CN202781470U - 用于制作化学气相沉积生长多晶硅的硅芯专用切割设备 - Google Patents
用于制作化学气相沉积生长多晶硅的硅芯专用切割设备 Download PDFInfo
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- CN202781470U CN202781470U CN 201220378703 CN201220378703U CN202781470U CN 202781470 U CN202781470 U CN 202781470U CN 201220378703 CN201220378703 CN 201220378703 CN 201220378703 U CN201220378703 U CN 201220378703U CN 202781470 U CN202781470 U CN 202781470U
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound 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[Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005039 chemical industry Methods 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000005712 crystallization Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
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Abstract
本实用新型涉及的一种用于制作化学气相沉积生长多晶硅的硅芯专用切割设备。属新能源及新材料技术领域。本实用新型将多晶硅棒料安装固定在金刚石外圆切割机中，同时对多根多晶硅棒料进行切割制取硅芯，先将多晶硅棒料切割成多晶硅片料，再将多晶硅片料切割成条状硅芯，切割完毕，可以同时得到多根硅芯。本实用新型提供的硅芯制备方法其生产效率明显高于其它制备方法，且在整个切割过程中，所用切割冷却液为自来水或脱盐水，不需要专门配制切割浆料，将切割冷却液经简单处理后进行循环使用，整个生产过程产生的废物仅为硅渣，不会对环境产生不利影响。
Description
用于制作化学气相沉积生长多晶硅的硅芯专用切割设备
技术领域
[0001] 本实用新型涉及的一种用于制作化学气相反应沉积生长多晶硅的硅芯专用切割设备。属新能源及新材料技术领域。
背景技术
[0002] 硅材料是从硅石中冶炼金属硅开始，一般由工业硅粉氯化，经过一系列的物理或化学方法提纯生产出的高纯度多晶硅产品后，向半导体单晶硅、硅抛光片，外延片，以及制成集成电路芯片或者分立器件和太阳能电池、太阳能电池组件的纵向延伸。
[0003] 高纯硅材料产品主要包括：多晶硅、单晶硅等，多晶硅是金属硅经过一系列的化学和物理反应提纯后达到一定纯度（99. 999999%至99. 999999999%)的材料，按纯度分类可以分为太阳能级、电子级。单晶硅以高纯度多晶硅为原料，在单晶炉中被熔化为液态，在单·晶种(杆晶）上结晶而成。
[0004] 多晶硅材料是硅产品产业链中一个极为重要的中间产品，是制造半导体器件、集成电路及太阳能电池的最重要的基础材料，是发展电子信息产业和光伏产业的根基。多晶硅的工业化规模生产是集冶金、化工、自动化控制、电子学、环保工程等学科为一体的生产体系，属技术密集型及资金密集型产业。目前世界上多晶硅工业化生产的主要工艺流程有改良西门子法和新硅烷法两种。
