CN202813984U - Polycrystalline silicon material drying system - Google Patents
Polycrystalline silicon material drying system Download PDFInfo
- Publication number
- CN202813984U CN202813984U CN201220436762.2U CN201220436762U CN202813984U CN 202813984 U CN202813984 U CN 202813984U CN 201220436762 U CN201220436762 U CN 201220436762U CN 202813984 U CN202813984 U CN 202813984U
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- air
- silicon material
- polycrystalline silicon
- drying system
- material drying
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Abstract
The utility model discloses a polycrystalline silicon material drying system, which comprises a blast blower and a primary filtering device, wherein the primary filtering device is connected with an air inlet of the blast blower through a first pipeline, an air outlet of the blast blower is connected with an air inlet of a secondary filtering device through a second pipeline, and an air outlet of the secondary filtering device is connected with an air inlet of a drying treatment groove through a third pipeline. The polycrystalline silicon material drying system has the advantages that the blast blower and the heat radiation of the blast blower are utilized for heating air, and the full contact with silicon chips in all directions is realized, so the goal of safely and efficiently drying silicon chips at low cost is reached.
Description
Technical field
The utility model relates to a kind of drying system, relates in particular to the drying system that is applied to need to avoid after silicon material class material cleans secondary pollution.
Background technology
Existing silicon material drying technology requires the surface can not be attached with water, in order to avoid subsequent handling is caused harmful effect after the silicon material class material that noble and unsullied quiet degree requirement is arranged is cleaned.And existing drying system adopts electric heater to preheat air mostly, the method that blows with ordinary blower again, and the oven dry design temperature is generally about 80Co.Yet, when reality is used, exist because of hot-spot and damage the problem of air cleaner, even have and then the risk of breaking out of fire.
How to provide that a kind of to use safe silicon material drying system be the technical problem that industry needs to be resolved hurrily.
Summary of the invention
The utility model is in order to solve the not good enough technical problem of security of existing silicon material drying system, proposes a kind of safe, polycrystalline silicon material drying system efficiently and cheaply.
The polycrystalline silicon material drying system that the utility model proposes, the first level filtering device that comprises air blast, is connected with the air inlet of this air blast by the first pipeline, the air outlet of this air blast by second pipe be connected with the air inlet of two-stage filter, the air outlet of this two-stage filter passes through the 3rd pipeline and is connected with the air inlet of drying and processing groove.
Preferably, the drying and processing groove comprises: be located at the automatic cover of cell body top, the heat-preservation cotton of cell body outer wall parcel, be located at the gas blow pipe in a plurality of orientation on the cell body internal chamber wall, this gas blow pipe and described the 3rd pipeline communication, the air outlet place of drying and processing groove is connected with exhaust column.
Preferably, exhaust column is made by the PVC material of inner lining steel silk screen, also is provided with adjusting valve on this air draft pipe.
Preferably, the cleaning basket in the drying and processing groove is provided with a plurality of ventilative mouths and bottom and is provided with spacer bar around this cleaning basket.
Preferably, air blast is connected with motor protecter, filters protector and phase sequence relay.
Preferably, air blast is the high-pressure vortex air blast.
When the utility model uses, not only utilize the high-pressure vortex air blast to produce mobile hot-air, the waste heat that has produced when also having utilized the work of high-pressure vortex air blast adds hot-air, further improved efficient, provide cost savings, and then utilize the gas hole of all directions on the drying and processing groove, allow the silicon chip all directions can both contact hot-air, a plurality of air-vents have promoted the circulation of hot-air more on the cleaning basket, thereby reach the purpose of drying quickly and safely silicon chip.
Description of drawings
Fig. 1 is the structural representation of the utility model preferred embodiment;
Fig. 2 is the cross sectional representation of the drying and processing groove of the utility model preferred embodiment;
Fig. 3 is the longitudinal section schematic diagram of the drying and processing groove of the utility model preferred embodiment.
The specific embodiment
As shown in Figure 1, a kind of polycrystalline silicon material drying system that the utility model preferred embodiment provides, the air outlet of the one-level that comprises air blast 1, is connected with the air inlet of this air blast by the first pipeline 2 (just effect) filter 3, this air blast pass through that second pipe 4 is connected with the air inlet of secondary (efficiently) filter 5, the air outlet of this secondary (efficiently) filter 5 passes through the 3rd pipeline 6 and is connected with the air inlet of drying and processing groove 7.
As shown in Figure 2, drying and processing groove 7 comprises: be located at the automatic cover 8 of cell body top, the heat-preservation cotton 9 of cell body outer wall parcel, be located at the gas blow pipe 10 in a plurality of orientation on the cell body internal chamber wall, this gas blow pipe is communicated with the 3rd pipeline 6 shown in Fig. 1.Be provided with a plurality of ventilative mouths 14 and bottom around the cleaning basket 13 in the drying and processing groove 7 and be provided with spacer bar 15.
As shown in Figure 3, the air outlet place of drying and processing groove 7 is connected with exhaust column 11.Exhaust column 11 is made by the PVC material of inner lining steel silk screen, also is provided with adjusting valve 12 on this air draft pipe.
The quantity of air blast can arrange as required, and present embodiment, air blast 1 are a cover high-pressure vortex blower fan, and are connected with motor protecter, filtration protector and phase sequence relay.
