CN203371273U - Large-stroke high-precision Z-axis workbench with novel structure - Google Patents

Large-stroke high-precision Z-axis workbench with novel structure Download PDF

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Publication number
CN203371273U
CN203371273U CN201320425819.3U CN201320425819U CN203371273U CN 203371273 U CN203371273 U CN 203371273U CN 201320425819 U CN201320425819 U CN 201320425819U CN 203371273 U CN203371273 U CN 203371273U
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CN
China
Prior art keywords
support
precision
workbench
activity orientation
orientation platform
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201320425819.3U
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Chinese (zh)
Inventor
范伟
金花雪
余卿
叶瑞芳
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Huaqiao University
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Huaqiao University
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Priority to CN201320425819.3U priority Critical patent/CN203371273U/en
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Publication of CN203371273U publication Critical patent/CN203371273U/en
Withdrawn - After Issue legal-status Critical Current
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Abstract

The utility model discloses a large-stroke high-precision Z-axis workbench with a novel structure. The large-stroke high-precision Z-axis workbench with the novel structure comprises a base, a first support, a second support, a movable support rod, a workbench and a precise movable positioning table, wherein the first support and the second support are both arranged on the base; the movable support rod is arranged on the first support and can move vertically; a grating ruler which extends in the vertical direction is fixedly arranged on the movable support rod; the first support is provided with a grating reading head; the precise movable positioning table is arranged on the second support and can move vertically; the lower end of the movable support rod is fixedly connected with the precise movable positioning table; a driving device is arranged specific to the precise movable positioning table. In this way, the center of the workbench, the center of the grating ruler, the center of the grating reading head, and the center of the precise movable positioning table are located in the same straight line, therefore, a zero Abbe error of a system can be realized theoretically, Abbe errors of the system can be reduced to the maximum extent, and requirements of micro-nano measurement and micro-nano processing are met.

