CN203221280U - Ultraviolet-laser processing apparatus - Google Patents

Ultraviolet-laser processing apparatus Download PDF

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Publication number
CN203221280U
CN203221280U CN 201320077316 CN201320077316U CN203221280U CN 203221280 U CN203221280 U CN 203221280U CN 201320077316 CN201320077316 CN 201320077316 CN 201320077316 U CN201320077316 U CN 201320077316U CN 203221280 U CN203221280 U CN 203221280U
Authority
CN
China
Prior art keywords
laser
light splitting
splitting piece
light
galvanometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN 201320077316
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Chinese (zh)
Inventor
赵盛宇
张松岭
郭卫军
曾林波
钟辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Hymson Laser Technology Co Ltd
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Shenzhen Hymson Laser Technology Co Ltd
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Priority to CN 201320077316 priority Critical patent/CN203221280U/en
Application granted granted Critical
Publication of CN203221280U publication Critical patent/CN203221280U/en
Withdrawn - After Issue legal-status Critical Current
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Abstract

The utility model discloses an ultraviolet-laser processing apparatus comprising an ultraviolet laser, a vibrating mirror system and a focusing lens. A light splitting sheet is arranged on a light path between the ultraviolet laser and a vibrating mirror X. A coaxial vision system is mounted on the light splitting sheet. A coaxial light source is disposed on one side of a processing workpiece. An ultraviolet laser beam emitted by the ultraviolet laser is carried out horizontal incidence to the light splitting sheet, transmission of the light splitting sheet, total reflection of the vibrating mirror system and refraction of the focusing lens and then is converged to the processing workpiece. Light emitted by the light source is projected to the processing workpiece. The processing workpiece successively passes by the refraction of the focusing lens and the total reflection of the vibrating mirror system, is changed into parallel light, is performed incidence to the light splitting sheet, the total reflection of the light splitting sheet and then catch imaging by the coaxial vision system. An industrial control computer adjusts deviation angles of the vibrating mirror X and a vibrating mirror Y in the vibrating mirror system based on imaging data. The laser processing apparatus provided by the utility model has high processing precision and can precisely mark and cut the processing workpiece.

