CN202606430U - Spraying rinse tank - Google Patents
Spraying rinse tank Download PDFInfo
- Publication number
- CN202606430U CN202606430U CN 201120571192 CN201120571192U CN202606430U CN 202606430 U CN202606430 U CN 202606430U CN 201120571192 CN201120571192 CN 201120571192 CN 201120571192 U CN201120571192 U CN 201120571192U CN 202606430 U CN202606430 U CN 202606430U
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- Prior art keywords
- high capacity
- spray cleaning
- groove according
- support
- capacity groove
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- Expired - Lifetime
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Abstract
The utility model discloses a spraying rinse tank which comprises a tank body which is provided with a cavity. The spraying rinse tank is characterized by also comprising a first support, a clamp and a spraying pipe, wherein the first support is arranged inside the cavity in a movable mode, the clamp is used to a clamp working part which is to be cleaned and arranged on the first support in a rotating mode, and the spraying pipe is provided with a spraying nozzle which is toward the working part which is to be cleaned. The clamp can be used to clamp the working part which is to be cleaned to rotate in the spraying rinse tank, the clamp and the spraying pipe can respectively make relative motion independently, and spraying water can clean every position of the working part which is to be cleaned. The spraying rinse tank can clamp two working parts which are to be cleaned to clean one time so that working efficiency is high, the working part which is to be cleaned can be clamped on the clamp, then the clamp is arranged on the rotating shaft, so that using is convenient.
Description
Technical field
The utility model relates to a kind of spray Cleaning for High Capacity groove.
Background technology
In wafer, lead frame and other integrated circuit component production process, need PROCESS FOR TREATMENT such as plating, etching.Production process, cleaning are necessary work.Cleaning need guarantee that at first each position of wafer, lead frame or other element all can clean comprehensively.Secondly, also need satisfy the large-scale production needs, can be fast, efficient and automation cleaning.But cleaning equipment of the prior art also can't reach the requirement of comprehensive cleaning.And cleaning process is slow, and efficient is low.
The utility model content
The purpose of the utility model is in order to overcome deficiency of the prior art, a kind of spray Cleaning for High Capacity groove that can clean workpiece to be washed to be provided comprehensively.
For realizing above purpose, the utility model is realized through following technical scheme:
The spray Cleaning for High Capacity groove comprises cell body, and said cell body is provided with cavity volume; It is characterized in that, also comprise: first support, said first support is arranged in the cavity volume movably; Anchor clamps, said anchor clamps are used for clamping workpiece to be washed, and said anchor clamps are arranged on first support rotationally; Shower, said shower is provided with the mouth spray towards anchor clamps.
Preferably, said shower and anchor clamps can be arranged in the cavity volume with relatively moving.
Preferably, also comprise first drive unit; First drive unit is in transmission connection through first transmission device and first support; Said first drive unit pumps through first actuator drives, first support.
Preferably, said first transmission device comprises tooth bar and gear; The tooth bar end is connected with first support; Gear is installed on the output shaft of first drive unit and receives the first drive unit driven in rotation; The rack and pinion engagement.
Preferably, said first transmission device is a feed screw nut, and the screw mandrel of feed screw nut is connected with first support; The nut of first drive unit and feed screw nut is in transmission connection, and first drive unit drives the nut rotation of feed screw nut.
Preferably, described shower can move back and forth up and down to be arranged in the cavity volume.
Preferably, shower is installed on second support; Also comprise second drive unit, said second drive unit and second support are in transmission connection; Said second drive unit drives second support and pumps.
Preferably, said second drive unit is second reducing motor; Second reducing motor is in transmission connection through second transmission device and second support.
Preferably, reducing motor has output shaft, and said output shaft is horizontally disposed with; On the reducing motor output shaft rotating disk is installed, said rotating disk is connected through connecting rod with second support; Said connecting rod is connected the non-home position of rotating disk; The connecting rod and the second support tie point are positioned at the top of the tie point of connecting rod and rotating disk.
Preferably, be provided with the guider that in second support moves up and down process, leads in the said cavity volume.
Preferably, said guider is slide block and the guide rail that cooperatively interacts; Said slide block is connected with second support, and said guide rail is installed in the cavity volume.
Preferably, also comprise the 3rd drive unit, said the 3rd drive unit drives anchor clamps and rotates.
Preferably, said the 3rd drive unit and anchor clamps are in transmission connection through the 3rd transmission device.
Preferably, said the 3rd transmission device comprises one or more in synchronous band, driving-chain and the gear.