Description

The large stroke and high precision Z axis workbench of novel structure
Technical field
The utility model relates to accurate machine construction design field technology, refers in particular to a kind of large stroke and high precision Z axis workbench of novel structure.
Background technology
In fields such as micromachine, ultraprecise processing, miniature assembling, semiconductor devices manufacture and nanometer technologies, all need high-precision location and very meticulous motion, so the Micro-displacement Driving technology becomes the key technology support in these fields.In a lot of application scenarios, need to there is the Z axis workbench of tens of millimeters strokes, nano grade positioning precision at present.The Z axis workbench that meets large range high precision adopts multiple drive power mostly.Large stroke drives with stepper motor, and its stroke is large but positioning precision is not high; And then, by micro-driving of piezoelectric ceramics, realize hi-Fix.So, on structure, between guide pass and between guide pass and work top, larger spacing is all arranged, Abbe error is not easy to control, and can't meet the requirement of micro-nano measurement and micro-nano processing.The driving precision of Z axis drives much lower than the plane of X, Y-axis, be mainly to cause because the driving of round trip is inhomogeneous, therefore need add counterweight.Mostly the counterweight of work on hand platform is to adopt the symmetrical structure of double quality blocks, is difficult to reach gravitational equilibrium, and structure is relative complex also, makes to drive to control to be difficult to uniform and stable.In addition, the Sensor monitoring that traditional Z axle workbench also there is no need the state that drives stroke, so the state adjustment of workbench counterweight also is difficult to real-time ensuring.
The utility model content
In view of this, the utility model is for the disappearance of prior art existence, its main purpose is to provide a kind of large stroke and high precision Z axis workbench of novel structure, and its Abbe error that can effectively solve existing Z axis workbench is not easy to control and can't meets the problem of micro-nano measurement and micro-nano processing request.
Another purpose of the present utility model is to provide a kind of large stroke and high precision Z axis workbench of novel structure, and it can effectively solve existing Z axis workbench difficulty and reach gravitational equilibrium, complex structure and make the problem that is difficult to uniform and stable of controlling that drives.
A purpose more of the present utility model is to provide a kind of large stroke and high precision Z axis workbench of novel structure, and it can effectively solve the problem that existing Z axis workbench lacks necessary Sensor monitoring.
For achieving the above object, the utility model adopts following technical scheme:
A kind of large stroke and high precision Z axis workbench of novel structure, include base, the first support, the second support, movable support rod, workbench and accurate activity orientation platform; This first support and the second support all are arranged on base; This movable support rod can be arranged on the first support up and downly, is installed with the grating scale of vertical extension on this movable support rod, on this first support, is provided with grating reading head; This workbench is fixedly arranged on the upper end of movable support rod; This precision activity orientation platform can be arranged on the second support up and downly, the lower end of this movable support rod is fixedly connected with accurate activity orientation platform, be provided with and drive the up and down drive unit of accurate activity orientation platform for this precision activity orientation platform, this movable support rod and workbench are synchronously up and down with accurate activity orientation platform; And, being centered close on same straight line of the center of the center of this workbench, the center of grating scale, grating reading head and accurate activity orientation platform.
As a kind of preferred version, described accurate activity orientation platform is positioned at a side of the second support, the top of this second support is provided with the fixed pulley support, the both sides of this fixed pulley support are respectively arranged with fixed pulley, wherein a fixed pulley be positioned at accurate activity orientation platform directly over, another fixed pulley is positioned at the top of the second support opposite side, be provided with pull rope on two fixed pulleys, one end of this pull rope is connected with accurate activity orientation platform, the other end of pull rope is connected with pulling force sensor, vertically is hung with balancing weight on this pulling force sensor.
As a kind of preferred version, described fixed pulley support includes vertical regulating block and lateral adjustments piece; Be provided with vertical bar hole on this vertical regulating block, one first adjusting bolt is fixedly connected with the second support through this vertical bar hole; Be provided with horizontal bar hole on this lateral adjustments piece, one second adjusting bolt is fixedly connected with vertical regulating block through this horizontal bar hole; Aforementioned fixed pulley is provided with respectively the two ends of lateral adjustments piece rotationally.
