CN203200379U - Two-channel type temperature measuring equipment for sapphire crystal growth furnace - Google Patents
Two-channel type temperature measuring equipment for sapphire crystal growth furnace Download PDFInfo
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- CN203200379U CN203200379U CN 201320161318 CN201320161318U CN203200379U CN 203200379 U CN203200379 U CN 203200379U CN 201320161318 CN201320161318 CN 201320161318 CN 201320161318 U CN201320161318 U CN 201320161318U CN 203200379 U CN203200379 U CN 203200379U
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- pyrometer
- furnace
- temperature
- infrared rays
- crystal growth
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- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 13
- 239000010980 sapphire Substances 0.000 title claims abstract description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Chemical compound data:image/svg+xml;base64,PD94bWwgdmVyc2lvbj0nMS4wJyBlbmNvZGluZz0naXNvLTg4NTktMSc/Pgo8c3ZnIHZlcnNpb249JzEuMScgYmFzZVByb2ZpbGU9J2Z1bGwnCiAgICAgICAgICAgICAgeG1sbnM9J2h0dHA6Ly93d3cudzMub3JnLzIwMDAvc3ZnJwogICAgICAgICAgICAgICAgICAgICAgeG1sbnM6cmRraXQ9J2h0dHA6Ly93d3cucmRraXQub3JnL3htbCcKICAgICAgICAgICAgICAgICAgICAgIHhtbG5zOnhsaW5rPSdodHRwOi8vd3d3LnczLm9yZy8xOTk5L3hsaW5rJwogICAgICAgICAgICAgICAgICB4bWw6c3BhY2U9J3ByZXNlcnZlJwp3aWR0aD0nMzAwcHgnIGhlaWdodD0nMzAwcHgnIHZpZXdCb3g9JzAgMCAzMDAgMzAwJz4KPCEtLSBFTkQgT0YgSEVBREVSIC0tPgo8cmVjdCBzdHlsZT0nb3BhY2l0eToxLjA7ZmlsbDojRkZGRkZGO3N0cm9rZTpub25lJyB3aWR0aD0nMzAwLjAnIGhlaWdodD0nMzAwLjAnIHg9JzAuMCcgeT0nMC4wJz4gPC9yZWN0Pgo8dGV4dCB4PScxMzguMCcgeT0nMTcwLjAnIGNsYXNzPSdhdG9tLTAnIHN0eWxlPSdmb250LXNpemU6NDBweDtmb250LXN0eWxlOm5vcm1hbDtmb250LXdlaWdodDpub3JtYWw7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOm5vbmU7Zm9udC1mYW1pbHk6c2Fucy1zZXJpZjt0ZXh0LWFuY2hvcjpzdGFydDtmaWxsOiMzQjQxNDMnID5BPC90ZXh0Pgo8dGV4dCB4PScxNjUuNicgeT0nMTcwLjAnIGNsYXNzPSdhdG9tLTAnIHN0eWxlPSdmb250LXNpemU6NDBweDtmb250LXN0eWxlOm5vcm1hbDtmb250LXdlaWdodDpub3JtYWw7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOm5vbmU7Zm9udC1mYW1pbHk6c2Fucy1zZXJpZjt0ZXh0LWFuY2hvcjpzdGFydDtmaWxsOiMzQjQxNDMnID5yPC90ZXh0Pgo8L3N2Zz4K data:image/svg+xml;base64,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 [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052786 argon Inorganic materials 0.000 claims abstract description 12
- 238000009413 insulation Methods 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances data:image/svg+xml;base64,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 data:image/svg+xml;base64,PD94bWwgdmVyc2lvbj0nMS4wJyBlbmNvZGluZz0naXNvLTg4NTktMSc/Pgo8c3ZnIHZlcnNpb249JzEuMScgYmFzZVByb2ZpbGU9J2Z1bGwnCiAgICAgICAgICAgICAgeG1sbnM9J2h0dHA6Ly93d3cudzMub3JnLzIwMDAvc3ZnJwogICAgICAgICAgICAgICAgICAgICAgeG1sbnM6cmRraXQ9J2h0dHA6Ly93d3cucmRraXQub3JnL3htbCcKICAgICAgICAgICAgICAgICAgICAgIHhtbG5zOnhsaW5rPSdodHRwOi8vd3d3LnczLm9yZy8xOTk5L3hsaW5rJwogICAgICAgICAgICAgICAgICB4bWw6c3BhY2U9J3ByZXNlcnZlJwp3aWR0aD0nODVweCcgaGVpZ2h0PSc4NXB4JyB2aWV3Qm94PScwIDAgODUgODUnPgo8IS0tIEVORCBPRiBIRUFERVIgLS0+CjxyZWN0IHN0eWxlPSdvcGFjaXR5OjEuMDtmaWxsOiNGRkZGRkY7c3Ryb2tlOm5vbmUnIHdpZHRoPSc4NS4wJyBoZWlnaHQ9Jzg1LjAnIHg9JzAuMCcgeT0nMC4wJz4gPC9yZWN0Pgo8dGV4dCB4PScxMy4zJyB5PSc1My42JyBjbGFzcz0nYXRvbS0wJyBzdHlsZT0nZm9udC1zaXplOjIzcHg7Zm9udC1zdHlsZTpub3JtYWw7Zm9udC13ZWlnaHQ6bm9ybWFsO2ZpbGwtb3BhY2l0eToxO3N0cm9rZTpub25lO2ZvbnQtZmFtaWx5OnNhbnMtc2VyaWY7dGV4dC1hbmNob3I6c3RhcnQ7ZmlsbDojRTg0MjM1JyA+SDwvdGV4dD4KPHRleHQgeD0nMjguMicgeT0nNjIuOScgY2xhc3M9J2F0b20tMCcgc3R5bGU9J2ZvbnQtc2l6ZToxNXB4O2ZvbnQtc3R5bGU6bm9ybWFsO2ZvbnQtd2VpZ2h0Om5vcm1hbDtmaWxsLW9wYWNpdHk6MTtzdHJva2U6bm9uZTtmb250LWZhbWlseTpzYW5zLXNlcmlmO3RleHQtYW5jaG9yOnN0YXJ0O2ZpbGw6I0U4NDIzNScgPjI8L3RleHQ+Cjx0ZXh0IHg9JzM1LjAnIHk9JzUzLjYnIGNsYXNzPSdhdG9tLTAnIHN0eWxlPSdmb250LXNpemU6MjNweDtmb250LXN0eWxlOm5vcm1hbDtmb250LXdlaWdodDpub3JtYWw7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOm5vbmU7Zm9udC1mYW1pbHk6c2Fucy1zZXJpZjt0ZXh0LWFuY2hvcjpzdGFydDtmaWxsOiNFODQyMzUnID5PPC90ZXh0Pgo8L3N2Zz4K O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 2
- 230000003993 interaction Effects 0.000 abstract 1
- 238000009529 body temperature measurement Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000000630 rising Effects 0.000 description 3
- 230000000875 corresponding Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006011 modification reaction Methods 0.000 description 2
- 229940035295 Ting Drugs 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000003287 optical Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Abstract
The utility model discloses two-channel type temperature measuring equipment for a sapphire crystal growth furnace, and the equipment comprises a crystal growth furnace body and an insulating layer, wherein the insulating layer is arranged on the inner wall of the crystal growth furnace body and is provided with an argon inlet; an infrared ray measuring pyrometer A is arranged at a position close to the argon inlet, in the inner cavity of the crystal growth furnace body; the top end of the crystal growth furnace body is provided with an infrared ray measuring pyrometer B. The reading is carried out by using the infrared ray measuring pyrometers A and B in an interaction mode. According to the utility model, the infrared ray measuring pyrometers are used for monitoring the temperature field in a crucible, the respond is rapid, the measurement accuracy is high relatively; the equipment uses the two-channel infrared ray measuring pyrometers, so that the temperature monitoring reading can be performed by using the infrared ray measuring pyrometer at the top end when the infrared ray measuring pyrometer at the furnace wall of the crystal growth furnace can not read normally, so that the real-time monitoring of the temperature field in the furnace can be realized.
Description
Technical field
The utility model relates to the infrared temperature field, especially a kind of temperature measuring equipment of crucible inside temperature measurement when being applicable to sapphire crystal growth.