[0005] 改良西门子法是以HCl和工业硅粉为原料，在高温下合成为SiHCL3，然后对SiHCL3进行化学提纯，使其纯度达到99. 999999%以上，金属杂质总含量降到O. Ippba以下，最后在还原炉中1050°C的硅芯上用超高纯的氢气与SiHCL3进行化学气相沉积反应而生成高纯多晶硅棒。而新硅烷法是以氟硅酸、钠、铝、氢气为主要原辅材料、制取硅烷、SiH4热分解生产多晶硅的工艺。
[0006] 在多晶硅生产工艺中，硅芯棒作为还原炉沉积生长多晶硅棒所需要的沉积核心棒及提供反应温度的电阻发热体，其制备方法关键是在满足工艺质量的前提下，低成本规模
化生产。
[0007] 传统硅芯棒制备方法是基座区熔法，则用小型区熔炉将原料硅棒拉制成硅芯棒，平均每3小时拉制5根硅芯棒，生产效率较为低下，而且整个硅芯棒拉制过程中易出现硅芯棒拉断现象，故对操作人员的熟练程度要求较高。
[0008] 随着多晶硅行业向规模化方向的快速发展，区熔法制备硅芯的方法已不能满足工业需求。为了解决制备工艺和生产设备发展需求之间的矛盾，近切需要开发一种高效率的硅芯制备方法。《GXB2500-4硅芯切割机床》（中国集成电路2008年6期）报道了北京京联发数控科技有限公司于2007年3月推出了第一台硅芯切割机床，它是将单晶硅(多晶硅)切割为片状，再将切好的硅片切为8 X 8 X 2500mm的硅芯，其平均12小时可切割20-30根硅芯，一台硅芯切割机可代替4台硅芯拉制炉，该机床生产效率较传统区熔法有了一定提高，但是生产效率仍然较低，但文中未公开具体的硅芯切割方法。
[0009] 中国专利CN101514488A《一种用于生长多晶硅棒的硅芯及其制备方法》200910114990. O，它采用的是横向切割线和纵向切割线的多线切割一根硅棒制取硅芯方法，虽然该方法平均10小时可以制取180根硅芯，生产效率有所提高，但是多线切割方式存在切割浆料回收、分离和净化成本高、污染环境的问题，如果不带切割浆料切割则切割线价格昂贵，硅芯制备成本较高。
[0010] 中国专利CN202155964U同样采用两根金刚砂线的对进行硅棒同时往复运动，线切割制备硅芯，但该专利还是采用线切割方式。但是使用多线切割制备硅芯存在切割浆料回收、分离和净化成本高、污染环境的问题，如果不带切割浆料切割则切割线价格昂贵，硅芯制备成本较高。
发明内容
[0011] 本实用新型的目的在于上述现有技术的不足，发明一种用于制作化学气相沉积生长多晶硅的硅芯专用切割设备，它可同时对2-4根相同长度或不同长度的多晶硅棒料进行加工生产，其生产效率高，不会对环境产生污染。
[0012] 实现本实用新型的技术方案是：用于制作化学气相沉积生长多晶硅的硅芯专用切割设备，其特征在于专用切割设备的加工物件平台底部开有排水口（ I )，加工物件平台上部一端装有两组四个金刚石刀架（12、13、14、15)及一个放置于四个金刚石刀架的上部且能随刀架移动而自由伸缩的伸缩防护罩（16)，每个金刚石刀架（12、13、14、15)上各装一组9_11片金刚石外圆切割片，其中第一组两个金刚石刀架（12、13)安装的两组金刚石外圆切割片由第I号切割电机（17)提供动力，第二组两个金刚石刀架（14、15)安装的两组金刚石外圆切割片由第2号切割电机（18)提供动力，二组金刚石刀架均由一台传动电机（21)实现前进和后退功能，每个金刚石刀架（12、13、14、15)配装一个冷却液喷淋管（19)，整根待切割加工娃棒料放置在由固定挡板（20)、1-3个娃棒支撑块（7)及一个可移动挡板组成的娃棒支座上，排水口（I)及冷却液喷淋管（19)通过管道与废液循环处理器连接。
