CN202717397U - Negative pressure type plate parting machine - Google Patents
Negative pressure type plate parting machine Download PDFInfo
- Publication number
- CN202717397U CN202717397U CN 201220418458 CN201220418458U CN202717397U CN 202717397 U CN202717397 U CN 202717397U CN 201220418458 CN201220418458 CN 201220418458 CN 201220418458 U CN201220418458 U CN 201220418458U CN 202717397 U CN202717397 U CN 202717397U
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- negative pressure
- lamellar body
- transmission plane
- type wafer
- suction type
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Abstract
The utility model discloses a negative pressure type plate parting machine which is used for parting stacked thin plates and conveying the thin plates to a next working procedure. The negative pressure type plate parting machine comprises a transmission mechanism, a plate bearing frame and a negative pressure adsorption system. The plate parting machine absorbs the current plates through the negative pressure adsorption system, and then plates are conveyed by the transmission mechanism to the positions needed by the next working procedure. The transmission mechanism comprises a transmission belt, wherein absorption nozzles are arranged on the transmission belt. When one absorption nozzle is rotated to the current position, the nozzle is communicated with a negative pressure cavity in the negative pressure adsorption system and absorbs the plates. The length of the negative pressure cavity is almost the same as the length of a straight section of a conveying belt. The conveying length of the plates can be defined as needed, and other auxiliary tools are not needed. In the entire absorption and conveying process, the entire surface of the plates is attached to the conveying belt, fragments are guaranteed to be avoided in the process, and the plate-forming rate is largely improved. Besides, the negative pressure type plate parting machine is high in transmission efficiency, is suitable for being used in the air (such as parting sheet glass), and is suitable for being used in water as well (such as parting silicon wafers).
Description
Technical field
The utility model relates to a kind of suction type wafer separator.
Background technology
For slim, the easy micrinite that segments, when separating and transmitting these lamellar bodies, there is very large difficulty, existing separate mode is roughly two kinds: a kind of is the suction pawl that adopts sucked type, inhale pawl by propulsion source control and hold current lamellar body, then it is moved to follow-up required procedure position, the shortcoming of this mode is, owing to inhaling between pawl and the lamellar body and will form an annular seal space, so inhaling pawl is merely able to hold mutually with the part of lamellar body, the unbalance stress that will cause the lamellar body each several part seriously causes fragment rate high; Another kind is to adopt belt conveyor and adsorbing mechanism, first current lamellar body is separated by adsorbing mechanism, be sent to follow-up required procedure position by belt conveyor and other connecting gears, the shortcoming of this mode is, complex structure, cost are high, and because lamellar body is very thin, from burst to the switching process that transmits, cause lamellar body frangible, affect rate in blocks.Orthodox method to sum up all can cause rate in blocks low in the process of burst or transmission, causes productive costs too high, can not satisfy production requirement.
The utility model content
The purpose of this utility model provides a kind of suction type wafer separator that utilizes the negative-pressure adsorption mode sheet stacked together to be separated and is sent to subsequent processing.
For solving the problems of the technologies described above, the utility model adopts following technical scheme:
A kind of suction type wafer separator for several lamellar bodies stacked together being separated and being sent to subsequent processing, comprising:
Connecting gear, it comprises at least two belt wheels, is stretched in these described belt wheel upper conveyor belts, and described belt conveyor comprises a straight section, and this straight section is for being used for transmitting the transmission plane of lamellar body;
The lamellar body support bracket, it has the support face of the described lamellar body of support, and this support face extends to the position near described transmission plane;
The negative-pressure adsorption system, it comprises the negative pressure source that produces negative pressure in negative pressure cavity, the described negative pressure cavity of control, the live apart inside and outside both sides of described transmission plane of described negative pressure cavity, described lamellar body support bracket, described negative pressure cavity has a chamber wall that is adjacent in described transmission plane inboard, and the direct of travel along described belt conveyor offers long through-hole on this chamber wall;
The length of described long through-hole and the length of described transmission plane about equally,
Be arranged with a plurality of suction nozzles on along its length on the described belt conveyor, distance between two adjacent described suction nozzles greater than lamellar body along the width in the transmission direction, described long through-hole connects with suction nozzle on the corresponding described transmission plane, and the length of described long through-hole is greater than the distance between two adjacent described suction nozzles.
