CN202974592U - Vacuum leakage detection device for quartz-crystal resonator - Google Patents

Vacuum leakage detection device for quartz-crystal resonator Download PDF

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Publication number
CN202974592U
CN202974592U CN 201220716057 CN201220716057U CN202974592U CN 202974592 U CN202974592 U CN 202974592U CN 201220716057 CN201220716057 CN 201220716057 CN 201220716057 U CN201220716057 U CN 201220716057U CN 202974592 U CN202974592 U CN 202974592U
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China
Prior art keywords
vacuum
tight
housing
quartz
cover
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CN 201220716057
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Chinese (zh)
Inventor
郑善发
张建国
谢兴明
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Anhui Polytron Technologies Inc
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TONGLING CITY JINGSAI ELECTRONIC CO Ltd
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Abstract

The utility model relates to a vacuum leakage detection device for a quartz-crystal resonator, which comprise an instrument body, a vacuum cover and a vacuum pump, wherein the instrument body is used for detecting the crystal resonant resistance R, and comprises an operative part and a control part; a cover body of the vacuum cover is provided with a sealing cover which can be opened, and the operative part is arranged in the vacuum cover; the vacuum pump is used for pumping vacuum for the vacuum cover; and the control part is arranged outside the vacuum cover and electrically connected with the operative part arranged in the vacuum cover through a cable. Air leakage products detected by the vacuum leakage detection device provided by the utility model can be packaged and repaired again, the equipment investment is small, the required detection time is short, the efficiency is high, a sample is not needed in detection, and missed or false detection does not occur.

Description

The quartz-crystal resonator vacuum leak detector
Technical field
The utility model relates to a kind of quartz-crystal resonator leakage detection apparatus, specifically a kind of quartz-crystal resonator vacuum leak detector.
Background technology
Whether leak gas after crystal package, be one of important indicator of crystal product reliability.At present, detecting the method whether the quartz-crystal resonator product leak gas is mainly Liquid pressure injection and pressure differential method.The method of Liquid pressure injection is: first product is put into pressurized tank, then inject alcohol in pressurized tank, then add compressed air in pressurized tank, make the interior pressure of pressurized tank remain on the pressure of 5kg, the time is 30 minutes; Product is taken out, again it is carried out the frequency electric performance test after with towel, the alcohol on the surface of product being dried simultaneously.If product hermeticity is bad, alcohol can be undertaken in product by the gap of product, and the electrical property that records can change, and therefore, can judge this part product gas leakage, and is defective.This leak hunting method is because the parameter by crystal judges, advantage is that equipment investment is few, and shortcoming is: the one, and each pressurization needs half an hour, and the test duration is long; The 2nd, alcohol is volatile,, easily produces and fails to judge such as the SMD product for the little product of cavity volume; The 3rd, may judge by accident, the bad of crystal own also can cause the crystal current performance change; The 4th, detection has destructiveness, and the gas leakage product causes crystal pollute and can't again encapsulate reparation because alcohol infiltrates, and causes rejection rate to increase and makes the production cost rising.
Whether pressure differential method is that product and qualified exemplar are placed on respectively in the identical container of two volumes, is pumped to simultaneously respectively in the identical air storage chamber of two volumes, measures the pressure of two air storage chambers, have difference to judge whether product leaks gas according to pressure.The advantage of this method is to detect not have destructiveness, but the reparation of gas leakage product Reseal can improve product percent of pass, reduces production costs.Shortcoming is: equipment price is expensive, and separate unit checkout equipment price reaches more than 800,000 yuan; Secondly, require product and exemplar outward appearance in full accord, otherwise can cause erroneous judgement because of the outward appearance volumetric errors.
Summary of the invention
The purpose of this utility model is for the deficiencies in the prior art, and a kind of quartz-crystal resonator vacuum leak detector is provided, and not only detects not possess destructiveness, and the gas leakage product can be repaired, and has advantages of that equipment investment is few.
The utility model is realized based on following thinking: the resonant resistance R of the crystal of same Frequency point under different vacuum tightnesss is different, and along with vacuum tightness descends, its resonant resistance R is also on a declining curve.If product is detected respectively its resonant resistance R under the negative pressure state of normal pressure and low vacuum OftenAnd R NegativeIf, latter R NegativeThan the former resonant resistance R OftenObvious decline is arranged, illustrate that in product, the vacuum tightness around crystal descends, can judge its gas leakage.
The utility model is achieved in that and comprises that an instrument body that is used for detecting crystal resonant resistance R, described instrument body have operating part and be used for sending instruction and show the control section of result; A vacuum (-tight) housing, cover body is provided with openable gland bonnet, and the operating part of instrument body is arranged in vacuum (-tight) housing; A vacuum pump is used for vacuum (-tight) housing is vacuumized; The control section of described instrument body is arranged on outside vacuum (-tight) housing, is electrically connected to operating part in being arranged on vacuum (-tight) housing by cable.
During test, the quartz-crystal resonator product is placed in respectively normal pressure and vacuum tightness detects respectively its resonant resistance R under the negative pressure state below 100Pa OftenAnd R NegativeCalculate both rate of change R%=R Negative/ R Often% is if rate of change R% more than or equal to 10% the time, judges product gas leakage; Otherwise, judge that product is air tight.
Place specimen for convenient in vacuum (-tight) housing, described gland bonnet is located at a side of vacuum (-tight) housing.
The utility model not only has the advantage of Liquid pressure injection and pressure differential method concurrently, and detected gas leakage product can encapsulate reparation again, and the instrument body is conventional electric performance test equipment, and equipment investment is few.Also overcome simultaneously the shortcoming of Liquid pressure injection and pressure differential method, had that to detect required time short, efficient is high, and detects and do not need exemplar, undetected and flase drop can not occur.
Description of drawings
Fig. 1 is the utility model structural representation.
Embodiment
As shown in Figure 1, comprise an instrument body that is used for detecting crystal resonant resistance R, described instrument body has operating part 7 and is used for sending instruction and shows the control section 5 of result; A vacuum (-tight) housing 1, cover body one side is provided with openable gland bonnet 2, and the operating part 7 of instrument body is arranged in vacuum (-tight) housing 1; A vacuum pump 4 communicates by in pipeline 3 and vacuum (-tight) housing 1, is used for vacuum (-tight) housing is vacuumized; The control section 5 of described instrument body is arranged on outside vacuum (-tight) housing 1, is electrically connected to operating part 7 in being arranged on vacuum (-tight) housing by cable 6.
This example selects the 250B crystal checker as the instrument body that detects crystal resonant resistance R.
Select the quartz-crystal resonator product of 3225 specifications as testing product, its crystal frequency point is 16M.Leak hunting method is as follows:
1, detect the resonant resistance R of quartz-crystal resonator product under normal pressure Often
2, the vacuum tightness in vacuum (-tight) housing is arranged on detects its resonant resistance R under the negative pressure state of 100Pa Negative
3, calculate both rate of change R%=R Negative/ R Often% is if rate of change R% more than or equal to 10 o'clock, judges product gas leakage; Otherwise, judge that product is air tight.
Following table is resonant resistance and the rate of change thereof that three products record under normal pressure and different vacuum tightness:
Wherein, 1,2, No. 3 product is 3225-16M quartz-crystal resonator product.
As seen from the above table, lower at the bottom of vacuum, the resonant resistance R that records is less, and R % value is larger, and is more easy to identify.Therefore, the vacuum tightness in above-mentioned steps 2 can be arranged on 50Pa or following.In case product gas leakage, rate of change R% can conveniently differentiate greater than more than 30%, effectively prevents flase drop.But vacuum tightness is crossed the low consumption energy, therefore, selects vacuum tightness 50Pa better.
The applicable detection to the SMD quartz-crystal resonator of the utility model.

