CN202528331U - Sapphire ingot C-axis orientation bonding device - Google Patents

Sapphire ingot C-axis orientation bonding device Download PDF

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Publication number
CN202528331U
CN202528331U CN2011205422618U CN201120542261U CN202528331U CN 202528331 U CN202528331 U CN 202528331U CN 2011205422618 U CN2011205422618 U CN 2011205422618U CN 201120542261 U CN201120542261 U CN 201120542261U CN 202528331 U CN202528331 U CN 202528331U
Authority
CN
China
Prior art keywords
adjusting
plate
crystal bar
locking
frame
Prior art date
Application number
CN2011205422618U
Other languages
Chinese (zh)
Inventor
张学炎
Original Assignee
铜陵市琨鹏光电科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 铜陵市琨鹏光电科技有限公司 filed Critical 铜陵市琨鹏光电科技有限公司
Priority to CN2011205422618U priority Critical patent/CN202528331U/en
Application granted granted Critical
Publication of CN202528331U publication Critical patent/CN202528331U/en

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Abstract

The utility model discloses a sapphire ingot C-axis orientation bonding device, comprising a rack, a locking material plate, an adjusting device and a locating device. The adjusting device comprises two micrometers, a support and an adjusting plate; the support is fixed to one side of the locking material plate; the two micrometers are fixed on the support at the same level horizontally; and the front surface of the adjusting plate is the reference plane and the rear surface of the adjusting plate is connected to the front ends of rod bodies of the two micrometers. The locating device comprises adjusting compression bolts disposed on the upper portion and the side of the locking material plate and connected with the rack threadedly. The sapphire ingot C-axis orientation bonding device is capable of adjusting the drift angle of a C-axis and an M-axis to adjust the C-plane [0001] off to M [1-100] crystal orientation angle through easy adjustment of the deviation distance between an M-side and the C-plane of an ingot. The sapphire ingot C-axis orientation bonding device realizes relatively accurate direction of the C-plane [0001] off to M [1-100] crystal orientation, thereby improving yield of products effectively.