[0013] 所用的金刚石外圆切割片为钢基材料带金刚石刀头，可是烧结金刚石切割片、焊接金刚石切割片或电镀金刚石切割片任意一种金刚石切割片。
[0014] 所述的娃棒料是通过任何一种方法制备而成的任意一种多晶娃原料棒，包括多晶直拉棒、单晶直拉棒或多晶沉积棒。
[0015] 所述的可移动挡板（2、3、4、5)及硅棒支撑块（7)安装在专用切割设备的加工物件平台上，每个可移动挡板（2、3、4、5)及硅棒支撑块（7)能沿导轨移动位置左右移动固定，固定挡板（20)安装在专用切割设备的加工物件平台上，位置固定不变，冷却液喷淋管（19)的出水口安装在金刚石外圆切割片上方，每个金刚石外圆切割片对应I个出水口。
[0016] 采用本实用新型提供的硅芯制备方法其生产效率明显高于其它制备方法，且在整个切割过程中，所用切割冷却液为自来水或脱盐水，不需要专门配制切割浆料，将切割冷却液经简单处理后进行循环使用，整个生产过程产生的废物仅为硅渣，不会对环境产生不利影响。
附图说明
[0017] 图I为本实用新型用于制作化学气相沉积生长多晶硅的硅芯专用切割设备结构示意图(俯视方向）。[0018] 图中：1、排水口 ；2、第I条可移动挡板；3、第2条可移动挡板；4、第3条可移动挡板；5、第4条可移动挡板；6、废液循环处理器；7、硅棒支撑块（根据硅棒长度和根数自由调整位置及数量；8、第I个硅棒；9、第2个硅棒；10、第3个硅棒；11、第4个硅棒；12、第I号金刚石刀架；13、第2号金刚石刀架；14、第3号金刚石刀架；15、第4号金刚石刀架；16、伸缩防护罩；17、第I号切割电机；18、第2号切割电机；19、冷却液喷淋管；20、固定挡板；21、传动电机。
[0019] 下面结合附图所示实施例，对结构作进一步说明，但本实用新型保护范围不限于此实施例。
具体实施方式
[0020] 本实用新型专用切割设备的加工物件平台上部一端装有两组四个金刚石刀架12、13、14、15及一个放置于四个金刚石刀架12、13、14、15的上部且能自由伸缩的伸缩防护罩16。切割加工时，当金刚石刀架12、13、14、15沿着加工物件平台两侧的导轨移动，整个伸缩 防护罩16随着金刚石刀架移动，金刚石刀架保持被伸缩防护罩16罩住状态，防止切割加工产生的粉末/粉尘扩散四周，减少对环境的影响。
[0021] 每个金刚石刀架12、13、14、15上各装一组9_11片金刚石外圆切割片，其中第一组两个金刚石刀架12、13安装的两组金刚石外圆切割片由第I号切割电机17提供动力，第二组两个金刚石刀架14、15安装的两组金刚石外圆切割片由第2号切割电机18提供动力，这样切割加工时，操作者可根据待切割加工硅棒料数量选择是开启一台切割电机，还是两台切割电机同时开启。
[0022] 待切割加工整根硅棒料放置在由固定挡板20、1〜3个硅棒支撑块7及一个可移动挡板组成的硅棒支座上。待切割加工整根硅棒料一端放置在固定挡板20，另一端根据整根硅棒料的长度被第一条可移动挡板2挡住，待切割加工整根硅棒料中部被I〜3个硅棒支撑块7支撑，硅棒支撑块7的数量由待切割加工整根硅棒料长度决定，只要保证切割加工时，待切割加工整根硅棒料受力均匀，不会断裂即可。每个硅棒支撑块7可活动安装在专用切割设备的加工物件平台上，方便位置调节。
[0023] 每个金刚石刀架12、13、14、15配装一个冷却液喷淋管19，冷却液喷淋管19出水口位于金刚石外圆切割片侧边上部，切割加工时，冷却液喷淋管19向金刚石外圆切割片喷水，以减少切割加工产生的粉末/粉尘扩散和降低金刚石外圆切割片表面的工作温度。冷却水从加工物件平台底部开有排水口 I排出，通过管道与废液循环处理器连接，经过滤处理后再次循规环使用。
