CN203069858U - Projection lens difference fine adjustment device - Google Patents
Projection lens difference fine adjustment device Download PDFInfo
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- CN203069858U CN203069858U CN 201220742869 CN201220742869U CN203069858U CN 203069858 U CN203069858 U CN 203069858U CN 201220742869 CN201220742869 CN 201220742869 CN 201220742869 U CN201220742869 U CN 201220742869U CN 203069858 U CN203069858 U CN 203069858U
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- microscope base
- lens barrel
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- screw rod
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- 238000001459 lithography Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 description 10
- 244000273256 Phragmites communis Species 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
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Abstract
The utility model belongs to a lithography machine adjustment device, and particularly relates to a projection lens difference fine adjustment device. The projection lens difference fine adjustment device comprises a lens barrel, a microscope base, three screw mechanisms uniformly distributed on the circumference of the lens barrel, and three plunger mechanisms which vertically correspond to the screw mechanisms, wherein the microscope base is clamped by the screw mechanisms and the plunger mechanisms and suspended in the lens barrel; and the screw mechanisms and the plunger mechanisms can move up and down relative to the lens barrel so as to enable the microscope base to rise, fall or incline in the lens barrel. According to the utility model, adjustment is carried out by using a difference structure, the lens barrel and microscope base are adjusted through difference screw threads, the adjustment precision depends on the screw thread difference among the difference screw threads, and z-direction adjustment and inclined adjustment of a lens can be realized; the thread pitch of the selected screw thread is moderate, and the reliability is high; an off center problem in the adjustment process is solved by a reed structure; and an non threaded connection structure reduces stress imposed on the microscope base by the screws during inclined adjustment.
Description
Technical field
The utility model belongs to the litho machine regulating device, is specifically related to a kind of projection objective difference micromatic setting.
Background technology
Along with the raising of SIC (semiconductor integrated circuit) integrated level, the reducing of the characteristic dimension of semiconductor devices, the requirement of the projection optical system resolution in the photo-etching machine exposal equipment is more and more higher, requires also higher to the image quality of optical system.
Object lens the underproof phenomenon of picture element occurs toward the contact meeting after just adorning, and in order to compensate, some eyeglass need be set as adjustable eyeglass, improve picture element by regulating small amount, and governor motion need have higher degree of regulation.In order to save cost, the adjustment structure of manual mode is used in the off-line adjustment often.
Mainly comprise following three kinds of technical schemes in the prior art:
Scheme one: as shown in Figure 1, the X-direction by voussoir 101 moves, and the Z-direction of adjusting jacking block 102 on the inclined-plane moves, and microscope base is finely tuned, and can realize that high precision is regulated and stability is high, easy operating.But angle precision, row position tolerance and surfaceness etc. for the inclined-plane have higher requirement, and can't adjust the eyeglass degree of tilt.
Scheme two: as shown in Figure 2, Fig. 2 (b) is Fig. 2 (a) partial enlarged drawing, Fig. 2 (c) is the principle of work synoptic diagram, this device applies power by certain point on 103 pairs of first reeds 104 of control lever, causes the deformation of first reed 104 and second reed 105, thereby makes eyeglass L produce, this structure is regulated sensitive, can realize aberration correction, but this mode only limits to tilt adjustments, can not realize the adjustment of Z-direction.
Scheme three: as shown in Figure 3, adopt screw 106 to carry out fixing between lens barrel and the microscope base and by the single thread pair microscope base is carried out position adjustments, there is the following defective in this scheme: at first, regulating resolution is subject to the pitch size, is difficult to break through 0.5mm, the general theoretical resolution that can arrive only is 1.4 μ m/ degree, namely only can be used for coarse adjustment; Secondly the load-bearing capacity and the wear-resistant situation that connect of screw is all not ideal enough, can't assurance device stability; If carry out the tilt adjustment of eyeglass by 3 cooperations, the stress of generation can cause the microscope base distortion.
The utility model content
Technical problem to be solved in the utility model is to take into account that Z-direction is regulated and the degree of tilt adjusting, and the adjusting sensitivity that can't satisfy of single thread pair, in order to overcome above deficiency, provides a kind of projection objective difference micromatic setting.
In order to solve the problems of the technologies described above, the technical solution of the utility model is: described projection objective difference micromatic setting, it comprises lens barrel, microscope base, be evenly distributed on the lens barrel circumference at least three screw mechanisms and with the screw mechanism plunger mechanism of corresponding equal number up and down, microscope base is suspended from the lens barrel by screw mechanism and plunger mechanism clamping.Screw mechanism can move up and down by relative lens barrel with plunger mechanism, thereby makes microscope base rise in lens barrel, descend or tilt.