Background technology
What the long brilliant stove temperature measurer of sapphire of the prior art adopted is the high speed infrared temperature measurer, can catch Fast Moving Object and temperature variation fast, utilize its high-quality optical lens can clearly detect little measurement target, argon gas fed a mouthful position in the middle of pyrometer was installed on the long brilliant stove furnace chamber of heat exchange, infrared rays is through lagging material, directly measure the mode of crucible outer wall by induced radiation and obtain temperature data, control the furnace chamber temperature inside by industrial computer and change, thus the growth of control crystal.
But be arranged on the other pyrometer of sidewall of crucible and be easy to occur reading error, and after work for some time, show ultimate value because the corresponding temperature reading of its operating power of the rising of temperature can surpass.And because pyrometer is installed in the logical ingress of argon gas, furnace chamber middle part, the volatile matter of crystal is attached to lagging material work in the crystal growth because the cooling effect of argon gas causes easily, and the cooling effect meeting of argon gas causes the temperature spot place of pyrometer collection local overcooling to occur, and then causes furnace chamber temperature inside field inequality.
Summary of the invention
Goal of the invention: at the deficiencies in the prior art, the applicant has designed the long brilliant stove temperature measuring equipment of a kind of two-way type sapphire through long-term practical exploration.
Technical scheme: in order to realize the foregoing invention purpose, the technical scheme that the utility model adopts is: the long brilliant stove temperature measuring equipment of a kind of two-way type sapphire, comprise the thermal insulation layer of growing brilliant furnace body, being arranged on the brilliant furnace body inwall of described length, described thermal insulation layer is provided with argon gas and feeds mouth, the brilliant furnace body inner chamber of described length is provided with infrared rays survey pyrometer A near the position that argon gas feeds mouth, the brilliant furnace body of described length top arranges the pyrometer support, and infrared rays survey pyrometer B and Continental Europe table temperature regulator is set on the described pyrometer support.Utilize infrared rays survey pyrometer A and infrared rays survey pyrometer B to cooperatively interact and carry out reading, before high temperature crystal in long brilliant stove is not stopped up the pyrometer hole, the read-around ratio of infrared rays survey pyrometer A is more accurate, compares the correction data error with the reading of infrared rays survey pyrometer B.In the rising because of temperature, the temperature reading of infrared rays survey pyrometer A surpasses after the readable ultimate value like this, just can control temperature field in the crucible by the reading of observation infrared rays survey pyrometer B.
The oblique side of the brilliant furnace body probe location of described length is provided with vision slit, and described infrared rays survey pyrometer B keeps certain height apart from vision slit.Be provided with the water flow pipes cooling that circulates around the described vision slit.
The apical pore of described vision slit, thermal insulation layer inclined hole and crucible cover is designed to sight alignment, and the thermometric infrared rays of described like this infrared rays survey pyrometer B passes the apical pore of vision slit, thermal insulation layer apical pore and crucible cover, through crucible inwall.
Temperature value by infrared rays survey pyrometer B detection, forward the Continental Europe table to, corresponding temperature reading can appear in Continental Europe table display instrument, change temperature measurement module over to after by artificial mode set(ting)value being arranged, described temperature measurement module adopts the RS485 communication bus, need the RS232/485 modular converter to insert the industrial computer serial ports, realize the monitoring to the crucible temperature field.
Beneficial effect: the utility model compared with prior art, its beneficial effect is:
1, the utility model utilizes the infrared rays survey pyrometer that the temperature field in the crucible is monitored, and response is rapid, and measuring accuracy is higher;
2, two-way type infrared rays survey pyrometer is adopted in the utility model utilization, the infrared rays survey pyrometer that can realize place, long brilliant stove furnace wall is normally behind the reading, utilize the infrared rays survey pyrometer on top to carry out the temperature monitoring reading, can realize the real-time monitoring to temperature field in furnace;
3, the utility model belongs to improvement embedded type device, implants this device and just can continue to produce in original infrared observation system, needn't upgrade a complete set of equipment, and cost performance is higher.
Description of drawings
Fig. 1 is the structural representation of the long brilliant stove temperature measuring equipment of a kind of two-way type sapphire of the utility model.
Fig. 2 is for offering the synoptic diagram of inclined hole on the thermal insulation layer.
Embodiment
Below by a most preferred embodiment, the technical program is elaborated, but protection domain of the present utility model is not limited to described embodiment.