Preferably, be provided be used to the control cock of regulating the force value in the described negative pressure cavity between described negative pressure source and the described negative pressure cavity.
Preferably, described negative-pressure adsorption system comprises that also be used to the monitor of monitoring the pressure in the described negative pressure cavity, described monitor signal is connected to described control cock.
Preferably, the distance of the described transmission plane of the end of described support face distance is less than the thickness of lamellar body.
Preferably, described suction nozzle is along evenly distributing on the length direction of described belt conveyor.
Preferably, described suction nozzle comprises a plurality of through holes that are opened on the described belt conveyor, and the lamellar body that is adsorbed covers on all through holes that a corresponding described suction nozzle comprises.
Preferably, described transmission plane is along roughly vertical direction setting, and described support face tilt arranges and near the downward-sloping setting of an end of described transmission plane, and lamellar body is placed on the end of close described transmission plane of described support face.
Preferably, the scope of described support face leaning angle with respect to the horizontal plane is 5-30 °, and described transmission plane and described support face are perpendicular.
Preferably, this suction type wafer separator also comprises the auxiliary blow gun that lamellar body upon adsorption and a rear lamellar body are separated, this blow gun be arranged on the top of lamellar body and aim at lamellar body upon adsorption and a rear lamellar body between.
Preferably, described connecting gear, described lamellar body support bracket and the described negative-pressure adsorption of part system are arranged in a tank, and described negative pressure source is a lift pump.
The beneficial effects of the utility model are: the utility model adopts the negative-pressure adsorption system that the current lamellar body in some lamellar bodies stacked together is adsorbed on the transmission plane of belt conveyor, and bring it into the subsequent processing desired position with the transmission of belt conveyor, make support face tilt setting and downward-sloping near an end of transmission plane, lamellar body is placed on this end, because will being adsorbed away along with current lamellar body, the deadweight of these lamellar bodies slides to down one by one like this position near belt conveyor, namely realized auto-feed, greatly saved the cost of other feeding mode, in addition, corresponding position is provided with the blow gun that current lamellar body and a rear lamellar body is separated for auxiliary between current lamellar body and a rear lamellar body, suction nozzle pre-inhale current lamellar body and each absorption be taken in before during lamellar body, blow gun is to air blowing between current lamellar body and the rear lamellar body or water and current lamellar body and a rear lamellar body are separated, in whole absorption and the transport process, lamellar body all is that whole face is fitted on the belt conveyor, can not cause fragment in the assurance process, greatly improved rate in blocks, and transmission efficiency is high, both be applicable in the air (such as the separation of glasses sheet etc.), also be applicable to (as separating silicon chip etc.) in the water.
Description of drawings
Accompanying drawing 1 is looked schematic diagram for the master of suction type wafer separator of the present utility model;
Accompanying drawing 2 is the schematic side view of suction type wafer separator of the present utility model.
In the accompanying drawing: 1, lamellar body; 2, the first belt wheel; 3, the second belt wheel; 4, belt conveyor; 5, transmission motor; 6, transmission plane; 7, support face; 8, negative pressure cavity; 9, negative pressure source; 10, long through-hole; 11, suction nozzle; 12, control cock; 13, through hole; 14, blow gun; 15, tank.