Further, described screw mechanism comprises screw rod and is enclosed within the outer swivel nut of screw rod, stretch out from the two ends of swivel nut respectively at the two ends of screw rod, the lower end bulb contacts with microscope base, the external thread of screw rod is connected with the screw-internal thread fit of swivel nut, and pitch is P1, and the external thread of swivel nut is connected with the screw-internal thread fit of lens barrel, pitch is P2, P2〉P1.Different difference pitch differences can obtain different degrees of regulation.
Further, the screw rod upper end is provided with the screw rod set nut, is used for the relative position of standing screw in swivel nut, and swivel nut is provided with the swivel nut set nut, is used for the fixedly relative position of swivel nut in cylinder.
Further, also comprise screw rod positioning device, it comprise horizontally disposed on pin, the screw rod before pin-and-hole and relevant position connect the back pin-and-hole that arranges at lens barrel, pin-and-hole before pin inserts by the back pin-and-hole, described back pin-and-hole is slotted hole, horizontal direction matches with pin, and vertical direction leaves the space that pin moves up and down with screw rod.Screw rod positioning device is in order to prevent that screw rod is along with swivel nut rotates together.
Further, described plunger mechanism comprises spring-loaded plunger and brace, and spring-loaded plunger is fixedlyed connected by brace with lens barrel, and the pin of spring-loaded plunger contacts with microscope base.
Further, also comprise z to the ring-type reed of flexibility, described reed is fixedlyed connected with microscope base with lens barrel simultaneously, and reed can prevent the radial-play of microscope base in the adjustment process.
Further, described microscope base is cylindrical structure, and the centre has circular hole and has step, and eyeglass is placed on the step, evenly extends at least three back-up blocks on the described microscope base excircle, and described back-up block is arranged between corresponding screw mechanism and the plunger mechanism.
Further, also comprise at least three sensors, lay respectively on the screw mechanism 180 degree positions.Be used for surveying the displacement of opposite screw rod.
Further, described lens barrel is one-body molded little cylinder, middle cylinder and the large cylinder of comprising from top to bottom, the upper surface that cylinder stretches out in described is evenly distributed with at least three screw holes by circumference, be used for arranging screw mechanism, the inner peripheral surface of middle cylinder is provided with and screw hole upper-lower position corresponding groove, be used for back-up block and plunger mechanism are set, the excircle of middle cylinder is provided with at least three breach, is used for arranging sensor.
The utility model utilizes differential configuration to regulate, and by the difference threaded adjusting, its degree of regulation depends on that the screw thread between the difference screw thread is poor between lens barrel and the microscope base, can realize that eyeglass z is to regulating and tilt adjustment; Selected thread pitch is moderate, the reliability height; Reed structure solves the eccentricity issues in the adjustment process; Non-threaded bindiny mechanism, the stress that screw rod produces microscope base when reducing tilt adjustment.
Description of drawings
Fig. 1 is scheme one structural representation in the prior art;
Fig. 2 is scheme two structural representations in the prior art;
Fig. 3 is scheme three structural representations in the prior art;
Fig. 4 is three-dimensional view of the present utility model;
Fig. 5 be Fig. 4 A-A to cut-open view;
Fig. 6 is Fig. 5 partial enlarged drawing;
Fig. 7 is that B of the present utility model is to view.
Shown in the figure:
101 voussoirs, 102 jacking blocks, 103 control lever, 104 first reeds, 105 second reeds, 106 screws;
2 lens barrels, 21 little cylinders, cylinder in 22,23 large cylinders, 24 screw holes, 25 grooves, 26 breach;
3 microscope bases, 31 circular holes, 32 steps, 33 back-up blocks;
4 screw mechanisms, 41 screw rods, 42 swivel nuts, 43 bulbs, 44 screw rod set nuts, 45 swivel nut set nuts;
5 plunger mechanism, 51 spring-loaded plungers, 52 braces, 53 pins;
6 screw rod positioning devices, 61 pins, 62 preceding pin-and-holes, 63 back pin-and-holes;
7 reeds;
8 sensors.
Embodiment
Below in conjunction with accompanying drawing the utility model is described in detail:
Shown in Figure 4 and 5, a kind of projection objective difference micromatic setting described in the utility model, it comprises lens barrel 2, microscope base 3, be evenly distributed on three screw mechanisms 4 on lens barrel 2 circumference, with screw mechanism corresponding three plunger mechanism 5, screw rod positioning device 6, reed 7 and three sensors 8 about in the of 4, microscope base 3 is suspended from the lens barrel 2 by screw mechanism 4 and plunger mechanism 5 clampings.
