection domain of the present utility model is not limited to this.Being equal to that those skilled in the art do on the utility model basis substitutes or conversion, all within protection domain of the present utility model.Protection domain of the present utility model is as the criterion with claims.
Claims (4)
1. light shield transmits a box, it is characterized in that, at least includes a base and a clamshell, and clamshell can cover with base the parking space that forms an accommodating light shield relatively;
Wherein base is provided with a support group for support one light shield, and in clamshell, is provided with a pilot group, and pilot group limit correcting light shield relative to support group is in light shield transmits the parking space of box.
2. according to light shield claimed in claim 1, transmit box, it is characterized in that, on this base, be formed with the accommodating hole of a plurality of upper and lower connections, and on base, be covered with a metal negative, on this metal negative, be formed with the valve seat of a plurality of corresponding accommodating holes and periphery tool through hole, and base accommodating hole and metal negative valve base chamber are arranged with the air valve that inlet, outlet are used.
3. according to light shield claimed in claim 1, transmit box, it is characterized in that, this support group includes two bracketing elements and a rest element, two bracketing component top surface are provided with two for the support piece that is supported in light shield bottom surface, and two support interblocks also have supporting spring together, two bracketing elements are formed with respectively a plurality of lateral plates that recline for light shield edge in different outside again, and lateral plate medial surface is also formed with the side arrived piece at corresponding light shield edge, and rest element have at least one upwards protrude out lean against sheet, this leans against sheet and reclines for light shield back of the body edge.
4. according to light shield claimed in claim 1, transmit box, it is characterized in that, this clamshell end face is provided with leader, and clamshell periphery is provided with a plurality of snap close pieces of selecting buckle base, clamshell internal lock is provided with a metal inner cover again, moreover clamshell inside is in metal inner cover inner side and the synchrolock pilot group of having pulled, pilot group includes a plurality of symmetrically arranged element and correcting elements of pressing, the side that this presses element and correcting element and is located at the corresponding light shield of a pedestal, and press element and on pedestal, be formed with an open-work, and press element and in open-work, be hung with one for the part that compresses that presses light shield, correcting element is divided into the adjacent both sides of the edge, Yu Gai edge, edge that pedestal differs from support group dorsal part rest element again, and by pedestal, the arc bending shape correcting arc sheet to downward-extension is formed correcting element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320341944.6U CN203403037U (en) | 2013-06-14 | 2013-06-14 | Light cover conveying box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320341944.6U CN203403037U (en) | 2013-06-14 | 2013-06-14 | Light cover conveying box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203403037U true CN203403037U (en) | 2014-01-22 |
Family
ID=49938974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320341944.6U Expired - Lifetime CN203403037U (en) | 2013-06-14 | 2013-06-14 | Light cover conveying box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203403037U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111359113A (en) * | 2018-12-26 | 2020-07-03 | Lg电子株式会社 | Mask storage device and control method thereof |
-
2013
- 2013-06-14 CN CN201320341944.6U patent/CN203403037U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111359113A (en) * | 2018-12-26 | 2020-07-03 | Lg电子株式会社 | Mask storage device and control method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: JIADENG PRECISE INDUSTRY CO., LTD. Free format text: FORMER OWNER: CHEN MINGSHENG Effective date: 20140620 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; TO: TAIWAN, CHINA |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20140620 Address after: The central road Tucheng China Taiwan New Taipei 4 No. 2 9 floor Patentee after: Gudeng Precision Industrial Co.,Ltd. Address before: West side, up South Road, section 158, No. 7, building 6 Patentee before: Chen Mingsheng |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140122 |