Claims (2)

1. quartz-crystal resonator vacuum leak detector is characterized in that:
Comprise an instrument body that is used for detecting crystal resonant resistance R, described instrument body have operating part (7) and be used for sending instruction and and show the control section (5) of result;
A vacuum (-tight) housing (1), cover body are provided with openable gland bonnet (2), and the operating part of instrument body (7) is arranged in vacuum (-tight) housing (1);
A vacuum pump (4) is used for vacuum (-tight) housing (1) is vacuumized;
The control section of described instrument body (5) is arranged on outside vacuum (-tight) housing (1), and the operating part (7) interior with being arranged on vacuum (-tight) housing (1) by cable (6) is electrically connected to.
2. quartz-crystal resonator vacuum leak detector according to claim 1, it is characterized in that: described gland bonnet (2) is located at a side of vacuum (-tight) housing (1).
CN 201220716057 2012-12-21 2012-12-21 Vacuum leakage detection device for quartz-crystal resonator Active CN202974592U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220716057 CN202974592U (en) 2012-12-21 2012-12-21 Vacuum leakage detection device for quartz-crystal resonator

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Application Number Priority Date Filing Date Title
CN 201220716057 CN202974592U (en) 2012-12-21 2012-12-21 Vacuum leakage detection device for quartz-crystal resonator

Publications (1)

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CN202974592U true CN202974592U (en) 2013-06-05

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103775645A (en) * 2014-01-21 2014-05-07 燕山大学 Quartz pipe vacuum seal push-and-pull device and vacuum seal detection method
WO2016082351A1 (en) * 2014-11-24 2016-06-02 应达利电子(深圳)有限公司 Airtightness detecting method and device for quartz crystal resonator
CN111562072A (en) * 2020-05-12 2020-08-21 东晶电子金华有限公司 Detection method, detection apparatus, and computer-readable storage medium
CN111707420A (en) * 2020-06-28 2020-09-25 陶国斌 Quartz crystal resonator gas tightness detection device
CN112880913A (en) * 2021-04-08 2021-06-01 中国科学技术大学 Vacuum degree detection system based on crystal resonance frequency

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103775645A (en) * 2014-01-21 2014-05-07 燕山大学 Quartz pipe vacuum seal push-and-pull device and vacuum seal detection method
CN103775645B (en) * 2014-01-21 2016-01-27 燕山大学 A kind of quartz tube vacuum seal push-and-pull device and vacuum seal detecting method
WO2016082351A1 (en) * 2014-11-24 2016-06-02 应达利电子(深圳)有限公司 Airtightness detecting method and device for quartz crystal resonator
CN111562072A (en) * 2020-05-12 2020-08-21 东晶电子金华有限公司 Detection method, detection apparatus, and computer-readable storage medium
CN111707420A (en) * 2020-06-28 2020-09-25 陶国斌 Quartz crystal resonator gas tightness detection device
CN112880913A (en) * 2021-04-08 2021-06-01 中国科学技术大学 Vacuum degree detection system based on crystal resonance frequency

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Address after: The economic and Technological Development Zone two road 244061 Anhui city in Tongling Province, Tongling City, No. 1258

Patentee after: Anhui Polytron Technologies Inc

Address before: The economic and Technological Development Zone two road 244061 Anhui city in Tongling Province, Tongling City, No. 1258

Patentee before: Tongling City Jingsai Electronic Co., Ltd.