Description

A kind of Ultra-Violet Laser processing unit (plant)
[technical field]
The utility model relates to technical field of laser processing, relates in particular to a kind of Ultra-Violet Laser processing unit (plant).
[background technology]
Laser Micro-Machining refers to that product processing (mark, cutting) size is in several technical process to more than 1000 microns, it is a branch field of Laser Processing, be widely used in every profession and trade at present, it mainly be the laser beam that utilizes high-energy-density to material directly ablate, charing, Carving Machining, charing, thawing, gasification appear behind the energy of material surface absorption laser, realize processing purpose, mainly contain laser energy height, efficient height, effective, advantages such as cost is low, environmental protection.
Raising along with scientific and technological progress, the focal beam spot diameter of Ultra-Violet Laser can reach 0.005MM, the precision of processing improves greatly, but conventional laser locate mode (artificial or machine clamp is located accurately more than 0.05MM reaches) is difficult to satisfy mark and the cutting accuracy requirement of product, for example in the processing on nonmetal unhairing limit, required precision is in 0.03MM, and like this, the location of common laser can't be satisfied.
[utility model content]
The utility model provides a kind of Ultra-Violet Laser processing unit (plant), and its machining accuracy height can carry out accurate mark and cutting to processing work.
The technical solution of the utility model is:
A kind of Ultra-Violet Laser processing unit (plant), comprise ultraviolet laser, galvanometer system, condenser lens, also be provided with light splitting piece on the light path between ultraviolet laser and the galvanometer X, also be provided with coaxial vision system above light splitting piece, the coaxial light source in the coaxial vision system is located at a side of processing work;
The UV laser beam glancing incidence that ultraviolet laser sends is to light splitting piece, through the transmission of light splitting piece, again through the total reflection of galvanometer system, finally by the refraction of crossing condenser lens UV laser beam is converged on the processing work;
The light that coaxial light source sends projects on the processing work, the reverberation of processing work becomes directional light successively after the total reflection through the refraction of condenser lens, galvanometer system and reenters and be mapped on the light splitting piece, again through being caught imaging by coaxial vision system after the total reflection of light splitting piece, coaxial vision system sends to industrial control computer with imaging data, and industrial control computer is according to the galvanometer X in this imaging data adjustment galvanometer system and the deflection angle of galvanometer Y.
The light path of the utility model between ultraviolet laser and galvanometer X is provided with light splitting piece, also is provided with coaxial vision system above light splitting piece, and the coaxial light source in the coaxial vision system is located at a side of processing work; Light splitting piece can the ultraviolet transmissive laser beam, but the reverberation that light source is transmitted on the processing work can all reflect away, thereby can in coaxial vision system, catch the imaging data of processing work, and send to industrial control computer, industrial control computer is according to the galvanometer X in this imaging data adjustment galvanometer system and the deflection angle of galvanometer Y, realize that laser moves by the coordinate position value of industrial control computer indication, satisfy the high requirement of machining accuracy, can carry out accurate mark and cutting to material.
[description of drawings]
Fig. 1 is Ultra-Violet Laser processing unit (plant) of the present utility model structure principle chart in one embodiment.
[specific embodiment]
Below in conjunction with accompanying drawing specific embodiment of the utility model is done a detailed elaboration.
As Fig. 1, Ultra-Violet Laser processing unit (plant) of the present utility model, comprise ultraviolet laser 1, galvanometer system, condenser lens 7, on the light path between ultraviolet laser 1 and the galvanometer X5, also be provided with light splitting piece 4, also be provided with coaxial vision system 3 above light splitting piece 4, the coaxial light source 9 that coaxial vision system is 3 li is located at a side of processing work 8;
The UV laser beam glancing incidence that ultraviolet laser 1 sends is to light splitting piece 4, through the transmission of light splitting piece 4, again through the total reflection of galvanometer system, finally by the refraction of crossing condenser lens 7 UV laser beam is converged on the processing work 8, realize accurate mark and cutting to processing work 8;
The light that coaxial light source 9 sends projects on the processing work 8, form reverberation at processing work 8, the reverberation of processing work 8 becomes directional light successively after the total reflection through the refraction of condenser lens 7, galvanometer system and reenters and be mapped on the light splitting piece 4, again through being caught imaging by coaxial vision system 3 after the total reflection of light splitting piece 4, thereby can be at 3 li imaging datas that capture processing work of coaxial vision system, and can by the graphic alphanumeric display of 3 li of coaxial vision systems check processing work clearly as; Coaxial vision system 3 sends to industrial control computer 10 with imaging data, 10 li calibration softwares that image is installed of industrial control computer, this imaging data is carried out signature analysis, position seizure, exports the locator data of laser to galvanometer system than equity processing back, galvanometer system is adjusted the deflection angle of galvanometer X and galvanometer Y according to this locator data; Thereby realize that laser moves by the coordinate position value of industrial control computer indication, satisfy the high requirement of machining accuracy, can carry out accurate mark and cutting to material.
