CN202583695U - 一种光刻曝光机的多灯光源系统 - Google Patents
一种光刻曝光机的多灯光源系统 Download PDFInfo
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- CN202583695U CN202583695U CN 201220167128 CN201220167128U CN202583695U CN 202583695 U CN202583695 U CN 202583695U CN 201220167128 CN201220167128 CN 201220167128 CN 201220167128 U CN201220167128 U CN 201220167128U CN 202583695 U CN202583695 U CN 202583695U
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CN 201220167128 CN202583695U (zh) | 2012-04-19 | 2012-04-19 | 一种光刻曝光机的多灯光源系统 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105144340A (zh) * | 2013-04-09 | 2015-12-09 | 株式会社Orc制作所 | 光源装置以及具有光源装置的曝光装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105144340A (zh) * | 2013-04-09 | 2015-12-09 | 株式会社Orc制作所 | 光源装置以及具有光源装置的曝光装置 |
CN105144340B (zh) * | 2013-04-09 | 2017-04-12 | 株式会社Orc制作所 | 光源装置以及具有光源装置的曝光装置 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: ZHANGJIAGANG ENDA COMMUNICATION TECHNOLOGY CO., LT Free format text: FORMER OWNER: WUXI OME OPTOELECTRONIC TECHNOLOGY CO., LTD. Effective date: 20130702 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 214214 WUXI, JIANGSU PROVINCE TO: 215614 SUZHOU, JIANGSU PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20130702 Address after: 215614 E, Phoenix Science Park, Fenghuang Avenue, Fenghuang Town, Suzhou, Jiangsu, Zhangjiagang Patentee after: Zhangjiagang Enda Communication Technology Co., Ltd. Address before: 11 No. 214214 Jiangsu city of Wuxi province Yixing Jincheng Road Economic Development Zone Patentee before: Wuxi OME Opto Technology Co., Ltd. |
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C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121205 Termination date: 20140419 |