CN203310455U - Sensor of gas mass flow controller - Google Patents

Sensor of gas mass flow controller Download PDF

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Publication number
CN203310455U
CN203310455U CN2013203824358U CN201320382435U CN203310455U CN 203310455 U CN203310455 U CN 203310455U CN 2013203824358 U CN2013203824358 U CN 2013203824358U CN 201320382435 U CN201320382435 U CN 201320382435U CN 203310455 U CN203310455 U CN 203310455U
Authority
CN
China
Prior art keywords
sensor
mass flow
flow controller
shell
sensor base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2013203824358U
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Chinese (zh)
Inventor
苏乾益
李凯
宋志辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Sevenstar Flow Co Ltd
Original Assignee
BEIJING SEVENSTAR QUALIFLOW ELECTRONIC EQUIPMENT MANUFACTURING Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEIJING SEVENSTAR QUALIFLOW ELECTRONIC EQUIPMENT MANUFACTURING Co Ltd filed Critical BEIJING SEVENSTAR QUALIFLOW ELECTRONIC EQUIPMENT MANUFACTURING Co Ltd
Priority to CN2013203824358U priority Critical patent/CN203310455U/en
Application granted granted Critical
Publication of CN203310455U publication Critical patent/CN203310455U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model discloses a sensor of a gas mass flow controller. The sensor of the gas mass flow controller comprises an outer shell and a sensor base, wherein the outer shell is internally provided with a groove; the sensor base is provided with two through holes; a sensing pipe is arranged in the groove of the outer shell, and two ends of the sensing pipe respectively pass through the two through holes in the sensor base; the sensing pipe and the sensor base are bonded and fixed with glue; two groups of sensing wires are wound on the middle part of the sensing pipe; the outer shell is installed on the sensor base and is connected and fixed by a screw; an electric cable wire is installed in the outer shell and is bonded and fixed by glue; the two groups of sensing wires and four terminals on the electric cable wire are welded and fixed; first thermal insulation cotton and a sprue are sequentially arranged in holes in the back surface of the outer shell; the sprue and the outer shell are bonded and fixed with glue; the front surface of the outer shell is sequentially provided with second thermal insulation cotton and a cover plate; the cover plate and the outer shell are fixed by a screw; the cover plate and the sensor base are fixed by a screw. The sensor of the gas mass flow controller is simple in structure, is easy to manufacture, is low in cost, and is high in reliability.

Description

The sensor of gas mass flow controller
Technical field
The utility model relates to a kind of gas mass flow controller, relates in particular to a kind of sensor of gas mass flow controller.
Background technology
Sensor is critical component on gas mass flow controller, and its performance has a great impact the overall performance of gas mass flow controller.
Mass flow sensor of the prior art exists many shortcomings.At first, the amount of parts of existing mass flow sensor inside is more, and volume is larger, and manufacture craft is very complicated, and manufacturing cost is high; The shortcomings such as secondly, occur that in actual use many problems are as the sensor internal short circuit, drift is large, and poor anti jamming capability is very sensitive to installation site, and repeatable accuracy is poor, and long and sensing silk of response time is easily broken.
The utility model content
The purpose of this utility model be to provide a kind of simple in structure, be easy to manufacture, the sensor of the gas mass flow controller that low-cost, reliability is high.
The purpose of this utility model is achieved through the following technical solutions:
The sensor of gas mass flow controller of the present utility model, comprise that inside is provided with the shell and the sensor base that is provided with two through holes of groove, the sensing pipe is placed in the groove two ends interior and the sensing pipe of described shell and passes respectively two through holes on described sensor base, between described sensing pipe and sensor base, be adhesively fixed with glue, two groups of sensing filament windings are in the centre position of described sensing pipe, and described shell is contained on described sensor base and with screw and is connected and fixed.
By the technical scheme that above-mentioned the utility model provides, can be found out, the sensor of the gas mass flow controller that the utility model embodiment provides, owing to comprising that inside is provided with the shell and the sensor base that is provided with two through holes of groove, the sensing pipe is placed in the groove two ends interior and the sensing pipe of shell and passes respectively two through holes on sensor base, between sensing pipe and sensor base, be adhesively fixed with glue, two groups of sensing filament windings are in the centre position of sensing pipe, shell is contained on sensor base and with screw and is connected and fixed, simple in structure, be easy to manufacture, low-cost, reliability is high.
The accompanying drawing explanation
The disassembled form schematic diagram of the sensor of the gas mass flow controller that Fig. 1 provides for the utility model embodiment;
The contour structures schematic diagram of the sensor of the gas mass flow controller that Fig. 2 provides for the utility model embodiment;
Fig. 3 is that the A-A of Fig. 2 is to the sectional structure schematic diagram.
Embodiment
Below will be described in further detail the utility model embodiment.
The sensor of gas mass flow controller of the present utility model, its preferably embodiment be:
Comprise that inside is provided with the shell and the sensor base that is provided with two through holes of groove, the sensing pipe is placed in the groove two ends interior and the sensing pipe of described shell and passes respectively two through holes on described sensor base, between described sensing pipe and sensor base, be adhesively fixed with glue, two groups of sensing filament windings are in the centre position of described sensing pipe, and described shell is contained on described sensor base and with screw and is connected and fixed.
Cable is contained in described shell and is adhesively fixed with glue, and four terminal solderings on described two groups of sensing silks and described cable are fixed.
In the hole at the described shell back side, the first heat-preservation cotton and sprue are housed successively, with glue, are adhesively fixed between described sprue and shell.
The front of described shell is provided with the second heat-preservation cotton and cover plate successively, is screwed between described cover plate and shell.
Between described cover plate and described sensor base, be screwed.
The sensor of gas mass flow controller of the present utility model, can overcome the shortcoming that existing mass flow sensor is deposited, make sensor have simple in structure, be easy to manufacture, low cost and high reliability.
Specific embodiment:
As shown in Figure 1, Figure 2, Figure 3 shows, comprise sensor base 1, sprue 2, the first heat-preservation cotton 3, shell 4, sensing pipe 5, cable 6, the second heat-preservation cotton 7, cover plate 8, glue 9, sensing silk 10 etc.
Two groups of sensing silks 10 are around the centre position of sensing pipe 5.
By around the sensing pipe 5 of sensing silk, passing the hole of sensor base 1, with glue, be adhesively fixed between sensing pipe 5 and sensor base 1.
Shell 4 is contained on sensor base 1, and sensing pipe 5 is placed in the groove of shell 4.Between shell 4 and sensor base 1, be connected and fixed with screw.
Cable 6 is contained in shell 4, and is adhesively fixed with glue.
Two groups of sensing silks 10 weld with four terminals on cable 6.
The first heat-preservation cotton 3 is put in the hole of shell 4, then sprue 2 is put in the hole of shell 4, with glue, is adhesively fixed between sprue 2 and shell 4.
The second heat-preservation cotton 7 is placed in the front of shell 4.Cover plate 8 is placed in the second heat-preservation cotton 7 fronts, is screwed between cover plate 8 and shell 4.Simultaneously, cover plate 8 also is screwed with sensor base 1.
The above; it is only preferably embodiment of the utility model; but protection domain of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement, within all should being encompassed in protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claims.

