CN202886300U - Heavy ion single event effect biaxial automatic beam limiting diaphragm - Google Patents
Heavy ion single event effect biaxial automatic beam limiting diaphragm Download PDFInfo
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- CN202886300U CN202886300U CN201220452528.9U CN201220452528U CN202886300U CN 202886300 U CN202886300 U CN 202886300U CN 201220452528 U CN201220452528 U CN 201220452528U CN 202886300 U CN202886300 U CN 202886300U
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- lead screw
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- way lead
- movable baffles
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Abstract
本实用新型属于重离子试验设备的研究，具体涉及一种重离子单粒子效应双轴自动限束光阑。其结构包括设置在滑动导轨上的两块水平活动挡板和两块垂直活动挡板，每块活动挡板分别与挡板控制臂连接，两块水平活动挡板的挡板控制臂分别通过螺母与水平双向丝杠连接，两块垂直活动挡板的挡板控制臂分别通过螺母与垂直双向丝杠连接，水平双向丝杠和垂直双向丝杠的端部通过垂直变向齿轮相连接，垂直双向丝杠或水平双向丝杠通过联轴器与步进电机连接，两块水平活动挡板和两块垂直活动挡板分别在步进电机的带动下同步对向运动。本实用新型可以实现束斑尺寸的快速连续调节，从而提高试验效率、增加试验方案灵活性。
The utility model belongs to the research of heavy ion test equipment, in particular to a double-axis automatic beam-limiting aperture of heavy ion single particle effect. Its structure includes two horizontal movable baffles and two vertical movable baffles arranged on the sliding guide rail, each movable baffle is respectively connected with the baffle control arm, and the baffle control arms of the two horizontal movable baffles are respectively connected by nuts. It is connected with the horizontal two-way lead screw, and the baffle control arms of the two vertical movable baffles are respectively connected with the vertical two-way lead screw through nuts. The lead screw or the horizontal two-way lead screw is connected with the stepper motor through a coupling, and the two horizontal movable baffles and the two vertical movable baffles move oppositely synchronously under the drive of the stepper motor respectively. The utility model can realize the rapid and continuous adjustment of the beam spot size, thereby improving the test efficiency and increasing the flexibility of the test scheme.
Description
Technical field
The utility model belongs to the research of heavy ion testing equipment, is specifically related to a kind of heavy ion single particle effect twin shaft automatic limiting beam diaphragm.
Background technology
In the heavy ion single particle experiment, not only can cover the whole sensitive volume of chip under test but also do not affect peripheral devices in order to make ion beam spot, need to be according to the topology layout choose reasonable beam spot size of test specimen plate.The means that limit at present the ion beam spot size are the monolithic beam-defining jaw at sample irradiation target chamber porch manual installation specific dimensions, yet because the diaphragm installation process is to finish before test, if need to change beam spot size in the process of the test, then need destroy the target chamber vacuum environment, reduce test efficiency.Therefore, regulate problem for the beam spot size in the single particle experiment, need to carry out the design of automatic control research of beam spot size in the test of heavy ion single particle effect, realize fast continuous adjusting of beam spot size.
Summary of the invention
The purpose of this utility model is in order to realize the fast continuously adjusting of beam spot size in the test of heavy ion single particle effect, a kind of heavy ion single particle effect twin shaft automatic limiting beam diaphragm to be provided, to improve test efficiency, to increase the testing program dirigibility.
The technical solution of the utility model is as follows: a kind of heavy ion single particle effect twin shaft automatic limiting beam diaphragm, comprise the two horizontal anomalous movement baffle plates and two vertical shifting boards that are arranged on the rail plate, every shifting board is connected with baffle control arm respectively, the baffle control arm of two horizontal anomalous movement baffle plates is connected with the horizontal bidirectional leading screw by nut respectively, the baffle control arm of two vertical shifting boards is connected with the vertical bidirectional leading screw by nut respectively, the end of horizontal bidirectional leading screw and vertical bidirectional leading screw is connected by vertical change gear, vertical bidirectional leading screw or horizontal bidirectional leading screw are connected with stepper motor by shaft coupling, two horizontal anomalous movement baffle plates and the respectively synchronously out movement under the drive of stepper motor of two vertical shifting boards.