Described lens barrel 2 is one-body molded roundlet tube 21, middle cylinder 22 and the large cylinder 23 of comprising from top to bottom, the upper surface that cylinder 22 stretches out in described is evenly distributed with three screw holes 24 by circumference, be used for arranging screw mechanism 4, the inner peripheral surface of middle cylinder 22 is provided with and screw hole 24 upper-lower position corresponding groove 25, be used for arranging microscope base 3 and block mechanism 5, in the excircle of cylinder 22 be provided with on the 180 degree positions that 26, three breach 26 of three breach lay respectively at three screw holes 24.
Described microscope base 3 is cylindrical structure, and the centre has circular hole 31 and has step 32, and eyeglass is placed on the step 32.Evenly extend three back-up blocks 33 on described microscope base 3 excircles, described back-up block 33 is arranged in the groove 25.
As shown in Figure 6, described screw mechanism 4 comprises screw rod 41 and the swivel nut 42 that is enclosed within outside the screw rod 41, stretch out from the two ends of swivel nut 42 respectively at the two ends of screw rod 41, the external thread of screw rod 41 is connected with the screw-internal thread fit of swivel nut 42, pitch is P1, pass the swivel nut 42 of screw hole 24, its external thread is connected with the screw-internal thread fit of middle cylinder 22, and pitch is P2.The bulb 43 that stretches out swivel nut 42 contacts with back-up block 33, and screw rod 41 upper ends are provided with screw rod set nut 44, the relative position of standing screw 41 in swivel nut 42, and swivel nut 42 is provided with swivel nut set nut 45, fixedly the relative position of swivel nut 42 in middle cylinder 22.
Described plunger mechanism 5 comprises spring-loaded plunger 51 and brace 52, and spring-loaded plunger 51 is fixedlyed connected by brace 22 with middle cylinder 22, and the pin 53 of spring-loaded plunger 51 contacts with back-up block 33.
Wherein pitch P 2〉pitch P 1 and two pitch differ 0.25mm, that is to say that when swivel nut 42 rotates a circle microscope base 3 will rise or decline 0.25mm, degree of regulation reaches 0.7 μ m/ degree, by the real z of difference pitch difference to the minute adjustment that tilts.
Described screw rod positioning device 6 comprise horizontally disposed on pin 61, the screw rod 41 before pin-and-hole 62 and relevant position connect the back pin-and-hole 63 that arranges at middle cylinder 22, pin-and-hole 62 before pin 61 inserts by back pin-and-hole 63, prevent that screw rod 41 is along with swivel nut 42 rotates together, described back pin-and-hole 63 is slotted hole, horizontal direction matches with pin 61, and vertical direction leaves the space that pin 61 moves up and down with screw rod 41.
As shown in Figure 7, described reed 7 be z to the ring-type reed of flexibility, reed 7 is fixedlyed connected by screw with lens barrel 2 and microscope base 3 simultaneously, reed 7 can with microscope base 3 move up and down and deformation is bigger in radial rigidity, can prevent the radial-play of microscope base 3 in the adjustment process.
Three sensors 8 are separately positioned in three breach 26, and just sensor 8 is on 180 degree positions between corresponding screw mechanism 4 and the plunger mechanism 5.
The course of work is as follows: by the distortion that pertinent instruments is measured object lens, when the distortion of optical system was undesirable, eyeglass needed tilt adjustment, adjusted 42, three swivel nuts of swivel nut, 42 adjustment amount differences by the frock spanner, tilted to realize eyeglass.After finishing, adjusting surveys the object lens distortion again, if defective continuation adjusting, until meeting the demands.When the multiplying power of optical system was undesirable, eyeglass needed translational adjustment up or down, regulates three swivel nuts 42 successively by the frock spanner, and regulating direction all must be identical with regulated quantity, observes the reading of three sensors 8, meets the requirements until three readings.Survey the object lens multiplying power again, if defective continuation adjusting, until meeting the demands.
It is to be noted, be used for screw mechanism and the complete use of plunger mechanism of clamping and adjusting microscope base, screw rod positioning device with matching and sensor also can correspondingly adopt, in order to realize above-mentioned effect, except providing the situation of three covers among the embodiment, can realize identical technique effect equally more than three structures of overlapping.
Claims (9)
1. projection objective difference micromatic setting, comprise lens barrel and microscope base, it is characterized in that, also comprise at least three screw mechanisms being evenly distributed on the lens barrel circumference and with the screw mechanism plunger mechanism of corresponding equal number up and down, microscope base is suspended from the lens barrel by screw mechanism and plunger mechanism clamping.
2. according to the described a kind of projection objective difference micromatic setting of claim 1, it is characterized in that, described screw mechanism comprises screw rod and is enclosed within the outer swivel nut of screw rod, stretch out from the two ends of swivel nut respectively at the two ends of screw rod, and the lower end bulb contacts with microscope base, and the external thread of screw rod is connected with the screw-internal thread fit of swivel nut, pitch is P1, the external thread of swivel nut is connected with the screw-internal thread fit of lens barrel, and pitch is P2, P2〉P1.