Wherein, described light splitting piece 4 can be all transmissions of Ultra-Violet Laser of 355nm to wavelength, and is visible light (being coaxial visual light) total reflection between the 390nm-1064nm to wavelength.Thereby can catch the imaging datas of processing work 3 li of coaxial vision systems, nor influence UV laser beam; This light splitting piece 4 can be fixed on the interior part of laser cavity.In the utility model, the wavelength of the UV laser beam that described ultraviolet laser 1 sends can be 355nm.
During these light splitting piece 4 concrete enforcements, comprise quartz plate, positive and negative at quartz plate is coated with zirconia layer, silicon dioxide layer and magnesium fluoride layer respectively, and perhaps the positive and negative at quartz plate is coated with the reflection and transmission layer that is mixed and made into by zirconia, silica and magnesium fluoride respectively.Positive and negative at quartz plate is coated with zirconia layer, silicon dioxide layer, magnesium fluoride layer respectively, can realize the whole transmissions of laser laser beam, and natural visible light total reflection.Zirconia layer, silicon dioxide layer, magnesium fluoride layer be coated on the quartz plate about order without limits, zirconia layer can be positioned at innermost layer, silicon dioxide layer is positioned at the intermediate layer, the magnesium fluoride layer is positioned at outermost layer.Perhaps the positive and negative at quartz plate is coated with the reflection and transmission layer that is mixed and made into by zirconia, silica and magnesium fluoride respectively, also can realize same effect.
In a preferred embodiment, described light splitting piece 4 becomes miter angle with the UV laser beam that ultraviolet laser 1 sends, coaxial vision system 3 be positioned at light splitting piece 4 directly over.Can realize best imaging effect, satisfy the demand of accurate mark and cutting.
In addition, also be provided with beam expanding lens 2 between ultraviolet laser 1 and light splitting piece 4, the UV laser beam process beam expanding lens 2 back glancing incidences that ultraviolet laser 1 sends are to light splitting piece 4.With the diameter of expanded beam, reduce the angle of divergence of laser beam.
Wherein, when coaxial vision system 3 is specifically implemented, can comprise CCD hardware sensor, coaxial vision software, graphic alphanumeric display, wherein CCD hardware sensor amplification multiple can be 2-600 doubly, be installed in light splitting piece directly over, processing work is by the illumination of coaxial light source, pass through the reflection of condenser lens transmission and galvanometer system again, last again by the reflection of light splitting piece, received by the CCD hardware sensor, and graphic alphanumeric display obtain clearly as.
PC specialty control software is installed in industrial control computer, can adopt existing Industry Control customized software, write with the exploitation of VB programming language, it runs on the industrial control computer, the function that its integrated CCD monitoring, Template Learning memory, article position are pounced on and caught, signature analysis, data are judged, intrinsic mark operating software and ultraviolet laser communicate by letters in result's output and the galvanometer system, thus realization is to the automatic control of galvanometer system and the automatic control of ultraviolet laser.
The software that described galvanometer system is mainly rotated by galvanometer X5, galvanometer Y6, motor, control motor etc. constitutes.Its operation principle be with laser beam incident to two speculums (galvanometer X, galvanometer Y), galvanometer X and galvanometer Y are fixed on the motor rotating axle, the rotation of control motor shaft can be adjusted the reflection angle of two speculums, these two speculums can scan along X, Y-axis respectively, thereby reach the deflection of laser beam.
During concrete operations, earlier workpiece to be processed is displaced on the focal length of condenser lens below, the light that coaxial light source sends projects on the processing work, lighting source is provided, the emission light of processing work is through the total reflection of refraction, galvanometer X and the galvanometer Y of condenser lens, becomes directional light and reenters and be mapped on the light splitting piece, all reflexes to then in the coaxial vision system, pounced on by the CCD hardware sensor and to catch imaging, obtain image clearly at graphic alphanumeric display; By the control software in the operation industrial control computer object of coaxial vision system imaging is compared, feature and position analysis, after drawing locator data, control starts ultraviolet laser, sending UV laser beam amplifies and shaping by beam expanding lens, parallel inciding on the light splitting piece then, then light splitting piece is crossed in the whole transmissions of Ultra-Violet Laser, direct projection is to galvanometer X again, after be reflected to galvanometer Y again, reflex to condenser lens again, UV laser beam converges in the processing work feature locations and carries out operation, variation along with its coordinate figure position, the deflection angle of corresponding adjustment galvanometer X and galvanometer Y realizes that laser beam moves in the X/Y of work top coordinate system, above-mentioned hardware can all be fixed on frame and the support.
Above-described the utility model embodiment does not constitute the restriction to the utility model protection domain.Any modification of within spirit of the present utility model and principle, doing, be equal to and replace and improvement etc., all should be included within the claim protection domain of the present utility model.

