CN203013686U - Chemical liquid distributor - Google Patents
Chemical liquid distributor Download PDFInfo
- Publication number
- CN203013686U CN203013686U CN 201220602636 CN201220602636U CN203013686U CN 203013686 U CN203013686 U CN 203013686U CN 201220602636 CN201220602636 CN 201220602636 CN 201220602636 U CN201220602636 U CN 201220602636U CN 203013686 U CN203013686 U CN 203013686U
- Authority
- CN
- China
- Prior art keywords
- chemical liquid
- output
- valve
- input
- pneumatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 84
- 239000000126 substance Substances 0.000 title claims abstract description 59
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 25
- 238000005070 sampling Methods 0.000 claims abstract description 20
- 238000002347 injection Methods 0.000 claims abstract description 17
- 239000007924 injection Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 45
- 239000012530 fluid Substances 0.000 claims description 4
- 230000000875 corresponding Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 abstract description 8
- 238000003860 storage Methods 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000008213 purified water Substances 0.000 abstract 2
- 230000003247 decreasing Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003020 moisturizing Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000002596 correlated Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Abstract
The utility model relates to a chemical liquid distributor, belonging to the field of semiconductor manufacture. The distributor comprises a storage device, a sampling valve and a pneumatic tee valve, wherein chemical liquid is stored in the storage device, and the storage device is equipped with a filling-liquid inlet and a returned-liquid inlet at the top, and a liquid outlet connected with the input of a circulating pump at the bottom; the sampling valve is a tee valve, wherein the input of the sampling valve is connected with the output of the circulating pump, a sampling end of the sampling valve is connected with a hot water injecting channel, and the output of the sampling valve is connected with the input of the pneumatic tee valve; and a first output of the pneumatic tee valve is connected with the returned-liquid inlet of the storage device, a second output of the pneumatic tee valve is connected with the input of a technical unit, and the output of the technical unit is connected with the returned-liquid inlet of the storage device. According to the chemical liquid distributor of the utility model, the hot water injecting channel is arranged in a technical pipeline, which replaces an online heating mechanism and a purified water injecting mechanism in the prior art, and combines heating with purified water injection, thereby simplifying structure of the chemical liquid distributor, providing convenience for operation, and decreasing control points.
Description
Technical field
The utility model relates to field of semiconductor manufacture, is specifically related to a kind of chemical liquid distributor.
Background technology
Can use various chemical liquids in the semi-conductor silicon chip wet clean process, these chemical liquids or be acid, alkalescence or have strong corrosivity, or viscosity is higher, volatile, and some chemical liquid may be because the high cost problem also requires to recycle within useful life.If certain chemical liquid viscosity is higher and volatile but also can be recycled, this chemical liquid can because viscosity high in pipeline flow difficulties, be difficult to reach the required pressure of technique and flow; Because volatile meeting affect the proportioning of its component and can increase its viscosity, and because can recycle, so need flow back to the chemical liquid storage device later in technique, this has more aggravated the volatilization of this chemical liquid, thereby further increase its viscosity, had a strong impact on technological effect.
It is the device that adopts as shown in fig. 1 that the semiconductor manufacturing equipment of being correlated with at present, addresses the above problem.Due to this chemical liquid reusable edible, also need reclaim after entering processing chamber to complete technique, therefore need a special reservoir vessel 1, reservoir vessel 1 can be stored a certain amount of chemical liquid, both can complete technique and begin front preparation, can also continue the chemical liquid of memory recall after technique is completed.When technique begins, at first open the 4th pneumatic operated valve 6 and inject a certain amount of chemical liquid in reservoir vessel, close the 4th pneumatic operated valve 6; The first pneumatic operated valve 3 is opened, chemical liquid enters process pipeline in the effect of circulating pump 2, because this chemical liquid viscosity is higher, this device has been installed on-line heating device 10 on process pipeline, in the situation that satisfy process requirements, chemical liquid is heated to a certain temperature, after temperature raises, the reduced viscosity of chemical liquid, can better flow in process pipeline, reach the required flow of technique and pressure, enter liquid storage container 1 via Pneumatic three-way valve 8 and the 3rd pneumatic operated valve 5 afterwards.In addition, this chemical liquid is volatile, technique unit 9 also needs chemical liquid is reclaimed via the second pneumatic operated valve 4 after completing technique, this has more aggravated the volatilization of chemical liquid, the method that this device adopts is, by the folding of timing controlled the 5th pneumatic operated valve 7, inject a certain amount of pure water in reservoir vessel 1, chemical liquid is diluted.
Due to the heating-up temperature that both needs to control online heater 10, need again to control simultaneously the injection of pure water, operation inconvenience; Simultaneously, due to the setting of the 5th pneumatic operated valve 7 and on-line heating device 10, make this apparatus structure complicated.