Preferably, said anchor clamps are installed in the rotating shaft, and rotating shaft is rotatably installed on first support.
Preferably, said rotating shaft two ends are separately installed with anchor clamps; Said shower number is two.
Preferably, said the 3rd drive unit rotates through the rotating shaft of band driving synchronously.
Preferably, said the 3rd drive unit rotates through band and gear drive rotating shaft synchronously; First synchronous pulley is installed on the output shaft of the 3rd drive unit; Second synchronous pulley and the coaxial installation of first gear; Band is sleeved on first synchronous pulley and second synchronous pulley synchronously; Second gear is installed in the rotating shaft; First gear and second gears engaged, or first gear and second gear are simultaneously and the 3rd gears engaged.
Preferably, said anchor clamps comprise substrate, reference column, locating piece and elasticity reset device; Said reference column is arranged at substrate surface and protrudes in substrate surface; Said locating piece is arranged on substrate edges, and locating piece is provided with the catch that extends to substrate center from substrate edges, and said locating piece can and can return back to away from the substrate edges motion and be fastened on the setting of substrate edges ground; Said elasticity reset device produces the elastic deformation force when locating piece moves away from substrate edges, this elastic deformation force has the trend that locating piece is returned back to be fastened on the position of substrate edges.
Preferably, said locating piece is provided with groove; Substrate edges embeds in the groove along thickness direction, and said catch is the cell wall of groove.
Preferably, said substrate comprises substrate body and is arranged on the fixed teeth on the substrate body, and the number of described fixed teeth is more than two, and plural fixed teeth is along the circumferential direction arranged; Locating piece is arranged on one of them fixed teeth at least.
Preferably, said locating piece is sleeved on the fixed teeth end.
Preferably, the groove of said locating piece shape along its length matches with fixed teeth shape along the circumferential direction.
Preferably, the length of the groove of said locating piece is greater than the thickness of fixed teeth.
Preferably, described elasticity reset device is a spring.
Preferably, said elasticity reset device is the compression spring, and said substrate is provided with screw, and said locating piece is provided with first through hole, is provided with step in first through hole; Screw passes first through hole and substrate threaded engagement; Said compression spring housing be contained on the screw and be restricted to screw end and step between.
Preferably, said locating piece can screw be that axle is provided with rotationally.
Preferably, said substrate is provided with second through hole along thickness direction.
Preferably, described reference column is provided with the termination, and termination and substrate surface have the gap that adapts with wafer thickness.
Preferably, between termination and the substrate surface be draw-in groove.
Preferably, said shower is communicated with water supply installation.
The rotation of spray Cleaning for High Capacity groove in the utility model anchor clamps clamping capable of using workpiece to be washed, and anchor clamps and shower can be distinguished relative motion independently, each position of shower water workpiece to be washed capable of washing.But the utility model is two workpiece cleaning to be washed of clamping once, high efficiency.And, can be earlier when the utility model uses with piece-holder to be washed on anchor clamps, again anchor clamps are installed in the rotating shaft, use more convenient.
Description of drawings
Fig. 1 is the utility model structural representation.
Fig. 2 is the front view of Fig. 1.
Fig. 3 is the utility model cavity volume internal structure sketch map.
Fig. 4 is the front view of Fig. 3.
Fig. 5 is the anchor clamps rotary principle sketch map in the utility model.
Fig. 6 is the shower operation principle sketch map in the utility model.
Fig. 7 is the clamp structure sketch map in the utility model.
Fig. 8 is the chuck side view in the utility model.
Fig. 9 is the A-A cutaway view of Fig. 8.
Figure 10 is the locating piece structure cutaway view in the utility model.
Figure 11 is anchor clamps first principle schematic in the utility model.
Figure 12 is anchor clamps second principle schematic in the utility model.
Figure 13 is anchor clamps the 3rd principle schematic in the utility model.
Figure 14 is the utility model method for using sketch map.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is carried out detailed description:
Like Fig. 1, Fig. 2, Fig. 3 and shown in Figure 4, the spray Cleaning for High Capacity groove comprises cell body 100, and said cell body 100 is provided with cavity volume 101.Also comprise first support 200.Said first states support 200 is arranged in the cavity volume 101 movably.Two rotating anchor clamps 300 are installed on first support 200.Anchor clamps 300 are used for clamping workpiece to be washed.Two anchor clamps 300 are separately positioned on first support, 200 both sides.