When the utility model uses, after ambient atmosphere is tentatively filtered by one-level (just effect) filter 3, enter in the high-pressure vortex air blast 1, during 1 work of high-pressure vortex air blast, gas is inhaled into from air inlet, and rotary blade is given speed of gas in direction of rotation behind approaching side passage (not marking among the figure), centrifugal force on the blade makes gas outwards accelerate to have increased pressure simultaneously, and along with the carrying out of rotating, gas kinetic energy increases, so that further increase along the gas pressure of wing passage.Because the gas outlet of wing passage narrows down, gas heats when being extruded outlet, become one fast hot-air, the waste heat that produces during 1 work of recycling high-pressure vortex air blast, send into air inlet and produce secondary air, so that the air themperature that flows reaches about 60 ℃, this method is safety not only, and maximally utilised the heat energy that turbo-fan produces, improved transformation efficiency.
Hot-air passes through secondary (efficiently) filter 5 again and further filters, after removing metallic dust and other impurity, enter in the drying and processing groove 7, all be provided with gas hole 10 on the drying and processing groove 7 interior all directions, thermal air current is through gas hole 10, contact with silicon chip from a plurality of directions, in order to further facilitate the oven dry of silicon material, leave many ventilative mouthful 14 around cleaning basket 13, and be provided with spacer bar 15 in the bottom, so that it is smooth to guarantee to clean basket 13 interior air, improves silicon material drying efficiency, thereby reduce cost.The exhaust column 11 that is connected in addition drying and processing groove 7 air outlet places is made by the PVC material of inner lining steel silk screen, heatproof and withstand voltage effectively, also be provided with adjusting valve 12 on this air draft pipe, thereby air is not deposited in drying and processing groove 7, avoid affecting the normal operation of blower fan.
Only in order to illustrate structure of the present utility model, those of ordinary skill in the art can make various deformation and variation to above specific embodiment under design of the present utility model, and these distortion and variation include within protection domain of the present utility model.
Claims (6)
1. polycrystalline silicon material drying system, it is characterized in that the first level filtering device (3) that comprises air blast (1), is connected with the air inlet of this air blast by the first pipeline (2), the air outlet of this air blast pass through that second pipe (4) is connected with the air inlet of two-stage filter (5), the air outlet of this two-stage filter (5) passes through the 3rd pipeline (6) and is connected with the air inlet of drying and processing groove (7).
2. polycrystalline silicon material drying system as claimed in claim 1, it is characterized in that, described drying and processing groove (7) comprising: be located at the automatic cover (8) of cell body top, the heat-preservation cotton (9) of cell body outer wall parcel, be located at the gas blow pipe (10) in a plurality of orientation on the cell body internal chamber wall, this gas blow pipe is communicated with described the 3rd pipeline (6); The air outlet place of described drying and processing groove (7) is connected with exhaust column (11).
3. polycrystalline silicon material drying system as claimed in claim 2 is characterized in that, described exhaust column (11) is made by the PVC material of inner lining steel silk screen, also is provided with adjusting valve (12) on this air draft pipe.
4. polycrystalline silicon material drying system as claimed in claim 1 is characterized in that, also comprises the cleaning basket (13) of being located in the described drying and processing groove (7), is provided with a plurality of ventilative mouthful (14) and bottom around this cleaning basket and is provided with spacer bar (15).
5. polycrystalline silicon material drying system as claimed in claim 4 is characterized in that, described air blast (1) is connected with motor protecter, filters protector and phase sequence relay.
6. polycrystalline silicon material drying system as claimed in claim 1 is characterized in that, described air blast (1) is the high-pressure vortex air blast.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220436762.2U CN202813984U (en) | 2012-08-30 | 2012-08-30 | Polycrystalline silicon material drying system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220436762.2U CN202813984U (en) | 2012-08-30 | 2012-08-30 | Polycrystalline silicon material drying system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202813984U true CN202813984U (en) | 2013-03-20 |
Family
ID=47872847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220436762.2U Expired - Lifetime CN202813984U (en) | 2012-08-30 | 2012-08-30 | Polycrystalline silicon material drying system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202813984U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105276934A (en) * | 2015-11-11 | 2016-01-27 | 同济大学 | Drying device and technique for optical elements washed through chemical wet process |
| WO2017161657A1 (en) * | 2016-03-23 | 2017-09-28 | 常州捷佳创精密机械有限公司 | Groove-type drying structure |
| CN109654824A (en) * | 2019-01-26 | 2019-04-19 | 常州捷佳创精密机械有限公司 | A kind of slot type drying structure |
-
2012
- 2012-08-30 CN CN201220436762.2U patent/CN202813984U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105276934A (en) * | 2015-11-11 | 2016-01-27 | 同济大学 | Drying device and technique for optical elements washed through chemical wet process |
| WO2017161657A1 (en) * | 2016-03-23 | 2017-09-28 | 常州捷佳创精密机械有限公司 | Groove-type drying structure |
| US10553460B2 (en) | 2016-03-23 | 2020-02-04 | Changzhou S.C Exact Equipment Co., Ltd. | Groove-type drying structure |
| CN109654824A (en) * | 2019-01-26 | 2019-04-19 | 常州捷佳创精密机械有限公司 | A kind of slot type drying structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130320 |