[0024] 制作化学气相沉积生长多晶硅的硅芯加工制作硅芯的加工步骤是：
[0025] I)将拟切割加工的2〜4根硅棒料，各自分别安装固定在由固定挡板20、1〜3个娃棒支撑块7及可移动挡板组成的娃棒支座上，每根娃棒料的一端放置在固定挡板20处，该根娃棒料的中部由1-3个娃棒支撑块7支撑,该根娃棒料另一端端头由一个可移动挡板
2、3、4、5挡住；调整硅棒支撑块7和可移动挡板的位置，让固定在硅棒支座上的整根硅棒料受力均匀，不会左右前后移动；
[0026] 2)开动切割电机17、18和传动电机21，金刚石刀架带动金刚石外圆切割片沿专用切割设备的加工物件平台内中的导轨移动，高速转动的金刚石外圆切割片将预先固定在硅棒支座上的每根硅棒料从纵向方向自动切割为数块硅片料；
[0027] 3)再将切割好的硅片料，手动旋转90度后，再次按步骤I方式，安装固定在专用切割设备的硅棒支座上；
[0028] 4)再次开动切割电机17、18和传动电机21，硅片料再次从纵向方向自动切割，形成条状硅棒；
[0029] 5)切割完毕，从专用切割设备中取出条状硅棒，则制得多根硅芯；
[0030] 制得的多根娃芯,其横截面为4mm〜20mm的正方形,长度为60mm〜3000mm。
[0031] 整个切割过程是自动进行，切割时所用的切割冷却液为自来水或脱盐水，不需要专门配制切割浆料，且切割冷却液经废液循环处理器简单处理后，可循环使用。
[0032] 实施例I :制备规格为5X5X200mm的硅芯。
[0033] 用经过金刚石外圆切割多晶直拉棒获得硅芯，其硅芯横截面为边长5mm的正方形，长度为200mm。
[0034] 采用金刚石外圆切割方法同时对四根多晶硅棒料进行切割制取一种用于化学气相沉积生长多晶硅的硅芯，加工步骤如下：
[0035] I)将拟切割加工的四根长度为200mm硅棒料，各自分别安装固定在由固定挡板20及可移动挡板组成的硅棒支座上，每根硅棒料的一端放置在固定挡板处，每根硅棒料另一端端头分别由一个可移动挡板2、3、4、5挡住，调整可移动挡板位置，让固定在硅棒支座上的整根硅棒料受力均匀，不会左右前后移动；这样四根硅棒料各自放置在四组硅棒支座上，构成四条加工切割工段。
[0036] 2)同时开动两台切割电机17、18和一台传动电机21，四组金刚石刀架带动金刚石外圆切割片沿专用切割设备的加工物件平台内中的导轨同时移动，高速转动的金刚石外圆切割片将预先固定在硅棒支座上的每根硅棒料从纵向方向切割，每次切割前根据硅芯横截面尺寸要求，调节金刚石切割片间距，最后将整根硅棒料切割为数块硅片料；
[0037] 3)再将切割好的数块硅片料，整体同时手动旋转90度后，再按步骤I方式，安装固定在娃芯切IllJ专用设备中；
[0038] 4)再次同时开动两台切割电机17、18和一台传动电机21，硅片料再次被从纵向方向切割，形成数个条状硅棒；
[0039] 5)切割完毕，从硅芯切割专用设备中取出条状硅棒，每根条状硅棒则是一根5X5X200mm 的硅芯。
[0040] 整个切割过程是自动进行，所用切割冷却液为自来水，且切割冷却液经简单处理后循环使用。
[0041] 实施例2 :制备规格为8X8X2000mm的硅芯。
[0042] 用经过金刚石外圆切割多晶沉积棒制作娃芯，其娃芯横截面为边长8mm的正方形，长度为2000mm。
[0043] 采用金刚石外圆切割方法同时对两根多晶硅棒料进行切割制取一种用于化学气相沉积生长多晶硅的硅芯，步骤如下：