As a kind of preferred version, described balancing weight includes a plurality of 500g counterweights, a plurality of 100g counterweight and a plurality of 50g counterweight, and the plurality of 500g counterweight, a plurality of 100g counterweight and a plurality of 50g counterweight are together superimposed from lower to upper.
As a kind of preferred version, described drive unit includes stepper motor and leading screw and nut mechanism, the nut that this leading screw and nut mechanism includes screw mandrel and screws togather with screw mandrel, this screw mandrel is vertical to be extended and is arranged at rotationally on the second support, aforementioned accurate activity orientation platform is fixed on nut, and this stepper motor drives screw mandrel by shaft coupling and rotates.
As a kind of preferred version, described the first support is the L-type support, and this first support is fixed on base by screw.
As a kind of preferred version, described the second support is the L-type support, and this second support is fixed on base by screw.
The utility model compared with prior art has obvious advantage and beneficial effect, particularly, and as shown from the above technical solution:
One, the center of the center by the center by workbench, grating scale, grating reading head and accurate activity orientation Tai center are arranged on and are located along the same line, the Zero-Abbe error of feasible system in theory, farthest to have reduced the Abbe error of system, meet micro-nano measurement and micro-nano processing request.
Two, by cooperation, utilize fixed pulley support, fixed pulley and pull rope to form single-arm bridge type counterbalance design simple in structure to hang balancing weight, by finite element Analysis, the center of gravity of system is carried out to analytical calculation, adopt single counter weight construction, make the arm vertical distraction at the system gravity line, and make the center of gravity of balancing weight adjustable by the fixed pulley support, by adjusting the pull rope movement of slight distance all around, make the arm vertical distraction at the system gravity line, thereby guarantee to drive the uniform and stable of process.
Three,, by being provided with pulling force sensor, utilize pulling force sensor to be monitored the state that drives stroke, so that the state adjustment of workbench counterweight also obtains real-time ensuring.
For more clearly setting forth architectural feature of the present utility model and effect, below in conjunction with accompanying drawing and specific embodiment, the utility model is elaborated:
The accompanying drawing explanation
Fig. 1 is the three-dimensional diagram of assembling of the preferred embodiment of the utility model;
Fig. 2 is the front view of the preferred embodiment of the utility model
Fig. 3 is the side view of the preferred embodiment of the utility model;
Fig. 4 is the top view of the preferred embodiment of the utility model;
Fig. 5 is the schematic diagram of A direction in Fig. 2.
The accompanying drawing identifier declaration:
The specific embodiment
Please refer to shown in Fig. 1 to Fig. 5, the concrete structure that it has demonstrated the preferred embodiment of the utility model, include base 10, the first support 20, the second support 30, movable support rod 40, workbench 50 and accurate activity orientation platform 60.
Wherein, this first support 20 and the second support 30 all are arranged on base 10; In the present embodiment, this first support 20 and the second support 30 are the L-type support, and this first support 20 and the second support 30 all are fixed on base 10 by screw 101, not to be limited.
This movable support rod 40 vertically extends, this movable support rod 40 can be arranged on the first support 20 up and downly, be installed with the grating scale 70 of vertical extension on this movable support rod 40, be provided with grating reading head 80 on this first support 20, this grating reading head 80 is fixed on the first support 20 by fluting flush end holding screw 102.
This workbench 50 is fixedly arranged on the upper end of movable support rod 40.
This precision activity orientation platform 60 can be arranged on the second support 30 up and downly, the lower end of this movable support rod 40 is fixedly connected with accurate activity orientation platform 60, be provided with and drive the up and down drive unit 90 of accurate activity orientation platform 60 for this precision activity orientation platform 60, this movable support rod 40 and workbench 50 are synchronously up and down with accurate activity orientation platform 60; Particularly, this drive unit 90 includes stepper motor 91 and leading screw and nut mechanism 92, this leading screw and nut mechanism 92 includes the screw mandrel (not shown) and is screwed together in the nut (not shown) on screw mandrel, this screw mandrel is vertical to be extended and is arranged at rotationally on the second support 30, aforementioned accurate activity orientation platform 60 is fixed on nut, this stepper motor 91 drives screw mandrel by shaft coupling 93 and rotates, and this stepper motor 91 is positioned at the below of screw mandrel.
And, being centered close on same straight line of this workbench 50 center, grating scale 70 center, grating reading head 80 center and accurate activity orientation platform 60, the Zero-Abbe error of feasible system so in theory.