As shown in Figure 1, the long brilliant stove temperature measuring equipment of a kind of two-way type sapphire, comprise the thermal insulation layer 2 of growing brilliant furnace body 1, being arranged on brilliant furnace body 1 inwall of described length, described thermal insulation layer 2 is provided with argon gas and feeds mouth 3, brilliant furnace body 1 inner chamber of described length is provided with infrared rays survey pyrometer A4 near the position that argon gas feeds mouth 3, the brilliant furnace body of described length 1 top is provided with pyrometer support 7, and infrared rays survey pyrometer B is set on the described pyrometer support 7.The brilliant furnace body of described length 1 top is provided with vision slit 6, and described infrared rays survey pyrometer B keeps certain height apart from vision slit 6.Around described vision slit 6, be provided with water flow pipes circulation cooling.The thermometric infrared rays of described infrared rays survey pyrometer B passes inclined hole 9 on vision slit 6, the thermal insulation layer 2 and the apical pore of crucible cover 5, through crucible inwall.
As shown in Figure 2, offer inclined hole 9 on the thermal insulation layer 2, be used for passing the thermometric infrared rays of infrared rays survey pyrometer B.
During real work, utilize infrared rays survey pyrometer A4 and infrared rays survey pyrometer B to cooperatively interact and carry out reading, before high temperature crystal in long brilliant stove is not stopped up the pyrometer hole, the read-around ratio of infrared rays survey pyrometer A4 is more accurate, the reading of the data that read and infrared rays survey pyrometer B is compared the temperature error scope of confirming both, proofread and correct infrared rays survey pyrometer B data error, obtain the proportional law of two readings.In the rising because of temperature, the temperature reading of infrared rays survey pyrometer A4 surpasses after the readable ultimate value like this, and by the reading of observation infrared rays survey pyrometer B, the proportional law of two readings of acquisition just can obtain temperature reading accurately before utilizing.Then this temperature reading signal is transferred to the Continental Europe table, after artificially Continental Europe table desired temperature being arranged, change temperature measurement module over to, described temperature measurement module adopts the RS485 communication bus, need the RS232/485 modular converter to insert the industrial computer serial ports, utilize the industrial computer realization to the control of crucible temperature field.
The above only is preferred implementation of the present utility model; be noted that for those skilled in the art; under the prerequisite that does not break away from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (4)
1. a two-way type sapphire is grown brilliant stove temperature measuring equipment, comprise the thermal insulation layer (2) of growing brilliant furnace body (1), being arranged on the brilliant furnace body of described length (1) inwall, described thermal insulation layer (2) is provided with argon gas and feeds mouthful (3), the brilliant furnace body of described length (1) inner chamber is provided with infrared rays survey pyrometer A(4 near the position that argon gas feeds mouthful (3)), it is characterized in that: the brilliant furnace body of described length (1) top is provided with pyrometer support (7), and infrared rays survey pyrometer B is set on the described pyrometer support (7).
2. a kind of two-way type sapphire according to claim 1 is grown brilliant stove temperature measuring equipment, and it is characterized in that: the brilliant furnace body of described length (1) top is provided with vision slit (6).
3. a kind of two-way type sapphire according to claim 1 is grown brilliant stove temperature measuring equipment, it is characterized in that: the thermometric infrared rays of described infrared rays survey pyrometer B passes the apical pore of vision slit (6), thermal insulation layer (2) inclined hole (9) and crucible cover (5), through crucible inwall.
4. the long brilliant stove temperature measuring equipment of a kind of two-way type sapphire according to claim 2 is characterized in that: be provided with water flow pipes circulation cooling around the described vision slit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320161318 CN203200379U (en) | 2013-04-02 | 2013-04-02 | Two-channel type temperature measuring equipment for sapphire crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320161318 CN203200379U (en) | 2013-04-02 | 2013-04-02 | Two-channel type temperature measuring equipment for sapphire crystal growth furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203200379U true CN203200379U (en) | 2013-09-18 |
Family
ID=49144507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320161318 Expired - Fee Related CN203200379U (en) | 2013-04-02 | 2013-04-02 | Two-channel type temperature measuring equipment for sapphire crystal growth furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203200379U (en) |
-
2013
- 2013-04-02 CN CN 201320161318 patent/CN203200379U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| C14 | Grant of patent or utility model | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130918 Termination date: 20160402 |
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| CF01 | Termination of patent right due to non-payment of annual fee |