The specific embodiment
Below in conjunction with embodiment shown in the drawings the utility model is done following detailed description the in detail:
Such as accompanying drawing 1 to shown in the accompanying drawing 2, suction type wafer separator of the present utility model, be used for several lamellar bodies stacked together 1 are separated and are sent to subsequent processing, its structure comprises: connecting gear, lamellar body 1 support bracket and negative-pressure adsorption system, wherein: connecting gear comprises at least two belt wheels, be stretched in the transmission on these belt wheels, 4, belt conveyor 4 comprises a straight section, this straight section comprises the first belt wheel 2 for the connecting gear for the transmission plane 6(the present embodiment that transmits lamellar body 1, the second belt wheel 3, be stretched in the belt conveyor 4 on the first belt wheel 2 and the second belt wheel 3, the transmission motor 5 that is in transmission connection mutually with the first belt wheel 2 or the second belt wheel 3, belt conveyor 4 comprises two straight sections of both sides and two segmental arcs at two ends, wherein a straight section is for being used for transmitting the transmission plane 6 of lamellar body 1), lamellar body 1 support bracket has the support face 7 of support lamellar body 1, this support face 7 extends to the position near transmission plane 6, the negative-pressure adsorption system comprises negative pressure cavity 8, the negative pressure source 9 of control negative pressure cavity 8 interior generation negative pressure, negative pressure cavity 8, in the lamellar body 1 support bracket separation transmission plane 6, outer both sides, one chamber wall of negative pressure cavity 8 is adjacent to the inboard at transmission plane 6, and the direct of travel along belt conveyor 4 on this chamber wall offers long through-hole 10, the length of the length of long through-hole 10 and transmission plane 6 about equally, be arranged with a plurality of suction nozzles 11 on along its length on the belt conveyor 4, distance between two adjacent suction nozzles 11 greater than lamellar body 1 along the width in the transmission direction, suction nozzle 11 corresponding on long through-hole 10 and the transmission plane connects, the length of long through-hole 10 is greater than the distance between two adjacent suction nozzles 11, transmission plane 6 is along roughly vertical direction setting, support face 7 is obliquely installed and near the downward-sloping setting of an end of transmission plane 6, further preferably talk about, it is 5-30 ° that support face 7 tilt angle ranges with respect to the horizontal plane can be set, certainly this leaning angle specifically will be according to the friction coefficient of support face 7, the factors such as transfer rate of the weight of lamellar body 1 and suction nozzle 11 consider, lamellar body 1 is placed on the end of close transmission plane 6 of support face 7, like this, under the effect of the deadweight of these lamellar bodies 1, along with the absorption of current lamellar body 1 and send away, the lamellar body 1 of back is convenient to one by one absorption and is transmitted near belt conveyor 4, realize auto-feed, this suction type wafer separator also comprises the auxiliary blow gun 14 that lamellar body upon adsorption 1 and a rear lamellar body 1 are separated, this blow gun 14 be arranged on the top of lamellar body 1 and aim at lamellar body upon adsorption 1 and a rear lamellar body 1 between, in the pre-absorption of suction nozzle 11 or when just having adsorbed the lamellar body 1 of the most close transmission plane, this blow gun 14 is assisted to blowing medium (air or water) between this lamellar body 1 and the rear lamellar body 1 and will be separated between this lamellar body 1 and the rear lamellar body 1.
Be provided with between negative pressure source 9 and the negative pressure cavity 8 for the control cock 12 of regulating the force value in the negative pressure cavity 8, the negative-pressure adsorption system also comprises the monitor for the pressure in the monitoring negative pressure cavity 8, monitor signal is connected to control cock 12, for example the number of the suction nozzle 11 of long through-hole 10 correspondences is 3, so at the first two lamellar body 1 that begins to adsorb and transmit, because two of the forefront or a suction nozzle 11 are not covered by lamellar body 1, will need larger adsorption affinity the first lamellar body 1 can be adsorbed on the transmission plane 6, and in absorption on the 3rd lamellar body 1 after, chipping for preventing lamellar body 1, again adsorption affinity is turned down, this comes the size of opening flow of adjusting control valve 12 with regard to the feedback data that needs monitor and controls negative pressure value in the negative pressure cavity 8, in like manner, when the penultimate in this lamination body 1 of absorption and last lamellar body 1, also need the interoperation of monitor and control cock 12 to regulate, even also be included in the pilot process outer sliver that occurs of likeing, will need larger adsorption affinity, and the back needs adsorption affinity to diminish, equally all need monitor and control cock 12 to control to adjust, the end of support face 7 is apart from the distance of transmission plane 6 thickness less than lamellar body 1, suction nozzle 11 is along evenly distributing on the length direction of belt conveyor 4, suction nozzle 11 comprises a plurality of through holes 13 that are opened on the belt conveyor 4, the initiating terminal of control long through-hole 10 and the relative position that is placed on the lamellar body 1 on the support face 7, and then control the center that these through holes 13 just in time are adsorbed on corresponding lamellar body 1, and lamellar body 1 upon adsorption covers on all through holes 13 that a corresponding suction nozzle 11 comprises just, and lamellar body upon adsorption 1 herein refers in these lamellar bodies stacked together the lamellar body that is about to be adsorbed of close transmission plane.