In addition, this precision activity orientation platform 60 is positioned at a side of the second support 30, the top of this second support 30 be provided with fixed pulley support 10 ', this fixed pulley support 10 ' both sides be respectively arranged with fixed pulley 20 ', wherein the accurate activity orientation platform 60 of a fixed pulley 20 ' be positioned at directly over, another fixed pulley 20 ' be positioned at top of the second support 30 opposite sides, two fixed pulleys 20 ' above be provided with pull rope 30 ', this pull rope 30 ' an end with accurate activity orientation platform 60, be connected, pull rope 30 ' the other end be connected with pulling force sensor 40 ', this pulling force sensor 40 ' above vertically be hung with balancing weight 50 '.Particularly, the vertical regulating block 11 of this fixed pulley support 10 ' include ' and lateral adjustments piece 12 '; The vertical bar hole 101 of this vertical regulating block 11 ' above be provided with ', one first adjusting bolt 13 ' through this vertical bar hole 101 ' be fixedly connected with the second support 30, so that vertical regulating block 11 ' be fixed on the second support 30; The horizontal bar hole 102 of this lateral adjustments piece 12 ' above be provided with ', one second adjusting bolt 14 ' through this horizontal bar hole 102 ' with vertical regulating block 11 ' be fixedly connected with so that lateral adjustments piece 12 ' be fixed in vertical regulating block 11 ' on; Aforementioned fixed pulley 20 ' be provided with rotationally respectively lateral adjustments piece 12 ' two ends.A plurality of 500g counterweights 51 of this balancing weight 50 ' include ', a plurality of 100g counterweight 52 ' and a plurality of 50g counterweight 53 ', the plurality of 500g counterweight 51 ', a plurality of 100g counterweight 52 ' and a plurality of 50g counterweight 53 ' together superimposed from lower to upper.
The operation principle that the present embodiment is described in detail in detail is as follows:
During work, driving leading screw and nut mechanism 92 by stepper motor 91 by shaft coupling 93 rotates, make accurate activity orientation platform 60 up and down on the second support 30, this movable support rod 40, workbench 50 and grating scale 70 are synchronously up and down with accurate activity orientation platform 60, coordinate and utilize grating reading head 80 to can read out the distance that workbench 50 rises or descends.Simultaneously, when accurate activity orientation platform 60 rises, this balancing weight 50 ' descend under the effect of deadweight, when accurate activity orientation platform 60 descends, this balancing weight 50 ' pull rope 30 ' traction under rise, in balancing weight 50 ' decline or the process that rises, utilize pulling force sensor 40 ' can be monitored the variation that drives tractive force; And can coordinate the current sensor (not shown) to be monitored the driving condition of workbench 50 simultaneously, the power output of current sensor monitoring stepper motor 91, when balancing weight 50 ' adjust bad, driving force is inhomogeneous in different strokes, will cause the variation of stepper motor 91 power outputs, and stepper motor 91 driving voltages are certain, P=UI, can monitor in real time stepper motor 91 power outputs and change.
In addition, system gravity by Auto Cad calculates, can find theoretic center of gravity, but with the center of gravity of system reality still can some gap, as shown in Figure 5, at this moment can by adjust vertical regulating block 11 ' and lateral adjustments piece 12 ' fixed position, adjust pull rope 30 ' movement of slight distance all around with this, make the arm vertical distraction at the system gravity line.
Design focal point of the present utility model is: at first, center by the center by workbench, grating scale, the center of grating reading head and accurate activity orientation Tai center are arranged on and are located along the same line, the Zero-Abbe error of feasible system in theory, farthest to have reduced the Abbe error of system, meet micro-nano measurement and micro-nano processing request.Secondly, by cooperation, utilize fixed pulley support, fixed pulley and pull rope to form single-arm bridge type counterbalance design simple in structure to hang balancing weight, by finite element Analysis, the center of gravity of system is carried out to analytical calculation, adopt single counter weight construction, make the arm vertical distraction at the system gravity line, and make the center of gravity of balancing weight adjustable by the fixed pulley support, by adjusting the pull rope movement of slight distance all around, make the arm vertical distraction at the system gravity line, thereby guarantee to drive the uniform and stable of process.Moreover, by being provided with pulling force sensor, utilize pulling force sensor to be monitored the state that drives stroke, so that the state adjustment of workbench counterweight also obtains real-time ensuring.
The above, it is only preferred embodiment of the present utility model, not technical scope of the present utility model is imposed any restrictions, therefore any trickle modification, equivalent variations and modification that every foundation technical spirit of the present utility model is done above embodiment, all still belong in the scope of technical solutions of the utility model.