The utility model content
The technical problem that (one) will solve
It is a kind of simple in structure, easy to operate that the purpose of this utility model is to provide, the chemical liquid distributor that the control point is few.
(2) technical scheme
Technical solutions of the utility model are as follows:
A kind of chemical liquid distributor comprises:
Reservoir vessel, its internal reservoir chemical liquid, its top is provided with the fluid injection entrance and returns the liquid entrance, and its bottom is provided with the liquid outlet that is connected with the input of circulating pump;
Sampling valve, it is triple valve, and its input connects circulation delivery side of pump, and sampling end connects the hot water injection channel, and output connects the input of Pneumatic three-way valve;
Pneumatic three-way valve, its first output connect time liquid entrance of reservoir vessel, and the second output connects the input of technique unit, and the output of described technique unit connects time liquid entrance of described reservoir vessel.
Preferably, described technique unit is a plurality of, described Pneumatic three-way valve is identical with the quantity of described technique unit, and the second output of each Pneumatic three-way valve connects with the input of corresponding technique unit respectively, and the output of each technique unit is connected with the liquid entrance that returns of described reservoir vessel respectively.
Preferably, be provided with flow control element on described hot water injection channel.
Preferably, be provided with liquid level sensor on described reservoir vessel.
Preferably, described circulating pump is magnetic drive pump.
(3) beneficial effect
A kind of chemical liquid distributor of the present utility model is by arranging the hot water injection channel on process pipeline, on-line heating mechanism of the prior art and pure water injecting mechanism have been replaced, to heat to inject with pure water and unite two into one, simplified the structure of chemical liquid distributor, facilitate operation, reduced simultaneously the control point.
Description of drawings
Fig. 1 is the schematic diagram of chemical liquid distributor in prior art;
Fig. 2 is the schematic diagram of a kind of chemical liquid distributor of the present utility model.
In figure, 1: reservoir vessel; 2: circulating pump; 3: the first pneumatic operated valves; 4: the second pneumatic operated valves; 5: the three pneumatic operated valves; 6: the four pneumatic operated valves; 7: the five pneumatic operated valves; 8: Pneumatic three-way valve; 9: technique unit; 10: the on-line heating device; 11: the hot water injection channel; 12: sampling valve.
Embodiment
Below in conjunction with drawings and Examples, the embodiment of utility model is described further.Following examples only are used for explanation the utility model, but are not used for limiting scope of the present utility model.
The difference of the prior art shown in the utility model and Fig. 1 mainly is no longer regularly moisturizing in the reservoir vessel 1, remove simultaneously on-line heating device 10, the method that a certain amount of specified temp hot water is injected in employing in the process pipeline reaches the purpose that reduces chemical liquid viscosity, has also improved its volatile deficiency simultaneously.Specific implementation process is as described below:
A kind of chemical liquid distributor as shown in Figure 2, comprise reservoir vessel 1, its internal reservoir chemical liquid, its top is provided with the fluid injection entrance and returns the liquid entrance, the fluid injection entrance is used for injecting chemical liquid by the 4th pneumatic operated valve 6, returns the liquid entrance and is used for refluxing for chemical liquid; Be provided with liquid level sensor on reservoir vessel 1, be convenient to inject from visual observation the total amount of chemical liquid; The output of reservoir vessel 1 is connected with the input of circulating pump 2, is used for driving circulating of chemical liquid; Circulating pump 2 is magnetic drive pump, and magnetic drive pump has the characteristics such as long service life and service free; Sampling valve 12 is triple valve, and the output of circulating pump 2 is connected with the input of sampling valve 12; The sampling end of sampling valve 12 is connected with hot water injection channel 11, is used for injecting hot water to process pipeline; Be provided with flow control element on hot water injection channel 11, be used for controlling the amount of the hot water that injects; The output of sampling valve 12 is connected with the input of Pneumatic three-way valve 8; The first output of Pneumatic three-way valve 8 is connected with the liquid entrance that returns of reservoir vessel 1 by pipeline, is provided with the 3rd pneumatic operated valve 5 on pipeline, when the larger needs of chemical liquid total amount reflux, opens the 3rd pneumatic operated valve 5 chemical liquid is refluxed; The second output is connected with the input of technique unit 9; The output of technique unit 9 is connected with the liquid entrance that returns of reservoir vessel 1 by pipeline, is provided with the second pneumatic operated valve 4 on pipeline, opens the recovery of the chemical liquid after the second pneumatic operated valve 4 is completed for technique in technical process.