Description

A kind of directed adhering device of sapphire crystal bar C axle that is used for
Technical field:
The utility model relates to a kind of sapphire crystal bar cutting LED that is used for the directed adhering device of C axle before the sapphire wafer.
Background technology:
The crystal orientation is the important technology parameter of Sapphire Substrate sheet, is determining the epitaxially grown quality of GaN, directly influences the luminous efficiency of LED, and the crystal bar orientation is the key technology of cutting, require high, the quality of decision landing product.And surface orientation can only be determined by the directed sizing before the cutting; This after-processing technology can't change; Therefore directed bonding of crucial importance before the cutting still do not have effective directed instrument at present and can carry out orientation and bonding accurately simultaneously, and processed wafer manufacturing enterprise can only require crystal bar factory when crystal bar dispatches from the factory; With C-plane 0001] offto M [1-100] angle, crystal orientation is adapted to setting; But crystal bar factory also can produce error when the adjustment crystal orientation, the crystal orientation declination error of institute's pellet is bigger, and the product percent of pass that obtains is not high.
The utility model content
The purpose of the utility model solves the directed and bonding easy generation error of crystal bar exactly, and the crystal orientation declination error of institute's pellet is bigger, the problem that the product percent of pass that obtains is not high.
The technical scheme that the utility model adopts is: a kind of directed adhering device of sapphire crystal bar C axle that is used for; It is characterized in that it comprises base plate, frame, is positioned at locking flitch, adjusting device and positioner on the frame, described adjusting device comprises micrometer, support and adjustable plate, and support is fixed on a side of locking flitch; Described micrometer is horizontally fixed on the support; Described adjustable plate front is a datum plane, and the back side one end is connected the front end of the micrometer body of rod, and other end fixed point is hinged; Described positioner comprise be positioned at locking flitch top and side compress the adjusting bolt, compress adjusting bolt and frame thread connection.
Adopt technique scheme, connect sizing plate and locking flitch, bonding cutting substrate on the sizing plate.The sapphire crystal bar is measured the inclined to one side M of C crystal orientation angle on direction finder; Calculate the crystal orientation angle that the inclined to one side M of C need adjust; According to adjustable plate true edge length and the crystal orientation angle that needs adjustment; Calculate the flexible distance that promotes adjusting part caliper-gauge expansion link with trigonometric function, apart from the locking caliper-gauge, the true edge of adjustable plate is positioned by this.On the cutting substrate, be coated with special bonding glue; The sapphire crystal bar is pressed on the gluing cutting substrate, and side is being close to by the adjustable plate true edge of caliper-gauge location, and end face edits the perpendicularity with the sizing plate with the standard straight angle square; Hold-down bolt with the frame top is pushed down crystal bar; The clamping screw of regulating locking flitch side is crystal bar fixedly, treat that bonded adhesives is absolutely dry after, accomplished directed bonding.
Connect through line slideway between described locking flitch and the support, make the locking flitch to slide along the slide rail of line slideway.
Be positioned at compressing of frame top and regulate the bolt below and be provided with and compress backing plate, compress and regulate bolt and contact extruding with the sapphire crystal bar through compressing backing plate.
The bottom of described frame is provided with spike.
The utility model beneficial effect is: simple in structure, can be through the deviation distance of convenient adjustment crystal bar M limit with the C face, reach the drift angle of adjusting C axle and M axle adjust C-plane 0001] offto M [1-100] angle, crystal orientation.Use this device, can more accurate directed C-plane 0001] and offto M [1-100] crystal orientation, guaranteed the technical indicator of Sapphire Substrate sheet greatly to improve product percent of pass.
Description of drawings
Fig. 1 is the utility model sketch map.
Fig. 2 is the left view of Fig. 1.
Among the figure, 1, go up pressure strip, 2, compress backing plate, 3, frame, 4, compress the adjusting bolt; 5, base plate, 6, sapphire crystal bar C face, 7, adjustable plate, 8, micrometer, 9, sapphire crystal bar M face; 10, sizing plate, 11, the locking flitch, 12, line slideway, 13, sapphire crystal bar A face.
The specific embodiment
Like Fig. 1, shown in Figure 2, a kind of directed adhering device of sapphire crystal bar C axle that is used for, it comprises base plate 5, frame 3, is positioned at locking flitch 11, adjusting device and positioner on the frame 3.
As shown in Figure 2; Adjusting device comprises micrometer 8, support 14 and adjustable plate 7, and support 14 is fixed on a side of locking flitch 11, and micrometer 8 is horizontally fixed on the support 14; Adjustable plate 7 fronts are datum plane; The back side one end is connected the front end of the micrometer body of rod, and other end fixed point is hinged, rotates the micrometer 8 good angles that can realize regulating adjustable plate 7 datum levels like this.
As shown in Figure 2, positioner comprises that being positioned at compressing of locking flitch 11 tops and side regulates bolt 4, compresses and regulates bolt 4 and frame 3 thread connection.Through compressing the mobile realization of regulating bolt 4 the extruding realization of locking flitch 11 is located.
Connects through line slideway 12 between locking flitch 11 and the frame 3, the feasible flitch 11 of locking can be along the slide rail slip of line slideway 12.Locking flitch 11 places on the supporting plate of line slideway 12, and support 14 bottoms are fixed in the tray edge of line slideway 12.Be positioned at compressing of frame 3 tops and regulate the bolt below and be provided with and compress backing plate 2, compress backing plate 2 belows and be and the suitable cambered surface of sapphire crystal bar disc.Compress the adjusting bolt and contact extruding with the sapphire crystal bar through compressing backing plate 2.The bottom of frame 3 is provided with spike.
The utility model is to use like this, connects sizing plate 10 and locking flitch 11, and locking flitch 11 is contained on the supporting plate of line slideway 12 bonding cutting substrate on the sizing plate 10.The sapphire crystal bar is measured the inclined to one side M of C crystal orientation angle on direction finder; Calculate the crystal orientation angle that the inclined to one side M of C need adjust; According to adjustable plate 7 true edge length and the crystal orientation angle that needs adjustment; Calculate the flexible distance of the adjusting rod that promotes adjusting part caliper-gauge 8 with trigonometric function, apart from locking caliper-gauge 8, the true edge of adjustable plate is positioned by this.On the cutting substrate, be coated with special bonding glue; Sapphire crystal bar A face 13 is pressed on the gluing cutting substrate, and sapphire crystal bar M face 9 is close to by the adjusting part true edge of caliper-gauge location, and sapphire crystal bar C face 6 usefulness standard straight angle squares edit the perpendicularity with the sizing plate; The crystal bar upper end is used pressure strip 1 and is compressed backing plate 2 and pushes down crystal bar; Regulate fixedly crystal bar of hold-down bolt 4, treat that bonded adhesives is absolutely dry after, accomplished directed bonding.When gluing second crystal bar, the locking flitch repeats above operation and getting final product along the line slideway translation.

