CN202549809U - Nitrogen dryer - Google Patents
Nitrogen dryer Download PDFInfo
- Publication number
- CN202549809U CN202549809U CN2012201343062U CN201220134306U CN202549809U CN 202549809 U CN202549809 U CN 202549809U CN 2012201343062 U CN2012201343062 U CN 2012201343062U CN 201220134306 U CN201220134306 U CN 201220134306U CN 202549809 U CN202549809 U CN 202549809U
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- CN
- China
- Prior art keywords
- nitrogen
- cavity
- silicon chip
- cover plate
- sprayer head
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- Expired - Fee Related
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Abstract
The utility model provides a nitrogen dryer. The nitrogen dryer comprises a cavity, a rotating body arranged in the cavity and a silicon chip basket loader, wherein the silicon chip basket loader is arranged at the bottom of the internal part of the rotating body; a cover plate is arranged on the cavity; the nitrogen dryer further comprises a nitrogen sprayer; the nitrogen sprayer comprises a spraying end and a nitrogen input end; and the spraying end of the nitrogen sprayer is arranged in the cavity through an opening on the cover plate. According to the nitrogen dryer, the nitrogen is heated through an oil heating barrel firstly, and the nitrogen is uniformly sprayed in a working cavity through the nitrogen sprayer , so that when a silicon chip is dried, the heating speed is fast, the rotating period of the silicon chip is shortened, and the gas consumption effect is reduced; simultaneously, the problem that the original moisture in the air remains on the surface of the silicon chip to form a watermark piece is avoided; and the nitrogen dryer is simple in structure and practical.
Description
Technical field
The utility model relates to the silicon wafer drying machine apparatus field, is a kind of nitrogen drier specifically.
Background technology
At present, the most uses of silicon wafer drying machine is that pneumatics gas dries on the market, and in two steps, the first step was that the low speed water spray cleans when silicon chip dried in machine, and second one is to spray pneumatics gas at a high speed to dry.A series of problems such as yet excess moisture in the pneumatics gas, and the link of water spray is arranged during machine run causes rate of warming slow excessively, and silicon chip dries excessive cycle, and efficient is low, and gas consumption is big.
Moreover, when drying, the process that has the low speed water spray to clean on the one hand; Pneumatics gas contains moisture on the other hand, and both moisture all remains in silicon chip surface easily and forms the watermark sheet, and this watermark sheet needs secondary to do over again; Increase production cost, do not reach practical effect.
Therefore, need a kind of nitrogen drier especially, to solve the problem that exists in the prior art.
The utility model content
The purpose of the utility model be for solve prior art hollow calm the anger in rate of warming that excess moisture causes slow; Silicon chip dries excessive cycle, inefficiency, and gas consumption is big; And the problem that can form the watermark sheet, provide a kind of nitrogen drier to solve the problems referred to above.
To achieve these goals, the technical scheme of the utility model is following:
A kind of nitrogen drier; Comprise cavity, be arranged on rotary body and silicon chip gaily decorated basket carrier in the cavity, said silicon chip gaily decorated basket carrier is arranged on the inner bottom of rotary body, and said cavity is provided with cover plate; Its spy is being; Also comprise nitrogen sprayer head, said nitrogen sprayer head comprises discharge end and nitrogen input, and the discharge end of said nitrogen sprayer head is arranged in the cavity through the opening on the cover plate.
In the utility model, also comprise the nitrogen thermotank, said nitrogen thermotank is provided with the air inlet and the gas outlet of exporting nitrogen that is used to import nitrogen, and the gas outlet of said nitrogen is communicated with the nitrogen input of nitrogen sprayer head through pipeline.
In the utility model, the pipeline that said nitrogen sprayer head is connected with the nitrogen thermotank is provided with the strainer valve that is used for filtering gas.
In the utility model, said cover plate is arranged on the top of cavity.
In the utility model, four angles of said cavity bottom are respectively arranged with support column.
A kind of nitrogen drier of the utility model compared with prior art, at first heats nitrogen through oily thermotank; Evenly be sprayed in the working chamber through nitrogen sprayer head, make silicon chip when drying, it is fast to reach rate of warming; Shorten the swing circle of silicon chip, reduce the effect of gas consumption, also avoided the interior moisture entrapment of original pneumatics gas can form the problem of watermark sheet at silicon chip surface simultaneously; Simple in structure, very practical, the purpose of realization the utility model.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Fig. 2 is the utility model rotational body position structural representation.
Embodiment
For making architectural feature of the utility model and the effect of being reached there are further understanding and understanding, cooperate detailed explanation, explain as follows in order to preferred embodiment and accompanying drawing:
Referring to Fig. 1, a kind of nitrogen drier comprises cavity 100, is arranged on the rotary body 200 and the passive silicon chip gaily decorated basket carrier 300 that play the drying effect in the cavity 100; Silicon chip gaily decorated basket carrier 300 is arranged on the bottom of rotary body 200 inside; Cavity 100 is provided with cover plate 400, and the nitrogen drier also comprises nitrogen sprayer head 500; Nitrogen sprayer head 500 comprises discharge end and nitrogen input, and the discharge end of nitrogen sprayer head 500 is arranged in the cavity 100 through the opening on the cover plate 400.
The nitrogen drier also comprises nitrogen thermotank 700, and nitrogen thermotank 700 is provided with the air inlet and the gas outlet of exporting nitrogen that is used to import nitrogen, and the gas outlet of nitrogen is communicated with the nitrogen input of nitrogen sprayer heads through pipeline 600.