Further, aforesaid heavy ion single particle effect twin shaft automatic limiting beam diaphragm, wherein, described shifting board is aluminium material, thickness is 3～5mm.
Further, aforesaid heavy ion single particle effect twin shaft automatic limiting beam diaphragm, wherein, described two horizontal anomalous movement baffle plates are less than or equal to 1.6 with the smooth finish that two vertical shifting boards consist of the baffle edge of square diaphragm.
Further, aforesaid heavy ion single particle effect twin shaft automatic limiting beam diaphragm wherein, is respectively equipped with two sections reverse screw threads on described horizontal bidirectional leading screw and the vertical bidirectional leading screw; The baffle control arm of two horizontal anomalous movement baffle plates is connected to respectively the thread segment of the different directions of horizontal bidirectional leading screw by nut, the baffle control arm of two vertical shifting boards is connected to respectively the thread segment of the different directions of vertical bidirectional leading screw by nut.
Further, aforesaid heavy ion single particle effect twin shaft automatic limiting beam diaphragm, wherein, all elements all are fixed on the aluminum soleplate, and the position of the corresponding diaphragm of aluminum soleplate is provided with opening; Horizontal bidirectional leading screw and vertical bidirectional leading screw are fixed on the aluminum soleplate by bearing seat.
The beneficial effects of the utility model are as follows: the beam spot size robotization controlling factor of the utility model from the test of heavy ion single particle effect considered, its specific aim is stronger, beam spot size is adjustable continuously between 1cm * 1cm～5cm * 5cm, and error satisfies the requirement of test large beam spot less than 0.5mm; And the utility model can realize the control of this locality, remote double and vacuum environment operation, supports for radiation protection work and testing program dirigibility provide preferably; Package unit is finished preset function under few element of trying one's best, and considers the scheme of single step motor control, combination transmission, so that the more light easy dress of device conveniently operates from now on, safeguards.
Description of drawings
Fig. 1 is the structural representation that arranges of shifting board of the present utility model;
Fig. 2 is the structural representation of a kind of specific embodiment of the utility model.
Embodiment
Below in conjunction with drawings and Examples the utility model is described in detail.
Global design scheme of the present utility model as shown in Figure 1, design level, the vertical two groups shifting boards that (four) can be synchronized with the movement are by each out movement of group between baffle plate, the square diaphragm that construction size is adjustable.Two horizontal anomalous movement baffle plates 1,2 vertical shifting boards 3 with two, 4 are separately positioned on the rail plate 5, and rail plate 5 is cross-shaped, and are fixing by guide rails fixing support 6.
Whole design proposal also needs to do careful consideration from material selection, material thickness, ion scattering and robot brain aspect processed, and is specific as follows:
Material selection: must be chosen to be at the material that is not easy to produce induced radioactivity under the ion irradiation, and density of material is as far as possible little, so that the light easy dress of whole device; The main material that the utility model is selected is aluminium.
Material thickness: the Weir Plate Thickness that is used for consisting of the beam spot size automatic control device must surpass the maximum range of available all heavy ions of test in this material, and will guarantee its physical strength; Consider that energy is that the range of proton in aluminium of 25MeV is 3mm, the actual range of heavy ion beam current in aluminium that uses at tandem accelerator be all less than the range of above-mentioned 3mm, comprehensive above-mentioned two factors, and the design Weir Plate Thickness is 3 ~ 5mm, is preferably 4mm.
Ion scattering: the baffle edge that is used for consisting of the beam spot size automatic control device must have sufficiently high smooth finish, prevents that ion is in the scattering at edge.The utility model all carries out polishing to four baffle edges that consist of square diaphragm, and smooth finish is less than or equal to 1.6.
Automatically control: package unit should be finished preset function under few element of trying one's best, and consider the scheme of single step motor control, combination transmission, so that install easy operating, maintenance, to realize in addition local and remote two kinds of control modes, thereby to select suitable communication modes, exploitation (or using existing) control software.Control procedure of the present utility model is: stepper motor drives screw mandrel by shaft coupling and turns an angle, and two nuts subtend on screw mandrel moves, and drives shifting board subtend between guide rail and slides, and changes the diaphragm opening size.