Claims (7)

1. the large stroke and high precision Z axis workbench of a novel structure, is characterized in that: include base, the first support, the second support, movable support rod, workbench and accurate activity orientation platform; This first support and the second support all are arranged on base; This movable support rod can be arranged on the first support up and downly, is installed with the grating scale of vertical extension on this movable support rod, on this first support, is provided with grating reading head; This workbench is fixedly arranged on the upper end of movable support rod; This precision activity orientation platform can be arranged on the second support up and downly, the lower end of this movable support rod is fixedly connected with accurate activity orientation platform, be provided with and drive the up and down drive unit of accurate activity orientation platform for this precision activity orientation platform, this movable support rod and workbench are synchronously up and down with accurate activity orientation platform; And, being centered close on same straight line of the center of the center of this workbench, the center of grating scale, grating reading head and accurate activity orientation platform.
2. the large stroke and high precision Z axis workbench of novel structure according to claim 1, it is characterized in that: described accurate activity orientation platform is positioned at a side of the second support, the top of this second support is provided with the fixed pulley support, the both sides of this fixed pulley support are respectively arranged with fixed pulley, wherein a fixed pulley be positioned at accurate activity orientation platform directly over, another fixed pulley is positioned at the top of the second support opposite side, be provided with pull rope on two fixed pulleys, one end of this pull rope is connected with accurate activity orientation platform, the other end of pull rope is connected with pulling force sensor, vertically be hung with balancing weight on this pulling force sensor.
3. the large stroke and high precision Z axis workbench of novel structure according to claim 2, it is characterized in that: described fixed pulley support includes vertical regulating block and lateral adjustments piece; Be provided with vertical bar hole on this vertical regulating block, one first adjusting bolt is fixedly connected with the second support through this vertical bar hole; Be provided with horizontal bar hole on this lateral adjustments piece, one second adjusting bolt is fixedly connected with vertical regulating block through this horizontal bar hole; Aforementioned fixed pulley is provided with respectively the two ends of lateral adjustments piece rotationally.
4. the large stroke and high precision Z axis workbench of novel structure according to claim 2, it is characterized in that: described balancing weight includes a plurality of 500g counterweights, a plurality of 100g counterweight and a plurality of 50g counterweight, and the plurality of 500g counterweight, a plurality of 100g counterweight and a plurality of 50g counterweight are together superimposed from lower to upper.
5. the large stroke and high precision Z axis workbench of novel structure according to claim 1, it is characterized in that: described drive unit includes stepper motor and leading screw and nut mechanism, the nut that this leading screw and nut mechanism includes screw mandrel and screws togather with screw mandrel, this screw mandrel is vertical to be extended and is arranged at rotationally on the second support, aforementioned accurate activity orientation platform is fixed on nut, and this stepper motor drives screw mandrel by shaft coupling and rotates.
6. the large stroke and high precision Z axis workbench of novel structure according to claim 1, it is characterized in that: described the first support is the L-type support, this first support is fixed on base by screw.
7. the large stroke and high precision Z axis workbench of novel structure according to claim 1, it is characterized in that: described the second support is the L-type support, this second support is fixed on base by screw.
CN201320425819.3U 2013-07-17 2013-07-17 Large-stroke high-precision Z-axis workbench with novel structure Withdrawn - After Issue CN203371273U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201320425819.3U CN203371273U (en) 2013-07-17 2013-07-17 Large-stroke high-precision Z-axis workbench with novel structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201320425819.3U CN203371273U (en) 2013-07-17 2013-07-17 Large-stroke high-precision Z-axis workbench with novel structure

Publications (1)

Publication Number Publication Date
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103506855A (en) * 2013-07-17 2014-01-15 华侨大学 Large-stroke high-precision Z-axis worktable with novel structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103506855A (en) * 2013-07-17 2014-01-15 华侨大学 Large-stroke high-precision Z-axis worktable with novel structure
CN103506855B (en) * 2013-07-17 2016-08-10 华侨大学 Large stroke and high precision Z axis workbench

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C14 Grant of patent or utility model
GR01 Patent grant
C25 Abandonment of patent right or utility model to avoid double patenting
AV01 Patent right actively abandoned

Granted publication date: 20140101

Effective date of abandoning: 20160810