In the utility model, the pipeline that said nitrogen sprayer head is connected with the nitrogen thermotank is provided with the strainer valve 900 that is used for 500 filtering gas.
Four angles of cavity 100 bottoms are respectively arranged with support column 800, reach the effect of firm support in the time of work.
When in use, silicon chip is put on the silicon chip gaily decorated basket carrier 300, nitrogen is input in the nitrogen thermotank 700; Oil heater on the nitrogen thermotank 700 heats nitrogen through conduction oil, and nitrogen is transported to nitrogen sprayer head 500 places through pipeline 600 again, and nitrogen sprayer head 500 evenly sprays nitrogen; 900 pairs of pipelines 600 of strainer valve have played the effect of protection; Rotary body 200 energisings begin rotation, drive the silicon chip rotation on the silicon chip gaily decorated basket carrier 300, thereby reach the purpose that silicon chip dries.
A kind of nitrogen drier of the utility model compared with prior art, at first heats nitrogen through oily thermotank 700; Evenly be sprayed in the working chamber through nitrogen sprayer head 500, make silicon chip when drying, it is fast to reach rate of warming; Shorten the swing circle of silicon chip, reduce the effect of gas consumption, also avoided the interior moisture entrapment of original pneumatics gas can form the problem of watermark sheet at silicon chip surface simultaneously; Simple in structure, very practical, the purpose of realization the utility model.
More than show and described the advantage of basic principle, principal character and the utility model of the utility model.The technical staff of the industry should understand; The utility model is not restricted to the described embodiments; The just principle of describing in the foregoing description and the specification of the utility model; The utility model also has various changes and modifications under the prerequisite that does not break away from the utility model spirit and scope, and these variations and improvement all fall in the scope of the utility model that requires protection.The protection range that the utility model requires is defined by appending claims and equivalent thereof.
Claims (5)
1. nitrogen drier; Comprise cavity, be arranged on rotary body and silicon chip gaily decorated basket carrier in the cavity, said silicon chip gaily decorated basket carrier is arranged on the inner bottom of rotary body, and said cavity is provided with cover plate; Its spy is being; Also comprise nitrogen sprayer head, said nitrogen sprayer head comprises discharge end and nitrogen input, and the discharge end of said nitrogen sprayer head is arranged in the cavity through the opening on the cover plate.
2. a kind of nitrogen drier according to claim 1; It is characterized in that; Also comprise the nitrogen thermotank, said nitrogen thermotank is provided with the air inlet and the gas outlet of exporting nitrogen that is used to import nitrogen, and the gas outlet of said nitrogen is communicated with the nitrogen input of nitrogen sprayer head through pipeline.
3. a kind of nitrogen drier according to claim 2 is characterized in that: the pipeline that said nitrogen sprayer head is connected with the nitrogen thermotank is provided with the strainer valve that is used for filtering gas.
4. a kind of nitrogen drier according to claim 1, it is characterized in that: said cover plate is arranged on the top of cavity.
5. a kind of nitrogen drier according to claim 1 is characterized in that: four angles of said cavity bottom are respectively arranged with support column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201343062U CN202549809U (en) | 2012-03-31 | 2012-03-31 | Nitrogen dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201343062U CN202549809U (en) | 2012-03-31 | 2012-03-31 | Nitrogen dryer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202549809U true CN202549809U (en) | 2012-11-21 |
Family
ID=47170396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201343062U Expired - Fee Related CN202549809U (en) | 2012-03-31 | 2012-03-31 | Nitrogen dryer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202549809U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103822458A (en) * | 2014-03-12 | 2014-05-28 | 合肥彩虹蓝光科技有限公司 | Novel spin dryer filter heating system |
| CN104930846A (en) * | 2015-06-08 | 2015-09-23 | 高佳太阳能股份有限公司 | Heating cylinder cover of silicon wafer spin dryer |
| CN109087880A (en) * | 2018-09-14 | 2018-12-25 | 吉林华微电子股份有限公司 | A kind of spin-drying device and drying method |
| CN109390247A (en) * | 2017-08-02 | 2019-02-26 | 长鑫存储技术有限公司 | Semiconductor production equipment and its moisture removal method |
-
2012
- 2012-03-31 CN CN2012201343062U patent/CN202549809U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103822458A (en) * | 2014-03-12 | 2014-05-28 | 合肥彩虹蓝光科技有限公司 | Novel spin dryer filter heating system |
| CN103822458B (en) * | 2014-03-12 | 2016-02-10 | 合肥彩虹蓝光科技有限公司 | A kind of novel drier filter heat system |
| CN104930846A (en) * | 2015-06-08 | 2015-09-23 | 高佳太阳能股份有限公司 | Heating cylinder cover of silicon wafer spin dryer |
| CN109390247A (en) * | 2017-08-02 | 2019-02-26 | 长鑫存储技术有限公司 | Semiconductor production equipment and its moisture removal method |
| CN109087880A (en) * | 2018-09-14 | 2018-12-25 | 吉林华微电子股份有限公司 | A kind of spin-drying device and drying method |
| CN109087880B (en) * | 2018-09-14 | 2021-04-06 | 吉林华微电子股份有限公司 | Spin-drying device and spin-drying method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121121 Termination date: 20150331 |
|
| EXPY | Termination of patent right or utility model |