Be provided with two showers 400 in the cavity volume 101.Be provided with mouth spray 401 on each shower 400.The mouth spray 401 of each shower 400 is towards one of them anchor clamps 300.Two showers 400 all can be arranged in the cavity volume 401 with pumping.
Like Fig. 2, Fig. 3 and shown in Figure 4, first support 200 can move back and forth up and down to be arranged in the cavity volume.First support 200 is a case structure, and casing 201 is provided with the cavity volume (not shown).The 3rd drive unit and the 3rd transmission device that drive anchor clamps 300 rotations are arranged in the cavity volume of casing 201.First drive unit is on the output shaft of first reducing motor, 202, the first reducing motors 202 the gear (not shown) to be installed, and tooth bar 203 1 ends are connected with second support 200, and tooth bar 203 and gears engaged.Wheel and rack 203 is first transmission device.The rotation of first reducing motor, 202 driven wheels can drive tooth bar 203 and pump.First support 200 that is installed in tooth bar 203 ends pumps with tooth bar 203.
First transmission device can also adopt the feed screw nut transmission and utilize worm screw and the driving force of first reducing motor 202 is transmitted in the combination of turbine.The screw mandrel of feed screw nut is to be connected with second support with tooth bar 203 identical modes.The combination of worm screw and turbine is delivered to the driving force of first reducing motor 202 the nut rotation of driving feed screw nut.Nut is fixed on a certain height and position, and nut rotates screw mandrel is moved back and forth up and down.
Like Fig. 3, Fig. 4 and shown in Figure 5, two anchor clamps 300 are separately positioned on the two ends of rotating shaft 301.Rotating shaft 301 runs through first support 200, is arranged on rotationally on first support 200.Be provided with the 3rd drive unit in the cavity volume of casing 201, the 3rd drive unit is the 3rd reducing motor 302.First synchronous pulley 304 is installed on the output shaft 303 of the 3rd reducing motor 302.Second synchronous pulley 305 and first gear 306 are coaxially installed in the cavity volume of casing 201.First synchronous pulley 304 and second synchronous pulley 305 are provided with is with 307 synchronously.Second gear 308 also is installed in the rotating shaft 301.Second gear 308 is positioned at the cavity volume of casing 201.Also be provided with rotating the 3rd gear 309 in the cavity volume of casing 201.First gear 306 and second gear 308 all mesh with the 3rd gear 309.
The 3rd reducing motor 302 drives 304 rotations of first synchronous pulley, through being with 307 synchronously, driving force is passed to second synchronous pulley 305, drives second synchronous pulley 305 and first gear 306 rotates synchronously.Through second gear 308 and the 3rd gear 309, can the driving force of the 3rd reducing motor 302 be passed to rotating shaft 301.The rotating shaft 301 of rotating drives two anchor clamps 300 and rotates synchronously.
Like Fig. 3, Fig. 4 and shown in Figure 6, two showers 400 can be arranged in the cavity volume 101 of cell body 100 with pumping, and lay respectively at first support, 200 both sides.Shower 400 is communicated with the water supply installation (not shown).Each shower 400 is provided with the mouth spray 401 towards anchor clamps 300.Water supply installation is supplied to rinse water in the shower 400, and sprays to the workpiece to be washed that is clamped on the anchor clamps 300 through mouth spray 401.
Second drive unit is second reducing motor 402.Second reducing motor 402 is in transmission connection through second transmission device and second support 403.Second reducing motor 402 pumps through second actuator drives, second support 403.Two showers 400 all are installed on second support 403.
Second transmission device comprises rotating disk 404 and connecting rod 405.Rotating disk 404 is installed on the output shaft of second reducing motor 402, by second reducing motor, 402 driven in rotation.The output shaft of second reducing motor 402 is horizontally disposed with.Connecting rod 405 1 ends are connected the non-home position of rotating disk 404, and the other end is connected with second support 403.Slide block 406 is connected with second support 403.Slide block 406 is arranged on the guide rail 407 and can slides along guide rail 407.Slide block 406 matches with guide rail 407 and when second support 403 pumps, play the guiding role.
The utility model both can be used for cleaning wafer, also can be used to clean lead frame, can also clean other ic components.Select the structure of anchor clamps 300 according to workpiece to be washed.The utility model is the example explanation with the cleaning wafer.