[0044] I)将拟切割加工的两根长度为2000mm硅棒料，各自分别安装固定在由固定挡板20、1〜3个娃棒支撑块7及可移动挡板组成的娃棒支座上,每根娃棒料的一端放置在固定挡板处，每根娃棒料的中部由1-3个娃棒支撑块7支撑,每根娃棒料另一端端头各别由一个可移动挡板2、3挡住，调整可移动挡板及硅棒支撑块7位置，让固定在硅棒支座上的整根硅棒料受力均匀，不会左右前后移动；这样两根硅棒料各自放置在两条硅棒支座上，构成两条加工切割工段。
[0045] 2)同时开动一台切割电机17和传动电机21，两组金刚石刀架带动金刚石外圆切割片沿专用切割设备的加工物件平台内中的导轨同时移动，高速转动的金刚石外圆切割片将预先固定在硅棒支座上的每根硅棒料从纵向方向切割，每次切割前根据硅芯横截面尺寸要求，调节金刚石切割片间距，最后将整根硅棒料切割为数块硅片料 ；
[0046] 3)再将切割好的数块硅片料，整体同时手动旋转90度后，再按步骤I方式，安装固定在娃芯专用切IllJ设备中；
[0047] 4)再次同时开动一台切割电机17和传动电机21，硅片料再次被从纵向方向切割，形成数个条状硅棒；
[0048] 5)切割完毕，从硅芯专用切割设备中取出条状硅棒，每根条状硅棒则是一根8X8X2000mm 的硅芯。
[0049] 整个切割过程是自动进行的，所用切割冷却液为脱盐水，且切割冷却液经简单处理后循环使用。
[0050] 实施例3 :制备规格为8X8X2800mm的硅芯。
[0051] I.用经过金刚石外圆切割单晶直拉棒制得到硅芯，其硅芯横截面为边长8mm的正方形，长度为2800mm。
[0052] 2.采用金刚石外圆切割方法同时对三根多晶硅棒料进行切割制取一种用于化学气相沉积生长多晶硅的硅芯，步骤如下：
[0053] I)将拟切割加工的三根长度为2800mm硅棒料，各自分别安装固定在由固定挡板20、1〜3个娃棒支撑块7及可移动挡板组成的娃棒支座上,每根娃棒料的一端放置在固定挡板处，每根娃棒料的中部由1-3个娃棒支撑块7支撑,每根娃棒料另一端端头各别由一个可移动挡板2、3、4挡住，调整可移动挡板及硅棒支撑块7位置，让固定在硅棒支座上的整根硅棒料受力均匀，不会左右前后移动；这样四根硅棒料各自放置在三条硅棒支座上，构成三条加工切割工段。
[0054] 2)同时开动两台切割电机17、18和传动电机21，四组金刚石刀架带动金刚石外圆切割片沿专用切割设备的加工物件平台内中的导轨同时移动，高速转动的金刚石外圆切割片将预先固定在硅棒支座上的每根硅棒料从纵向方向切割，每次切割前根据硅芯横截面尺寸要求，调节金刚石切割片间距，最后将整根硅棒料切割为数块硅片料；
[0055] 3)再将切割好的数块硅片料，整体同时手动旋转90度后，再按步骤I方式，安装固定在娃芯专用设备中；
[0056] 4)再次同时开动两台切割电机17、18和传动电机21，硅片料再次被从纵向方向切害I]，形成数个条状硅棒；
[0057] 5)切割完毕，从硅芯专用切割设备中取出条状硅棒，每根条状硅棒则是一根8X8X2800mm 的硅芯。
[0058] 整个切割过程是自动进行，所用切割冷却液为自来水，且切割冷却液经简单处理后循环使用。
[0059] 实施例4 :同时制备规格为8X8X2400mm和规格为8X8X2800mm的硅芯。[0060] I.用多晶硅棒料经过金刚石外圆切割得到一种用于化学气相沉积生长多晶硅的娃芯，其娃芯横截面为边长8mm的正方形,长度分别为2400mm和2800mm。
[0061] 2.采用金刚石外圆切割方法同时对2根长度为2400mm多晶硅棒料和2根长度为2800mm多晶硅棒料进行切割制取一种用于化学气相沉积生长多晶硅的硅芯，步骤如下：