Suction type wafer separator of the present utility model can be used for air, negative pressure source 9 adopts air extracting pump, be used for separation and the transmission of slim glass sheet etc., also can be used for water, connecting gear, lamellar body 1 support bracket and part negative-pressure adsorption system are put in the tank 15, and corresponding negative pressure source 9 just adopts a lift pump, is used for separation and the transmission of silicon chip etc.
The utility model adopts the negative-pressure adsorption system that the lamellar body in some lamellar bodies stacked together is adsorbed on the transmission plane of belt conveyor, and bring it into the subsequent processing desired position with the transmission of belt conveyor, make support face tilt setting and downward-sloping near an end of transmission plane, lamellar body is placed on this end, because will being adsorbed away along with current lamellar body, the deadweight of these lamellar bodies slides to down one by one like this position near belt conveyor, namely realized auto-feed, greatly saved the cost of other feeding mode, in addition, corresponding position is provided with the blow gun that current lamellar body and a rear lamellar body is separated for auxiliary between current lamellar body and a rear lamellar body, suction nozzle pre-inhale current lamellar body and each absorption be taken in before during lamellar body, blow gun is to air blowing between current lamellar body and the rear lamellar body or water and current lamellar body and a rear lamellar body are separated, in whole absorption and the transport process, lamellar body all is that whole face is fitted on the belt conveyor, can not cause fragment in the assurance process, greatly improved rate in blocks, and transmission efficiency is high.
Above-described embodiment only is explanation technical conceive of the present utility model and characteristics, and its purpose is to allow the personage who is familiar with technique can understand content of the present utility model and according to this enforcement, can not limit protection domain of the present utility model with this.All equivalences of doing according to the utility model spirit change or modify, and all should be encompassed within the protection domain of the present utility model.
Claims (10)
1. suction type wafer separator is used for several lamellar bodies stacked together are separated and are sent to subsequent processing, it is characterized in that: comprising:
Connecting gear, it comprises at least two belt wheels, is stretched in these described belt wheel upper conveyor belts, and described belt conveyor comprises a straight section, and this straight section is for being used for transmitting the transmission plane of lamellar body;
The lamellar body support bracket, it has the support face of the described lamellar body of support, and this support face extends to the position near described transmission plane;
The negative-pressure adsorption system, it comprises the negative pressure source that produces negative pressure in negative pressure cavity, the described negative pressure cavity of control, the live apart inside and outside both sides of described transmission plane of described negative pressure cavity, described lamellar body support bracket, described negative pressure cavity has a chamber wall that is adjacent in described transmission plane inboard, and the direct of travel along described belt conveyor offers long through-hole on this chamber wall;
The length of described long through-hole and the length of described transmission plane about equally,
Be arranged with a plurality of suction nozzles on along its length on the described belt conveyor, distance between two adjacent described suction nozzles greater than lamellar body along the width in the transmission direction, described long through-hole connects with suction nozzle on the corresponding described transmission plane, and the length of described long through-hole is greater than the distance between two adjacent described suction nozzles.
2. suction type wafer separator according to claim 1 is characterized in that: be provided be used to the control cock of regulating the force value in the described negative pressure cavity between described negative pressure source and the described negative pressure cavity.
3. suction type wafer separator according to claim 2 is characterized in that: described negative-pressure adsorption system comprises that also be used to the monitor of monitoring the pressure in the described negative pressure cavity, described monitor signal is connected to described control cock.
4. suction type wafer separator according to claim 1 is characterized in that: the end of described support face is apart from the distance of the described transmission plane thickness less than lamellar body.
5. suction type wafer separator according to claim 1 is characterized in that: described suction nozzle is along evenly distributing on the length direction of described belt conveyor.
6. suction type wafer separator according to claim 1, it is characterized in that: described suction nozzle comprises a plurality of through holes that are opened on the described belt conveyor, the lamellar body that is adsorbed covers on all through holes that a corresponding described suction nozzle comprises.