Like Fig. 7, Fig. 8 and shown in Figure 9, anchor clamps 300 comprise substrate 1.Comprise substrate 1.Substrate 1 comprises basic body 11 and is arranged on the fixed teeth 12 on the substrate body 11.Fixed teeth 12 numbers are six.Six fixed teeth 12 are along the circumferential direction arranged.Wherein four fixed teeth 12 are provided with reference column 2.Reference column 2 protrudes in fixed teeth 12 surfaces 121.Reference column 2 has termination 21.Have the gap that adapts with wafer thickness between termination 21 and the substrate body 11, between termination 21 and substrate body 11, form draw-in groove 22.Substrate body 11 is provided with second through hole 13 along the thickness T direction.
Wherein be respectively arranged with a locating piece 3 on two fixed teeth 12.Locating piece 3 structures are as shown in Figure 4, and locating piece 3 is provided with groove 31.Groove 31 matches with fixed teeth 12 circumferencial direction shapes along length L direction shape.Groove 31 length L are greater than the thickness T of fixed teeth 12.First cell wall 32 of groove 31 and second cell wall 33 extend selected length along the edge of fixed teeth 12 to the center O of substrate body 1.Locating piece 3 is provided with first through hole 34.Be provided with step 35 in first through hole 34.
The fixed teeth 12 that is provided with locating piece 3 is equipped with screw 4.Screw 4 passes first through hole 34 and fixed teeth 12 threaded engagement.Compression spring 5 is sleeved on the screw 4 and between screw 4 ends 41 and step 35, and is restricted between end 41 and the step 35.Locating piece 3 among Fig. 2 and Fig. 3 serves as that axle has rotated 90 degree with respect to the state among Fig. 1 with screw 4.
Be illustrated in figure 7 as and do not place wafer anchor clamps 300 before.At this moment, the groove 31 length L directions of locating piece 3 match with the shape of fixed teeth 12 circumferencial directions, and locating piece 3 is fastened on the fixed teeth 12.Locating piece 12 protrudes in substrate body 11 surfaces unlike reference column 2 that kind.Shown in figure 11, when needing the clamping wafer, can wafer 6 be placed on 11 of substrate body, four reference columns 2 are held wafer 6.Shown in figure 12, on the basis of Figure 11, pulling locating piece 3 makes itself and fixed teeth 12 edges draw back certain distance.Compress spring 5 this moment and be compressed the generation elastic deformation force, this elastic deformation force can make locating piece 3 return back to and fixed teeth 12 position contacting.Shown in figure 13, on the basis of Figure 12, positioning of rotating piece 3 revolves it and turn 90 degrees, and the length L direction of groove 31 is consistent with the thickness T direction of substrate body 11.Shown in figure 14, on the basis of Figure 13, unclamp locating piece 3 after, locating piece 3 is under elastic deformation force's the effect of compression spring 5, near fixed teeth 12 and finally be fastened on the fixed teeth 12.Because locating piece 3 has rotated 90 degree with respect to the state among Fig. 7; Therefore; First cell wall 32 and second cell wall 33 of groove 3 have extended certain length from the edge of fixed teeth 12 to the center O of substrate body 11, and push down wafer 6, can prevent that wafer 6 breaks away from from substrate 1 surface.The length that first cell wall 32 and second cell wall 33 extend to the center of substrate body 11 from the edge of fixed teeth 12 can be definite according to the distance at the edge of wafer 6 edges and fixed teeth 12.In the utility model, utilize fixedly wafer 6 of four reference columns 2 and two locating pieces 3.
In the time of need taking off wafer 6, the mode of operation reverse operating during according to the clamping wafer gets final product.
As shown in Figure 3, wafer 6 of two anchor clamps 300 difference clampings is removably mounted in the rotating shaft 301.The 3rd reducing motor 302 drives rotating shaft 301 and rotates, and drives wafer 6 rotations.Simultaneously, first reducing motor 202 drives first support 200 and pumps, and pumps to drive wafer 6.Second reducing motor 402 drives shower 400 and pumps.Wafer 6 is when rotating and pumping, and shower 402 pumps and sprays flushing with clean water wafer 6 to wafer.
Embodiment in the utility model only is used for the utility model is described, and does not constitute the restriction to the claim scope, and other substituting of being equal in fact that those skilled in that art can expect are all in the utility model protection domain.
Claims (32)
1. the spray Cleaning for High Capacity groove comprises cell body, and said cell body is provided with cavity volume; It is characterized in that, also comprise:
First support, said first support is arranged in the cavity volume movably;
Anchor clamps, said anchor clamps are used for clamping workpiece to be washed, and anchor clamps are arranged on first support rotationally;
Shower, said shower is provided with the mouth spray towards anchor clamps.
2. spray Cleaning for High Capacity groove according to claim 1 is characterized in that, said shower and anchor clamps can be arranged in the cavity volume with relatively moving.