3. according to the described a kind of projection objective difference micromatic setting of claim 2, it is characterized in that the screw rod upper end is provided with the screw rod set nut, is used for the relative position of standing screw in swivel nut, swivel nut is provided with the swivel nut set nut, is used for the fixedly relative position of swivel nut in cylinder.
4. according to the described a kind of projection objective difference micromatic setting of claim 2, it is characterized in that, also comprise screw rod positioning device, it comprise horizontally disposed on pin, the screw rod before pin-and-hole and relevant position connect the back pin-and-hole that arranges at lens barrel, pin-and-hole before pin inserts by the back pin-and-hole, described back pin-and-hole is slotted hole, and horizontal direction matches with pin, and vertical direction leaves the space that pin moves up and down with screw rod.
5. according to the described a kind of projection objective difference micromatic setting of claim 1, it is characterized in that described plunger mechanism comprises spring-loaded plunger and brace, spring-loaded plunger is fixedlyed connected by brace with lens barrel, and the pin of spring-loaded plunger contacts with microscope base.
6. according to the described a kind of projection objective difference micromatic setting of claim 1, it is characterized in that, also comprise z to the ring-type reed of flexibility, described reed is fixedlyed connected with microscope base with lens barrel simultaneously, and reed can prevent the radial-play of microscope base in the adjustment process.
7. according to the described a kind of projection objective difference micromatic setting of claim 1, it is characterized in that, described microscope base is cylindrical structure, the centre has circular hole and has step, eyeglass is placed on the step, evenly extend at least three back-up blocks on the described microscope base excircle, described back-up block is arranged between corresponding screw mechanism and the plunger mechanism.
8. according to the described a kind of projection objective difference micromatic setting of claim 1, it is characterized in that, also comprise at least three sensors, described sensor lays respectively on the screw mechanism 180 degree positions.
9. according to the arbitrary described a kind of projection objective difference micromatic setting of claim 1～8, it is characterized in that, described lens barrel is one-body molded little cylinder, middle cylinder and the large cylinder of comprising from top to bottom, the upper surface that cylinder stretches out in described is evenly distributed with at least three screw holes by circumference, the inner peripheral surface of middle cylinder is provided with and screw hole upper-lower position corresponding groove, and the excircle of middle cylinder is provided with at least three breach.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220742869 CN203069858U (en) | 2012-12-28 | 2012-12-28 | Projection lens difference fine adjustment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220742869 CN203069858U (en) | 2012-12-28 | 2012-12-28 | Projection lens difference fine adjustment device |
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| Publication Number | Publication Date |
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| CN203069858U true CN203069858U (en) | 2013-07-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220742869 Expired - Lifetime CN203069858U (en) | 2012-12-28 | 2012-12-28 | Projection lens difference fine adjustment device |
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| CN (1) | CN203069858U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106405777A (en) * | 2016-08-20 | 2017-02-15 | 南京理工大学 | Fusion detection system visible lens optical axis fine adjustment platform |
| CN108398761A (en) * | 2018-03-28 | 2018-08-14 | 中国科学院光电技术研究所 | Three-dimensional dynamic adjusting and locking mechanism |
| CN110202258A (en) * | 2019-05-17 | 2019-09-06 | 南京魔迪多维数码科技有限公司 | A device for adjusting the height of the vibrating mirror |
| CN114295005A (en) * | 2021-11-30 | 2022-04-08 | 航天科工微电子系统研究院有限公司 | Reference mirror adjusting device |
-
2012
- 2012-12-28 CN CN 201220742869 patent/CN203069858U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106405777A (en) * | 2016-08-20 | 2017-02-15 | 南京理工大学 | Fusion detection system visible lens optical axis fine adjustment platform |
| CN106405777B (en) * | 2016-08-20 | 2019-02-05 | 南京理工大学 | A fusion detection system visible light lens optical axis fine-tuning platform |
| CN108398761A (en) * | 2018-03-28 | 2018-08-14 | 中国科学院光电技术研究所 | Three-dimensional dynamic adjusting and locking mechanism |
| CN110202258A (en) * | 2019-05-17 | 2019-09-06 | 南京魔迪多维数码科技有限公司 | A device for adjusting the height of the vibrating mirror |
| CN114295005A (en) * | 2021-11-30 | 2022-04-08 | 航天科工微电子系统研究院有限公司 | Reference mirror adjusting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) Co.,Ltd. Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: SHANGHAI MICRO ELECTRONICS EQUIPMENT Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130717 |
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| CX01 | Expiry of patent term |