The practical operation step is as follows:
Inject chemical liquid: open the 4th pneumatic operated valve 6, inject a certain amount of chemical liquid in reservoir vessel 1, the amount of chemical liquid can be by the level sensor monitors of installing on reservoir vessel 1; When the chemical liquid liquid level in reservoir vessel 1 reaches preset requirement, close the 4th pneumatic operated valve 6.
Preparation before technique: open the first pneumatic operated valve 3, start magnetic drive pump 2, open the 3rd pneumatic operated valve 5, chemical liquid flows out from reservoir vessel 1, passes through successively the Pneumatic three-way valve 8 on each technique unit 9, finally by flowing back to reservoir vessel 1 by the 3rd pneumatic operated valve 5.In this stage, the amount of the hot water of injection and temperature can accurately be controlled.Control mode can be regularly to open the sampling end of sampling valve 12, allows the hot water injection technology pipeline of specified temp, reduces the viscosity of chemical liquid; Can be also to adopt thinner hot water line, access simultaneously the flow control elements such as needle-valve in pipeline, keep the sampling end of sampling valve 12 be open mode always, controls the injection of hot water by flow control element.
Technical process: close the 3rd pneumatic operated valve 5, switching simultaneously 8, two technique units 9 of each Pneumatic three-way valve can work simultaneously, also can only have one of them work, at this moment, chemical liquid can flow back to reservoir vessel 1 through the second pneumatic operated valve 4 by the reclaim line of technique unit.
Advantage of the present utility model:
Chemical liquid distributor of the present utility model does not need in the reservoir vessel moisturizing at regular time and quantity, and directly inject the hot water of steady temperature in the process pipeline, also replenished the moisture that loses due to volatilization when having reduced chemical liquid viscosity, this programme has been saved the on-line heating device compared to existing technology simultaneously, the temperature of hot water can accurately be controlled, simplify the structure of chemical liquid distributor, facilitated operation, reduced simultaneously the control point.
Above execution mode only is used for explanation the utility model; and be not limitation of the utility model; the those of ordinary skill in relevant technologies field; in the situation that do not break away from spirit and scope of the present utility model; can also make a variety of changes and modification, so all technical schemes that are equal to also belong to protection category of the present utility model.
Claims (5)
1. a chemical liquid distributor, is characterized in that, comprising:
Reservoir vessel (1), its internal reservoir chemical liquid, its top is provided with the fluid injection entrance and returns the liquid entrance, and its bottom is provided with the liquid outlet that is connected with the input of circulating pump (2);
Sampling valve (12), it is triple valve, and its input connects the output of circulating pump (2), and sampling end connects hot water injection channel (11), and output connects the input of Pneumatic three-way valve (8);
Pneumatic three-way valve (8), its first output connect time liquid entrance of reservoir vessel (1), and the second output connects the input of technique unit (9), and the output of described technique unit (9) connects time liquid entrance of described reservoir vessel (1).
2. a kind of chemical liquid distributor according to claim 1, it is characterized in that, described technique unit (9) is a plurality of, described Pneumatic three-way valve (8) is identical with the quantity of described technique unit (9), second output of each Pneumatic three-way valve (8) connects with the input of corresponding technique unit (9) respectively, and the output of each technique unit (9) is connected with the liquid entrance that returns of described reservoir vessel (1) respectively.
3. a kind of chemical liquid distributor according to claim 1, is characterized in that, is provided with flow control element on described hot water injection channel (11).
4. the described a kind of chemical liquid distributor of according to claim 1 to 3 any one, is characterized in that, described reservoir vessel is provided with liquid level sensor on (1).
5. the described a kind of chemical liquid distributor of according to claim 1 to 3 any one, is characterized in that, described circulating pump (2) is magnetic drive pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220602636 CN203013686U (en) | 2012-11-14 | 2012-11-14 | Chemical liquid distributor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220602636 CN203013686U (en) | 2012-11-14 | 2012-11-14 | Chemical liquid distributor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203013686U true CN203013686U (en) | 2013-06-19 |
Family
ID=48605251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220602636 Withdrawn - After Issue CN203013686U (en) | 2012-11-14 | 2012-11-14 | Chemical liquid distributor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203013686U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102938385A (en) * | 2012-11-14 | 2013-02-20 | 北京七星华创电子股份有限公司 | Chemical liquor dispensing device |
-
2012
- 2012-11-14 CN CN 201220602636 patent/CN203013686U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102938385A (en) * | 2012-11-14 | 2013-02-20 | 北京七星华创电子股份有限公司 | Chemical liquor dispensing device |
| CN102938385B (en) * | 2012-11-14 | 2015-01-21 | 北京七星华创电子股份有限公司 | Chemical liquor dispensing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130619 Effective date of abandoning: 20150121 |
|
| RGAV | Abandon patent right to avoid regrant |