Claims (5)

1. Ultra-Violet Laser processing unit (plant), comprise ultraviolet laser, galvanometer system, condenser lens, it is characterized in that: on the light path between ultraviolet laser and the galvanometer X, also be provided with light splitting piece, also be provided with coaxial vision system above light splitting piece, the coaxial light source in the coaxial vision system is located at a side of processing work;
The UV laser beam glancing incidence that ultraviolet laser sends is to light splitting piece, through the transmission of light splitting piece, again through the total reflection of galvanometer system, finally by the refraction of crossing condenser lens UV laser beam is converged on the processing work;
The light that coaxial light source sends projects on the processing work, the reverberation of processing work becomes directional light successively after the total reflection through the refraction of condenser lens, galvanometer system and reenters and be mapped on the light splitting piece, again through being caught imaging by coaxial vision system after the total reflection of light splitting piece, coaxial vision system sends to industrial control computer with imaging data, and industrial control computer is according to the galvanometer X in this imaging data adjustment galvanometer system and the deflection angle of galvanometer Y.
2. Ultra-Violet Laser processing unit (plant) according to claim 1, it is characterized in that: described light splitting piece comprises quartz plate, positive and negative at quartz plate is coated with zirconia layer, silicon dioxide layer and magnesium fluoride layer respectively, and perhaps the positive and negative at quartz plate is coated with the reflection and transmission layer that is mixed and made into by zirconia, silica and magnesium fluoride respectively.
3. Ultra-Violet Laser processing unit (plant) according to claim 1, it is characterized in that: described light splitting piece becomes miter angle with the UV laser beam that ultraviolet laser sends, coaxial vision system be positioned at light splitting piece directly over.
4. Ultra-Violet Laser processing unit (plant) according to claim 1 is characterized in that: between ultraviolet laser and light splitting piece, also be provided with beam expanding lens, the UV laser beam that ultraviolet laser sends through glancing incidence behind the beam expanding lens to light splitting piece.
5. Ultra-Violet Laser processing unit (plant) according to claim 1, it is characterized in that: the wavelength of the UV laser beam that described ultraviolet laser sends is 355nm.
CN 201320077316 2013-02-19 2013-02-19 Ultraviolet-laser processing apparatus Withdrawn - After Issue CN203221280U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN 201320077316 CN203221280U (en) 2013-02-19 2013-02-19 Ultraviolet-laser processing apparatus

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103128450A (en) * 2013-02-19 2013-06-05 深圳市海目星激光科技有限公司 Ultraviolet laser processing device
CN105034608A (en) * 2015-07-10 2015-11-11 辽宁科技大学 Industrial robot laser marking machine
CN106614990A (en) * 2015-10-29 2017-05-10 崔峨 A method of realizing multi-position laser engraving of demi-carcass pork using a set of laser units
CN107073645A (en) * 2014-06-12 2017-08-18 施肯拉光学技术公司 Materialbearbeitung mit Laserlicht equipment with parallel misalignment unit
CN109421267A (en) * 2017-09-04 2019-03-05 东台精机股份有限公司 The 3 D-printing device and its operating method of dust recycling

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103128450A (en) * 2013-02-19 2013-06-05 深圳市海目星激光科技有限公司 Ultraviolet laser processing device
CN103128450B (en) * 2013-02-19 2015-08-19 深圳市海目星激光科技有限公司 A kind of Ultra-Violet Laser processing unit (plant)
CN107073645A (en) * 2014-06-12 2017-08-18 施肯拉光学技术公司 Materialbearbeitung mit Laserlicht equipment with parallel misalignment unit
US10272521B2 (en) 2014-06-12 2019-04-30 Scanlab Gmbh Laser machining apparatus comprising a parallel displacement unit
CN107073645B (en) * 2014-06-12 2020-01-21 施肯拉股份有限公司 Laser material processing equipment with parallel dislocation units
CN105034608A (en) * 2015-07-10 2015-11-11 辽宁科技大学 Industrial robot laser marking machine
CN106614990A (en) * 2015-10-29 2017-05-10 崔峨 A method of realizing multi-position laser engraving of demi-carcass pork using a set of laser units
CN109421267A (en) * 2017-09-04 2019-03-05 东台精机股份有限公司 The 3 D-printing device and its operating method of dust recycling

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Granted publication date: 20131002

Effective date of abandoning: 20150819