Claims (5)

1. the sensor of a gas mass flow controller, it is characterized in that, comprise that inside is provided with the shell and the sensor base that is provided with two through holes of groove, the sensing pipe is placed in the groove two ends interior and the sensing pipe of described shell and passes respectively two through holes on described sensor base, between described sensing pipe and sensor base, be adhesively fixed with glue, two groups of sensing filament windings are in the centre position of described sensing pipe, and described shell is contained on described sensor base and with screw and is connected and fixed.
2. the sensor of gas mass flow controller according to claim 1, is characterized in that, cable is contained in described shell and is adhesively fixed with glue, and four terminal solderings on described two groups of sensing silks and described cable are fixed.
3. the sensor of gas mass flow controller according to claim 2, is characterized in that, in the hole at the described shell back side, the first heat-preservation cotton and sprue is housed successively, with glue, is adhesively fixed between described sprue and shell.
4. the sensor of gas mass flow controller according to claim 3, is characterized in that, the front of described shell is provided with the second heat-preservation cotton and cover plate successively, is screwed between described cover plate and shell.
5. the sensor of gas mass flow controller according to claim 4, is characterized in that, is screwed between described cover plate and described sensor base.
CN2013203824358U 2013-06-28 2013-06-28 Sensor of gas mass flow controller Expired - Lifetime CN203310455U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2013203824358U CN203310455U (en) 2013-06-28 2013-06-28 Sensor of gas mass flow controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2013203824358U CN203310455U (en) 2013-06-28 2013-06-28 Sensor of gas mass flow controller

Publications (1)

Publication Number Publication Date
CN203310455U true CN203310455U (en) 2013-11-27

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2013203824358U Expired - Lifetime CN203310455U (en) 2013-06-28 2013-06-28 Sensor of gas mass flow controller

Country Status (1)

Country Link
CN (1) CN203310455U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106768113A (en) * 2016-12-09 2017-05-31 北京七星华创电子股份有限公司 A kind of fluid conveys measurement apparatus
CN112816011A (en) * 2020-12-22 2021-05-18 北京七星华创流量计有限公司 Fluid measurement sensor and mass flow controller

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106768113A (en) * 2016-12-09 2017-05-31 北京七星华创电子股份有限公司 A kind of fluid conveys measurement apparatus
CN112816011A (en) * 2020-12-22 2021-05-18 北京七星华创流量计有限公司 Fluid measurement sensor and mass flow controller
WO2022135134A1 (en) * 2020-12-22 2022-06-30 北京七星华创流量计有限公司 Fluid measurement sensor and mass flow controller

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20171107

Address after: 100176 room 1, building 8, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing, Daxing District, 506

Patentee after: BEIJING SEVENSTAR FLOW Co.,Ltd.

Address before: 100016, 3 floor, building M4, No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District

Patentee before: BEIJING SEVENSTAR QUALIFLOW ELECTRONIC EQUIPMENT MANUFACTURING Co.,Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20131127