Claims (4)

1. one kind is used for the directed adhering device of sapphire crystal bar C axle; It is characterized in that it comprises base plate (5), frame (3), is positioned at locking flitch (11), adjusting device and positioner on the frame (3); Described adjusting device comprises micrometer (8), support (14) and adjustable plate (7); Support (14) is fixed on a side of locking flitch (11), and described micrometer (8) is horizontally fixed on the support (14), and described adjustable plate (7) front is a datum plane; The back side one end is connected the front end of the micrometer body of rod, and other end fixed point is hinged; Described positioner comprises that being positioned at compressing of locking flitch (11) top and side regulates bolt (4), compresses and regulates bolt (4) and frame (3) thread connection.
2. a kind of directed adhering device of sapphire crystal bar C axle that is used for according to claim 1; It is characterized in that connecting through line slideway (12) between described locking flitch (11) and the frame (3), make locking flitch (11) to slide along the slide rail of line slideway (12).
3. a kind of directed adhering device of sapphire crystal bar C axle that is used for according to claim 1 and 2; It is characterized in that being positioned at compressing of frame (3) top and regulate the bolt below and be provided with and compress backing plate (2), compress and regulate bolt and contact extruding with the sapphire crystal bar through compressing backing plate (2).
4. a kind of directed adhering device of sapphire crystal bar C axle that is used for according to claim 3 is characterized in that the bottom of described frame (3) is provided with spike.
CN2011205422618U 2011-12-22 2011-12-22 Sapphire ingot C-axis orientation bonding device CN202528331U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011205422618U CN202528331U (en) 2011-12-22 2011-12-22 Sapphire ingot C-axis orientation bonding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011205422618U CN202528331U (en) 2011-12-22 2011-12-22 Sapphire ingot C-axis orientation bonding device

Publications (1)

Publication Number Publication Date
CN202528331U true CN202528331U (en) 2012-11-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011205422618U CN202528331U (en) 2011-12-22 2011-12-22 Sapphire ingot C-axis orientation bonding device

Country Status (1)

Country Link
CN (1) CN202528331U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103552166A (en) * 2013-09-30 2014-02-05 洛阳鸿泰半导体有限公司 Device for adjusting crystal-orientation deviation degree of silicon rod
CN104210041A (en) * 2014-08-21 2014-12-17 浙江辉弘光电能源有限公司 Silicon rod clamp for sawing machine
CN104608266A (en) * 2015-01-19 2015-05-13 苏州硅峰太阳能科技有限公司 Adhering device used for rotary cutting of hard and brittle material
TWI713140B (en) * 2019-08-29 2020-12-11 環球晶圓股份有限公司 Ingot fixing fixture

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103552166A (en) * 2013-09-30 2014-02-05 洛阳鸿泰半导体有限公司 Device for adjusting crystal-orientation deviation degree of silicon rod
CN104210041A (en) * 2014-08-21 2014-12-17 浙江辉弘光电能源有限公司 Silicon rod clamp for sawing machine
CN104608266A (en) * 2015-01-19 2015-05-13 苏州硅峰太阳能科技有限公司 Adhering device used for rotary cutting of hard and brittle material
TWI713140B (en) * 2019-08-29 2020-12-11 環球晶圓股份有限公司 Ingot fixing fixture

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20121114

Termination date: 20131222