3. spray Cleaning for High Capacity groove according to claim 2 is characterized in that, said first support can move back and forth up and down to be provided with.
4. spray Cleaning for High Capacity groove according to claim 3 is characterized in that, also comprises first drive unit; First drive unit is in transmission connection through first transmission device and first support; Said first drive unit pumps through first actuator drives, first support.
5. spray Cleaning for High Capacity groove according to claim 4 is characterized in that, said first transmission device comprises tooth bar and gear; The tooth bar end is connected with first support; Gear is installed on the output shaft of first drive unit and receives the first drive unit driven in rotation; The rack and pinion engagement.
6. spray Cleaning for High Capacity groove according to claim 5 is characterized in that, said first transmission device is a feed screw nut, and the screw mandrel of feed screw nut is connected with first support; The nut of first drive unit and feed screw nut is in transmission connection, and first drive unit drives the nut rotation of feed screw nut.
7. spray Cleaning for High Capacity groove according to claim 1 and 2 is characterized in that, described shower can move back and forth up and down to be arranged in the cavity volume.
8. spray Cleaning for High Capacity groove according to claim 7 is characterized in that, shower is installed on second support; Also comprise second drive unit, said second drive unit and second support are in transmission connection; Said second drive unit drives second support and pumps.
9. spray Cleaning for High Capacity groove according to claim 8 is characterized in that, said second drive unit is second reducing motor; Second reducing motor is in transmission connection through second transmission device and second support.
10. spray Cleaning for High Capacity groove according to claim 9 is characterized in that reducing motor has output shaft, and said output shaft is horizontally disposed with; On the reducing motor output shaft rotating disk is installed, said rotating disk is connected through connecting rod with second support; Said connecting rod is connected the non-home position of rotating disk; The connecting rod and the second support tie point are positioned at the top of the tie point of connecting rod and rotating disk.
11. spray Cleaning for High Capacity groove according to claim 8 is characterized in that, is provided with the guider that in second support moves up and down process, leads in the said cavity volume.
12. spray Cleaning for High Capacity groove according to claim 11 is characterized in that, said guider is slide block and the guide rail that cooperatively interacts; Said slide block is connected with second support, and said guide rail is installed in the cavity volume.
13. spray Cleaning for High Capacity groove according to claim 1 and 2 is characterized in that, also comprises the 3rd drive unit, said the 3rd drive unit drives anchor clamps and rotates.
14. spray Cleaning for High Capacity groove according to claim 13 is characterized in that, said the 3rd drive unit and anchor clamps are in transmission connection through the 3rd transmission device.
15. spray Cleaning for High Capacity groove according to claim 14 is characterized in that, said the 3rd transmission device comprises one or more in synchronous band, driving-chain and the gear.
16. spray Cleaning for High Capacity groove according to claim 13 is characterized in that said anchor clamps are installed in the rotating shaft, rotating shaft is rotatably installed on first support.
17. spray Cleaning for High Capacity groove according to claim 16 is characterized in that, said rotating shaft two ends are separately installed with anchor clamps; Said shower number is two.
18. spray Cleaning for High Capacity groove according to claim 16 is characterized in that, said the 3rd drive unit rotates through the rotating shaft of band driving synchronously.
19. spray Cleaning for High Capacity groove according to claim 18 is characterized in that, said the 3rd drive unit rotates through band and gear drive rotating shaft synchronously; First synchronous pulley is installed on the output shaft of the 3rd drive unit; Second synchronous pulley and the coaxial installation of first gear; Band is sleeved on first synchronous pulley and second synchronous pulley synchronously; Second gear is installed in the rotating shaft; First gear and second gears engaged, or first gear and second gear are simultaneously and the 3rd gears engaged.
20. spray Cleaning for High Capacity groove according to claim 1 and 2 is characterized in that said anchor clamps comprise substrate, reference column, locating piece and elasticity reset device; Said reference column is arranged at substrate surface and protrudes in substrate surface; Said locating piece is arranged on substrate edges, and locating piece is provided with the catch that extends to substrate center from substrate edges, and said locating piece can and can return back to away from the substrate edges motion and be fastened on the setting of substrate edges ground; Said elasticity reset device produces the elastic deformation force when locating piece moves away from substrate edges, this elastic deformation force has the trend that locating piece is returned back to be fastened on the position of substrate edges.
21. spray Cleaning for High Capacity groove according to claim 20 is characterized in that said locating piece is provided with groove; Substrate edges embeds in the groove along thickness direction, and said catch is the cell wall of groove.