[0062] I)将拟切割加工的两根长度为2400mm硅棒料，各自分别安装固定在由固定挡板20、1〜3个娃棒支撑块7及可移动挡板组成的娃棒支座上,每根娃棒料的一端放置在固定挡板处，每根娃棒料的中部由1-3个娃棒支撑块7支撑,每根娃棒料另一端端头各别由一个可移动挡板2、3挡住；将拟切割加工的两根长度为2800mm硅棒料，各自分别安装固定在由固定挡板20、I〜3个娃棒支撑块7及可移动挡板组成的娃棒支座上,每根娃棒料的一端放置在固定挡板处，每根娃棒料的中部由1-3个娃棒支撑块7支撑,每根娃棒料另一端端头各别由一个可移动挡板4、5挡住；调整可移动挡板及硅棒支撑块7位置，让固定在硅棒支座上的整根硅棒料受力均匀，不会左右前后移动；这样四根硅棒料各自放置在四条硅棒支座上，构成四条加工切割工段。·[0063] 2)同时开动二台切割电机17和传动电机21，四组金刚石刀架带动金刚石外圆切割片沿专用切割设备的加工物件平台内中的导轨同时移动，高速转动的金刚石外圆切割片将预先固定在硅棒支座上的每根硅棒料从纵向方向切割，每次切割前根据硅芯横截面尺寸要求，调节金刚石切割片间距，最后将整根硅棒料切割为数块硅片料；
[0064] 3)再将切割好的数块硅片料，整体同时手动旋转90度后，再按步骤I方式，安装固定在娃芯专用切IllJ设备中；
[0065] 4)再次同时开动二台切割电机17和传动电机21，硅片料再次被从纵向方向切割，形成数个条状硅棒；
[0066] 5)切割完毕，从硅芯专用切割设备中取出条状硅棒，每根条状硅棒则是一根8X8X 2400mm 或者 8X8X 2800mm 硅芯。
[0067] 整个切割过程是自动进行的，所用切割冷却液为脱盐水，且切割冷却液经简单处理后循环使用。
[0068] 本实用新型提供的方法与其它硅芯制备方法比较表
[0069]
Claims (4)
1. 一种用于制作化学气相沉积生长多晶硅的硅芯专用切割设备，其特征在于专用切割设备的加工物件平台底部开有排水口（1)，加工物件平台上部一端装有两组四个金刚石刀架（12、13、14、15)及一个放置于四个金刚石刀架的上部且能随刀架移动而自由伸缩的伸缩防护罩（16)，每个金刚石刀架（12、13、14、15)上各装一组9-11片金刚石外圆切割片，其中第一组两个金刚石刀架（12、13)安装的两组金刚石外圆切割片由第I号切割电机（17)提供动力，第二组两个金刚石刀架（14、15)安装的两组金刚石外圆切割片由第2号切割电机(18)提供动力，二组金刚石刀架均由一台传动电机（21)实现前进和后退功能，每个金刚石刀架（12、13、14、15)配装一个冷却液喷淋管（19)，整根待切割加工硅棒料放置在固定挡板(20),1〜3个硅棒支撑块（7)及可移动挡板组成的硅棒支座上，排水口（I)及冷却液喷淋管（19)通过管道与废液循环处理器（6 )连接。
2.根据权利要求I所述的用于制作化学气相沉积生长多晶硅的硅芯的专用切割设备，其特征在于：所用的金刚石外圆切割片为钢基材料带金刚石刀头，可是烧结金刚石切割片、焊接金刚石切割片或电镀金刚石切割片任意一种金刚石切割片。
3.根据权利要求I所述的用于制作化学气相沉积生长多晶硅的硅芯专用切割设备，其特征在于：所述的硅棒料是通过任何一种方法制备而成的任意一种多晶硅原料棒，包括多晶直拉棒、单晶直拉棒或多晶沉积棒。
4.根据权利要求I所述的用于制作化学气相沉积生长多晶硅的硅芯专用切割设备，其特征在于：所述的可移动挡板（2、3、4、5)及硅棒支撑块（7)安装在专用切割设备的加工物件平台上，每个可移动挡板（2、3、4、5)及硅棒支撑块（7)能沿平台上部的导轨移动位置左右移动固定，固定挡板（20)安装在专用切割设备的加工物件平台上，位置固定不变，冷却液喷淋管（19)的出水口安装在金刚石外圆切割片上方，每个金刚石外圆切割片对应I个出水□。
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