7. suction type wafer separator according to claim 1, it is characterized in that: described transmission plane is along roughly vertical direction setting, described support face tilt arranges and near the downward-sloping setting of an end of described transmission plane, and lamellar body is placed on the end of close described transmission plane of described support face.
8. suction type wafer separator according to claim 7, it is characterized in that: the scope of described support face leaning angle with respect to the horizontal plane is 5-30 °, described transmission plane and described support face are perpendicular.
9. suction type wafer separator according to claim 1, it is characterized in that: this suction type wafer separator also comprises the auxiliary blow gun that lamellar body upon adsorption and a rear lamellar body are separated, this blow gun be arranged on the top of lamellar body and aim at lamellar body upon adsorption and a rear lamellar body between.
10. suction type wafer separator according to claim 1, it is characterized in that: described connecting gear, described lamellar body support bracket and the described negative-pressure adsorption of part system are arranged in a tank, and described negative pressure source is a lift pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220418458 CN202717397U (en) | 2012-08-22 | 2012-08-22 | Negative pressure type plate parting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220418458 CN202717397U (en) | 2012-08-22 | 2012-08-22 | Negative pressure type plate parting machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202717397U true CN202717397U (en) | 2013-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220418458 Expired - Fee Related CN202717397U (en) | 2012-08-22 | 2012-08-22 | Negative pressure type plate parting machine |
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| CN (1) | CN202717397U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103586235A (en) * | 2013-11-19 | 2014-02-19 | 张家港市超声电气有限公司 | Suction cup conveying belt type slice cleaning device |
| CN103601015A (en) * | 2013-11-19 | 2014-02-26 | 张家港市超声电气有限公司 | Piece separating and conveying device |
| CN104609146A (en) * | 2015-02-02 | 2015-05-13 | 无锡市南亚科技有限公司 | Separated silicon wafer conveying device and silicon wafer conveying method |
| CN106180111A (en) * | 2016-08-24 | 2016-12-07 | 高佳太阳能股份有限公司 | A kind of feeding device of automatic machine for inserting silicon wafers |
| CN107215693A (en) * | 2017-04-24 | 2017-09-29 | 深圳市德仓科技有限公司 | A kind of optical film material automates conveyer |
| CN109016817A (en) * | 2018-09-21 | 2018-12-18 | 汕头东风印刷股份有限公司 | A kind of gripper mechanism of adjustable negative pressure position |
| CN112938554A (en) * | 2021-01-27 | 2021-06-11 | 贵阳天海数码科技有限公司 | Paper separating device |
| CN114194506A (en) * | 2021-12-22 | 2022-03-18 | 烟台大学 | Fruit mesh opening device with straightening function and mesh opening method thereof |
-
2012
- 2012-08-22 CN CN 201220418458 patent/CN202717397U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103586235A (en) * | 2013-11-19 | 2014-02-19 | 张家港市超声电气有限公司 | Suction cup conveying belt type slice cleaning device |
| CN103601015A (en) * | 2013-11-19 | 2014-02-26 | 张家港市超声电气有限公司 | Piece separating and conveying device |
| CN104609146A (en) * | 2015-02-02 | 2015-05-13 | 无锡市南亚科技有限公司 | Separated silicon wafer conveying device and silicon wafer conveying method |
| CN106180111A (en) * | 2016-08-24 | 2016-12-07 | 高佳太阳能股份有限公司 | A kind of feeding device of automatic machine for inserting silicon wafers |
| CN107215693A (en) * | 2017-04-24 | 2017-09-29 | 深圳市德仓科技有限公司 | A kind of optical film material automates conveyer |
| CN109016817A (en) * | 2018-09-21 | 2018-12-18 | 汕头东风印刷股份有限公司 | A kind of gripper mechanism of adjustable negative pressure position |
| CN112938554A (en) * | 2021-01-27 | 2021-06-11 | 贵阳天海数码科技有限公司 | Paper separating device |
| CN114194506A (en) * | 2021-12-22 | 2022-03-18 | 烟台大学 | Fruit mesh opening device with straightening function and mesh opening method thereof |
| CN114194506B (en) * | 2021-12-22 | 2023-09-22 | 烟台大学 | Fruit net cover opening device with straightening function and net cover opening method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130206 Termination date: 20160822 |
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| CF01 | Termination of patent right due to non-payment of annual fee |