22., it is characterized in that said substrate comprises substrate body and be arranged on the fixed teeth on the substrate body according to claim 20 or 21 described spray Cleaning for High Capacity grooves, the number of described fixed teeth is more than two, plural fixed teeth is along the circumferential direction arranged; Locating piece is arranged on one of them fixed teeth at least.
23. spray Cleaning for High Capacity groove according to claim 22 is characterized in that said locating piece is sleeved on the fixed teeth end.
24. spray Cleaning for High Capacity groove according to claim 23 is characterized in that, the groove of said locating piece shape along its length matches with fixed teeth shape along the circumferential direction.
25. spray Cleaning for High Capacity groove according to claim 24 is characterized in that the length of the groove of said locating piece is greater than the thickness of fixed teeth.
26. spray Cleaning for High Capacity groove according to claim 20 is characterized in that, described elasticity reset device is a spring.
27. spray Cleaning for High Capacity groove according to claim 26 is characterized in that, said elasticity reset device is the compression spring, and said substrate is provided with screw, and said locating piece is provided with first through hole, is provided with step in first through hole; Screw passes first through hole and substrate threaded engagement; Said compression spring housing be contained on the screw and be restricted to screw end and step between.
28. spray Cleaning for High Capacity groove according to claim 27 is characterized in that, said locating piece can screw be that axle is provided with rotationally.
29. spray Cleaning for High Capacity groove according to claim 20 is characterized in that said substrate is provided with second through hole along thickness direction.
30. spray Cleaning for High Capacity groove according to claim 20 is characterized in that described reference column is provided with the termination, termination and substrate surface have the gap that adapts with wafer thickness.
31. spray Cleaning for High Capacity groove according to claim 30 is characterized in that, is draw-in groove between termination and the substrate surface.
32. spray Cleaning for High Capacity groove according to claim 1 is characterized in that said shower is communicated with water supply installation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120571192 CN202606430U (en) | 2011-12-31 | 2011-12-31 | Spraying rinse tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120571192 CN202606430U (en) | 2011-12-31 | 2011-12-31 | Spraying rinse tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202606430U true CN202606430U (en) | 2012-12-19 |
Family
ID=47340163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120571192 Expired - Lifetime CN202606430U (en) | 2011-12-31 | 2011-12-31 | Spraying rinse tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202606430U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102513302A (en) * | 2011-12-31 | 2012-06-27 | 上海新阳半导体材料股份有限公司 | Spray rinsing tank |
| CN104275324A (en) * | 2013-07-08 | 2015-01-14 | 上海和辉光电有限公司 | Device for removing organic matter or dirt on shielding cover |
| CN104576408A (en) * | 2014-12-31 | 2015-04-29 | 上海新阳半导体材料股份有限公司 | Lead frame processing device |
| CN104658948A (en) * | 2014-12-31 | 2015-05-27 | 上海新阳半导体材料股份有限公司 | Lead frame treatment production line |
-
2011
- 2011-12-31 CN CN 201120571192 patent/CN202606430U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102513302A (en) * | 2011-12-31 | 2012-06-27 | 上海新阳半导体材料股份有限公司 | Spray rinsing tank |
| CN102513302B (en) * | 2011-12-31 | 2014-05-14 | 上海新阳半导体材料股份有限公司 | Spray rinsing tank |
| CN104275324A (en) * | 2013-07-08 | 2015-01-14 | 上海和辉光电有限公司 | Device for removing organic matter or dirt on shielding cover |
| CN104576408A (en) * | 2014-12-31 | 2015-04-29 | 上海新阳半导体材料股份有限公司 | Lead frame processing device |
| CN104658948A (en) * | 2014-12-31 | 2015-05-27 | 上海新阳半导体材料股份有限公司 | Lead frame treatment production line |
| CN104658948B (en) * | 2014-12-31 | 2017-07-28 | 上海新阳半导体材料股份有限公司 | Lead frame process for producing line |
| CN104576408B (en) * | 2014-12-31 | 2017-11-14 | 上海新阳半导体材料股份有限公司 | Lead frame processing equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170914 Address after: 201616 Shanghai city Songjiang District Sixian Road No. 3600 Building No. 10 West 1 floor Patentee after: Xinyang silicon (Shanghai) semiconductor technology Co., Ltd. Address before: 201616 No. 1268, Wen Jie Road, Shanghai, Songjiang District Patentee before: Shanghai Xinyang Semiconductor Material Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121219 |