Embodiment
As shown in Figure 2, in a specific embodiment, all elements all are fixed on the aluminum base 17, and base plate is provided with the opening 18 of 6cm * 6cm, so that ion beam passes through.Level, vertical two groups of guide rails 5 are fixed on the base plate 17 by guide rails fixing support 6, and two groups of guide rails are close to, to reduce ion by the scattering in slit between two groups of shifting boards; Two horizontal anomalous movement baffle plates 1,2 baffle control arm 7,8 are connected with horizontal bidirectional leading screw 11 by nut respectively, two vertical shifting boards 3,4 baffle control arm 9,10 are connected with vertical bidirectional leading screw 12 by nut respectively, shifting board is driven by nut, can slide between guide rail.Horizontal bidirectional leading screw 11 and vertical bidirectional leading screw 12 are fixed on the base plate 17 by bearing seat 16, and horizontal bidirectional leading screw 11 and vertical bidirectional leading screw 12 are respectively equipped with two sections reverse screw threads; Two horizontal anomalous movement baffle plates 1,2 baffle control arm 7,8 are connected to respectively the thread segment of the different directions of horizontal bidirectional leading screw 11 by nut, two vertical shifting boards 3,4 baffle control arm 9,10 are connected to respectively the thread segment of the different directions of vertical bidirectional leading screw 12 by nut; The end that horizontal bidirectional leading screw 11 is connected with the vertical bidirectional leading screw connects by the vertical change gear 15 of 1:1, realizes rotating synchronously, and screw mandrel two end grain silks are reverse, thereby can realize that the nut subtend moves.Be connected by shaft coupling 13 between stepper motor 14 and the vertical bidirectional screw mandrel 12, certainly, also horizontal bidirectional leading screw 11 can be connected the respectively synchronously out movement under the drive of stepper motor 14 of two horizontal anomalous movement baffle plates 1,2 vertical shifting boards 3 with two, 4 with stepper motor by shaft coupling.
Control procedure is (take vertical component as example, horizontal component is synchronous with it): stepper motor drives down-feed screw by shaft coupling and turns an angle, two nuts subtend on screw mandrel moves, and drives shifting board subtend between guide rail and slides, and changes diaphragm vertical openings size.
This device beam spot size is designed between 1cm * 1cm～5cm * 5cm adjustable continuously, can also carry out neatly the expansion of beam spot size, and package unit develops to small-sized, stabilising direction in the design of control, running part as far as possible, not only make device lighter, and can save the limited space that utilizes in the test unit, conveniently operate from now on, safeguard.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technology thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220452528.9U CN202886300U (en) | 2012-09-07 | 2012-09-07 | Heavy ion single event effect biaxial automatic beam limiting diaphragm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220452528.9U CN202886300U (en) | 2012-09-07 | 2012-09-07 | Heavy ion single event effect biaxial automatic beam limiting diaphragm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202886300U true CN202886300U (en) | 2013-04-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220452528.9U Expired - Lifetime CN202886300U (en) | 2012-09-07 | 2012-09-07 | Heavy ion single event effect biaxial automatic beam limiting diaphragm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202886300U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102841107A (en) * | 2012-09-07 | 2012-12-26 | 中国原子能科学研究院 | Biaxial automatic beam limiting diaphragm for heavy-ion single-particle effect test |
| CN109900986A (en) * | 2019-03-07 | 2019-06-18 | 中国科学院近代物理研究所 | A mobile platform-based single event effect testing device and method |
-
2012
- 2012-09-07 CN CN201220452528.9U patent/CN202886300U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102841107A (en) * | 2012-09-07 | 2012-12-26 | 中国原子能科学研究院 | Biaxial automatic beam limiting diaphragm for heavy-ion single-particle effect test |
| CN109900986A (en) * | 2019-03-07 | 2019-06-18 | 中国科学院近代物理研究所 | A mobile platform-based single event effect testing device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130417 |
|
| CX01 | Expiry of patent term |